CN101754562A - Atmospheric plasma generating device with function of electric arc control - Google Patents
Atmospheric plasma generating device with function of electric arc control Download PDFInfo
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- CN101754562A CN101754562A CN200810178844A CN200810178844A CN101754562A CN 101754562 A CN101754562 A CN 101754562A CN 200810178844 A CN200810178844 A CN 200810178844A CN 200810178844 A CN200810178844 A CN 200810178844A CN 101754562 A CN101754562 A CN 101754562A
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Abstract
The invention provides an atmospheric plasma generating device with function of electric arc control, which comprises a shell, an inner electrode, an airflow control mechanism and at least one electric arc guide electrode. The shell is provided with an electrode setting end and a plasma outlet end which are opposite to each other, the inner electrode is arranged in the shell and is located at the electrode setting end, and the inner electrode is connected to a power supply device. The airflow control mechanism is arranged at the electrode setting end and is used for generating vortex airflow at the periphery of the inner electrode, so as to lead electric arc generated by the inner electrode to be centralized at the center position in the shell, and to guide the electric arc to the plasma outlet end. The electric arc guide electrode is arranged at the plasma outlet end and is connected to the power supply device. The electric arc guide electrode is provided with a pointed end which is an inner surface protruding at the plasma outlet end. The pointed end is used for attracting the electric arc so as to control the position of the electric arc.
Description
Technical field
The present invention relates to a kind of atmospheric plasma generating device, and particularly relevant for a kind of atmospheric plasma generating device of tool function of electric arc control.
Background technology
The characteristic of plasma is the reaction that it comprises neutral particle, activation particle, electronics and ion etc., thereby function very widely can be provided.Especially the particle that has energy can cause the many special chemistry and the reaction of physics especially.Also because so, at present, plasma has been widely used in various fields, and for example at the semiconductor manufacture view, the etching of the growth of different materials film and circuit is all generally reached by plasma technique such as.Partly leading aspect the encapsulation, then as seen using plasma to clean and change material surface, to reach required function and effect.In addition, the also application of visible plasma in fields such as environmental protection, medical treatment and ray machine electricity.
The kind of plasma source is relevant with the form of plasma generation, and it comprises that inductance type plasma source, microwave surface wave plasma source, atmospheric plasma body source, plasma immersion ion cloth are planted and plasma flare etc.In the atmospheric plasma body source, because the concentration of energy of injecting type atmosphere plasma can be used for the high speed processing surface of the work to improve the water-wet behavior on surface.Yet when being applied in the surface of the work of metal material or electric conducting material making, the caused electric arc of plasma but is very easy to the diffusing surface of arriving workpiece of can overflowing, and the damage surface of the work, causes the generation of workpiece defective products, has influence on preparation technology's yield.
Summary of the invention
The present invention is relevant for a kind of atmospheric plasma generating device of tool function of electric arc control, it is the design that sees through electric arc lead electrode and airflow field, arc position is controlled in the device, avoids arc damage surface of the work to be processed, and then promote preparation technology's acceptance rate by this.
According to the present invention, a kind of atmospheric plasma generating device of tool function of electric arc control is proposed, this device comprises electrode, an airflow control mechanism and at least one electric arc lead electrode in the shell.Shell has a relative electrode end and a plasma port of export is set.Interior electrode setting in the enclosure, and the position at electrode end is set, wherein, interior electrode is connected to a power supply unit.Airflow control mechanism is arranged on electrode end is set, and produces a vortex air-flow in order to the periphery at interior electrode, and the electric arc that electrode produces in making by this is concentrated middle position in the enclosure, and pilot arc is to the plasma port of export.The electric arc lead electrode is arranged on the plasma port of export, and is connected to power supply unit, and wherein, it is the inner surface that protrudes at the plasma port of export that the electric arc lead electrode has a tip, in order to attract electric arc, by the position of this control electric arc.
For foregoing of the present invention can be become apparent, preferred embodiment cited below particularly, and cooperate appended graphicly, be described in detail below:
Description of drawings
Figure 1A is the schematic diagram according to the atmospheric plasma generating device of a kind of tool function of electric arc control of preferred embodiment of the present invention;
Figure 1B is the schematic diagram of Figure 1A atmospheric plasma generating device in the plasma outlet side;
Fig. 2 is that the tip of electric arc lead electrode is the schematic diagram of a sphere;
Fig. 3 is that the electric arc lead electrode sees through the schematic diagram that shell is connected to power supply unit;
Fig. 4 is that atmospheric plasma generating device adds the schematic diagram that an opening reduces element;
Fig. 5 is that the electric arc lead electrode is the schematic diagram of a hollow electrode.
[main element symbol description]
100: atmospheric plasma generating device
110: shell
112: electrode is provided with end
114: the plasma port of export
120: interior electrode
132: the plasma outlet
140: airflow control mechanism
142: the gas guide element
144: oblique through hole
150,150 ', 150 ": the electric arc lead electrode
152,152 ': the tip
152 ": penetrating via
160: lead
170: isolated component
180,180 ': opening reduces element
182,182 ': opening
200: power supply unit
300: eddy airstream
400: electric arc
500: plasma gas
A1, A2: bearing of trend
Embodiment
Please refer to Figure 1A, Figure 1B, Figure 1A is the schematic diagram according to the atmospheric plasma generating device of a kind of tool function of electric arc control of preferred embodiment of the present invention, and Figure 1B is the schematic diagram of Figure 1A atmospheric plasma generating device in the plasma outlet side.Shown in Figure 1A, atmospheric plasma generating device 100 comprises element such as an electrode 120 and an airflow control mechanism 140 in the shell 110,, below the configuration and the effect of each element is described one by one.
Shell 110 for example is a hollow housing, and it has a relative electrode end 112 and one plasma port of export 114 is set.The material of shell 110 can be metal or nonmetallic materials.
The plasma port of export 114, it has plasma outlet 132.The shape of plasma outlet 132 does not limit, and its big I for example is that the exit velocity of plasma gas goes to set according to demand.
Shown in Figure 1A, airflow control mechanism 140 for example comprises a gas guide element 142 and a gas supply device (not illustrating).Gas guide element 142 has 144 peripheries at interior electrode 120 of a plurality of oblique through holes, and is communicated in the shell 110.These oblique through holes 144 are to be parallel to each other, and in addition, the bearing of trend A1 of oblique through hole 144 preferably presents crooked relation with the bearing of trend A2 of interior electrode 120.
The gas that gas supply device (not illustrating) is supplied can and enter in the shell 110 by oblique through hole 142.And when gas when oblique through hole 144 pours in the shell 110, because the configuration mode of oblique through hole 144, the gas that pours into can rotate around interior electrode 120, thereby can produce eddy airstream 300 in the periphery of interior electrode 120, then, electric arc 400 guiding that just can be subjected to eddy airstream 300 is moved.Thus, just electric arc 400 can be controlled at middle position in the shell 110.
The injecting type atmosphere plasma is because concentration of energy, can be used for high speed processing material surface, improve the water-wet behavior on material surface, when still being applied in metal material or conductor material surface, the caused electric arc of plasma can overflow and loose to the metal surface, causes the damage of metal surface.At this, mainly be configuration and the design that utilizes the electric arc lead electrode, the position that electric arc 400 is produced directs into the cavity inboard of shell 110, makes the plasma outlet not have the electric arc that overflows and loose.
Preferably, in atmospheric plasma generating device 100, can install at least one electric arc lead electrode, and the electric arc lead electrode is preferably along radially being plugged in the plasma port of export 114 of the plasma port of export 114, and interior electrode 120 is positive pole and the negative pole (or earth terminal) that is connected to power supply unit 200 respectively with the electric arc lead electrode.
Present embodiment is to be that example is done explanation with four electric arc lead electrode 150, right the present invention is not limited thereto, and also can only install the electric arc lead electrode 150 of single electric arc lead electrode 150 or other number in the plasma port of export 114 of atmospheric plasma generating device 100.In addition, electric arc lead electrode 150 can be solid or hollow tube, does explanation with solid electric arc lead electrode 150 (seeing Figure 1A) earlier at this.
Electric arc lead electrode 150 is equally spaced to be plugged in the plasma port of export 114, shown in Figure 1B.Electric arc lead electrode 150 is connected to a power supply unit 200 or an earth terminal, and wherein, it is the inner surfaces that protrude the plasma port of export 114 that each electric arc lead electrode 150 has a tip 152.Because most advanced and sophisticated 152 design can make charge concentration, thereby can produce the effect of point discharge, can attract electric arc 400 by this, thereby be controlled the position of electric arc 400 in the plasma port of export 114, the problem of further avoiding electric arc to overflow and loose.
The tip 152 of Figure 1B is the pattern of cusp, and right the present invention is not limited thereto.As shown in Figure 2, the tip 152 ' of electric arc lead electrode 150 ' also can be the pattern of a sphere, and it has the characteristics that attract electric arc equally.
Because the material of shell 110 can be metal or nonmetal, when the material of shell 110 when being nonmetal, shown in Figure 1A, electric arc lead electrode 150 is can see through lead 160 be connected to power supply unit 200.
Then please refer to Fig. 3, it is that the electric arc lead electrode sees through the schematic diagram that shell is connected to power supply unit.As shown in Figure 3, when the material of shell 110 was metal, in fact electric arc lead electrode 150 can directly see through shell 110 and be connected to power supply unit 200.At this moment, electrically contact for avoiding shell 110 to produce with interior electrode 120, the preferable isolated component 170 that is provided with is between interior electrode 120 and shell 110, with electrode 120 and shell 110 in isolated.
The material of isolated component 170 can be a dielectric material, and it for example is quartz, pottery or macromolecular material etc.In addition, between gas guide element 142 and interior electrode 120, also isolated component 170 can be set, with being electrically insulated between each element of suitable maintenance.
Please refer to Fig. 4, it is that atmospheric plasma generating device adds the schematic diagram that an opening reduces element.As shown in Figure 4, opening reduces element 180 and is arranged on plasma and exports 132 places, and wherein, opening reduces the opening 182 of element 180 less than plasma outlet 132.Opening reduces element 180 except reducing the outlet fabric width of plasma gas, and it is diffusing to stop that also unnecessary electric arc overflows, and then the position of assist control electric arc.Preferably, to reduce the material of element 180 be insulating material to opening.
Please refer to Fig. 5, it is that the electric arc lead electrode is the schematic diagram of a hollow electrode.As shown in Figure 5, electric arc lead electrode 150 " have one and run through channel 152 ", and run through channel 152 " be to be communicated in the plasma port of export 114, make the spaces in the plasma port of export 114 also can see through electric arc lead electrode 150 " be communicated to outside atmosphere.The opening 182 ' that opening reduces element 180 ' makes plasma outlet 132 contract forr a short time, therefore causes the gas pressure of plasma outlet 132 to raise, and can make the exit velocity of plasma gas increase many.Too Gao Su plasma gas has stronger impulsive force, also takes the electric arc that overflows and loose easily out of, therefore easily surface of the work to be processed is damaged.
For instance, in the time will going to carry out the coating film treatment of surface of the work with atmospheric plasma generating device 100, gas pressure can rise because of plasma outlet 132 reducing of its bore, causes the probability of gas particle collision to increase, and therefore is unfavorable for controlling the quality of film forming.Because the spaces in the plasma port of export 114 can see through electric arc lead electrode 150 " penetrating via 152 " be communicated to outside atmosphere; when plasma gas produces; portion gas can be from penetrating via 152 " drain into space outerpace; therefore can effectively reduce exit velocity; and then reduce the impact of plasma gas, with protection workpiece to be processed.
The atmospheric plasma generating device of the disclosed tool function of electric arc control of the above embodiment of the present invention, be the electric arc lead electrode to be set in order to attract electric arc in the position of contiguous plasma outlet, direct into the cavity inboard of shell with the position that electric arc is produced, make the plasma outlet not have the electric arc that overflows and loose, therefore can avoid electric arc to touch surface of the work to be processed.In addition, can design suitable airflow field in the shell, go to limit the direction of electric arc by the guiding of air-flow, the position that makes plasma generation is more near the plasma port of export.Again, when the size of plasma outlet is reduced, can adopt hollow electric arc lead electrode to go assist gas to discharge, the flow velocity of plasma outlet is reduced, and then can reduce plasma gas and damage handling surface of the work.The atmospheric plasma generating device of the disclosed tool function of electric arc control of the above embodiment of the present invention is to promote preparation technology's yield that workpiece is made in fact, and more broad in the atmosphere plasma Application for Field.
In sum, though the present invention discloses as above with preferred embodiment, so it is not in order to limit the present invention.The persond having ordinary knowledge in the technical field of the present invention, without departing from the spirit and scope of the present invention, when being used for a variety of modifications and variations.Therefore, protection scope of the present invention when look the accompanying Claim book scope defined is as the criterion.
Claims (15)
1. the atmospheric plasma generating device of a tool function of electric arc control is characterized in that comprising:
One shell has a relative electrode end and a plasma port of export is set;
Electrode in one is arranged in this shell, and the position is provided with end at this electrode, and wherein, electrode is connected to a power supply unit in this;
One airflow control mechanism is arranged on this electrode end is set, and produces a vortex air-flow in order to the periphery of electrode in this, make electrode produces in this electric arc concentrate on middle position in this shell by this, and pilot arc is to this plasma port of export; And
At least one electric arc lead electrode is arranged on this plasma port of export, and is connected to this power supply unit, wherein, it is to be positioned at the inner surface that protrudes this plasma port of export that this at least one electric arc lead electrode has a tip, in order to attract electric arc, with the position of control electric arc.
2. atmospheric plasma generating device as claimed in claim 1 is characterized in that, this at least one electric arc lead electrode is radially being plugged in this plasma nozzle along this plasma port of export.
3. atmospheric plasma generating device as claimed in claim 2 is characterized in that, comprises a plurality of electric arc lead electrode, and those electric arc lead electrode are equally spaced to be plugged on this plasma port of export.
4. atmospheric plasma generating device as claimed in claim 1 is characterized in that, electrode is connected to the positive pole of this power supply unit in this, and this at least one electric arc lead electrode is a negative pole or an earth terminal that is connected to this power supply unit.
5. atmospheric plasma generating device as claimed in claim 1, it is characterized in that, the material of this shell is a metal, and this shell is to be connected to this power supply unit, and this at least one electric arc lead electrode is to see through a negative pole or the earth terminal that this shell is connected to this power supply unit.
6. atmospheric plasma generating device as claimed in claim 1 is characterized in that, comprises an isolated component, is arranged between this interior electrode and this shell, in order to electrode and this shell in isolated being somebody's turn to do.
7. as the 6th described atmospheric plasma generating device of claim, it is characterized in that the material of this isolated component is a dielectric material.
8. as the 7th described atmospheric plasma generating device of claim, it is characterized in that this dielectric material is pottery, quartz or macromolecule material.
9. atmospheric plasma generating device as claimed in claim 1 is characterized in that, comprises that an opening reduces element, is arranged on this plasma port of export, and wherein, this opening reduces element, and to have an opening be size less than this plasma port of export.
10. atmospheric plasma generating device as claimed in claim 9 is characterized in that, the material that this opening reduces element is an insulating material.
11. atmospheric plasma generating device as claimed in claim 1 is characterized in that, this tip of this at least one electric arc lead electrode is to have a cusp or a sphere.
12. atmospheric plasma generating device as claimed in claim 1 is characterized in that, this at least one electric arc lead electrode is a hollow electrode, and has consistent break-through road in order to the inner space that is communicated with this plasma port of export and the space outerpace of this shell.
13. atmospheric plasma generating device as claimed in claim 1, it is characterized in that, this airflow control mechanism comprises a gas guide element, this gas guide element has the periphery of a plurality of oblique through holes position electrode in this, and be communicated in this shell, in order to supplied gas by and enter this shell.
14. atmospheric plasma generating device as claimed in claim 13 is characterized in that, those oblique through holes are to be parallel to each other.
15. atmospheric plasma generating device as claimed in claim 13 is characterized in that, the bearing of trend of those oblique through holes is to present a crooked relation with the bearing of trend that is somebody's turn to do interior electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810178844XA CN101754562B (en) | 2008-12-01 | 2008-12-01 | Atmospheric plasma generating device with function of electric arc control |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810178844XA CN101754562B (en) | 2008-12-01 | 2008-12-01 | Atmospheric plasma generating device with function of electric arc control |
Publications (2)
| Publication Number | Publication Date |
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| CN101754562A true CN101754562A (en) | 2010-06-23 |
| CN101754562B CN101754562B (en) | 2012-05-09 |
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| CN200810178844XA Active CN101754562B (en) | 2008-12-01 | 2008-12-01 | Atmospheric plasma generating device with function of electric arc control |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102291923A (en) * | 2011-08-10 | 2011-12-21 | 苏州工业职业技术学院 | Plasma gun |
| CN103104575A (en) * | 2013-01-21 | 2013-05-15 | 南京航空航天大学 | Electric arc type discharging plasma vortex generator |
| CN105792496A (en) * | 2016-02-26 | 2016-07-20 | 苏州工业职业技术学院 | Atmospheric pressure plasma spraying gun |
| CN109951943A (en) * | 2017-12-21 | 2019-06-28 | 雷立强光电科技股份有限公司 | A kind of atmospheric plasma generating unit |
| CN113546920A (en) * | 2021-07-20 | 2021-10-26 | 浙江洁美电子科技股份有限公司 | Electric arc burning-off system and paper tape manufactured by using same |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5109150A (en) * | 1987-03-24 | 1992-04-28 | The United States Of America As Represented By The Secretary Of The Navy | Open-arc plasma wire spray method and apparatus |
| US6365867B1 (en) * | 2000-11-01 | 2002-04-02 | Sandia Corporation | Plasma arc torch with coaxial wire feed |
| CN200947700Y (en) * | 2006-04-10 | 2007-09-12 | 徐州燃烧控制研究院有限公司 | Plasma generator |
| CN101163370A (en) * | 2006-10-10 | 2008-04-16 | 馗鼎奈米科技股份有限公司 | Plasma guiding mechanism and plasma discharging device of using the mechanism |
| CN200980199Y (en) * | 2006-12-08 | 2007-11-21 | 航天空气动力技术研究院 | An industrial plasma spray gun |
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2008
- 2008-12-01 CN CN200810178844XA patent/CN101754562B/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102291923A (en) * | 2011-08-10 | 2011-12-21 | 苏州工业职业技术学院 | Plasma gun |
| CN103104575A (en) * | 2013-01-21 | 2013-05-15 | 南京航空航天大学 | Electric arc type discharging plasma vortex generator |
| CN105792496A (en) * | 2016-02-26 | 2016-07-20 | 苏州工业职业技术学院 | Atmospheric pressure plasma spraying gun |
| CN109951943A (en) * | 2017-12-21 | 2019-06-28 | 雷立强光电科技股份有限公司 | A kind of atmospheric plasma generating unit |
| CN113546920A (en) * | 2021-07-20 | 2021-10-26 | 浙江洁美电子科技股份有限公司 | Electric arc burning-off system and paper tape manufactured by using same |
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| Publication number | Publication date |
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| CN101754562B (en) | 2012-05-09 |
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