CN101794840A - 柔性CdTe薄膜太阳能电池制备方法 - Google Patents
柔性CdTe薄膜太阳能电池制备方法 Download PDFInfo
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- CN101794840A CN101794840A CN201010109118A CN201010109118A CN101794840A CN 101794840 A CN101794840 A CN 101794840A CN 201010109118 A CN201010109118 A CN 201010109118A CN 201010109118 A CN201010109118 A CN 201010109118A CN 101794840 A CN101794840 A CN 101794840A
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- cdte
- stainless steel
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- thin film
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- 229910004613 CdTe Inorganic materials 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims abstract description 39
- 239000010409 thin film Substances 0.000 title claims abstract description 29
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 43
- 239000010935 stainless steel Substances 0.000 claims abstract description 43
- 239000010408 film Substances 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 18
- 239000010439 graphite Substances 0.000 claims abstract description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 17
- 238000000137 annealing Methods 0.000 claims abstract description 11
- 238000002360 preparation method Methods 0.000 claims abstract description 11
- 230000008569 process Effects 0.000 claims abstract description 8
- 239000000126 substance Substances 0.000 claims abstract description 6
- 239000012808 vapor phase Substances 0.000 claims abstract description 6
- 238000004544 sputter deposition Methods 0.000 claims description 27
- 239000011248 coating agent Substances 0.000 claims description 18
- 238000000576 coating method Methods 0.000 claims description 18
- 230000001105 regulatory effect Effects 0.000 claims description 15
- 238000000859 sublimation Methods 0.000 claims description 12
- 230000008022 sublimation Effects 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 10
- 238000012546 transfer Methods 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 claims description 6
- 238000004821 distillation Methods 0.000 claims description 6
- 229910052736 halogen Inorganic materials 0.000 claims description 6
- 150000002367 halogens Chemical class 0.000 claims description 6
- 239000000843 powder Substances 0.000 claims description 6
- 238000005477 sputtering target Methods 0.000 claims description 6
- 239000013077 target material Substances 0.000 claims description 6
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 230000001143 conditioned effect Effects 0.000 claims description 3
- 239000008367 deionised water Substances 0.000 claims description 3
- 229910021641 deionized water Inorganic materials 0.000 claims description 3
- 239000004519 grease Substances 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000013049 sediment Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- YKYOUMDCQGMQQO-UHFFFAOYSA-L cadmium dichloride Chemical compound Cl[Cd]Cl YKYOUMDCQGMQQO-UHFFFAOYSA-L 0.000 abstract 2
- 238000002202 sandwich sublimation Methods 0.000 abstract 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 abstract 1
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 13
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000008521 reorganization Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
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CN201010109118XA CN101794840B (zh) | 2010-02-11 | 2010-02-11 | 柔性CdTe薄膜太阳能电池的制备方法 |
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CN201010109118XA CN101794840B (zh) | 2010-02-11 | 2010-02-11 | 柔性CdTe薄膜太阳能电池的制备方法 |
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CN101794840A true CN101794840A (zh) | 2010-08-04 |
CN101794840B CN101794840B (zh) | 2011-07-20 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102286741A (zh) * | 2011-09-02 | 2011-12-21 | 南京大学 | 碲化镉薄膜制备方法 |
CN102888584A (zh) * | 2012-09-17 | 2013-01-23 | 上海大学 | 一种基于金刚石薄膜上沉积CdTe薄膜的方法 |
CN104674166A (zh) * | 2015-03-10 | 2015-06-03 | 中国科学技术大学 | 一种CdTe薄膜制备方法及包含其的CdTe太阳电池 |
CN106653946A (zh) * | 2016-12-27 | 2017-05-10 | 成都中建材光电材料有限公司 | 一种碲化镉薄膜太阳能电池吸收层的沉积方法 |
CN104425653B (zh) * | 2013-08-30 | 2017-11-21 | 中国建材国际工程集团有限公司 | 用于薄层太阳能电池的附加的底层 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104733547B (zh) * | 2015-03-27 | 2017-01-25 | 西交利物浦大学 | 基于石墨烯的柔性碲化镉薄膜太阳能电池及其制备方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09148597A (ja) * | 1995-11-28 | 1997-06-06 | Matsushita Electric Ind Co Ltd | 太陽電池の製造法 |
CN101222000A (zh) * | 2008-01-07 | 2008-07-16 | 四川大学 | 双层石墨导电膏作为CdTe电池的背电极过渡层结构 |
CN101299443A (zh) * | 2008-06-17 | 2008-11-05 | 四川大学 | 一种柔性碲化镉薄膜太阳电池结构 |
US20090078313A1 (en) * | 2007-09-18 | 2009-03-26 | Basol Bulent M | Substrate preparation for thin film solar cell manufacturing |
CN101601121A (zh) * | 2006-12-01 | 2009-12-09 | 应用材料股份有限公司 | 电镀卷式柔性太阳能电池基板的方法与设备 |
CN101609860A (zh) * | 2009-07-16 | 2009-12-23 | 上海联孚新能源科技有限公司 | CdTe薄膜太阳能电池制备方法 |
CN101615638A (zh) * | 2008-10-06 | 2009-12-30 | 四川大学 | 具有Te缓冲层的CdTe薄膜太阳电池 |
CN101640234A (zh) * | 2009-08-21 | 2010-02-03 | 四川阿波罗太阳能科技有限责任公司 | 用磁控溅射法生产CdS/CdTe太阳能电池的方法 |
-
2010
- 2010-02-11 CN CN201010109118XA patent/CN101794840B/zh not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09148597A (ja) * | 1995-11-28 | 1997-06-06 | Matsushita Electric Ind Co Ltd | 太陽電池の製造法 |
CN101601121A (zh) * | 2006-12-01 | 2009-12-09 | 应用材料股份有限公司 | 电镀卷式柔性太阳能电池基板的方法与设备 |
US20090078313A1 (en) * | 2007-09-18 | 2009-03-26 | Basol Bulent M | Substrate preparation for thin film solar cell manufacturing |
CN101222000A (zh) * | 2008-01-07 | 2008-07-16 | 四川大学 | 双层石墨导电膏作为CdTe电池的背电极过渡层结构 |
CN101299443A (zh) * | 2008-06-17 | 2008-11-05 | 四川大学 | 一种柔性碲化镉薄膜太阳电池结构 |
CN101615638A (zh) * | 2008-10-06 | 2009-12-30 | 四川大学 | 具有Te缓冲层的CdTe薄膜太阳电池 |
CN101609860A (zh) * | 2009-07-16 | 2009-12-23 | 上海联孚新能源科技有限公司 | CdTe薄膜太阳能电池制备方法 |
CN101640234A (zh) * | 2009-08-21 | 2010-02-03 | 四川阿波罗太阳能科技有限责任公司 | 用磁控溅射法生产CdS/CdTe太阳能电池的方法 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102286741A (zh) * | 2011-09-02 | 2011-12-21 | 南京大学 | 碲化镉薄膜制备方法 |
CN102286741B (zh) * | 2011-09-02 | 2012-12-19 | 南京大学 | 碲化镉薄膜制备方法 |
CN102888584A (zh) * | 2012-09-17 | 2013-01-23 | 上海大学 | 一种基于金刚石薄膜上沉积CdTe薄膜的方法 |
CN102888584B (zh) * | 2012-09-17 | 2014-05-14 | 上海大学 | 一种基于金刚石薄膜上沉积CdTe薄膜的方法 |
CN104425653B (zh) * | 2013-08-30 | 2017-11-21 | 中国建材国际工程集团有限公司 | 用于薄层太阳能电池的附加的底层 |
CN104674166A (zh) * | 2015-03-10 | 2015-06-03 | 中国科学技术大学 | 一种CdTe薄膜制备方法及包含其的CdTe太阳电池 |
CN104674166B (zh) * | 2015-03-10 | 2017-10-03 | 中国科学技术大学 | 一种CdTe薄膜制备方法及包含其的CdTe太阳电池 |
CN106653946A (zh) * | 2016-12-27 | 2017-05-10 | 成都中建材光电材料有限公司 | 一种碲化镉薄膜太阳能电池吸收层的沉积方法 |
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CN101794840B (zh) | 2011-07-20 |
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Inventor after: Kang Lixia Inventor after: Lai Jianming Inventor after: Su Qingfeng Inventor after: Zhang Genfa Inventor before: Kang Lixia Inventor before: Lai Jianming Inventor before: Su Qingfeng Inventor before: Zhang Genfa |
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Owner name: SHANGHAI LIANFU NEW ENERGY TECHNOLOGY GROUP CO., L Free format text: FORMER NAME: SHANGHAI LIANFU NEW ENERGY SCIENCE AND TECHNOLOGY CO., LTD. |
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Address after: 201201 Pudong New Area, Shengli Road, No. 17, building 1, floor 836, Patentee after: SHANGHAI LIANFU NEW ENERGY SCIENCE & TECHNOLOGY GROUP Co.,Ltd. Address before: 201201 Shanghai city Pudong New Area King Road No. 1003 Patentee before: Shanghai Lianfu New Energy Science & Technology Co.,Ltd. |
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