CN101783342B - Bga集成电阻器及其制造方法和设备 - Google Patents
Bga集成电阻器及其制造方法和设备 Download PDFInfo
- Publication number
- CN101783342B CN101783342B CN2009100019952A CN200910001995A CN101783342B CN 101783342 B CN101783342 B CN 101783342B CN 2009100019952 A CN2009100019952 A CN 2009100019952A CN 200910001995 A CN200910001995 A CN 200910001995A CN 101783342 B CN101783342 B CN 101783342B
- Authority
- CN
- China
- Prior art keywords
- pad
- conduction band
- resistive film
- substrate
- integrated resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 65
- 230000001681 protective effect Effects 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims description 25
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 24
- 239000010949 copper Substances 0.000 claims description 24
- 229910052802 copper Inorganic materials 0.000 claims description 24
- 229910001252 Pd alloy Inorganic materials 0.000 claims description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 13
- 238000004891 communication Methods 0.000 claims description 12
- 239000011159 matrix material Substances 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 claims description 9
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 8
- 238000013459 approach Methods 0.000 claims description 8
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 229920002521 macromolecule Polymers 0.000 claims 1
- 230000007797 corrosion Effects 0.000 abstract description 12
- 238000005260 corrosion Methods 0.000 abstract description 12
- 238000012423 maintenance Methods 0.000 abstract description 5
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 abstract description 2
- 239000005864 Sulphur Substances 0.000 abstract 1
- 238000012536 packaging technology Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 17
- 238000005538 encapsulation Methods 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 11
- 238000005486 sulfidation Methods 0.000 description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 238000005987 sulfurization reaction Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 229930091051 Arenine Natural products 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 description 1
- 229910017944 Ag—Cu Inorganic materials 0.000 description 1
- 229910017083 AlN Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- 229910007116 SnPb Inorganic materials 0.000 description 1
- 229910052946 acanthite Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- XUARKZBEFFVFRG-UHFFFAOYSA-N silver sulfide Chemical compound [S-2].[Ag+].[Ag+] XUARKZBEFFVFRG-UHFFFAOYSA-N 0.000 description 1
- 229940056910 silver sulfide Drugs 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 101150051314 tin-10 gene Proteins 0.000 description 1
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Abstract
Description
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009100019952A CN101783342B (zh) | 2009-01-21 | 2009-01-21 | Bga集成电阻器及其制造方法和设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009100019952A CN101783342B (zh) | 2009-01-21 | 2009-01-21 | Bga集成电阻器及其制造方法和设备 |
Publications (2)
Publication Number | Publication Date |
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CN101783342A CN101783342A (zh) | 2010-07-21 |
CN101783342B true CN101783342B (zh) | 2012-05-23 |
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CN2009100019952A Active CN101783342B (zh) | 2009-01-21 | 2009-01-21 | Bga集成电阻器及其制造方法和设备 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10121573B2 (en) | 2016-01-06 | 2018-11-06 | International Business Machines Corporation | Epoxy-based resin system composition containing a latent functionality for polymer adhesion improvement to prevent sulfur related corrosion |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105448873A (zh) * | 2014-08-29 | 2016-03-30 | 展讯通信(上海)有限公司 | 一种集成优化的芯片结构 |
CN108987010A (zh) * | 2018-07-10 | 2018-12-11 | 广东风华高新科技股份有限公司 | 一种油位电阻片及其制造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1245340A (zh) * | 1998-08-18 | 2000-02-23 | 罗姆股份有限公司 | 贴片式电阻器及其制备方法 |
EP1503414A2 (en) * | 2003-07-31 | 2005-02-02 | CTS Corporation | Ball grid array package |
-
2009
- 2009-01-21 CN CN2009100019952A patent/CN101783342B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1245340A (zh) * | 1998-08-18 | 2000-02-23 | 罗姆股份有限公司 | 贴片式电阻器及其制备方法 |
EP1503414A2 (en) * | 2003-07-31 | 2005-02-02 | CTS Corporation | Ball grid array package |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10121573B2 (en) | 2016-01-06 | 2018-11-06 | International Business Machines Corporation | Epoxy-based resin system composition containing a latent functionality for polymer adhesion improvement to prevent sulfur related corrosion |
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Publication number | Publication date |
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CN101783342A (zh) | 2010-07-21 |
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C14 | Grant of patent or utility model | ||
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ASS | Succession or assignment of patent right |
Owner name: LIU DI Free format text: FORMER OWNER: HUAWEI TECHNOLOGY CO., LTD. Effective date: 20141212 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 518129 SHENZHEN, GUANGDONG PROVINCE TO: 518052 SHENZHEN, GUANGDONG PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20141212 Address after: 518052, Guangdong, Shenzhen province Nanshan District Nanshan digital cultural industry base, east block, room 407-408 Patentee after: Liu Di Address before: 518129 Bantian HUAWEI headquarters office building, Longgang District, Guangdong, Shenzhen Patentee before: HUAWEI TECHNOLOGIES Co.,Ltd. |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20151228 Address after: Taojiang 413000 Yiyang province Hunan city Taojiang County Economic Development Zone Industrial Park cattle River Patentee after: HUNAN FULLDE ELECTRIC Co.,Ltd. Patentee after: GUANGDONG FULLDE ELECTRONICS Co.,Ltd. Address before: 518052, Guangdong, Shenzhen province Nanshan District Nanshan digital cultural industry base, east block, room 407-408 Patentee before: Liu Di |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: BGA integrated resistor and its manufacturing method and equipment Effective date of registration: 20200903 Granted publication date: 20120523 Pledgee: China Co. truction Bank Corp Dongguan branch Pledgor: GUANGDONG FULLDE ELECTRONICS Co.,Ltd. Registration number: Y2020440000242 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Granted publication date: 20120523 Pledgee: China Co. truction Bank Corp Dongguan branch Pledgor: GUANGDONG FULLDE ELECTRONICS Co.,Ltd. Registration number: Y2020440000242 |