CN101777549A - 化合物半导体元件的封装模块结构及其制造方法 - Google Patents
化合物半导体元件的封装模块结构及其制造方法 Download PDFInfo
- Publication number
- CN101777549A CN101777549A CN200910002243A CN200910002243A CN101777549A CN 101777549 A CN101777549 A CN 101777549A CN 200910002243 A CN200910002243 A CN 200910002243A CN 200910002243 A CN200910002243 A CN 200910002243A CN 101777549 A CN101777549 A CN 101777549A
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- Prior art keywords
- compound semiconductor
- circuit layer
- modular structure
- dielectric layer
- light
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- Granted
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 68
- 150000001875 compounds Chemical class 0.000 title claims abstract description 67
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 238000004806 packaging method and process Methods 0.000 title abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 32
- 238000005538 encapsulation Methods 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 26
- 230000004888 barrier function Effects 0.000 claims description 18
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 16
- 239000002390 adhesive tape Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000004411 aluminium Substances 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 claims description 3
- 229910001195 gallium oxide Inorganic materials 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 3
- ATFCOADKYSRZES-UHFFFAOYSA-N indium;oxotungsten Chemical compound [In].[W]=O ATFCOADKYSRZES-UHFFFAOYSA-N 0.000 claims description 3
- 239000011135 tin Substances 0.000 claims description 3
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 claims description 3
- 229910000846 In alloy Inorganic materials 0.000 claims 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 2
- 239000011358 absorbing material Substances 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 2
- 239000004332 silver Substances 0.000 claims 2
- 229910052718 tin Inorganic materials 0.000 claims 2
- 239000002245 particle Substances 0.000 abstract description 9
- 230000017525 heat dissipation Effects 0.000 abstract description 5
- 239000000853 adhesive Substances 0.000 abstract description 4
- 230000001070 adhesive effect Effects 0.000 abstract description 4
- 239000011810 insulating material Substances 0.000 abstract description 3
- 239000011889 copper foil Substances 0.000 description 13
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 12
- 238000010586 diagram Methods 0.000 description 12
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 8
- 230000005611 electricity Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 7
- 239000012530 fluid Substances 0.000 description 6
- 239000000084 colloidal system Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 238000012216 screening Methods 0.000 description 5
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012856 packing Methods 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000009795 derivation Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000002223 garnet Substances 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000000741 silica gel Substances 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910017083 AlN Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 208000034189 Sclerosis Diseases 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000009969 flowable effect Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Led Device Packages (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009100022438A CN101777549B (zh) | 2009-01-13 | 2009-01-13 | 化合物半导体元件的封装模块结构及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN2009100022438A CN101777549B (zh) | 2009-01-13 | 2009-01-13 | 化合物半导体元件的封装模块结构及其制造方法 |
Publications (2)
Publication Number | Publication Date |
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CN101777549A true CN101777549A (zh) | 2010-07-14 |
CN101777549B CN101777549B (zh) | 2012-07-04 |
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CN2009100022438A Expired - Fee Related CN101777549B (zh) | 2009-01-13 | 2009-01-13 | 化合物半导体元件的封装模块结构及其制造方法 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102760824A (zh) * | 2011-04-29 | 2012-10-31 | 展晶科技(深圳)有限公司 | 发光二极管封装结构 |
CN102820387A (zh) * | 2011-06-08 | 2012-12-12 | 普罗科技有限公司 | Led元件制造方法 |
CN103941326A (zh) * | 2014-04-11 | 2014-07-23 | 广东威创视讯科技股份有限公司 | 一种平板显示器的导光结构及带该导光结构的平板显示器 |
CN108807227A (zh) * | 2018-05-24 | 2018-11-13 | 武汉华星光电半导体显示技术有限公司 | 用于切割显示面板的切割装置和切割方法、显示面板 |
CN109103744A (zh) * | 2018-09-03 | 2018-12-28 | 业成科技(成都)有限公司 | 发光装置及其制造方法 |
US20210343574A1 (en) * | 2020-04-29 | 2021-11-04 | Semiconductor Components Industries, Llc | Curved semiconductor die systems and related methods |
-
2009
- 2009-01-13 CN CN2009100022438A patent/CN101777549B/zh not_active Expired - Fee Related
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102760824A (zh) * | 2011-04-29 | 2012-10-31 | 展晶科技(深圳)有限公司 | 发光二极管封装结构 |
US9123870B2 (en) | 2011-04-29 | 2015-09-01 | Advanced Optoelectronic Technology, Inc. | LED package structure |
CN102760824B (zh) * | 2011-04-29 | 2016-06-08 | 展晶科技(深圳)有限公司 | 发光二极管封装结构 |
CN102820387A (zh) * | 2011-06-08 | 2012-12-12 | 普罗科技有限公司 | Led元件制造方法 |
CN103941326A (zh) * | 2014-04-11 | 2014-07-23 | 广东威创视讯科技股份有限公司 | 一种平板显示器的导光结构及带该导光结构的平板显示器 |
CN103941326B (zh) * | 2014-04-11 | 2016-08-24 | 广东威创视讯科技股份有限公司 | 一种平板显示器的导光结构及带该导光结构的平板显示器 |
CN108807227A (zh) * | 2018-05-24 | 2018-11-13 | 武汉华星光电半导体显示技术有限公司 | 用于切割显示面板的切割装置和切割方法、显示面板 |
CN109103744A (zh) * | 2018-09-03 | 2018-12-28 | 业成科技(成都)有限公司 | 发光装置及其制造方法 |
US20210343574A1 (en) * | 2020-04-29 | 2021-11-04 | Semiconductor Components Industries, Llc | Curved semiconductor die systems and related methods |
US12020972B2 (en) * | 2020-04-29 | 2024-06-25 | Semiconductor Components Industries, Llc | Curved semiconductor die systems and related methods |
Also Published As
Publication number | Publication date |
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CN101777549B (zh) | 2012-07-04 |
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