CN101750714B - Vision system for substrate alignment apparatus and method for focusing the same - Google Patents
Vision system for substrate alignment apparatus and method for focusing the same Download PDFInfo
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- CN101750714B CN101750714B CN2009102606335A CN200910260633A CN101750714B CN 101750714 B CN101750714 B CN 101750714B CN 2009102606335 A CN2009102606335 A CN 2009102606335A CN 200910260633 A CN200910260633 A CN 200910260633A CN 101750714 B CN101750714 B CN 101750714B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
- G03B13/32—Means for focusing
- G03B13/34—Power focusing
- G03B13/36—Autofocus systems
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B3/00—Focusing arrangements of general interest for cameras, projectors or printers
- G03B3/10—Power-operated focusing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
Abstract
The present invention discloses a method for focusing a vision system for a substrate alignment apparatus which aligns a substrate with images shot by a camera section, comprising: shooting images for focusing control by a camera section; comparing storage images with the shot images for focusing control and setting the storage images corresponding to the shot images for focusing control as a comparison image, wherein the storages image comprise focus images shot at the focusing position of the camera section and movement images, each of the movement images contains information on the distance between the shooting position and the focusing position; calculating information corresponding to the distance corresponding to the movement images; and moving the camera section the calculated distance.
Description
The cross reference of related application
The application's case advocate according to 35U.S.C. § 119 application on Dec 19th, 2008 10-2008-0130455 korean patent application case right of priority and from its generation benefit, the mode that the content of described korean patent application case is quoted in full is incorporated herein.
Technical field
The present invention relates to a kind of vision system that is used for pad alignment equipment and a kind of method that it is focused of being used for, and more particularly, relate to a kind of vision system that is used for pad alignment equipment, its can be by in using the substrate alignment equipment of vision system, automatically performing vision system focus controlling (promptly, the focal length that focusing) and therefore camera promptly is set reduces the focus controlling time of vision system, and a kind of method that is used to control the focal length of described vision system.
Background technology
So far (cathode ray tube is CRT) as display device to have used cathode-ray tube (CRT).Yet CRT has the bigger shortcoming of volume and weight.Therefore, in recent years, liquid crystal indicator (liquid crystal display device for example, LCD) panel display board, plasma display (plasma display panel such as, PDP) and organic light emitting apparatus (organic lightemitting device, use OLDE) increases.The characteristic of panel display board has light-duty, very thin and low power consumption.
By being engaged with each other, the pair of plates substrate makes panel display board.For instance, when making LCD, make the lower substrate that wherein forms a plurality of thin film transistor (TFT)s and pixel electrode, and then make the upper substrate that wherein forms colored filter and common electrode.After this, liquid crystal drop is dropped on the lower substrate, and sealant is applied in the marginarium of lower substrate.Subsequently, settle the lower substrate wherein form pixel electrode so that its after the upper substrate that wherein forms common electrode, upper substrate and lower substrate be engaged with each other and seal with so that manufacturing LCD.
In order to make LCD, need be used for the liquid crystal drippage equipment of dropping liquid crystal, the coating apparatus for sealant equipment that is used to be coated with the sealant that is applied to the substrate sealing and the substrate junction apparatus that is used to make up lower substrate and upper substrate.
Liquid crystal drippage equipment, coating apparatus for sealant equipment and substrate junction apparatus are aimed at substrate on platform or surface plate.Then, liquid crystal or sealant are dripped or spread on described substrate, or two substrates are engaged with each other.
The said equipment comprises the substrate alignment equipment that is used for substrate alignment.This substrate alignment equipment comprises and is used for substrate is carried out the calibration section of X, Y, Z and θ control and is used to observe substrate and makes the alignment point vision system of (synchronizing) synchronously.
Substrate alignment equipment uses vision system to observe substrate, and controls the calibration section according to observed result, and then aims at substrate.At this moment, before using vision system observation substrate, the focal length of control vision system.
In the focus controlling (that is, focusing) of conventional vision system, the image that the operator uses the camera of vision system to observe is manually controlled focal length.That is to say, make focal length synchronous by moving up and down camera.Yet, manually control under the situation of focal length of camera of vision system the processing time that its cost is long the operator.In addition, because each substrate is carried out focus controlling, so throughput rate is impaired.
Summary of the invention
The invention provides a kind of vision system and a kind of focus controlling method to described vision system that is used for substrate alignment equipment, it can reduce the focus controlling time and improve throughput rate by the focal length that automatic control is used for the vision system of substrate alignment equipment.
According to one exemplary embodiment, a kind of method (described substrate alignment equipment uses the captured image of camera section to aim at substrate) of focal length of the vision system that is used to control substrate alignment equipment comprises: by described camera section photographic images to be used for focus controlling; Obtain memory image, described memory image be included in the focal length images of the focal position place of described camera section taking and have the camera site and described focal position between the mobile image apart from the information of length; Described memory image and the image of taking for focus controlling are compared, and will be provided as movement images corresponding to the memory image of the image of taking for focus controlling, wherein said memory image corresponding to the described image of taking for described focus controlling is the part in the described memory image; Calculating is corresponding to the information apart from length of described movement images; And make described camera section move described institute calculated distance length.
Memory image can be stored in the independent storage compartments, and the method that is used to store described memory image can comprise: come the identification focal position by operation camera section; To be stored as focal length images at the image that the focal position place of camera section is taken; And by making the camera section move up and down photographic images, and store captured image and displacement thereof as mobile image from focal position.
Storing captured image and displacement thereof can use by making the camera section move the image of taking with equal intervals from focal position as described mobile image, and described equal intervals can the depth of focus of described camera section approximate 50% in approximate 90% scope, or have approximate 1/100 value in approximate 1/10000 the scope in the whole displacement of camera section.
Memory image and the image taken for focus controlling are compared and will be provided as movement images corresponding to the memory image of the image of taking for focus controlling and can comprise: the luma data that will be configured to the pixel of the luma data of pixel of the image that focus controlling takes and memory image compares; And the memory image in the constant error range that remains on the described luma data of the image of taking for described focus controlling of luma data is set to movement images.
Can be by with image division being the comparison that the mean value of the luma data in the part of the mean value of luma data of a plurality of parts and more described pixel in dividing part or described image is carried out described luma data.
The image of taking with memory image and for described focus controlling compares and is set to movement images corresponding to the memory image of the image of taking for described focus controlling and can comprise: one or more in the edge of image resolution of taking with the resolution of the size of the slope of the boundary interface between background and the alignment mark, described alignment mark, described alignment mark, image similarity and for described focus controlling compare with memory image.
According to another one exemplary embodiment, a kind of vision system that is used for substrate alignment equipment comprises: the camera section, and it is in order to photographic images; And vision control section, it comprises in order to the focus controlling unit of the focal length of control camera section with in order to show the image-display units of the image that the camera section is captured, wherein the focus controlling unit comprises: image storage section, it is in order to the store storage image, described memory image is included in the focal length images of the focal position place shooting of camera section, and by making the camera section move up and down the mobile image of taking from described focal position; The image rating unit, it compares in order to the memory image of being stored in image that the camera section is captured and the image storage section; And the camera control section, its comparative result according to the image rating unit moves up and down the camera section.
Described vision system can further comprise: light source, and it is in order to provide light to the camera section; And the diffusion section, it has the light that sphere or hemispherical shape provide from described light source with diffusion.
Description of drawings
Can understand one exemplary embodiment in more detail from the following description of carrying out in conjunction with the accompanying drawings, wherein:
Fig. 1 explanation is according to the concept map of the substrate alignment equipment of the embodiment of the invention.
Fig. 2 explanation is according to the concept map of the vision system that is used for substrate alignment equipment of the embodiment of the invention.
Fig. 3 explanation is used to explain the process flow diagram according to the focus controlling method of the vision system of the embodiment of the invention.
Fig. 4 explanation is used to explain according to the generation of the memory image of the embodiment of the invention and the process flow diagram of storage.
(a) of Fig. 5 and (b) of Fig. 5 illustrate the concept map according to the part of the vision system of the modification of the embodiment of the invention.
(a) of Fig. 6 and (b) of Fig. 6 illustrate the image graphic that obtains according to the shape according to the diffusion section of vision system of the modification of the embodiment of the invention.
Embodiment
Hereinafter will describe specific embodiment in detail referring to accompanying drawing.Yet the present invention can multi-formly embody, and the embodiment that should not be construed as limited to herein to be stated.On the contrary, provide these embodiment in order to make that this disclosure will be for thorough and complete, and will convey to the those skilled in the art to scope of the present invention all sidedly.In addition, same or similar reference number is represented same or analogous element, although its appear at different embodiments of the invention or graphic in.
Fig. 1 explanation is according to the concept map of the substrate alignment equipment of the embodiment of the invention.Fig. 2 explanation is according to the concept map of the vision system that is used for substrate alignment equipment of the embodiment of the invention.
Referring to Fig. 1 and Fig. 2, comprise according to the substrate alignment equipment of described embodiment: platform 200, substrate 100 are placed in described platform 200 places; Aim at section 300, it is used for the substrate 100 that is placed on the platform 200 is carried out X, Y, Z and θ control; Vision system 400, it is used to detect the aligned position of substrate 100; And aim at control section 500, it is used for controlling the operation of aiming at section 300 according to vision system 400.
Effectively, substrate 100 uses light-transmissive substrates.For instance, substrate 100 can use glass substrate or plastic.Can be with flexible substrate as substrate 100.Form alignment mark to be used for aligning at a side place of substrate 100 herein.
Platform 200 prevents the handling failure that causes owing to shaking of substrate 100 when carry out handling the technology of substrate 100 (for example, liquid crystal drippage, sealant spreads or substrate engages) by fixing substrate 100.Therefore, although do not show on the platform 200, can adopt the equipment that is used for dropping liquid crystal, the equipment that is used to spread the equipment of sealant or is used for bonded substrate.
This is because above-mentioned substrate alignment equipment can be included as the assembly of liquid crystal drippage equipment, coating apparatus for sealant equipment and substrate junction apparatus.Substrate alignment equipment can be attached to the outside of substrate junction apparatus, coating apparatus for sealant equipment and liquid crystal drippage equipment.Herein, the substrate alignment equipment in the substrate junction apparatus can be carried out X, Y, Z and θ to one in upper substrate and the lower substrate and moves.
Platform 200 forms the plate shape identical with the shape of substrate 100.On platform 200, be formed for aiming at the platform alignment mark of substrate 100.Therefore, might accurately substrate 100 be aligned in platform 200 tops.
Effectively adopt a plurality of platform alignment marks of platform 200 and a plurality of alignment marks of substrate 100 herein.In this embodiment, aim at substrate 100 by the alignment mark that makes substrate 100 synchronously with the alignment mark of platform 200.When upper substrate and lower substrate are engaged with each other, make the alignment mark of upper substrate and the alignment mark of lower substrate.
Calibration section 300 is by being placed in target location on the platform 200 to the small adjustment of substrate 100 with substrate 100.At this moment, calibration section 300 is aimed at the position of substrate 100 by mobile substrate 100 on X, Y, Z and θ direction.
Vision system 400 is taken the alignment mark of substrate 100 and platform 200 by camera section 410, and captured image is offered vision control section 420.Vision system 400 among this embodiment is the focal length of control camera section 410 automatically.That is to say that vision system 400 can use the image that provides from camera section 410 to control the focal length of camera section 410 automatically.
Aiming at control section 500 uses the image or the view data of taking by vision system 400 to control the operation of calibrating section 300.Therefore, might critically control the position of substrate 100.
Herein, the operator can aim at substrate 100 by using from the image control aligning control section 500 of vision system 400 outputs.
In above-mentioned substrate alignment equipment, come alignment stage 200 and substrate 100 by mobile substrate 100.Yet, also might come alignment stage 200 and substrate 100 by mobile platform 200.In addition, substrate alignment equipment is being placed under the situation of substrate junction apparatus, can passing through mobile platform 200 (that is, surface plate, substrate 100 is fixed on herein) and aim at two substrates.
The substrate alignment operation of substrate alignment equipment hereinafter will be described.
Substrate alignment equipment among this embodiment is operated substrate alignment in target location by carrying out substrate alignment.For this purpose, at first, substrate 100 is placed on the platform 200.
Then, use vision system 400 to check whether the alignment mark of substrate 100 is synchronous with the platform alignment mark of platform 200.Under the alignment mark of substrate 100 and platform 200 situation synchronized with each other, do not carry out alignment function.
Yet, the alignment mark of substrate 100 not with the synchronous situation of the alignment mark of platform 200 under, by aiming at substrate 100 via calibration section 300 mobile substrate 100 on X, Y, Z and θ direction.That is to say, carry out the alignment mark operation synchronized with each other that is used to make substrate 100 and platform 200.At this moment, vision system 400 provides image in real time so that substrate 100 is synchronous with the alignment mark of platform 200.
Because under vision system 400 unfocused situations, be difficult to accurately check substrate 100 whether synchronized with each other with the alignment mark of platform 200, so before the alignment function that uses vision system 400 execution substrates 100, carry out the operation that vision system 400 is focused.
Therefore, it is highly important that accurately vision system 400 is focused so that accurately aim at substrate 100.Yet as described in the background art, have such shortcoming: the skill level of the processing time of the focus process of vision system 400 according to the operator becomes longer.
This embodiment provides the scheme of the focus process that automatically performs vision system 400.
In this embodiment, vision system 400 comprises camera section 410 and vision control section 420, described vision control section 420 is used to use the captured image that provides from camera section 410 to control the focal length of camera section 410 automatically, and externally shows captured image.In addition, vision system 400 comprises mobile camera moving section 430, and it is used for the focal length of mobile camera section 410 with control camera section 410.
This embodiment describes the focal length of controlling vision system 400 by mobile camera section 410.Yet, the invention is not restricted to this embodiment, and might be by moving up and down substrate 100 or platform 200 is controlled focal length.
Although do not show that camera section 410 can comprise a plurality of lens.Camera section 410 can critically be controlled the focal length of camera apart from length between the lens by adjusting.
Image-display units 422 will be fed to for example display device such as monitor in real time from the captured image of camera section 410.
Focus controlling unit 421 comprises: image storage section 421-1, and it is used to be stored in captured master image under the state that camera section 410 focuses on, and by move up and down the mobile image that camera section 410 is taken based on master image; Image rating unit 421-2, it is used for camera section 410 captured images are compared with the image that is stored in image storage section 421-1; Camera control section 421-3, it is used for moving up and down camera section 410 according to the comparative result of image rating unit 421-2.
In this embodiment, by manually when beginning the mobile camera section 410 once come camera section 410 is focused, and the image storage that will this moment be captured by camera section 410 is as master image.In addition, camera section 410 position at this moment is defined as the focal position of camera section 410.Then, come photographic images along with moving up and down camera section 410, and captured image is stored among the image storage section 421-1 as mobile image with a certain distance.
After this, under the situation of the focal length of controlling vision system 400, the image in order to the control focal length that camera section 410 is taken in the current position comparing with the image (that is, master image and mobile image) that is stored among the image storage section 421-1.After comparison, calculate between captured image and the master image apart from length.Then, make camera section 410 move institute's calculated distance length to carry out the focusing operation of camera section 410.
Hereinafter will explain the focusing operation of using above-mentioned vision system 400.For this purpose, substrate 100 is placed on the platform 200 of substrate alignment equipment, and vision system 400 is placed in the corresponding position.
Fig. 3 explanation is used to explain the process flow diagram according to the focus controlling method of the vision system 400 of the embodiment of the invention.Fig. 4 is used to explain according to the generation of the memory image of the embodiment of the invention and the process flow diagram of storage.
Illustrated as Fig. 3, at first, in step S110, take the image that is used for focus controlling by the camera section 410 of vision system 400.
In step S120, by captured image and memory image are compared, be set to movement images corresponding to the memory image of captured image.Herein, memory image is included in the master image (that is focal length images) of the focal position place of camera section 410 taking and by making camera section 410 move up and down the mobile image of taking from focal position.
Subsequently, in step S130, calculate between set movement images and the master image apart from length, and in step S140, it is described apart from length that camera section 410 is moved.By this operation, finish the automatic focus controlling of vision system 400.
Herein, the image that captures by single job when beginning is stored to be used as memory image.
For this purpose, as shown in the process flow diagram of Fig. 4, the operator establishes best focus position by the camera section 410 of operation vision system 400.In step S210, the image that will take at set focal position place is stored as master image, i.e. focal length images.Herein, the focal position resolution that is called as the captured image of camera section wherein 410 is best position.
Then, though camera section 410 is moved up and down from focal position, in step S220, come photographic images, and captured image is stored as mobile image according to displacement.
Produce memory image according to method as described above, and it is stored in the independent storage compartments.
At this moment, will store together with mobile image about the information that the camera section position of wherein taking mobile image and focal position are separated how many distances (that is, the camera section apart from length value).
Herein, mobile image uses by making camera section 410 move up and down the image of taking with equidistance from focal position.
Effectively, displacement the depth of focus of the lens 412 of camera section 410 approximate 50% in approximate 90% scope.For instance, be under the situation of 50 μ m in the depth of focus of camera section 410, displacement can be 20 μ m to 45 μ m.At this moment, under the situation of displacement less than above-mentioned value, camera section 410 is taken too much image.Therefore, spending a large amount of processing times compares captured image and memory image.In addition, under the situation of displacement greater than above-mentioned value, it is big that the moving range of camera section 410 becomes, and therefore be difficult to accurately control focal length.
, take the mobile image that makes progress upward herein, and take mobile image on the downward direction by making camera section 410 move down described displacement by make the camera section 410 described displacement that moves up based on focal position.
For instance, displacement is set to 1, and will be stored as the 1st respectively and move image to the 10th from the move up mobile image taken for 10 times of focal position by making camera section 410.Then, will be stored as the 11st respectively and move image by making camera section 410 move down the mobile image of taking for 10 times from focal position to the 20th.At this moment, note that the 1st to the 10th, to move image be respectively to take upwards separate 1 to 10 position with focal position upward, and the 11st to the 20th to move image be respectively to separate 1 to 10 position shooting with focal position on downward direction.That is to say that the known the 5th to move image be to take upwards separate 5 position with focal position upward, and the 13rd to move image be to separate 3 position shooting with focal position on downward direction.
Certainly, the invention is not restricted to this embodiment, and displacement can be provided with in every way.For instance, displacement can the whole displacement of camera section 410 approximate 1/100 in approximate 1/10000 scope.That is, be under the situation of 100mm in the whole displacement of camera section 410, displacement can be at 0.01mm in the scope of 1mm.
Therefore, in this embodiment, memory image and the image of taking for current focus controlling are compared, and use comparative result to judge how many distances camera section 410 and focal position separate.
When movement images, relatively which images category is similar to captured image in the memory image.
Herein, when movement images, the luma data of captured image and the luma data of memory image are compared.That is to say that image comprises a plurality of pixels, and each pixel have one in 0 to 255 luma data.The luma data of pixel can change according to the resolution of pixel.Therefore, image has the luma data of himself according to the camera site of camera section 410.
Memory image with luma data identical with the luma data of captured image in error range is set to movement images.Herein, error range is ± 10%.Image can have number at least 1000 and even greater than 1,000,000 pixel.Therefore, when the luma data of all pixels relatively, take a long time and carry out comparison.Therefore, be a plurality of parts preferably, and relatively divide the mean value of the luma data in the part image division.Certainly, the invention is not restricted to this embodiment, and only be arranged in the pixel of some part in the pixel of movement images.By this operation, the decreased number of luma data that might will image to be compared arrives less than 100, and for example 10 to 100.In addition, can compare the luma data in the some parts, maybe can compare the mean value of the luma data in the some parts.For instance, might compare luma data in the center of alignment mark.
Comparative approach is not limited to above description.The resolution that can compare for instance, two edge of image districts; The similarity that can compare two images; Maybe can use the size and/or the resolution that are printed on the alignment mark on the image that two images are compared to each other.In addition, can use the background of two images and the slope of the boundary interface between the alignment mark that two images are compared to each other.
The resolution of image represents to be recognized as the pixel data and the occupied number of pixels of boundary value group that is recognized as the pixel data of alignment mark of background when identification alignment mark in the image that obtains by camera.For instance, under the bigger situation of the number of pixels of the group with boundary value, the boundary interface between background and the alignment mark seems to extend.On the other hand, under the less situation of the number of pixels of the group with boundary value, the boundary interface between background and the alignment mark seems clear.Therefore, might use the variation of resolution data to implement automatic focusing.
The similarity of image is represented the similarity that obtains with respect to the reference alignment mark that is alignd.Similarity is represented by comparing the fiducial value that calculates with the information of the reference alignment mark that is alignd from all data (for example brightness of entire image, size and shape and resolution) that image is obtained.
Owing to may aspect alignment mark big or small, cause variations (this recognizes under existence situation about defocusing in relatively in the size of alignment mark in practice), so can implement automatic focusing as data by the use size variation.
Can implement automatic focusing by the slope (that is the slope of the data variation value of background from the seizure image and the boundary interface between alignment mark acquisition) that uses the boundary interface between background and the alignment mark.For instance, if boundary interface is clear, can promptly produce the variation (that is slope size) of the pixel data on the boundary interface so.If boundary interface is unintelligible, produce the variation (that is slope size) of pixel data so gradually.Therefore, come movement images by using as slope, and therefore can realize automatic focusing by calculating the value that changes acquisition.
As described above, if movement images is set up, how many distances are the memory image that is easy to so calculate corresponding to movement images separate with the master image (that is focal length images) of taking at the focal position place.This is that memory image comprises the information of separating how many distances about each memory image and focal position because as mentioned previously.
By above operation, might judge at current time camera section 410 to separate how many distances with focal position.Can be by control the focal length of camera section 410 automatically according to judged result mobile camera section 410.For instance, as mentioned above, the captured the 1st to the 10th move the situation that image and the 11st to the 20th moves image with considering to be stored in 1 o'clock separated from one another.In compare operation, judge to draw and move under the identical situation of image, notice that camera section 410 is upwards separating 5 with focal position upward at captured image and the 5th of current time.Therefore, might 5 camera section 410 be placed in the focal position place by camera section 410 is moved up downwards.Simultaneously, in compare operation, judge to draw and move under the identical situation of image, notice that camera section 410 separates 7 with focal position on downward direction at captured image and the 17th of current time.Therefore, might 7 camera section 410 be placed in the focal position place moving up upward by making camera section 410.
As described above, according to this embodiment, might separate how many distances with the next automatic computing camera section 410 of previous captured image with focal position by the image of relatively also analyzing to taking when the front focal length setting.Then, might camera section 410 be moved to the focal length that focal position is controlled camera section 410 automatically by using institute's result calculated.
Vision system according to the modification of the embodiment of the invention hereinafter will be described.
(a) of Fig. 5 and (b) of Fig. 5 illustrate the concept map of the part of the vision system of revising according to the present invention.(a) of Fig. 6 and (b) of Fig. 6 illustrate according to the present invention the image graphic that the shape according to the diffusion section of vision system revised is obtained.
Referring to (a) of Fig. 5 and (b) of Fig. 5, vision system comprises: light source 440, and it is used for providing light to camera section 410; And diffusion section 450, it is used to make the light diffusion that provides from light source 440, and will be provided to camera section 410 through the light of diffusion.In this revised, diffusion section 450 had spherical form ((a) as Fig. 5 is illustrated) or hemispherical shape ((b) as Fig. 5 is illustrated).
Using with plate shape shape under the situation of diffusion section 450, can not expand equably, but accumulating in the place, center from the light of light source 440 emissions, illustrated as Fig. 6 (a).Therefore, be difficult to accurately photographic images.
Therefore, in this embodiment, by with spherical form manufacturing diffusion section 450 (as shown in Fig. 5 (a)), light can not accumulate in the place, center but expansion equably, such as Fig. 6 (b) description.Therefore, can take accurate image.In addition, might improve the homogeneity of illumination.
(b) as Fig. 5 is illustrated, and vision system can further comprise light projector 460, and it is used for promptly wherein settling the direction of object to be taken with arriving the substrate direction by the photoinduction of diffusion section 450 emissions.Herein, light projector 460 can use beam splitter.
As described above, according to embodiments of the invention, might use prior setting and the memory image measured between camera site and focal position to be known as focus controlling and how many distances the image taken separates with focal position apart from length.By this operation, might be described apart from the focal length of length from moving control camera section by the camera section being moved reach.
In addition, according to embodiments of the invention, might light be spread and prevent that the light that is provided to the camera section from concentrating in the center.
Though described the present invention with reference to specific embodiment, the invention is not restricted to this.Therefore, the those skilled in the art will readily appreciate that, can make various modifications and change to the present invention under the situation that does not break away from the spirit and scope of the present invention that defined by appended claims.
Claims (8)
1. the method for the focal length of a vision system that is used to control substrate alignment equipment, described substrate alignment equipment uses the captured image of camera section to aim at substrate, and the method for the focal length of the described vision system that is used to control substrate alignment equipment comprises:
By described camera section photographic images to be used for focus controlling;
Obtain memory image, described memory image be included in the focal length images of the focal position place of described camera section taking and have the camera site and described focal position between the mobile image apart from the information of length;
Described memory image and the described image of taking for described focus controlling are compared, and the memory image corresponding to the described image of taking for described focus controlling is set to movement images, and wherein said memory image corresponding to the described image of taking for described focus controlling is the part in the described memory image;
Calculating is corresponding to the information apart from length of described movement images; And
Make described camera section move institute's calculated distance length.
2. the method for the focal length of the vision system that is used to control substrate alignment equipment according to claim 1 is characterized in that described memory image is stored in the independent storage compartments, and the method that is used to store described memory image comprises:
Come the described focal position of identification by operating described camera section;
To be stored as described focal length images at the image that the described focal position place of described camera section is taken; And
By making described camera section move up and down photographic images, and captured image and displacement thereof are stored as described mobile image from described focal position.
3. the method for the focal length of the vision system that is used to control substrate alignment equipment according to claim 2, it is characterized in that described captured image and displacement thereof are stored as described mobile image use by making described camera section move the image of taking with equal intervals from described focal position, and described equal intervals is in 50% to 90% scope of the depth of focus of described camera section, or has the value in 1/100 to 1/10000 scope of the whole displacement of described camera section.
4. the method for the focal length of the vision system that is used to control substrate alignment equipment according to claim 1 is characterized in that described memory image and the described image of taking for described focus controlling compared and is set to described movement images corresponding to the described memory image of the described image of taking for described focus controlling and comprises:
The luma data of the pixel of the luma data of the pixel of the described image that is configured to described focus controlling and takes and described memory image is compared; And
The described memory image that luma data is constant to remain in the error range with the described luma data of the described image of taking for described focus controlling is set to described movement images.
5. the method for the focal length of the vision system that is used to control substrate alignment equipment according to claim 4 is characterized in that by being that the mean value of the luma data in the part of the mean value of luma data of the pixel in a plurality of parts and the comparison part through dividing or described image is carried out described luma data relatively with image division.
6. the method for the focal length of the vision system that is used to control substrate alignment equipment according to claim 1 is characterized in that the described image of taking with described memory image and for described focus controlling compares and is set to described movement images corresponding to the described memory image of the described image of taking for described focus controlling comprising: with the slope of the boundary interface between background and the alignment mark, the size of described alignment mark, the resolution of described alignment mark, one or more and described memory image in the image similarity and the described edge of image resolution of taking for described focus controlling compares.
7. vision system that is used for substrate alignment equipment comprises:
The camera section is in order to photographic images; And
Vision control section comprises in order to the focus controlling unit of the focal length of controlling described camera section with in order to showing the image-display units of the described image that described camera section is captured,
Wherein, described focus controlling unit comprises:
Image storage section, in order to the store storage image, described memory image is included in the focal length images the focal position place of described camera section taken and by making described camera section move up and down the mobile image of taking from described focal position;
The image rating unit compares in order to the described memory image of being stored in image that described camera section is captured and the described image storage section; And
The camera control section moves up and down described camera section according to the comparative result of described image rating unit.
8. the vision system that is used for substrate alignment equipment according to claim 7, it further comprises:
Light source is in order to provide light to described camera section; And
The diffusion section has sphere or hemispherical shape so that the described light that provides from described light source spreads.
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|---|---|---|---|
| KR10-2008-0130455 | 2008-12-19 | ||
| KR1020080130455A KR101011779B1 (en) | 2008-12-19 | 2008-12-19 | Vision system for substrate alignment apparatus and method for focusing the same |
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| Publication Number | Publication Date |
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| CN101750714A CN101750714A (en) | 2010-06-23 |
| CN101750714B true CN101750714B (en) | 2011-12-28 |
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| CN2009102606335A Expired - Fee Related CN101750714B (en) | 2008-12-19 | 2009-12-18 | Vision system for substrate alignment apparatus and method for focusing the same |
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| KR (1) | KR101011779B1 (en) |
| CN (1) | CN101750714B (en) |
| TW (1) | TWI397759B (en) |
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| KR101034282B1 (en) * | 2009-07-31 | 2011-05-16 | 한국생산기술연구원 | The Method for Controlling Focus in Image Captured from Multi-focus Objects |
| KR101326107B1 (en) * | 2011-12-20 | 2013-11-06 | 삼성디스플레이 주식회사 | Laser processing apparatus and control method thereof |
| KR101825091B1 (en) * | 2013-08-28 | 2018-02-02 | 에이피시스템 주식회사 | Apparatus for amending tilt and method for processing substrate |
| KR20160065275A (en) | 2014-11-28 | 2016-06-09 | 링크가가(주) | Automatic selection of a communication signal loss prevention system and method using a Bluetooth signal |
| KR20170041378A (en) | 2015-10-07 | 2017-04-17 | 삼성전자주식회사 | Method fo measurement of a substrate and method for manufacturing semiconductor device using the same |
| TWI585394B (en) | 2015-12-09 | 2017-06-01 | 由田新技股份有限公司 | Automatic focusing system |
| CN107422501B (en) * | 2017-08-31 | 2020-11-24 | 深圳市华星光电半导体显示技术有限公司 | Method for acquiring display image of liquid crystal mother board |
| KR102258657B1 (en) * | 2020-03-17 | 2021-06-01 | (주) 엠엔비젼 | Product location tracking system using 2d design drawings and computer vision |
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|---|---|---|---|---|
| US4580900A (en) * | 1982-04-02 | 1986-04-08 | Eaton Corporation | Auto focus alignment and measurement system and method |
| KR0174486B1 (en) * | 1995-09-28 | 1999-02-01 | 이해규 | Aligning system using ccd camera for lithography |
| JP3226861B2 (en) | 1996-12-18 | 2001-11-05 | 株式会社不二越 | Automatic focusing method |
| KR100257739B1 (en) * | 1997-12-11 | 2000-06-01 | 구자홍 | Resolution auto-setting apparatus and method for solid-state image pickup device camera |
| KR19990070870A (en) * | 1998-02-25 | 1999-09-15 | 이종수 | Prober autofocus method |
| KR100784663B1 (en) | 2006-09-27 | 2007-12-12 | 주식회사 디이엔티 | Apparatus for aligning of auto multi-focus and method thereof |
| US7769219B2 (en) * | 2006-12-11 | 2010-08-03 | Cytyc Corporation | Method for assessing image focus quality |
| US8369605B2 (en) * | 2006-12-15 | 2013-02-05 | Carl Zeiss Sms Gmbh | Method and apparatus for determining the position of a structure on a carrier relative to a reference point of the carrier |
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- 2008-12-19 KR KR1020080130455A patent/KR101011779B1/en not_active IP Right Cessation
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| TW201028785A (en) | 2010-08-01 |
| KR101011779B1 (en) | 2011-02-07 |
| KR20100071659A (en) | 2010-06-29 |
| TWI397759B (en) | 2013-06-01 |
| CN101750714A (en) | 2010-06-23 |
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