CN101798084A - Hydrogenation furnace - Google Patents
Hydrogenation furnace Download PDFInfo
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- CN101798084A CN101798084A CN 201010145955 CN201010145955A CN101798084A CN 101798084 A CN101798084 A CN 101798084A CN 201010145955 CN201010145955 CN 201010145955 CN 201010145955 A CN201010145955 A CN 201010145955A CN 101798084 A CN101798084 A CN 101798084A
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Abstract
The invention relates to a hydrogenation furnace, which is used for comprehensively recycling silicon tetrachloride. The hydrogenation furnace comprises a furnace body (1), a base plate (2), electrodes (3) and a heating and heat insulation system (5). The entire hydrogenation furnace is erected; the base plate (2) is positioned below the furnace body (1) and is connected with the bottom of the furnace body (1) through a flange; the electrodes (3) are arranged on the base plate (2); the heating and heat insulation system (5) is arranged in the furnace body (1); an electrode heating element of the heating and heat insulation system (5) is connected with the electrodes (3) on the base plate (2); the electrodes (3) are circumferentially arranged in five circles, wherein the electrodes (3) of a first circle are connected with the electrodes (3) of a third circle through current-conducting plates (8) to form a first electrode combination; the electrodes (3) of a second circle are connected with the electrodes (3) of a fourth circle through the current-conducting plates (8) to form a second electrode combination; the electrodes (3) of a fifth circle are separately connected; the first and second electrode combinations and the electrodes of the fifth circles are separately supplied with power according to the circles; and temperature measurement holes (54) are arranged at different positions at the upper, middle and lower parts of the heating and heat insulation system (5). The hydrogenation furnace has high treatment capacity and remarkably improves the rate of conversion of the silicon tetrachloride.
Description
(1) technical field
The present invention relates to hydrogenation furnace, be specifically related to the large-scale hydrogenation furnace of a kind of polysilicon industry.Be used for comprehensive reutilization to silicon tetrachloride.
(2) background technology
In the production of polysilicon, can produce a large amount of by-product silicon tetrachlorides.And the environmental protection pressure that silicon tetrachloride causes has become serious social concern.Pour in the stream, can cause the water source to be subjected to severe contamination, handle, soil is caused irremediable destruction with the way of burying." effectively utilizing silicon tetrachloride, reducing environmental pollution is the current matter of utmost importance that must solve." this also is the common recognition of polysilicon enterprise.
The cost pressure of each manufacturing enterprise, the downslide of polysilicon price in the international environment of present global financial crisis, has forced production of polysilicon enterprise must consider comprehensive utilization to silicon tetrachloride.The deficiency of the large-scale hydrogenation furnace of polysilicon industry existence in design, manufacturing at present causes the silicon tetrachloride rate of recovery seriously on the low side.Former hydrogenation furnace apparatus has following shortcoming:
1, arrangement of electrodes limited amount is 18 pairs only, and thermal value is little, and treatment capacity is less relatively to be 1 ton/hour only, and transformation efficiency is on the low side.
2, the layout of electrode connection and heating element is more random, is difficult to guarantee the uniformity consistency of stove inner periphery direction temperature.
3, do not establish thermometer hole, can't understand material and heating element running condition in the stove, can't guarantee the controllability and the homogeneity of temperature in the stove.
(3) summary of the invention
The objective of the invention is to overcome above-mentioned deficiency, the hydrogenation furnace that a kind of arrangement of electrodes quantity is many, guarantee temperature uniformity in the stove is provided.
The object of the present invention is achieved like this: a kind of hydrogenation furnace, comprise body of heater, the chassis, electrode and heating, thermal insulation system, hydrogenation furnace totally adopts vertical, the chassis is positioned at the below of body of heater, the chassis is connected with flange with bottom of furnace body, electrode places on the chassis, heating, thermal insulation system places in the body of heater, heating, the electrode heating element of thermal insulation system links to each other with electrode on the described chassis, described electrode divides five circles to arrange along the chassis circumferential direction: be respectively first lap from inside to outside, second circle, the 3rd circle, the 4th circle and the 5th circle, the electrode of first lap links to each other by conducting plates with the electrode of the 3rd circle, constitute combination of electrodes one, the electrode of second circle links to each other by conducting plates with the electrode of the 4th circle, constitute combination of electrodes two, the electrode of the 5th circle links to each other separately, and by described combination of electrodes one, combination of electrodes two and the 5th circle are by circle power supply and control separately, in described heating, on the thermal insulation system, in, the bottom different positions is provided with thermometer hole, by temperature measuring equipment and power-regulating system the surface temperature of stove internal heat generation body is carried out observing and controlling, guarantee respectively to enclose heating element temperature unanimity.
The present invention takes into full account airflow field and thermal field feature, determines the layout of electrode heating element in stove, guarantees temperature uniformity in the stove; Introduce heating element power simultaneously by circle control theory, determine the connection of electrode; Adopt the real-time observation and control technology of heating element temperature, by temperature measuring equipment the surface temperature of stove internal heat generation body is measured, realized each phase independent regulation and control, guarantee respectively to enclose heating element temperature unanimity, thereby guaranteed the even of temperature field in furnace, finally guaranteed the transformation efficiency of silicon tetrachloride.
The invention has the beneficial effects as follows:
The present invention is directed to the deficiency that the existing hydrogenation furnace of present polysilicon industry exists in design, structure, cause the problem that the silicon tetrachloride treatment capacity is little, the rate of recovery is low, make full use of the finite space on chassis, arrange more electrode, totally 24 pairs, thermal value is big, and treatment capacity is relatively large, can reach 2.5 tons/hour, transformation efficiency increases; In conjunction with arrangement of electrodes, the circumferential locations different according to electrode connect simultaneously, and counter electrode is realized by circle power supply and control; Also the temperature measuring equipment by different positions carries out independent regulation, guarantees the realization of furnace high-temperature and the uniformity consistency of circumferential direction temperature, guarantees normally carrying out of hydrogenation, thereby guarantees the transformation efficiency of silicon tetrachloride.
(4) description of drawings
Fig. 1 is the overall structure synoptic diagram of hydrogenation furnace of the present invention.
Fig. 2 is the electrode of hydrogenation furnace of the present invention and chassis, electrode connecting structure synoptic diagram.
Fig. 3 is the thermometer hole position view of hydrogenation furnace of the present invention.
Fig. 4 is the vertical view of Fig. 3.
Fig. 5 is the processing medium schema of hydrogenation furnace of the present invention.
Among the figure:
Body of heater 1, chassis 2, electrode 3, cooling system 4, heating, thermal insulation system 5, power supply power-regulating system 6, guidance system 7, conducting plates 8;
Processing medium import A, processing medium outlet B.
(5) embodiment
Referring to Fig. 1, Fig. 1 is the overall structure synoptic diagram of hydrogenation furnace of the present invention.As seen from Figure 1, hydrogenation furnace of the present invention, it mainly is made up of body of heater 1, chassis 2, electrode 3, cooling system 4, heating, thermal insulation system 5, power supply power-regulating system 6 and guidance system 7.Being arranged as of its each building block: hydrogenation furnace totally adopts vertical, and for whole hydrogenation furnace, body of heater 1 is placed on the top in mid-way, and body of heater 1 is made up of chuck and inner core.Chassis 2 is positioned at the below of body of heater, is connected with flange with body of heater 1 bottom.Electrode 3 places on the chassis 2, perforate on the chassis 2, and electrode 3 inserts in the hole, and uses bolted.Body of heater 1, chassis 2 and electrode 3 all have independently cooling system 4, adopt the chuck cooling.Heating, thermal insulation system 5 adopt inside and outside double thermal insulation cover 51,52, electrode heating element 53 structures, heating, thermal insulation system 5 place in the body of heater 1, be positioned on the chassis 2 by three limited blocks, the electrode heating element in heating, the thermal insulation system 5 links to each other with the electrode 3 on the described chassis 2.Power supply power-regulating system 6 is by the feedback of the temperature measuring equipment on heating, the thermal insulation system 5, and the counter electrode heating element carries out the adjusting of power, guarantees the homogeneity of temperature in the stove.Guidance system 7 is independent of outside body of heater 1 and the chassis 2, by the locating device of body of heater outside and cooperating of guidance system 7, realizes the guiding of hydrogenation furnace.
Referring to Fig. 2, Fig. 2 is the electrode of hydrogenation furnace of the present invention and chassis, electrode connecting structure synoptic diagram.As seen from Figure 2, hydrogenation furnace of the present invention changes the connection in twos of former Russian hydrogenation furnace equipment adjacent electrode, take into full account the thermal field uniform distribution, electrode 3 has 24 pairs, 2 circumferential directions divide five circles to arrange to described 24 counter electrode 3 along the chassis, be respectively first lap from inside to outside, second circle, the 3rd circle, the 4th circle and the 5th circle, the electrode 3 of first lap links to each other by conducting plates 8 with the electrode 3 of the 3rd circle, constitute combination of electrodes one, the electrode 3 of second circle links to each other by conducting plates 8 with the electrode 3 of the 4th circle, constitute combination of electrodes two, the electrode 3 of the 5th circle links to each other separately, and by described combination of electrodes one, combination of electrodes two and the 5th circle be power supply and independent control separately, referring to Fig. 2.
Referring to Fig. 3, Fig. 3 is the thermometer hole position view of hydrogenation furnace of the present invention.Fig. 4 is the vertical view of Fig. 3.As seen from Figure 3, hydrogenation furnace of the present invention, pass through the setting of different positions thermometer hole in the upper, middle and lower portion of described heating, thermal insulation system 5, be equipped with the temperature measuring equipment of specialty, can detect the temperature of different positions heating element in the stove at any time, condition has been created in automatic adjusting to the heating element current/voltage, thereby guarantees the homogeneity of temperature in the stove.Referring to Fig. 3～4.
The processing medium flow process:
Mixed gas such as silicon tetrachloride, hydrogen passes chuck through upper of furnace body, directly enter inner core, downward along the inner core inwall, flow in the outer insulation plate by heating, insulation plate bottom, thermal insulation system China and foreign countries, along outer insulation plate inwall upwards, entered in the reaction chamber by interior insulation plate top, high temperature issues biochemical reaction and generates trichlorosilane, flow out hydrogenation furnace by the pneumatic outlet on the chassis, finish the conversion of silicon tetrachloride.Referring to Fig. 5.
Claims (1)
1. hydrogenation furnace, comprise body of heater (1), chassis (2), electrode (3) and heating, thermal insulation system (5), hydrogenation furnace totally adopts vertical, chassis (2) is positioned at the below of body of heater (1), chassis (2) is connected with flange with body of heater (1) bottom, electrode (3) places on the chassis (2), heating, thermal insulation system (5) places in the body of heater (1), heating, the electrode heating element of thermal insulation system (5) links to each other with electrode (3) on described chassis (2), it is characterized in that: (2) circumferential direction divides five circles to arrange to described electrode (3) along the chassis: be respectively first lap from inside to outside, second circle, the 3rd circle, the 4th circle and the 5th circle, the electrode of first lap (3) links to each other by conducting plates (8) with the electrode (3) of the 3rd circle, constitute combination of electrodes one, the electrode (3) of second circle links to each other by conducting plates (8) with the electrode (3) of the 4th circle, constitute combination of electrodes two, the electrode (3) of the 5th circle links to each other separately, and by described combination of electrodes one, combination of electrodes two and the 5th circle are by circle power supply separately, in described heating, on the thermal insulation system (5), in, the bottom different positions is provided with thermometer hole (54).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010145955 CN101798084A (en) | 2010-04-02 | 2010-04-02 | Hydrogenation furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010145955 CN101798084A (en) | 2010-04-02 | 2010-04-02 | Hydrogenation furnace |
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| Publication Number | Publication Date |
|---|---|
| CN101798084A true CN101798084A (en) | 2010-08-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010145955 Pending CN101798084A (en) | 2010-04-02 | 2010-04-02 | Hydrogenation furnace |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101973550A (en) * | 2010-09-30 | 2011-02-16 | 上海森松压力容器有限公司 | Polycrystalline silicon hydrogenation furnace |
| CN102424386A (en) * | 2011-09-06 | 2012-04-25 | 江苏中圣高科技产业有限公司 | Efficient energy-saving type polysilicon reduction furnace |
| CN103060502A (en) * | 2013-01-14 | 2013-04-24 | 白银龙家丰金属渣综合利用有限公司 | Process for one-time reduction melting of ferric silicate by using waste copper residue |
-
2010
- 2010-04-02 CN CN 201010145955 patent/CN101798084A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101973550A (en) * | 2010-09-30 | 2011-02-16 | 上海森松压力容器有限公司 | Polycrystalline silicon hydrogenation furnace |
| CN101973550B (en) * | 2010-09-30 | 2012-08-22 | 上海森松压力容器有限公司 | Polycrystalline silicon hydrogenation furnace |
| CN102424386A (en) * | 2011-09-06 | 2012-04-25 | 江苏中圣高科技产业有限公司 | Efficient energy-saving type polysilicon reduction furnace |
| CN102424386B (en) * | 2011-09-06 | 2012-12-19 | 江苏中圣高科技产业有限公司 | Efficient energy-saving type polysilicon reduction furnace |
| CN103060502A (en) * | 2013-01-14 | 2013-04-24 | 白银龙家丰金属渣综合利用有限公司 | Process for one-time reduction melting of ferric silicate by using waste copper residue |
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Application publication date: 20100811 |