CN101770539A - 基于fpga的光栅位移传感器测距装置 - Google Patents
基于fpga的光栅位移传感器测距装置 Download PDFInfo
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- CN101770539A CN101770539A CN 201010102506 CN201010102506A CN101770539A CN 101770539 A CN101770539 A CN 101770539A CN 201010102506 CN201010102506 CN 201010102506 CN 201010102506 A CN201010102506 A CN 201010102506A CN 101770539 A CN101770539 A CN 101770539A
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- displacement sensor
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CN 201010102506 CN101770539B (zh) | 2010-01-29 | 2010-01-29 | 基于fpga的光栅位移传感器测距装置 |
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CN 201010102506 CN101770539B (zh) | 2010-01-29 | 2010-01-29 | 基于fpga的光栅位移传感器测距装置 |
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CN101770539A true CN101770539A (zh) | 2010-07-07 |
CN101770539B CN101770539B (zh) | 2013-09-18 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102489548A (zh) * | 2011-12-28 | 2012-06-13 | 长春汇凯科技有限公司 | 多通道轴类零件跳动量高速测量装置 |
CN103075961A (zh) * | 2012-12-28 | 2013-05-01 | 广州数控设备有限公司 | 基于单片fpga支持多个光栅尺的位置测显装置及方法 |
CN103885778A (zh) * | 2014-03-25 | 2014-06-25 | 上海理工大学 | 光栅细分和判向方法 |
CN104748687A (zh) * | 2013-12-31 | 2015-07-01 | 贵州英特利智能控制工程研究有限责任公司 | 一种提高光栅传感器测量精度的方法及转接卡 |
CN106705859A (zh) * | 2016-12-29 | 2017-05-24 | 中科和光(天津)应用激光技术研究所有限公司 | 限幅相位检测装置 |
CN109634212A (zh) * | 2018-12-13 | 2019-04-16 | 中国航空工业集团公司北京长城计量测试技术研究所 | 一种具有远程触发功能的光栅数显装置 |
CN110764732A (zh) * | 2019-10-09 | 2020-02-07 | 中国航空工业集团公司洛阳电光设备研究所 | 只读存储器查表细分电路中的加减信号发生器逻辑设计方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2039014U (zh) * | 1988-06-30 | 1989-06-07 | 沈阳工业大学 | 单坐标光栅数显表 |
CN1441225A (zh) * | 2003-03-18 | 2003-09-10 | 华中科技大学 | 分级干涉条纹细分装置 |
US7526354B2 (en) * | 2006-07-10 | 2009-04-28 | Tokyo Electron Limited | Managing and using metrology data for process and equipment control |
CN201233224Y (zh) * | 2008-07-30 | 2009-05-06 | 上海维宏电子科技有限公司 | Ccd激光三角位移传感器 |
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2010
- 2010-01-29 CN CN 201010102506 patent/CN101770539B/zh not_active Expired - Fee Related
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102489548A (zh) * | 2011-12-28 | 2012-06-13 | 长春汇凯科技有限公司 | 多通道轴类零件跳动量高速测量装置 |
CN102489548B (zh) * | 2011-12-28 | 2014-04-30 | 长春汇凯科技有限公司 | 多通道轴类零件跳动量高速测量装置 |
CN103075961A (zh) * | 2012-12-28 | 2013-05-01 | 广州数控设备有限公司 | 基于单片fpga支持多个光栅尺的位置测显装置及方法 |
CN103075961B (zh) * | 2012-12-28 | 2015-09-23 | 广州数控设备有限公司 | 基于单片fpga支持多个光栅尺的位置测显方法 |
CN104748687A (zh) * | 2013-12-31 | 2015-07-01 | 贵州英特利智能控制工程研究有限责任公司 | 一种提高光栅传感器测量精度的方法及转接卡 |
CN104748687B (zh) * | 2013-12-31 | 2017-10-13 | 贵州英利智能控制系统有限公司 | 一种提高光栅传感器测量精度的方法及转接卡 |
CN103885778A (zh) * | 2014-03-25 | 2014-06-25 | 上海理工大学 | 光栅细分和判向方法 |
CN106705859A (zh) * | 2016-12-29 | 2017-05-24 | 中科和光(天津)应用激光技术研究所有限公司 | 限幅相位检测装置 |
CN109634212A (zh) * | 2018-12-13 | 2019-04-16 | 中国航空工业集团公司北京长城计量测试技术研究所 | 一种具有远程触发功能的光栅数显装置 |
CN110764732A (zh) * | 2019-10-09 | 2020-02-07 | 中国航空工业集团公司洛阳电光设备研究所 | 只读存储器查表细分电路中的加减信号发生器逻辑设计方法 |
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CN101770539B (zh) | 2013-09-18 |
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