CN101776782A - Glass-based ion exchange optical waveguide chip integrating light-emitting function of copper ions - Google Patents
Glass-based ion exchange optical waveguide chip integrating light-emitting function of copper ions Download PDFInfo
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- CN101776782A CN101776782A CN201010100228A CN201010100228A CN101776782A CN 101776782 A CN101776782 A CN 101776782A CN 201010100228 A CN201010100228 A CN 201010100228A CN 201010100228 A CN201010100228 A CN 201010100228A CN 101776782 A CN101776782 A CN 101776782A
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Abstract
The invention discloses a glass-based ion exchange light waveguide chip integrating the light-emitting function of copper ions. A local area of the surface of a glass substrate has a copper ion diffusion region; a strip doped region is formed in the glass substrate by using an ion exchange method; a strip doped region with the light-emitting function is formed in an overlapping region of the strip doped region and the copper ion diffusion region; and the refractive index of the strip doped area is higher than that of the glass substrate, the refractive index of the strip doped region with the light-emitting function is higher than that of the copper ion diffusion region, and the strip doped region and the strip doped region with the light-emitting function form a strip light waveguide core part in a mode of end surface coupling. The glass-based ion exchange light waveguide chip realizes the light-emitting function of the light waveguide in the area needed on the light waveguide chip, realizes integration of the light-emitting function on the glass substrate, has the obvious characteristics of simple manufacturing technique and high coupling efficiency and the like, provides a new structure for realizing the integration of the light-emitting function of the glass-based integrated optical chip, and leads the design of the glass-based integrated optical chip to be more flexible.
Description
Technical field
The present invention relates to integrated optical device, especially relate to a kind of glass-based ion exchange optical waveguide chip of integrating light-emitting function of copper ions.
Background technology
Integrated optical circuit is meant on the surface of same substrate, with the slightly high material optical waveguide of refractive index, and makes various optical device such as light source, grating based on this again.By this integrated, can realize the purpose of miniaturization, lightweight, stabilization and the high performance of optical system.Along with the development of modern Fibre Optical Communication Technology and optical fiber sensing technology, integrated optical device more and more is subject to people's attention.
The material that is used for the integrated optical device making mainly contains III-V family semiconductor materials such as Si, silicon dioxide, gallium arsenide phosphatization indium, polymkeric substance, glass etc.Glass light waveguide device based on ion exchange technique has distinguishing features such as cost is low, technology is simple, loss is low, PDL (polarization correlated) is little, the making tolerance is big, can produce in batches.
The glass-based fiber waveguide device generally adopts ion exchange process to make.In the ion exchange process, monovalent cation in the glass substrate (normally sodion) with from dopant ion (such as the silver ion of fused salt or metal film, potassium ion, copper ion, cesium ion, thallium ion) carry out ion-exchange, dopant ion forms ion-exchange area on glass substrate, this ion-exchange area has higher refractive index, forms the core of waveguide.
In recent years, adopt the making of the fiber waveguide device of Copper Ion Exchange making to cause the increasing concern of researchers.The optical waveguide that Copper Ion Exchange forms has the nonlinear optics and the bluish-green characteristics of luminescence, thereby the Copper Ion Exchange slab guide is in the making of non-linear optical waveguide device, and bluish-green band laser and amplifier aspect have tempting application prospect.
Usually the structure of Copper Ion Exchange chip of light waveguide as shown in Figure 1.1 has the bar shaped copper ion diffusion region 2 ' that makes by ion-exchange process on glass substrate.Bar shaped copper ion diffusion region 2 ' has the refractive index higher than glass substrate 1, as the sandwich layer of optical waveguide.The integral body of this structured light waveguide has the characteristics of luminescence of copper ion, but this optical waveguide can only realize lighting function in whole bar shaped copper ion diffusion region 2 ', be difficult to be implemented in glass substrate 1 selected zone and realize lighting function, dirigibility is not strong in the chip of light waveguide design process.
Summary of the invention
The object of the present invention is to provide a kind of glass-based ion exchange optical waveguide chip of integrating light-emitting function of copper ions.
The technical scheme that the present invention solves its technical matters employing is:
The present invention has the copper ion diffusion region at the regional area of glass substrate surface; In glass substrate, form the bar shaped doped region with ion exchange process, in bar shaped doped region and overlay region, copper ion diffusion region, form bar shaped doped region with lighting function; The refractive index of bar shaped doped region is higher than the refractive index of glass substrate, refractive index with bar shaped doped region of lighting function is higher than the refractive index of copper ion diffusion region, and bar shaped doped region and the bar shaped doped region with lighting function form the core of strip optical waveguide jointly in the mode of end face coupling.
The beneficial effect that the present invention has is:
The present invention can be on chip of light waveguide desired zone realize the lighting function of optical waveguide, lighting function is integrated on the realization glass substrate, and it is simple to have manufacture craft, distinguishing features such as coupling efficiency height, for the lighting function of realizing the glass-based integrated optics chip integrated provides new structure, make the design of glass-based integrated optics chip more flexible.
Description of drawings
Fig. 1 is the Copper Ion Exchange chip of light waveguide structural representation of using always.
Fig. 2 is the glass-based ion exchange optical waveguide chip structural representation of light-emitting function of copper ions involved in the present invention.
Fig. 3 is the glass-based ion exchange optical waveguide chip manufacturing process synoptic diagram of light-emitting function of copper ions involved in the present invention.
Among the figure: 1, glass substrate, 2 ', bar shaped copper ion diffusion region, 2, the copper ion diffusion region, 3, the bar shaped doped region, 4, have a bar shaped doped region of lighting function, 5, the Cr-Au film, 6, the Al film.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
As shown in Figure 2, the present invention has the copper ion diffusion region at the regional area on glass substrate 1 surface; In glass substrate 1, form bar shaped doped region 3 with ion exchange process, in bar shaped doped region 3 and 2 overlay regions, copper ion diffusion region, form bar shaped doped region 4 with lighting function; The refractive index of bar shaped doped region 3 is higher than the refractive index of glass substrate 1, refractive index with bar shaped doped region 4 of lighting function is higher than the refractive index of copper ion diffusion region 2, and bar shaped doped region 3 and the bar shaped doped region 4 with lighting function form the core of strip optical waveguide jointly in the mode of end face coupling.
The glass-based ion exchange optical waveguide chip of integrating light-emitting function of copper ions involved in the present invention is implemented (the English alphabet sequence number is corresponding to the sequence number of each figure among Fig. 3) as follows:
A.. prepare glass substrate 1, prepare the silicate glass substrate of twin polishing.
B. make mask, adopt the method for thermal evaporation to make Cr-Au film 5 at glass substrate; Photoetching then obtains the used window of Cu ions diffusion on Cr-Au film 5.
C. copper ion doped, adopt ion exchange process, the glass sheet that will have mask is put into CuSO
4And Na
2SO
4(CuSO
4And Na
2SO
4Mol ratio 1: 1) high temperature (540～580 ℃) fused salt mixt in carry out ion-exchange, 10～30 minutes swap times.Copper ion under the high temperature in the fused salt diffuses into glass, and in the local copper ion diffusion region that forms of glass substrate, the copper ion diffusion region has lighting function.
D. adopt the method for chemical corrosion to remove mask, remove Cr-Au film 5.
E. adopt the method for thermal evaporation to make A1 film 6 at glass substrate; Photoetching then obtains the used window of Ag ion functionalization on A1 film 6.
F. ion exchange process is adopted in ion-exchange, and the glass sheet that will have mask is put into NaNO
3And AgNO
3High temperature (280～400 ℃) fused salt mixt in carry out ion-exchange, NaNO
3And AgNO
3Mol ratio between 1: 0.1～1: 0.001,50～120 minutes swap times.The bar shaped doped region 3 that ion-exchange forms in glass substrate 1 forms the bar shaped doped region 4 with lighting function simultaneously in copper ion diffusion region 2; The refractive index of bar shaped doped region 3 is higher than the refractive index of glass substrate 1, refractive index with bar shaped doped region (4) of lighting function is higher than the refractive index of copper ion diffusion region 2, bar shaped doped region 3 and have the core of the bar shaped doped region 4 of lighting function as strip optical waveguide.
G. adopt the method for chemical corrosion to remove Al film 6.
Claims (1)
1. the glass-based ion exchange optical waveguide chip of an integrating light-emitting function of copper ions, the regional area on glass substrate (1) surface has the copper ion diffusion region; It is characterized in that: in glass substrate (1), form bar shaped doped region (3) with ion exchange process, in bar shaped doped region (3) and overlay region, copper ion diffusion region (2), form bar shaped doped region (4) with lighting function; The refractive index of bar shaped doped region (3) is higher than the refractive index of glass substrate (1), refractive index with bar shaped doped region (4) of lighting function is higher than the refractive index of copper ion diffusion region (2), and bar shaped doped region (3) and the bar shaped doped region (4) with lighting function form the core of strip optical waveguide jointly in the mode of end face coupling.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201010100228XA CN101776782B (en) | 2010-01-25 | 2010-01-25 | Glass-based ion exchange optical waveguide chip integrating light-emitting function of copper ions |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010100228XA CN101776782B (en) | 2010-01-25 | 2010-01-25 | Glass-based ion exchange optical waveguide chip integrating light-emitting function of copper ions |
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| Publication Number | Publication Date |
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| CN101776782A true CN101776782A (en) | 2010-07-14 |
| CN101776782B CN101776782B (en) | 2011-05-18 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102109638A (en) * | 2011-03-14 | 2011-06-29 | 浙江大学 | Strip-shaped optical wave guide in glass thermal poling layer |
| CN103400759A (en) * | 2013-08-06 | 2013-11-20 | 东南大学 | Grinding method of indium phosphide-based plane light wave light path waveguide chip and clamp applied to same |
| CN105158848A (en) * | 2015-08-26 | 2015-12-16 | 中国科学院微电子研究所 | Multi-mode waveguide array coupling structure of glass substrate, and manufacturing method thereof |
| CN107643560A (en) * | 2017-10-20 | 2018-01-30 | 河南工业大学 | A kind of method that magneto-optic glass base ion exchange prepares magneto-optic slab guide |
| CN114014558A (en) * | 2021-12-15 | 2022-02-08 | 天津光电通信技术有限公司 | BK7 glass composite waveguide |
-
2010
- 2010-01-25 CN CN201010100228XA patent/CN101776782B/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102109638A (en) * | 2011-03-14 | 2011-06-29 | 浙江大学 | Strip-shaped optical wave guide in glass thermal poling layer |
| CN103400759A (en) * | 2013-08-06 | 2013-11-20 | 东南大学 | Grinding method of indium phosphide-based plane light wave light path waveguide chip and clamp applied to same |
| CN103400759B (en) * | 2013-08-06 | 2016-04-20 | 东南大学 | The Ginding process of indium phosphide planar lightwave circuit waveguide chip and fixture |
| CN105158848A (en) * | 2015-08-26 | 2015-12-16 | 中国科学院微电子研究所 | Multi-mode waveguide array coupling structure of glass substrate, and manufacturing method thereof |
| CN107643560A (en) * | 2017-10-20 | 2018-01-30 | 河南工业大学 | A kind of method that magneto-optic glass base ion exchange prepares magneto-optic slab guide |
| CN114014558A (en) * | 2021-12-15 | 2022-02-08 | 天津光电通信技术有限公司 | BK7 glass composite waveguide |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101776782B (en) | 2011-05-18 |
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Granted publication date: 20110518 Termination date: 20120125 |