CN205187884U - Novel silicon tetrachloride vaporizing device - Google Patents
Novel silicon tetrachloride vaporizing device Download PDFInfo
- Publication number
- CN205187884U CN205187884U CN201520945475.8U CN201520945475U CN205187884U CN 205187884 U CN205187884 U CN 205187884U CN 201520945475 U CN201520945475 U CN 201520945475U CN 205187884 U CN205187884 U CN 205187884U
- Authority
- CN
- China
- Prior art keywords
- silicon tetrachloride
- barrel mast
- base
- intake pipe
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 title claims abstract description 54
- 239000005049 silicon tetrachloride Substances 0.000 title claims abstract description 54
- 230000008016 vaporization Effects 0.000 title claims abstract description 19
- 238000009834 vaporization Methods 0.000 claims description 16
- 238000007789 sealing Methods 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000000926 separation method Methods 0.000 abstract description 3
- 235000017166 Bambusa arundinacea Nutrition 0.000 abstract 3
- 235000017491 Bambusa tulda Nutrition 0.000 abstract 3
- 241001330002 Bambuseae Species 0.000 abstract 3
- 235000015334 Phyllostachys viridis Nutrition 0.000 abstract 3
- 239000011425 bamboo Substances 0.000 abstract 3
- 239000007788 liquid Substances 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000006200 vaporizer Substances 0.000 description 3
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 2
- 239000005052 trichlorosilane Substances 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model relates to a novel silicon tetrachloride vaporizing device, include the sealed barrel mast that is formed by connecting base and wall section of thick bamboo an organic whole, the silicon tetrachloride intake pipe gets into sealed barrel mast from base center extension in, silicon tetrachloride outlet duct nestification is at the outer wall of this silicon tetrachloride intake pipe, and the port of silicon tetrachloride intake pipe is close to in the top of sealed barrel mast, and the port of silicon tetrachloride outlet duct is close to in the base of sealed barrel mast, the U type that is provided with a plurality of parallel arrangement on the base adds the thermoelectric stick. The utility model discloses silicon tetrachloride intake pipe and outlet duct adopt nested formula structure, and silicon tetrachloride outlet duct nestification is on the outer wall of intake pipe, and interior gas distribution is even to add feasible even, the whole wall section of thick bamboo that admits air of gas separation unit, it adds the thermoelectric stick to set up simultaneously a plurality of U of group types in a wall section of thick bamboo for silicon tetrachloride fully vaporizes, the utility model provides a silicon tetrachloride vaporizing device is reduction in production cost well, improve equipment security and stability.
Description
Technical field
The utility model relates to a kind of novel silicon tetrachloride vaporization device.
Background technology
In recent years, along with the develop rapidly of solar photovoltaic industry, polysilicon also significantly increases as the starting material constant of solar panel or assembly, meanwhile, silicon tetrachloride as by-product in polysilicon production process also significantly increases, and this creates huge pressure to environment, also for the circulation generation of the raw material trichlorosilane of production of polysilicon brings puzzlement, and the conversion of silicon tetrachloride to trichlorosilane will be realized, the vaporization of silicon tetrachloride will be realized first exactly.Therefore, in order to realize above-mentioned purpose, silicon tetrachloride must first through vaporization process.
Usually, the vaporization of silicon tetrachloride is vaporized at about 200 DEG C, traditional horizontal vaporizer adopts Electric heating to vaporize, although can reach vaporization object, also there is vaporization temperature wayward, thus cause the generation that other impurity are vaporized, and electrolysis hot pin and silicon tetrachloride contact area less, non-uniform temperature, causes the turbulent flow of silicon tetrachloride liquid, also easily make the heavy impurity in liquid float bottom vaporizer, affect silicon tetrachloride liquid stability and vaporization efficiency.
Although the vaporizer of another kind of vertical connection form comparatively effectively can avoid the turbulent flow of silicon tetrachloride liquid, still there is electrolysis hot temperature degree uneven, the problem that contact area is little.
Summary of the invention
In order to solve above-mentioned technical problem, the purpose of this utility model is to provide a kind of silicon tetrachloride vaporization device, to improve the vaporization efficiency of silicon tetrachloride, energy-saving and cost-reducing, reduces production cost, improves equipment high efficiency, safety and stability.
To achieve the above object, the utility model have employed following technical scheme:
A kind of novel silicon tetrachloride vaporization device is provided, comprise the sealing barrel mast be integrally formed by connecting by base and wall cylinder, it is characterized in that, silicon tetrachloride inlet pipe extends in sealing barrel mast from base center, and silicon tetrachloride escape pipe is nested in the outer wall of this silicon tetrachloride inlet pipe; And the port of silicon tetrachloride inlet pipe is close to the top of sealing barrel mast, the port of silicon tetrachloride escape pipe is close to the base of sealing barrel mast; Base is provided with several and arranged in parallel U-shapedly adds thermoelectric stick, each U-shaped thermoelectric stick that adds is connected with heating power supply by electrode; The top of sealing barrel mast is provided with safety switch, and this safety switch is positioned at directly over the port of silicon tetrachloride inlet pipe; The bottom of wall cylinder is also provided with blow-off pipe.
The utility model has the advantages that: the utility model silicon tetrachloride inlet pipe and escape pipe adopt nesting type structure, and silicon tetrachloride escape pipe is nested on the outer wall of inlet pipe, sets up gas separation unit and makes gas distribution in air inlet uniformity, whole wall cylinder even; In wall cylinder, set up some groups simultaneously U-shapedly add thermoelectric stick, silicon tetrachloride is fully vaporized, and the silicon tetrachloride vaporization device that the utility model provides can reduce production cost well, improves device security and stability.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Accompanying drawing illustrates: 1 safety switch, 2 tripping devices, 3 inlet pipe, 4 escape pipes, 5 bases, 6 wall cylinders, 7U type adds thermoelectric stick, 8 heating power supplies, 9 electrodes.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is made a detailed explanation.
The specific embodiment of a kind of novel silicon tetrachloride vaporization device as shown in Figure 1, a kind of novel silicon tetrachloride vaporization device is provided, comprise the sealing barrel mast be integrally formed by connecting by base 5 and wall cylinder 6, it is characterized in that, silicon tetrachloride inlet pipe 3 extends in sealing barrel mast from base 5 center, and silicon tetrachloride escape pipe 4 is nested in the outer wall of this silicon tetrachloride inlet pipe 3; And the port of silicon tetrachloride inlet pipe 3 is close to the top of sealing barrel mast, the port of silicon tetrachloride escape pipe 4 is close to the base 5 of sealing barrel mast; Base 5 is provided with several and arranged in parallel U-shapedly adds thermoelectric stick 7, each U-shaped thermoelectric stick 7 that adds is connected with heating power supply 8 by electrode 9; The top of sealing barrel mast is provided with safety switch 1, and this safety switch 1 is positioned at directly over the port of silicon tetrachloride inlet pipe 3; When wall cylinder 6 internal pressure is greater than safe pressure, closes inlet pipe 3, and adopt corresponding pressure release mode, to guarantee safe operation in wall cylinder 6; The bottom of wall cylinder 6 is also provided with blow-off pipe.
The utility model silicon tetrachloride inlet pipe 3 and escape pipe 4 adopt nesting type structure, and silicon tetrachloride escape pipe 4 is nested on the outer wall of inlet pipe 3, set up gas separation unit 2 and make gas distribution in air inlet uniformity, whole wall cylinder 6 even; In wall cylinder 6, set up some groups simultaneously U-shapedly add thermoelectric stick 7, silicon tetrachloride is fully vaporized, and the silicon tetrachloride vaporization device that the utility model provides can reduce production cost well, improves device security and stability.
More than show and describe ultimate principle of the present utility model and principal character and advantage of the present utility model.The technician of the industry should understand; the utility model is not restricted to the described embodiments; what describe in above-described embodiment and specification sheets just illustrates principle of the present utility model; under the prerequisite not departing from the utility model spirit and scope; the utility model also has various changes and modifications, and these changes and improvements all fall within the scope of claimed the utility model.The claimed scope of the utility model is defined by appending claims and equivalent thereof.
Claims (1)
1. a novel silicon tetrachloride vaporization device, comprise the sealing barrel mast be integrally formed by connecting by base and wall cylinder, it is characterized in that, silicon tetrachloride inlet pipe extends in sealing barrel mast from base center, and silicon tetrachloride escape pipe is nested in the outer wall of this silicon tetrachloride inlet pipe; And the port of silicon tetrachloride inlet pipe is close to the top of sealing barrel mast, the port of silicon tetrachloride escape pipe is close to the base of sealing barrel mast; Base is provided with several and arranged in parallel U-shapedly adds thermoelectric stick, each U-shaped thermoelectric stick that adds is connected with heating power supply by electrode; The top of sealing barrel mast is provided with safety switch, and this safety switch is positioned at directly over the port of silicon tetrachloride inlet pipe; The bottom of wall cylinder is also provided with blow-off pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520945475.8U CN205187884U (en) | 2015-11-24 | 2015-11-24 | Novel silicon tetrachloride vaporizing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520945475.8U CN205187884U (en) | 2015-11-24 | 2015-11-24 | Novel silicon tetrachloride vaporizing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205187884U true CN205187884U (en) | 2016-04-27 |
Family
ID=55780900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520945475.8U Expired - Fee Related CN205187884U (en) | 2015-11-24 | 2015-11-24 | Novel silicon tetrachloride vaporizing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205187884U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106082236A (en) * | 2016-08-19 | 2016-11-09 | 太仓市金锚化工有限公司 | A kind of energy-conservation carburator of Silicon chloride. |
-
2015
- 2015-11-24 CN CN201520945475.8U patent/CN205187884U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106082236A (en) * | 2016-08-19 | 2016-11-09 | 太仓市金锚化工有限公司 | A kind of energy-conservation carburator of Silicon chloride. |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160427 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |