CN101799345A - Laser pressure sensor - Google Patents
Laser pressure sensor Download PDFInfo
- Publication number
- CN101799345A CN101799345A CN 201010119291 CN201010119291A CN101799345A CN 101799345 A CN101799345 A CN 101799345A CN 201010119291 CN201010119291 CN 201010119291 CN 201010119291 A CN201010119291 A CN 201010119291A CN 101799345 A CN101799345 A CN 101799345A
- Authority
- CN
- China
- Prior art keywords
- laser
- pressure
- ccd
- pressure sensor
- guide block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses a laser pressure sensor, relating to a sensor, and the invention provides the laser pressure sensor which has the characteristics of simple structure, non-contact type non-destructive testing, large dynamic measuring range, strong applicability, and the like. The laser pressure sensor is provided with a force reflector, a pressure guiding head, a pressure head base, a pressure welding ring, a pressure head fixed seat, a laser generator, CCD (Charge Coupled Device) receivers, a swallowtail guide block, a screw, an adjusting roller, a top cover, a locating ring, a shell and a foundation disk, wherein the force reflector is manufactured on a highly elastic membrane and forms a pressure guiding probe with the pressure guiding head, the pressure head base and the pressure welding ring, and the pressure head base and the pressure guiding head are connected by bolts; the laser generator is arranged between two CCD receivers and arranged on the swallowtail guide block, and the two CCD receivers are arranged on the swallowtail guide block through brackets of the CCD receivers; one end of the swallowtail guide block is connected with the screw; a graduated scale is arranged at the bottom of the swallowtail guide block; the pressure head fixed seat and the pressure guiding head are connected by bolts, the top cover is connected with the shell, the bottom of the shell is connected with the locating ring, and the shell and the foundation disk are fixed into a whole through the locating ring to form a laser reflection cavity.
Description
Technical field
The present invention relates to a kind of sensor, especially relate to a kind of contactless pressure transducer that detects based on laser-CCD.
Background technology
Pressure transducer has wide application prospect as one of main product of machinery instrument class in civilian industry and defence and military field.Specifically, on civilian, can be used for the pressure survey in pressure, oil country tubular good and the various engine cavity in chemical reaction still and the smelting column; Militarily, can be used for the heat-resisting cavity such as flight control, jet engine, rocket, guided missile, satellite of attitude control, high-speed aircraft or the long-range hypervelocity missile of spaceship and aerospacecraft and the pressure survey of surperficial each several part.At present, the silicon pressure sensor that commercialization is used mainly is a silicon diffused piezoresistive pressure sensor, its technical maturity and excellent performance, but it is limited by P-N knot heatproof, can only carry out pressure survey below 120 ℃.In addition, touch mode capacitive pressure sensor also is a focus of Study on pressure sensor, has advantages such as simple in structure, overload capacity is strong, radioresistance Qiang Zhen, but that its output exists is non-linear, and stray capacitance and distributed capacitance influence sensitivity and measuring accuracy.
Publication number is that the Chinese invention patent application of CN1215158 discloses a kind of device for pressure measurement that utilizes the optical pressure sensor of non-acoustics, has to produce the LASER Light Source of washing signal off, and pulsed optical signals is transferred to the array of optical pressure sensor along optical cable.A plurality of photo-couplers are connected with optical transmission cable, so that tell at least a portion pulsed optical signals.Each photo-coupler comprises optical pressure sensor and pressure-sensitive reverberator, and the shunt of pulsed optical signals partly is transferred in optical pressure sensor and the reverberator.Each optical pressure sensor reflects back into pressure indicating signal in the photo-coupler, and pressure-sensitive reverberator reflects back into reference signal in the photo-coupler simultaneously.With pressure indicating signal and reference signal comparison to determine to act on the pressure of optical pressure sensor.
Summary of the invention
The objective of the invention is to be subjected to the defective of heatproof restriction of P-N knot and contact pressure sensor, a kind of laser pressure sensor with characteristics such as simple in structure, contactless Non-Destructive Testing, range of dynamic measurement are big, applicability is strong is provided at the conventional semiconductor pressure transducer.
The present invention is provided with the quick catoptron of power, impulse head, pressure head pedestal, pressure welding ring, pressure head holder, laser generator, CCD receiver, dovetail guide block, screw rod, adjusting spinning roller, top cover, locating ring, housing and base disk.
The quick catoptron preparation of power is on the high resiliency diaphragm, and the quick catoptron of power, impulse head, pressure head pedestal and pressure welding ring are formed the impulse probe, and pressure head pedestal and impulse head are spirally connected; Laser generator is arranged between the two CCD receivers, laser generator is located on the dovetail guide block, two CCD receivers are located on the dovetail guide block by the CCD receiver holder, and the protruding distortion of the quick catoptron of power that two CCD receivers can cause malleation respectively, the recessed distortion of the quick catoptron of power that negative pressure causes detect; One end of dovetail guide block links to each other with screw rod, regulates spinning roller and is used for the precision positioning and the adjusting of Laser emission and receiving position, thereby guarantee higher flash ranging force sensitivity; Be provided with rule in dovetail guide block bottom, rule is used to indicate the sliding position of dovetail guide block; The pressure head holder is connected with top cover, and top cover is connected with housing, and housing bottom is connected with locating ring, and housing is fixed as one by locating ring and base disk, constitutes laser reflection cavity.
The quick catoptron of described power can adopt ion sputtering nano-coating technology to be produced on the high resiliency diaphragm, and the vertical range of quick catoptron of power and laser-CCD device is adjustable by screw thread.
Described impulse probe can connect air entraining pipe, also can inject silicone oil.
The middle part of described base disk can be provided with dovetail groove, is convenient to the slip of dovetail guide.
The data line of the power lead of described laser generator and CCD receiver can be drawn in the dovetails bottom; The data line of CCD receiver can pass through ten pin dado joint ccd data collectors, realizes the high-speed AD data acquisition; The data line of CCD receiver can be connected with computing machine by the USB socket.
The present invention adopts ion sputtering nano-coating technology that the quick catoptron of power is prepared on the high resiliency diaphragm, adopts the curvature distortion based on the quick catoptron of power, realizes laser-CCD photoelectronic imaging gaging pressure.The present invention constitutes the impulse probe with the quick catoptron of power and impulse head, pressure head pedestal, pressure welding ring laser bonding in one, and laser-CCD device is assemblied on the dovetail guide block, can adopt and regulate the spinning roller precision positioning or regulate Laser emission and receiving position.When ambient pressure acts on the quick catoptron of power, make the phase place, frequency, intensity etc. of light in the laser reflection cavity change, and then characterize ambient pressure and change.The present invention has abandoned the defective that the conventional semiconductors pressure transducer is subjected to heatproof restriction of P-N knot and contact pressure sensor, characteristics such as have simple in structure, contactless Non-Destructive Testing, range of dynamic measurement is big, applicability is strong.
Description of drawings
Fig. 1 is that the structure of the embodiment of the invention is formed synoptic diagram.In Fig. 1, the label of each device is as follows:
1 regulates spinning roller 3 screw rods 4 screw bolt seats
5 rules, 7 holders, 8 laser reflection cavities
12 impulse heads, 13 pressure head pedestals, 14 pressure head holders
15 pressure welding rings, 16 top covers, 17 laser generators
18 plug wire groove 19CCD receivers, 20 housings
25 dovetails, 26 base disks
Embodiment
Following examples will the present invention is further illustrated in conjunction with the accompanying drawings.
Referring to Fig. 1, the embodiment of the invention is provided with the quick catoptron 9 of power, impulse head 12, pressure head pedestal 13, pressure welding ring 15, pressure head holder 14, laser generator 17, CCD receiver 19, dovetail guide block 22, screw rod 3, regulates spinning roller 1, top cover 16, locating ring 24, housing 20 and base disk 26.
Quick catoptron 9 preparations of power are on the high resiliency diaphragm, and the quick catoptron 9 of power, impulse head 12, pressure head pedestal 13 and pressure welding ring 15 are formed the impulse probe, and pressure head pedestal 13 adopts screw thread and plain washer 10 close proximity with impulse head 12; Laser generator 17 (laser generator 17 can be provided with holder 7) is arranged between the two CCD receivers 19, laser generator 17 is located on the dovetail guide block 22, two CCD receivers 19 are located on the dovetail guide block 22 by CCD receiver holder 21, and the protruding distortion of the quick catoptron of power that two CCD receivers 19 can cause malleation respectively, the recessed distortion of the quick catoptron of power that negative pressure causes detect; One end of dovetail guide block 22 links to each other with screw rod 3 (screw rod 3 is provided with screw bolt seat 4), regulates spinning roller 1 and is used for the precision positioning and the adjusting of Laser emission and receiving position, thereby guarantee higher flash ranging force sensitivity; Be provided with rule 5 in dovetail guide block 22 bottoms, rule 5 is used to indicate the sliding position of dovetail guide block 22; Pressure head holder 14 is connected with top cover 16, and top cover 16 is connected with housing 20, and the bottom of housing 20 is connected with locating ring 24, and housing 20 is fixed as one by locating ring 24 and base disk 26, constitutes laser reflection cavity 8.
The quick catoptron 9 of described power can adopt ion sputtering nano-coating technology to be produced on the high resiliency diaphragm, and the quick catoptron 9 of power is adjustable by screw thread with the vertical range of laser-CCD device.
Described impulse probe can connect air entraining pipe, also can inject silicone oil.
The middle part of described base disk 26 can be provided with dovetail groove, is convenient to the slip of dovetail guide.
The data line of the power lead of described laser generator 17 and CCD receiver 19 can be drawn in dovetails 25 bottoms; The data line of CCD receiver 19 can connect the ccd data collector by plug wire groove 18, realizes the high-speed AD data acquisition; The data line of CCD receiver can be connected with computing machine by the USB socket.
During work, CCD receiver data line is linked to each other with computing machine by the USB socket, and give CCD receiver and laser generator power supply; Apply ambient pressure by tracting pressuring hole 11 and act on the quick catoptron of power, produce curvature and deflection deformation under pressure, laser beam irradiation reflects according to reflection law on the quick catoptron of power, and reflected light is received by the CCD receiver, and photosignal can be exported demonstration on computers.Can regulate laser incoming position and receiving position by regulating spinning roller, also can come the vertical range of the quick catoptron of adjusting power and laser-CCD device, obtain higher flash ranging force sensitivity by screw thread.When ambient pressure acts on the quick catoptron of power, make the phase place, frequency, intensity etc. of light in the laser reflection cavity change, and then characterize ambient pressure and change.Laser generator is arranged between the two CCD receivers, and the protruding distortion of the quick catoptron of power that two CCD receivers can cause malleation respectively, the recessed distortion of the quick catoptron of power that negative pressure causes detect, and a device is dual-purpose.
Claims (8)
1. laser pressure sensor is characterized in that being provided with the quick catoptron of power, impulse head, pressure head pedestal, pressure welding ring, pressure head holder, laser generator, CCD receiver, dovetail guide block, screw rod, adjusting spinning roller, top cover, locating ring, housing and base disk;
The quick catoptron preparation of power is on the high resiliency diaphragm, and the quick catoptron of power, impulse head, pressure head pedestal and pressure welding ring are formed the impulse probe, and pressure head pedestal and impulse head are spirally connected; Laser generator is arranged between the two CCD receivers, laser generator is located on the dovetail guide block, two CCD receivers are located on the dovetail guide block by the CCD receiver holder, and the protruding distortion of the quick catoptron of power that two CCD receivers cause malleation respectively, the recessed distortion of the quick catoptron of power that negative pressure causes detect; One end of dovetail guide block links to each other with screw rod, regulates precision positioning and adjusting that spinning roller is used for Laser emission and receiving position; Be provided with rule in dovetail guide block bottom; The pressure head holder is connected with top cover, and top cover is connected with housing, and housing bottom is connected with locating ring, and housing is fixed as one by locating ring and base disk, constitutes laser reflection cavity.
2. laser pressure sensor as claimed in claim 1 is characterized in that the quick catoptron of described power adopts ion sputtering nano-coating technology to be produced on the high resiliency diaphragm.
3. laser pressure sensor as claimed in claim 1 is characterized in that the vertical range of quick catoptron of described power and laser-CCD device is adjustable by screw thread.
4. laser pressure sensor as claimed in claim 1 is characterized in that described impulse probe connects air entraining pipe, or injects silicone oil.
5. laser pressure sensor as claimed in claim 1 is characterized in that the middle part of described base disk is provided with dovetail groove.
6. laser pressure sensor as claimed in claim 1 is characterized in that the data line of the power lead of described laser generator and CCD receiver is drawn in the dovetails bottom.
7. laser pressure sensor as claimed in claim 1, the data line that it is characterized in that described CCD receiver is by ten pin dado joint ccd data collectors.
8. laser pressure sensor as claimed in claim 1 is characterized in that the data line of described CCD receiver is connected with computing machine by the USB socket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101192918A CN101799345B (en) | 2010-03-02 | 2010-03-02 | Laser pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101192918A CN101799345B (en) | 2010-03-02 | 2010-03-02 | Laser pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101799345A true CN101799345A (en) | 2010-08-11 |
| CN101799345B CN101799345B (en) | 2012-02-01 |
Family
ID=42595117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101192918A Expired - Fee Related CN101799345B (en) | 2010-03-02 | 2010-03-02 | Laser pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101799345B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102322951A (en) * | 2011-08-15 | 2012-01-18 | 西北核技术研究所 | Method for measuring high energy laser energy parameter based on light pressure principle and apparatus thereof |
| CN103791815A (en) * | 2014-02-14 | 2014-05-14 | 哈尔滨工业大学 | Aero-engine rotor air floatation assembling method and device based on inductance measurement |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN88202728U (en) * | 1988-04-02 | 1988-12-21 | 宝鸡市秦岭晶体管厂 | Corrosion resistant differential pressure sensor |
| JPH05187941A (en) * | 1991-03-13 | 1993-07-27 | Fujitsu Ltd | Fluid pressure measuring instrument |
| JP2001108553A (en) * | 1999-10-07 | 2001-04-20 | Furukawa Electric Co Ltd:The | Sensor for measuring pressure |
| JP2001296310A (en) * | 2000-04-18 | 2001-10-26 | Koji Ono | Optical sensor and its manufacturing method |
| JP2003279429A (en) * | 2002-03-22 | 2003-10-02 | Yazaki Corp | Optical pressure sensor |
-
2010
- 2010-03-02 CN CN2010101192918A patent/CN101799345B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN88202728U (en) * | 1988-04-02 | 1988-12-21 | 宝鸡市秦岭晶体管厂 | Corrosion resistant differential pressure sensor |
| JPH05187941A (en) * | 1991-03-13 | 1993-07-27 | Fujitsu Ltd | Fluid pressure measuring instrument |
| JP2001108553A (en) * | 1999-10-07 | 2001-04-20 | Furukawa Electric Co Ltd:The | Sensor for measuring pressure |
| JP2001296310A (en) * | 2000-04-18 | 2001-10-26 | Koji Ono | Optical sensor and its manufacturing method |
| JP2003279429A (en) * | 2002-03-22 | 2003-10-02 | Yazaki Corp | Optical pressure sensor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102322951A (en) * | 2011-08-15 | 2012-01-18 | 西北核技术研究所 | Method for measuring high energy laser energy parameter based on light pressure principle and apparatus thereof |
| CN102322951B (en) * | 2011-08-15 | 2013-04-17 | 西北核技术研究所 | Method for measuring high energy laser energy parameter based on light pressure principle and apparatus thereof |
| CN103791815A (en) * | 2014-02-14 | 2014-05-14 | 哈尔滨工业大学 | Aero-engine rotor air floatation assembling method and device based on inductance measurement |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101799345B (en) | 2012-02-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103759641B (en) | Three-dimensional micro-scale measurement device and method based on four-core fiber grating | |
| CN108152830A (en) | A kind of laser radar scanning imaging system and its measuring method | |
| US20160305764A1 (en) | Method And Equipment Based On Detecting The Polarization Property Of A Polarization Maintaining Fiber Probe For Measuring Structures Of A Micro Part | |
| CN106595479B (en) | Optical fiber type three-dimensional trigger measuring head device and measuring method | |
| CN103759652B (en) | Two-dimentional micro-scale measurement device and method based on double optical fiber grating | |
| CN103308187A (en) | High-frequency Shack-Hartmann wave-front measuring device and measuring method thereof | |
| CN101799282A (en) | Reflection-type angular displacement transducer and measuring method based on optical fiber array | |
| CN102589439A (en) | Contact type temperature non-inductive three-dimensional detection sensor based on fiber Bragg grating (FBG) | |
| CN104567696A (en) | Two-dimensional displacement measuring device based on diffraction grating | |
| CN104198055A (en) | Wave surface detecting device | |
| CN101799345B (en) | Laser pressure sensor | |
| CN106425691A (en) | Laser interference principle-based precise main shaft rotation precision detecting device and method | |
| CN103759642A (en) | Two-dimensional microscale measuring device and method based on three-core fiber bragg grating | |
| CN103759643B (en) | Two-dimentional micro-scale measurement device and method based on twin-core fiber grating | |
| CN108592829A (en) | A kind of measuring device and method of non-cpntact measurement deep hole inside surface roughness | |
| CN109374112B (en) | Optical fiber two-dimensional vibration sensor and manufacturing method thereof | |
| CN203011847U (en) | Micropore rapidly-detecting device based on luminous flux | |
| Murakami et al. | Optical technique to measure five-degree-of-freedom error motions for a high-speed microspindle | |
| CN103398659B (en) | Optical fibre displacement sensor and the multichannel displacement measurement method based on data fusion | |
| CN103759653B (en) | Three-dimensional micro-scale measurement device and method based on five core fibre gratings | |
| CN108180839A (en) | A kind of displacement sensor and detection device for small space detection | |
| CN110940396B (en) | High-precision laser measuring device for propellant liquid level | |
| CN104374950A (en) | Engine combustion flow field speed measuring device and method based on flame radiation characteristics | |
| CN201662392U (en) | Photoelectric detection device for steel ball surface quality | |
| CN104697448A (en) | Double-fiber grating probe microscale measurement device and method based on optical fiber ring laser device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20160107 Address after: 518104 Guangdong city of Shenzhen province Baoan District manhole street bogang road Taifeng Industrial Zone (HENGQIANG Industrial Park) building C building 1-3 Patentee after: China Science and Technology (Shenzhen) Limited by Share Ltd Address before: Xiamen City, Fujian Province, 361005 South Siming Road No. 422 Patentee before: Xiamen University |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120201 Termination date: 20180302 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |