CN101782432A - Universal photoelectric test system for tera-hertz spectra - Google Patents
Universal photoelectric test system for tera-hertz spectra Download PDFInfo
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Abstract
The invention discloses a tera-hertz photoelectric characteristic test system capable of realizing multiple test functions on photoelectric characteristics and the like of Fourier spectra, transmittance spectra, reflection spectra and tera-hertz electronic devices by combination of various customized light sources and detectors, light path components selected by a user, and addition of peripheral auxiliary equipment. The tera-hertz photoelectric characteristic test system has the advantages of high signal-to-noise ratio, high resolution, strong expandability, low cost and the like, and can be widely suitable for tera-hertz technical research, new material research, environmental detection and biomedical analysis. In the tera-hertz photoelectric characteristic test system, the light paths, circuits and control of the spectra and photoelectric response test system are subjected to design optimization and systematic integration; compact and reasonable optical, mechanical and vacuum cavity structures are designed; computer controlled accurate mechanical scanning and data acquisition are adopted; and finally the aim of testing and analyzing tera-hertz photoelectric characteristics of materials and core devices such as tera-hertz light sources and detectors by using combination of various light sources and detectors can be fulfilled.
Description
Technical field
The present invention relates to a kind of photoelectric test system, especially refer to a kind of be used to test tera-hertz spectra and can by customization light source and combinations of detectors, user voluntarily the selective light circuit unit, add the system that peripheral auxiliary equipment is realized multiple terahertz light electrical characteristics test.The present invention is widely used in Terahertz Technology research, new material research, environment measuring and bio-medical analysis.
Background technology
THz wave is that frequency is the electromagnetic wave of 0.3THz-30THz (the about 10 μ m-1mm of wavelength, the about 1.2meV-120meV of photon energy), and it is between infrared waves and the millimeter wave, is very important wave band in the electromagnetic wave spectrum.The background electromagnetic radiation in the blackbody radiation under the room temperature, universe, many organic macromolecules of occurring in nature particularly biomolecule vibration and the rotation characteristic frequency all in the THz wave segment limit.Therefore material includes abundant physics and chemical information in emission, reflection and the transmitted spectrum of THz wave frequency range.Compare with conventional light source, unique, excellent characteristics such as that terahertz radiation source has is relevant, low energy, penetration power are strong, so it is in fundamental research fields such as physics, chemistry, uranology, life science and medical sciences, and applied research fields such as safety inspection, medical imaging, environmental monitoring, Food Inspection, radio astronomy, satellite communication and weapon guidance all have huge scientific research value and wide application prospect.In recent years, along with the develop rapidly of vacuum electronic technology, semiconductor microelectronic technology, ultrafast laser technique and nonlinear optical frequency conversion technology, Terahertz science and application technology have become the focus of international research.
Tera-hertz spectra and electrical response that the important evidence that Terahertz Technology is used is exactly a material, so terahertz light electrical testing technology is one of Terahertz Technology research and key in application.Existing photoelectric test system for tera-hertz spectra in use has significant limitation, and it is poor to show as system complex, cost height, function singleness, customization.Number of patent application is " measuring the method and apparatus of terahertz time-domain spectroscopy " of 200610171670.5, obtain terahertz time-domain spectroscopy by the terahertz pulse electric field intensity of measuring each phase differential place between the two bundle of pulsed laser bundle, have higher detective bandwidth and frequency spectrum resolving power, but this method needs two femto-second lasers, cost is too high, system complex.Number of patent application is 200620025319.0 " based on the terahertz time-domain spectroscopy instrument of optical rectification ", use femto-second laser to produce terahertz pulse and measure in conjunction with the method for optical rectification, spectrally resolved precision height, but its Measuring Time is long, and the influence of measurement result Stimulated Light power jitter is bigger.Number of patent application be 200910051781.X's " a kind of system of automatically measuring spectral characteristics of terahertz wave range ", Terahertz source based on the generation of nonlinear difference principle, pass through optics and physical construction again, carry out computer control, final measuring samples terahertz wave band transmission spectrum and reflectance spectrum characteristic automatically, but import laser instrument that this system's use is a large amount of and optics, mechanical organ, not only cost is higher, also is unfavorable for applying.
Summary of the invention
For overcoming the deficiency of equipment complexity in the above-mentioned prior art, cost height, function singleness, user customizable difference, the object of the present invention is to provide a kind of universal photoelectric test system for tera-hertz spectra, can use multiple different light sources and combinations of detectors flexibly, can be applicable to the terahertz light electrical characteristics test analysis of material and device widely.
A primary technical scheme that realizes the invention described above purpose is:
Universal photoelectric test system for tera-hertz spectra, it is characterized in that comprising be located in the system sealing chamber (1) as lower module:
The visible light output module comprises the laser instrument (2), catoptron (3), visible light window (4), collimation diaphragm (5) and the rotating mirror (6) that set gradually by light path, utilizes visible light to adjust the light path of total system;
The THz wave output module, comprise off-axis aspheric surface catoptron (7), chopper (8), line slideway (9), off-axis aspheric surface catoptron (10), Terahertz input window (11), off-axis aspheric surface catoptron (12), diaphragm (13) and Terahertz source (14), be used for to the adjustable THz wave of system sealing chamber (1) output light flux, and the THz wave after output chopper (8) modulation;
Intervention module comprises Terahertz beam splitter (15), visible light beam splitter (16), quiet catoptron (17), electricity driving displacement platform (19) and assembling moving catoptron (18) thereon, is used for the visible light or the THz wave of incident are formed interference;
The transmission sample module comprises off-axis aspheric surface catoptron (23), specimen holder (24), sample bin (25) and off-axis aspheric surface catoptron (26), is used for sample is carried out horizontal direction and the vertical direction position control that transmission spectrum is measured;
Detecting module, comprise visible-light detector (20), line slideway (21), catoptron (22), catoptron (27), Terahertz output window (28), off-axis aspheric surface catoptron (29) and terahertz detector (30), be used for surveying respectively visible light, the THz wave of Terahertz source output and the THz wave after the interference modulations;
And the control module that links to each other with the detecting module signal, comprise electrode port (31) and computing machine and software systems (32), voltage, electric current and the interactive communication signal of each parts in the system is provided and controls the working condition of each parts, and result of detection is carried out computational analysis and demonstration.
Further, aforesaid universal photoelectric test system for tera-hertz spectra, wherein this specimen holder (24) links to each other with computing machine and software systems (32) signal, and controlled along continuous straight runs of specimen holder (24) or vertical direction are shifted one's position.
In addition, this Terahertz beam splitter and visible light beam splitter are the thick high-purity silicon chip of 2mm; This electrode port also is connected with electrical testing, the optic test peripheral auxiliary equipment that is used to carry out the function expansion, comprises voltage source, oscillograph, detector etc. at least, and optional one or more assemblings wherein connect; Be full of in the system sealing chamber after this system architecture is finished dry nitrogen is arranged.
A less important technical scheme that realizes the invention described above purpose is:
A kind of implementation method of universal photoelectric test system for tera-hertz spectra, its characterization step comprises:
I, light path premodulation, whether vertical described visible-light detector (20) is by the interferometry of incident visible light being judged between quiet catoptron (17) and the moving catoptron (18), and consequential signal is fed back to control module vertically adjust; II, tera-hertz spectra test, the THz wave that send in described Terahertz source (14) is through seeing through sample or the device on the specimen holder (24) after the intervention module, the outgoing signal is gathered by terahertz detector (30) again, obtains the Terahertz Fourier spectrum of material or device; Or the THz wave sent directly seen through sample or device on the specimen holder (24), the outgoing signal is gathered by terahertz detector (30) again, obtains the Terahertz transmitted spectrum of material or device; III, detecting module export Terahertz Fourier spectrum or the Terahertz transmitted spectrum that records to computing machine and software systems (32), and the result who measures is carried out computational analysis, obtain the also test result of display light electrical characteristics.
Further, the implementation method of aforesaid universal photoelectric test system for tera-hertz spectra, the visible light light path control of incident described in the step I is to realize by collimation diaphragm (5) and rotating mirror (6) modulation in turn.
Further, the implementation method of aforesaid universal photoelectric test system for tera-hertz spectra, Terahertz wave interference in visible interference of light and the Step II among the step I, make the two-beam that reflects back into corresponding beam splitter through quiet catoptron (17) and moving catoptron (18) produce optical path difference by electricity driving displacement platform (19) mobile, form and interfere.
Further, the implementation method of aforesaid universal photoelectric test system for tera-hertz spectra, wherein this specimen holder (24) links to each other with computing machine and software systems (32), and computing machine and software systems (32) drive specimen holder (24) along continuous straight runs according to default test procedure signal or vertical direction is shifted one's position.
The invention described above universal photoelectric test system for tera-hertz spectra, its advantage is:
This universal photoelectric test system for tera-hertz spectra can be applicable to the combination of multiple detector and light source, and customization is strong, can form Fourier spectrum, transmitted spectrum, the reflectance spectrum of Terahertz, and analyzes the photoelectric characteristic that obtains the Terahertz electron device.In addition, also make this photoelectric test system also possess easy for operation, measuring accuracy and system signal noise ratio height, product architecture is simple, the significantly reduced characteristic of production cost.
Description of drawings
Fig. 1 is the principle schematic of universal photoelectric test system for tera-hertz spectra of the present invention
The implication of each Reference numeral is among the figure:
1～system sealing chamber, 2～laser instrument, 3～catoptron, 4～visible light window, 5～collimation diaphragm, 6～rotating mirror, 7～off-axis aspheric surface catoptron, 8～chopper, 9～line slideway, 10～off-axis aspheric surface catoptron, 11～Terahertz input window, 12～off-axis aspheric surface catoptron, 13～diaphragm, 14～Terahertz source, 15～Terahertz beam splitter, 16～visible light beam splitter, 17～quiet catoptron, 18～moving catoptron, 19～electricity driving displacement platform, 20～visible-light detector, 21～line slideway, 22 (22-1,22-2)～catoptron, 23～off-axis aspheric surface catoptron, 24～specimen holder, 25～sample bin, 26～off-axis aspheric surface catoptron, 27～catoptron, 28～Terahertz output window, 29～off-axis aspheric surface catoptron, 30～terahertz detector, 31～electrode port, 32～computing machine and software systems.
Solid line among the figure is the light path of laser; Dotted line is the light path of THz wave; Dot-and-dash line is the connecting line of associated components in computing machine and the system; Dotted line is the connecting line of associated components in electrode port and the system.
Embodiment
The present invention designed a kind of can satisfy core devices such as Terahertz light source, detector, terahertz wave band material and structured testing analyze in related common requirement, adopted spectrum and the photoelectric response test macro optimized that light path, circuit and computer control is integrated, made the present invention can form large, medium and small type or even miniature Terahertz photoelectric test system.This system can scan light, the electricity spectrum that obtains sample and analyze the terahertz light electrical characteristics that obtain device and sample.This system can use any existing Terahertz light source (as SiC Glowbar, high-pressure sodium lamp, Gunn submillimeter wave signal source, carcinotron etc.) and terahertz detector (as pyroelectricity, Golay Cell, silicon bolometer etc.).The present invention has designed optics, machinery and the vacuum chamber structure of compact and reasonable, has adopted computer-controlled accurate mechanical scanning and data acquisition.
The principle schematic of this universal photoelectric test system for tera-hertz spectra as shown in Figure 1, by system sealing chamber 1, laser instrument 2, catoptron 3,17,18,22 and 27, visible light window 4, collimation diaphragm 5, rotating mirror 6, off-axis aspheric surface catoptron 7,10,12,23,26 and 29, chopper 8, line slideway 9 and 21, Terahertz input window 11, diaphragm 13, Terahertz source 14, Terahertz beam splitter 15, visible light beam splitter 16, electricity driving displacement platform 19, visible-light detector 20, specimen holder 24, sample bin 25, Terahertz output window 28, terahertz detector 30, electrical testing port 31 and computing machine 32 are formed.
Whole Terahertz photoelectric test system mainly is divided into following six modules:
Constituting the visible light output module by He-Ne laser instrument 2, catoptron 3, visible light window 4, collimation diaphragm 5 and rotating mirror 6, can realize the visible light output of system, is the basis that system light path is adjusted;
Off-axis aspheric surface catoptron 7, chopper 8, line slideway 9, off-axis aspheric surface catoptron 10, Terahertz input window 11, off-axis aspheric surface catoptron 12, diaphragm 13 and Terahertz source 14 are the terahertz light output module, can the THz wave that luminous flux is adjustable be input to system sealing chamber 1, and the THz wave after the output modulation;
Terahertz beam splitter 15, visible light beam splitter 16, quiet catoptron 17, moving catoptron 18 and electricity driving displacement platform 19 are intervention module, directional light is divided into two-way by beam splitter, get back to beam splitter through mirror reflects again, the mobile two-beam generation optical path difference that reflects back into beam splitter through catoptron 17 and 18 that makes of electricity driving displacement platform 19, interfere thereby form, intervention module is the core of system;
Off-axis aspheric surface catoptron 23, specimen holder 24, sample bin 25 and off-axis aspheric surface catoptron 26 are the transmission sample module, and parallel incident light is focused on the testing sample district, and with the parallel output of transmitted light;
Visible-light detector 20, line slideway 21, catoptron 22, catoptron 27, Terahertz output window 28, off-axis aspheric surface catoptron 29, terahertz detector 30 are detecting module, by adjusting light path, can survey visible light, the terahertz light of Terahertz source output and the terahertz light after the interference modulations respectively;
The specifically architectural feature of this each member of photoelectric test system and function.
The effect in system sealing chamber 1 is with terahertz light electrical testing system sealing, and fills dry nitrogen therein, eliminates the influence of impurity such as airborne water and carbon dioxide to measurement result.
The effect of laser instrument 2 is debugging, regulation light source, is used to adjust the light path of Terahertz photoelectric test system and as frequency calibration.
The effect of catoptron 3 is optical path directions of adjusting laser instrument 2.
The effect of collimation diaphragm 5 is collimations of the laser optical path that sends of laser instrument 2.
The effect of rotating mirror 6 is the optical path directions that change laser instrument 2, with the light path of laser-bounce to Fig. 1 right side, is used for the intervention module of Adjustment System when rotating mirror 6 is in direction shown in Figure 1; With the light path of laser-bounce, be used for the light path adjustment after system's Terahertz source emission behind rotating mirror 6 Rotate 180s ° to Fig. 1 left side.
Off-axis aspheric surface catoptron 7 and 10 effect are parallel again ejaculations after parallel terahertz light is focused on, so that terahertz light is modulated.
The effect of chopper 8 is the modulation that realize the terahertz light signal, the terahertz light radiation signal can be modulated into alternating signal, and output and the synchronous reference voltage square wave of modulating frequency can be used as reference signal simultaneously.
The effect of Terahertz input window 11 is input ports that terahertz light enters system sealing chamber 1.
The effect of off-axis aspheric surface catoptron 12 is the parallel ejaculations of terahertz light with input.
The effect of diaphragm 13 is luminous fluxes of regulating the control terahertz light.
The effect in Terahertz source 14 is emission terahertz lights.
The effect of Terahertz beam splitter 15 is by its semi-transparent semi-reflecting character, and terahertz light is divided into two-way, and the two-way light that separates reflects the back respectively through Terahertz beam splitter 15, interferes thereby form.
The effect of visible light beam splitter 16 is by its semi-transparent semi-reflecting character, laser is divided into two-way comes the angle of accommodation reflex mirror 17 and 18 and pitching to interfere to form.
Catoptron 17 and 18 effect are the optical path directions of adjusting through the two-beam of beam splitter 15 and 16.
The effect of electricity driving displacement platform 19 is that catoptron 18 direction along ng a path uniform velocity trace is moved.
The effect of visible-light detector 20 is the power of Laser Measurement.
The effect of specimen holder 22 is to place the sample that needs measurement, and can carry out the level of transmission spectrum measurement and the position control of vertical direction to sample.
Off-axis aspheric surface catoptron 23 and 24 effect are that parallel terahertz light is focused on sample on the specimen holder 22, make the parallel outgoing of transmitted light again.
The effect of sample bin 25 is conveniently to pick and place sample, and keeps the balance environment in system's annular seal space 1.
The effect of Terahertz output window 28 is delivery outlets that terahertz light penetrates system sealing chamber 1.
The effect of off-axis aspheric surface catoptron 29 is that the terahertz light with the 1 parallel ejaculation of system sealing chamber converges at a bit, so that the reception of detector.
The effect of terahertz detector 30 is the power of measuring system output terahertz light.
The effect of electrical testing port 31 is that the biasing to Terahertz light source, terahertz detector, visible-light detector, chopper, electricity driving displacement platform, device under test provides voltage, electric current and AC signal etc.
The effect of computing machine 32 is the working conditions according to Testing requirement control electricity driving displacement platform 19, visible-light detector 20 and terahertz detector 30, and the result who measures is carried out computational analysis and demonstration.
Aforementioned universal photoelectric test system for tera-hertz spectra of the present invention further is described as in conjunction with the accompanying drawings:
The visible light that laser instrument 2 (He-Ne) sends is earlier through catoptron 3 reflections, incide rotating mirror 6 after entering system sealing chamber 1 by visible light window 4 again, can be when rotating mirror 6 is in state shown in the figure with parallel incident light can be reflexed to visible light beam splitter 16.Parallel visible light is divided into two-way by visible light beam device 16, one road directional light passes through visible light beam splitter 16 after being reflected by quiet catoptron 17 again, another road directional light is reflected by visible light beam splitter 16 after moving catoptron 18 reflections of moving on the electricity driving displacement platform 19 again, the parallel terahertz light of two-way is being interfered mutually through visible light beam splitter 16 backs for the second time, and the visible light of interference is surveyed by visible-light detector 20.Thus.Can utilize the signal of visible-light detector 20 feedback to regulate and judge whether the luffing angle of visible light beam splitter 16, quiet catoptron 17 and moving catoptron 18 and relative position be correct.After determining the relative position and luffing angle of visible light beam splitter 16, quiet catoptron 17 and moving catoptron 18, take off visible-light detector 20, make visible light be focused on specimen holder 24 places, thereby determine the position of specimen holder 24 by off-axis aspheric surface catoptron 23.Transmitted light through sample is reflected back normal sheaf catoptrons 27 by off-axis aspheric surface catoptron 26, penetrate system sealing chamber 1 back transmitted light through Terahertz output window 28 again and focused on terahertz detector 30, thereby determine the placement location of terahertz detector 30 by visible light by off-axis aspheric surface catoptron 29.Behind rotating mirror 6 Rotate 180s °, parallel visible light can be reflexed to off-axis aspheric surface catoptron 7, focused on chopper 8 by off-axis aspheric surface catoptron 7, thereby determine the placement location and the height of chopper 8, visible light through chopper 8 is reflected the parallel outgoing in back by off-axis aspheric surface catoptron 10 again, penetrate system sealing chamber 1, last visible light is focused on Terahertz source 14 by off-axis aspheric surface catoptron 12, thereby determines the placement location and the height in Terahertz source 14.
The terahertz light that send in Terahertz source 14 incides the 12 parallel outgoing in back of off-axis aspheric surface catoptron through diaphragm 13, enters system sealing chamber 1 through Terahertz input window 11.Off-axis aspheric surface catoptron 10 can prolong guide rail and do linear movement on line slideway 9.When off-axis aspheric surface catoptron 10 was positioned at the 10-1 position, parallel terahertz light was focused on chopper 8 places by off-axis aspheric surface catoptron 10, again by the 7 reflection parallel outgoing in back of off-axis aspheric surface catoptron.Parallel terahertz light is divided into two-way by Terahertz beam splitter 15, one road directional light passes through Terahertz beam splitter 15 after being reflected by quiet catoptron 17 again, another road directional light quilt is reflected by Terahertz beam splitter 15 after moving catoptron 18 reflections of moving on the electricity driving displacement platform 19 again, and the parallel terahertz light of two-way is in process Terahertz beam splitter 15 backs interference mutually for the second time.Catoptron 22 can prolong guide rail and do linear movement on line slideway 21.When catoptron 22 was positioned at the 22-1 position, the parallel terahertz light of interference was directly incident on off-axis aspheric surface catoptron 23, and was focused on specimen holder 24 places by off-axis aspheric surface catoptron 23.Terahertz transmitted light through sample is reflected back normal sheaf catoptrons 27 by off-axis aspheric surface catoptron 26, penetrate system sealing chamber 1 through Terahertz output window 28 again, Terahertz transmitted light after the last interference modulations is focused on terahertz detector 30 by off-axis aspheric surface catoptron 29, thereby can survey the Terahertz Fourier transmitted spectrum that obtains sample.When off-axis aspheric surface catoptron 10 is positioned at the 10-2 position, the parallel terahertz light that process Terahertz window 11 enters system sealing chamber 1 is positioned at catoptron 22 reflections of 22-2 position, enter the transmission sample module, promptly focused on specimen holder 24 places by off-axis aspheric surface catoptron 23.Terahertz transmitted light through sample is reflected back normal sheaf catoptrons 27 by off-axis aspheric surface catoptron 26, penetrate system sealing chamber 1 through Terahertz output window 28 again, last Terahertz transmitted light is focused on terahertz detector 30 by off-axis aspheric surface catoptron 29, thereby can survey the Terahertz transmitted spectrum that obtains sample.According to user's request and customization, electrode port 31 provides necessary voltage, electric current and AC signal for Terahertz source 14, terahertz detector 30, visible-light detector 20, chopper 13, electric displacement platform 19, device under test.Computing machine 32 is the working conditions according to Testing requirement control electricity driving displacement platform 19, visible-light detector 20 and terahertz detector 30, and the result who measures is carried out computational analysis and demonstration.
By the description of above structure and implementation method, essential characteristics of the present invention is clear and definite, its effect mainly be summed up as following some:
1, be applicable to the combination of multiple detector and light source, customization is strong, can form the multiple test functions such as Fourier spectrum, transmitted spectrum, reflectance spectrum and Terahertz electronic device photoelectric characteristic.
2, regulation light source provides efficiently guarantee for debugging and the maintenance of system.
3, the design of electrode port is achieved complicated photoelectricity test, for the user provides extending space.
4, photoelectric test system is sealed with the system sealing chamber, and fill therein dry nitrogen, eliminate the impurity such as airborne water and carbon dioxide to the impact of measurement result, improved the certainty of measurement of system.
5, photoelectric test system makes and computerizeds control, and the single measurement time is short, and repeatedly duplicate measurements is averaged, and greatly improves the signal to noise ratio of system.
6, main optics, the mechanical component of this photoelectric test system for tera-hertz spectra are the simple processing of conventional material and obtain, and cost is lower, is easy to use and promotes.
Claims (9)
1. universal photoelectric test system for tera-hertz spectra, it is characterized in that comprising be located in the system sealing chamber (1) as lower module:
The visible light output module comprises the laser instrument (2), catoptron (3), visible light window (4), collimation diaphragm (5) and the rotating mirror (6) that set gradually by light path, utilizes visible light to adjust the light path of total system;
The THz wave output module, comprise off-axis aspheric surface catoptron (7), chopper (8), line slideway (9), off-axis aspheric surface catoptron (10), Terahertz input window (11), off-axis aspheric surface catoptron (12), diaphragm (13) and Terahertz source (14), be used for to the adjustable THz wave of system sealing chamber (1) output light flux, and the THz wave after output chopper (8) modulation;
Intervention module comprises Terahertz beam splitter (15), visible light beam splitter (16), quiet catoptron (17), electricity driving displacement platform (19) and assembling moving catoptron (18) thereon, is used for the visible light or the THz wave of incident are formed interference;
The transmission sample module comprises off-axis aspheric surface catoptron (23), specimen holder (24), sample bin (25) and off-axis aspheric surface catoptron (26), is used for sample is carried out horizontal direction and the vertical direction position control that transmission spectrum is measured;
Detecting module, comprise visible-light detector (20), line slideway (21), catoptron (22), catoptron (27), Terahertz output window (28), off-axis aspheric surface catoptron (29) and terahertz detector (30), be used for surveying respectively visible light, the THz wave of Terahertz source output and the THz wave after the interference modulations;
And the control module that links to each other with the detecting module signal, comprise electrode port (31) and computing machine and software systems (32), voltage, electric current and the interactive communication signal of each parts in the system is provided and controls the working condition of each parts, and result of detection is carried out computational analysis and demonstration.
2. universal photoelectric test system for tera-hertz spectra according to claim 1 is characterized in that: described specimen holder (24) links to each other with computing machine and software systems (32) signal, and controlled along continuous straight runs of specimen holder (24) or vertical direction are shifted one's position.
3. universal photoelectric test system for tera-hertz spectra according to claim 1 is characterized in that: described Terahertz beam splitter (15) and visible light beam splitter (16) are the thick high-purity silicon chip of 2mm.
4. universal photoelectric test system for tera-hertz spectra according to claim 1, it is characterized in that: described electrode port (31) also is connected with electrical testing, the optic test peripheral auxiliary equipment that is used to carry out the function expansion, comprises in voltage source, oscillograph, detector or the similar device one or more at least.
5. universal photoelectric test system for tera-hertz spectra according to claim 1 is characterized in that: being full of in the system sealing chamber (1) after described system architecture is finished has dry nitrogen.
6. the implementation method of the described universal photoelectric test system for tera-hertz spectra of claim 1, its characterization step comprises:
I, light path premodulation, whether vertical described visible-light detector (20) is by the interferometry of incident visible light being judged between quiet catoptron (17) and the moving catoptron (18), and consequential signal is fed back to control module vertically adjust;
II, tera-hertz spectra test, the THz wave that send in described Terahertz source (14) is through seeing through sample or the device on the specimen holder (24) after the intervention module, the outgoing signal is gathered by terahertz detector (30) again, obtains the Terahertz Fourier spectrum of material or device; Or the THz wave sent directly seen through sample or device on the specimen holder (24), the outgoing signal is gathered by terahertz detector (30) again, obtains the Terahertz transmitted spectrum of material or device;
III, detecting module export Terahertz Fourier spectrum or the Terahertz transmitted spectrum that records to computing machine and software systems (32), and the result who measures is carried out computational analysis, obtain the also test result of display light electrical characteristics.
7. the implementation method of universal photoelectric test system for tera-hertz spectra according to claim 6 is characterized in that: the visible light light path control of incident described in the step I is in turn by collimation diaphragm (5) and rotating mirror (6) modulation realization.
8. the implementation method of universal photoelectric test system for tera-hertz spectra according to claim 6, it is characterized in that: Terahertz wave interference in visible interference of light and the Step II among the step I, make the two-beam that reflects back into corresponding beam splitter through quiet catoptron (17) and moving catoptron (18) produce optical path difference by electricity driving displacement platform (19) mobile, form and interfere.
9. the implementation method of universal photoelectric test system for tera-hertz spectra according to claim 6, it is characterized in that: described specimen holder (24) links to each other with computing machine and software systems (32), and computing machine and software systems (32) drive specimen holder (24) along continuous straight runs according to default test procedure signal or vertical direction is shifted one's position.
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| CN102175636A (en) * | 2011-03-18 | 2011-09-07 | 上海理工大学 | System and method for detecting and identifying Chinese herbal medicine |
| CN102354897A (en) * | 2011-08-30 | 2012-02-15 | 中国科学院上海技术物理研究所 | External secondary cascading difference frequency terahertz light source generation device and implementation method |
| CN103644968A (en) * | 2013-11-25 | 2014-03-19 | 深圳先进技术研究院 | Automatic inflation cabin and terahertz time-domain spectroscopy system provided with same |
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| CN102354897A (en) * | 2011-08-30 | 2012-02-15 | 中国科学院上海技术物理研究所 | External secondary cascading difference frequency terahertz light source generation device and implementation method |
| CN103767682A (en) * | 2012-10-19 | 2014-05-07 | 深圳先进技术研究院 | Terahertz spectrum imaging system and method |
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| CN105534481A (en) * | 2016-01-21 | 2016-05-04 | 华中科技大学 | Frequency domain optical coherence tomograghy device and method |
| CN105509817A (en) * | 2016-02-01 | 2016-04-20 | 中国工程物理研究院流体物理研究所 | TeraHertz wave Doppler interferometry instrument and method |
| CN105841811A (en) * | 2016-05-23 | 2016-08-10 | 中国科学院上海微系统与信息技术研究所 | Terahertz optical path calibrator, and calibration devices for convergence and parallel optical paths |
| CN108120695A (en) * | 2017-12-14 | 2018-06-05 | 天津大学 | A kind of pipeline blending monitoring system based on Terahertz frustrated total internal reflection |
| CN109343102A (en) * | 2018-09-11 | 2019-02-15 | 东莞中子科学中心 | A kind of white light neutron source charged particle detection spectrometer vacuum target chamber |
| CN109343102B (en) * | 2018-09-11 | 2020-09-29 | 东莞中子科学中心 | Vacuum target chamber of white-light neutron source charged particle detection spectrometer |
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