CN101713100A - Method and device for reducing internal stress of single crystal rod - Google Patents
Method and device for reducing internal stress of single crystal rod Download PDFInfo
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- CN101713100A CN101713100A CN200910111786A CN200910111786A CN101713100A CN 101713100 A CN101713100 A CN 101713100A CN 200910111786 A CN200910111786 A CN 200910111786A CN 200910111786 A CN200910111786 A CN 200910111786A CN 101713100 A CN101713100 A CN 101713100A
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- single crystal
- crystal rod
- internal stress
- attemperator
- cylindrical shell
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Abstract
The invention relates to a method and a device for reducing internal stress of a single crystal rod. The method comprises the following steps of taking the single crystal rod between 200 and 300DEG C out of an oven chamber; and immediately putting the single crystal rod into a heat insulation device and naturally cooling the single crystal rod to room temperature. The device comprises a cylinder and a handcart; and the inner surface of the cylinder is provided with an insulation layer. By means of the heat insulation effect, the residual internal stress of the single crystal rod can be well removed through heat aging so as to reduce loss caused by fragments in wafering.
Description
Technical field
The present invention relates to a kind of method and apparatus that reduces internal stress of single crystal rod.
Background technology
When monocrystalline pulled, because the thermal stresses effect, afterbody can produce a large amount of dislocations, and extends upward along monocrystalline, and the length of extension approximates a diameter.So the ending length requirement is greater than 150 millimeters.After stopping heating 6-8 hour, could inflate and tear stove open, promote crystal.This moment, the temperature of single crystal rod was 200-300 ℃.
So-called thermal stresses just is meant the relative contraction or expansion of germ nucleus part to the edge section, and size depends on uniform distribution of temperature in the crystal.Can be force of compression or drawing force.Single crystal rod if take out when temperature is higher, because the temperature difference of crystals and extraneous air is bigger, easily produces internal stress when coming out of the stove, cause slice loss; If but take out when by the time temperature is low then waste the production time.
Summary of the invention
The object of the present invention is to provide a kind of method and apparatus that reduces internal stress of single crystal rod.
Technical scheme provided by the invention is as follows:
Technical scheme one:
A kind of method that reduces internal stress of single crystal rod, it is after 200～300 ℃ single crystal rod is taken out from furnace chamber with temperature, a kind of attemperator of packing into immediately, this single crystal rod places this attemperator to naturally cool to room temperature.
Method of the present invention can be used for the single crystal rod of all material, and for example single crystal rod can be a silicon single crystal rod, indium phosphide single crystal rod etc.
Technical scheme two:
A kind of device that reduces internal stress of single crystal rod, comprise a cylinder, described cylinder internal surface is provided with thermal insulation layer, and described cylinder comprises left semicircle cylindrical shell and right semi-circle cylindrical shell, and described left semicircle cylindrical shell and right semi-circle cylindrical shell can rotate mutually and be in and open or close the position; Have at least one to form in described left semicircle cylindrical shell and the right semi-circle cylindrical shell by 2～10 small pieces semicircle cylindrical shells that are arranged above and below.
Each described small pieces semicircle cylindrical shell can be independently rotates mutually and is in relative second half cylinder and opens or closes the position.
Described cylinder is made by common galvanized steel pipe.
The thermal insulation layer of described cylinder internal surface is a graphite carbon felt, is used for high temperature resistant and insulation.
Device of the present invention comprises that also one is positioned at the cart device of described cylinder bottom.
Described cart device comprises a flat board, a handle portion that is used to promote, and the roller that is positioned at dull and stereotyped bottom.
Described cylinder bottom is fixedly connected or removably be connected on the flat board of described cart device.
From foregoing description as can be known, the invention provides a kind of method and apparatus that reduces internal stress of single crystal rod, device among the present invention, comprise a cylinder, described cylinder comprises left semicircle cylindrical shell and right semi-circle cylindrical shell, and described left semicircle cylindrical shell and right semi-circle cylindrical shell can rotate mutually and be in and open or close the position; Have at least one to form in described left semicircle cylindrical shell and the right semi-circle cylindrical shell by 2～10 small pieces semicircle cylindrical shells that are arranged above and below, during use, can earlier left semicircle cylindrical shell and right semi-circle cylindrical shell be separated certain angle, be convenient to include in single crystal rod, enter in the intravital process of cylinder in single crystal rod, can observe single crystal rod from divided portion and enter the intravital position of cylinder, such structure design extremely helps putting into fast single crystal rod, reduce the operating time that single crystal rod is put into this cylinder, thereby reduce the difference variation of crystal bar, reduce thermal stresses and produce; Owing to single crystal rod is radially extracted out from cylinder, but can laterally open taking-up, also help cooled single crystal rod and in cylinder, take out; When single crystal rod was taken out in stove, its upper temp was low, and the temperature of lower height also can be as required, the tightness when adjustment is closed with respect to the cylinder of single crystal rod different sites, thereby the cooling rate of regulating different single crystal rod position.This device also comprises a handcart simultaneously, makes things convenient for other position that is transferred to of single crystal rod, does not hinder the production of next stove.
Single crystal rod if take out when temperature is higher, easily produces internal stress when coming out of the stove, taking out when temperature is low then wastes the production time, the invention provides a kind of method and apparatus that reduces internal stress of single crystal rod.This method and device are applicable to the single crystal rod of all material, comprise silicon single crystal rod, the indium phosphide single crystal rod, and for the single crystal rod than low-purity of easy generation internal stress, the de-stress effect is more obvious.When normal single crystal rod was taken out, temperature was 200-300 ℃, and the monocrystalline afterbody is more higher, was positioned over that 3-4 hour single crystal rod is cooled to room temperature in the air, and the single crystal rod that is positioned in the single crystal rod stay-warm case need just can be cooled to room temperature in about 15-24 hour.Just can well remove the residualinternal stress of single crystal rod by thermal life, thereby reduce the loss that fragment causes when cutting into slices.This method had both well been removed the residualinternal stress of single crystal rod, because single crystal is transferred in this attemperator, need not waits single crystal to be cooled to room temperature and can carry out the operation of next stove again, had improved the utilising efficiency of single crystal growing furnace.
Description of drawings
Fig. 1 is a kind of perspective view that reduces the device of internal stress of single crystal rod of the present invention.
Fig. 2 is a kind of front view that reduces the device of internal stress of single crystal rod of the present invention.
Fig. 3 is a kind of top view that reduces the device of internal stress of single crystal rod of the present invention.
Embodiment
Referring to figs. 1 through Fig. 3, a kind of attemperator that reduces internal stress of single crystal rod, comprise cylinder 1 and handcart 2 two portions, wherein cylinder 1 comprises left semicircle tube and right semi-circle tube 11, the left semicircle tube is made up of upper left semicircular cylinder 12 and lower-left semicircular cylinder 13, and upper left semicircular cylinder 12 and lower-left semicircular cylinder 13 can rotate by turning axle 14 with right semi-circle tube 11 respectively mutually.Among Fig. 1 to Fig. 3, upper left semicircular cylinder 12 is in half-open position mutually with right semi-circle tube 11, and lower-left semicircular cylinder 13 is in crack position mutually with right semi-circle tube 11.
Cylinder is that common tin-coated steel pipe is made, and internal surface has a thick graphite carbon carpet veneer.
With the silicon single crystal rod is example, when the silicon single crystal rod temperature is in 200～300 ℃ in stove, after having put the single crystal rod attemperator below the crystal, left semicircle cylindrical shell and right semi-circle cylindrical shell 11 are separated into as shown in Figure 1 position, remove the brilliant dish of holder of single crystal growing furnace then, the control single crystal growing furnace makes crystal decline enter in the cylinder and observes the position that crystal enters cylinder 1 at any time, when also have from cylinder 1 bottom 3-5mm apart from the time, stop to descend, forbid to make crystal to touch the single crystal rod cylinder this moment, in order to avoid cause the axle wireline to damage because of job-hopping.A people buttresses single crystal rod stay-warm case device afterwards, and another human hand is caught weight or connecting rod (forbidding grabbing seed crystal), cuts off thin neck then, and single crystal rod enters cylinder, and upper left semicircular cylinder 12 and lower-left semicircular cylinder 13 again close.After single crystal is put into cylinder 1, promote dolly 2 whole device is removed from the furnace chamber next door, can carry out the single crystal rod production of next stove.And the intravital silicon single crystal rod of cylinder was cooled to the room temperature taking-up in about 15-24 hour, can well remove the residualinternal stress of single crystal rod by thermal life.
Above-mentioned only is a specific embodiment of the present invention, but design concept of the present invention is not limited thereto, and allly utilizes this design that the present invention is carried out the change of unsubstantiality, all should belong to the behavior of invading protection domain of the present invention.
Claims (9)
1. method that reduces internal stress of single crystal rod is characterized in that: with temperature is after 200～300 ℃ single crystal rod is taken out from furnace chamber, a kind of attemperator of packing into immediately, and this single crystal rod places this attemperator to naturally cool to room temperature.
2. a kind of method that reduces internal stress of single crystal rod as claimed in claim 1, it is characterized in that: described single crystal rod comprises silicon single crystal rod, the indium phosphide single crystal rod.
3. attemperator that reduces internal stress of single crystal rod, comprise a cylinder, described cylinder internal surface is provided with thermal insulation layer, it is characterized in that: described cylinder comprises left semicircle cylindrical shell and right semi-circle cylindrical shell, and described left semicircle cylindrical shell and right semi-circle cylindrical shell can rotate mutually and be in and open or close the position; Have at least one to form in described left semicircle cylindrical shell and the right semi-circle cylindrical shell by 2～10 small pieces semicircle cylindrical shells that are arranged above and below.
4. a kind of attemperator that reduces internal stress of single crystal rod as claimed in claim 3 is characterized in that: each described small pieces semicircle cylindrical shell can be independently rotates mutually and is in relative second half cylinder and opens or closes the position.
5. a kind of attemperator that reduces internal stress of single crystal rod as claimed in claim 3 is characterized in that: the thermal insulation layer of described cylinder internal surface is a graphite carbon felt.
6. a kind of attemperator that reduces internal stress of single crystal rod as claimed in claim 3, it is characterized in that: described cylinder is made by common galvanized steel pipe.
7. a kind of attemperator that reduces internal stress of single crystal rod as claimed in claim 3 is characterized in that: comprise that also one is positioned at the cart device of described cylinder bottom.
8. a kind of attemperator that reduces internal stress of single crystal rod as claimed in claim 7, it is characterized in that: described cart device comprises a flat board, a handle portion that is used to promote, and the roller that is positioned at dull and stereotyped bottom.
9. a kind of attemperator that reduces internal stress of single crystal rod as claimed in claim 7 is characterized in that: described cylinder bottom is fixedly connected or removably be connected on the flat board of described cart device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910111786A CN101713100A (en) | 2009-05-11 | 2009-05-11 | Method and device for reducing internal stress of single crystal rod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910111786A CN101713100A (en) | 2009-05-11 | 2009-05-11 | Method and device for reducing internal stress of single crystal rod |
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| Publication Number | Publication Date |
|---|---|
| CN101713100A true CN101713100A (en) | 2010-05-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910111786A Pending CN101713100A (en) | 2009-05-11 | 2009-05-11 | Method and device for reducing internal stress of single crystal rod |
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| CN (1) | CN101713100A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107881560A (en) * | 2017-11-24 | 2018-04-06 | 苏州阿特斯阳光电力科技有限公司 | A kind of preprocess method of crystalline silicon rod |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5958133A (en) * | 1996-01-29 | 1999-09-28 | General Signal Corporation | Material handling system for growing high-purity crystals |
-
2009
- 2009-05-11 CN CN200910111786A patent/CN101713100A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5958133A (en) * | 1996-01-29 | 1999-09-28 | General Signal Corporation | Material handling system for growing high-purity crystals |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107881560A (en) * | 2017-11-24 | 2018-04-06 | 苏州阿特斯阳光电力科技有限公司 | A kind of preprocess method of crystalline silicon rod |
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| AD01 | Patent right deemed abandoned |
Effective date of abandoning: 20100526 |
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| C20 | Patent right or utility model deemed to be abandoned or is abandoned |