CN101812663A - 分离式密封腔体 - Google Patents
分离式密封腔体 Download PDFInfo
- Publication number
- CN101812663A CN101812663A CN200910246908A CN200910246908A CN101812663A CN 101812663 A CN101812663 A CN 101812663A CN 200910246908 A CN200910246908 A CN 200910246908A CN 200910246908 A CN200910246908 A CN 200910246908A CN 101812663 A CN101812663 A CN 101812663A
- Authority
- CN
- China
- Prior art keywords
- strut member
- slide rail
- door
- plate
- opening surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims abstract description 21
- 238000009434 installation Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 8
- 238000007738 vacuum evaporation Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 238000001704 evaporation Methods 0.000 description 7
- 230000008020 evaporation Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000005401 electroluminescence Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200910246908XA CN101812663B (zh) | 2009-12-01 | 2009-12-01 | 分离式密封腔体 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200910246908XA CN101812663B (zh) | 2009-12-01 | 2009-12-01 | 分离式密封腔体 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101812663A true CN101812663A (zh) | 2010-08-25 |
CN101812663B CN101812663B (zh) | 2011-12-14 |
Family
ID=42620028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200910246908XA Expired - Fee Related CN101812663B (zh) | 2009-12-01 | 2009-12-01 | 分离式密封腔体 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101812663B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104302129A (zh) * | 2014-10-27 | 2015-01-21 | 四川蓝讯宝迩电子科技有限公司 | 一种便于操作的电气柜 |
CN110344019A (zh) * | 2019-06-25 | 2019-10-18 | 北京汉能薄膜发电技术有限公司 | 一种铜铟镓硒镀膜设备的真空腔室 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN86204249U (zh) * | 1986-06-23 | 1987-04-15 | 张弋飞 | 用于表面材料合成的真空反应室 |
CN2089739U (zh) * | 1991-05-07 | 1991-12-04 | 宋剑平 | 轨道式抽屉结构 |
CN201340157Y (zh) * | 2008-11-26 | 2009-11-04 | 苏州三星电子有限公司 | 冰箱用真空保鲜抽屉 |
CN101559232B (zh) * | 2009-05-12 | 2012-10-10 | 陈如金 | 一种具有密封装置的抽屉式柜体 |
CN201634754U (zh) * | 2009-12-01 | 2010-11-17 | 东莞宏威数码机械有限公司 | 抽屉式密封腔体 |
-
2009
- 2009-12-01 CN CN200910246908XA patent/CN101812663B/zh not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104302129A (zh) * | 2014-10-27 | 2015-01-21 | 四川蓝讯宝迩电子科技有限公司 | 一种便于操作的电气柜 |
CN110344019A (zh) * | 2019-06-25 | 2019-10-18 | 北京汉能薄膜发电技术有限公司 | 一种铜铟镓硒镀膜设备的真空腔室 |
Also Published As
Publication number | Publication date |
---|---|
CN101812663B (zh) | 2011-12-14 |
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Legal Events
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PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PP01 | Preservation of patent right |
Effective date of registration: 20131205 Granted publication date: 20111214 |
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RINS | Preservation of patent right or utility model and its discharge | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20140905 Granted publication date: 20111214 |
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PP01 | Preservation of patent right |
Effective date of registration: 20140905 Granted publication date: 20111214 |
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RINS | Preservation of patent right or utility model and its discharge | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20150905 Granted publication date: 20111214 |
|
PP01 | Preservation of patent right |
Effective date of registration: 20150905 Granted publication date: 20111214 |
|
RINS | Preservation of patent right or utility model and its discharge | ||
PD01 | Discharge of preservation of patent | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20210905 Granted publication date: 20111214 |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111214 Termination date: 20131201 |
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CF01 | Termination of patent right due to non-payment of annual fee |