CN101760773B - Monocrystal-pulling insulated feeding method and device thereof - Google Patents
Monocrystal-pulling insulated feeding method and device thereof Download PDFInfo
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- CN101760773B CN101760773B CN 201010301244 CN201010301244A CN101760773B CN 101760773 B CN101760773 B CN 101760773B CN 201010301244 CN201010301244 CN 201010301244 CN 201010301244 A CN201010301244 A CN 201010301244A CN 101760773 B CN101760773 B CN 101760773B
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Abstract
The invention discloses a monocrystal-pulling insulated feeding method. The method is implemented according to the following steps: (1) after a monocrystal furnace is disassembled, the volatile matter on furnace bodies and thermal field graphite components such as a main-chamber furnace shell, a main insulating cylinder and a graphite heater is cleaned up; (2) a big insulating cover is placed on the upper end surface of the main insulating cylinder; (3) a graphite crucible and a quartz crucible are sequentially placed on a graphite supporting pole, and monocrystal material starts to be fed; (4) after feeding, the quartz crucible is covered by a material-protecting cover; (5) the big insulating cover is then taken out, the material-protecting cover is removed, and consequently, the furnace can be covered, vacuumized and heated to start next monocrystal pulling. The invention also discloses an insulated feeding device, wherein the big insulating cover is selected from a piece of solid graphite felt, an alumina silicate ceramic fiber product, a calcium silicate product or a graphite product. Because the big insulating cover adopted by the method and the device can obstruct the thermal field from volatilizing airflow, the feeding process can be carried out without cooling the thermal field; and the occurrence of material-dropping accidents can be effectively prevented.
Description
Technical field
The invention belongs to the monocrystalline production technical field, relate to a kind of monocrystal-pulling insulated feeding method, the invention still further relates to the employed heat insulation feeder of this monocrystal-pulling insulated feeding method.
Background technology
In the pulling of crystals production technique, after tearing stove open, need get the cooling of crystal, thermal field, thermal field usually and clean, feed, close the preparation that several process links such as stove realize the crystal-pulling of next heat, this process is commonly referred to the dismounting furnaceman and plants.
In the crystal-pulling process,, quartz crucible and molten silicon can generate silicon monoxide because constantly reacting, a large amount of silicon monoxide volatile matters can be deposited on thermal field and single crystal growing furnace stove tube inside in the process of discharging, therefore after blowing out, usually thermal field and stove tube need be cleaned again, to guarantee down the high-purity health in the stove crystal-pulling process.But because still there is 500-600 ℃ high temperature thermal field inside when tearing stove open, the hot gas flow of vaporization at high temperature bring great difficulty can for subsequent operationss such as cleaning thermal field and charging, particularly stocking process.The pulling of crystals stocking process is that difform polycrystal piece is piled up into quartz crucible inside by certain processing requirement, and in whole charging process, it is suitable for reading that operator must face thermal field directly.For the scald that prevents operator and the generation of other security incidents, must need to carry out earlier the cooling of thermal field, and the cooling of thermal field need expend a large amount of time, seriously hindered the raising of production efficiency.
Summary of the invention
The purpose of this invention is to provide a kind of monocrystal-pulling insulated feeding method, solved prior art in whole charging process, need carry out the cooling of thermal field, production efficiency is low, the problem that processing safety is bad.
Another object of the present invention provides the above-mentioned heat insulation feeder that is used for pulling of crystals technology, has removed thermal field cooling link, prevents that effectively the material accident from taking place, and is not cooling off realization charging under the thermal field situation.
The technical solution adopted in the present invention is, a kind of monocrystal-pulling insulated feeding method, and this method is specifically implemented according to following steps:
After step 1, single crystal growing furnace were torn stove open, operator had dressed safety appliance, adopted high temperature resistant cleaning device, and the volatile matter on bodies of heater such as main chamber's stove tube, main heat-preservation cylinder and graphite heater and the thermal field graphite device is cleaned up;
After step 4, charging finish, build on quartz crucible and protect material lid, the described material lid that protects is provided with along circumference and protects the edge, protects the external diameter of the internal diameter on edge greater than quartz crucible, protects the external diameter of the external diameter on edge less than plumbago crucible;
Step 5, more heat insulation big lid is taken out, remove and protect the material lid, close stove, begin the crystal-pulling of next heat.
Another technical scheme of the present invention is, a kind of heat insulation feeder that is used for pulling of crystals technology is laid heat insulation big lid on the main heat-preservation cylinder of czochralski crystal growing furnace, and quartz crucible is provided with and protects the material lid;
Described heat insulation big lid is a disc-shape, contacts placement with the inwall of main chamber's stove tube, and the internal diameter of the external diameter of heat insulation big lid and main chamber's stove tube adapts, and the circular hole that equates with the plumbago crucible external diameter is dug at the center of heat insulation big lid;
The described material lid of protecting is provided with along circumference and protects the edge, protects the external diameter of the internal diameter on edge greater than quartz crucible, protects the external diameter of the external diameter on edge less than plumbago crucible.
The inventive method and device thereof by increasing big insulating cover, intercept thermal field volatilization air-flow, have reduced thermal field cooling link, not cooling off realization charging process under the thermal field situation, have shortened the dismounting stove time greatly, have significantly improved working efficiency; Heat insulation Da Gai and protect material lid and can prevent effectively that the material accident from taking place, protection thermal field graphite piece is not damaged, and can effectively prolong thermal field work-ing life.
Description of drawings
Fig. 1 is the heat insulation big lid structural representation in apparatus of the present invention;
Fig. 2 is the B-B schematic cross-section among Fig. 1;
Fig. 3 is that the material that protects in apparatus of the present invention covers structural representation;
Fig. 4 is the A-A schematic cross-section among Fig. 3;
Fig. 5 is a heat insulation loading method principle of work synoptic diagram of the present invention.
Among the figure, 1. heat insulation big lid 2. protects material lid, 3. handle, and 4. graphite heater, 5. graphite pressure pin, 6. quartz crucible, 7. plumbago crucible, 8. main heat-preservation cylinder, 9. main chamber's stove tube, 10. circular hole, 11. protect the edge.
Embodiment
The present invention is described in detail below in conjunction with the drawings and specific embodiments.
As Fig. 1, it is the heat insulation big lid structural representation in apparatus of the present invention, Fig. 2 is the B B schematic cross-section among Fig. 1, heat insulation big lid 1 has the disk of circular hole 10 for the axle center, the scope of its external diameter Φ 1 value is 500mm-1500mm, the scope of internal diameter Φ 2 values is 200mm-1200mm, and the scope of thickness H1 value is 10mm-100mm., heat insulation big lid 1 adopts heat insulation temperature-resistant material to make, and specifically selects solid graphite felt, alumina-silicate ceramic fibre goods, calcium silicate products or graphite product etc. for use.
As Fig. 3, be that protecting in apparatus of the present invention expects to cover structural representation, Fig. 4 is the A A schematic cross-section among Fig. 3, protect material and cover the handle 3 that uses when 2 upper surfaces are provided with two grasping manipulations, protecting material covers 2 and is provided with along circumference and protects along 11, protect along 11 internal diameter external diameter, protect along 11 external diameter external diameter less than plumbago crucible 7 greater than quartz crucible 6.
With reference to Fig. 5, heat insulation loading method of the present invention, specifically implement according to following steps:
1) after single crystal growing furnace was torn stove open, the operator had dressed safety appliance, adopted high temperature resistant cleaning device, and the volatile matter on bodies of heater such as main chamber's stove tube 9, main heat-preservation cylinder 8 and graphite heater 4 and the thermal field graphite device is cleaned up;
2) place heat insulation big lid 1 in main heat-preservation cylinder 8 upper surfaces, make the internal diameter periphery and the plumbago crucible 7 of heat insulation big lid 1 press close to, the inwall of external diameter periphery and main chamber's stove tube 9 is pressed close to, thereby with upwards evaporable hot gas flow obstruct in the thermal field, see shown in the arrow A among Fig. 3, prevent that simultaneously the when filling with substance dead small from falling into thermal field inside, protection graphite device;
3) plumbago crucible 7 and quartz crucible 6 are positioned on the graphite pressure pin 5 successively, begin the crystal raw material of packing into;
4) after charging finishes,, build in quartz crucible 6 upper edges and to protect material and cover 2 for preventing slag;
5) more heat insulation big lid 1 is taken out, remove to protect and expect to cover 2, close stove, can begin the crystal-pulling of next heat.
Heat insulation loading method of the present invention and device thereof, its characteristics are:
(1) intercepts the thermal field hot gas flow that upwards volatilizees.Because thermal field did not cool off as yet fully after pulling of crystals was torn stove open, its temperature is up to 500-600 ℃, and the rising of high temperature gas flow will have influence on stocking process greatly and carry out.By heat insulation big lid as auxiliary means, can play the effect that intercepts the thermal field high temperature gas flow, thereby be implemented in normally charging under the situation of not cooling off thermal field, shorten the operating time of dismounting stove, can shorten the dismounting furnaceman and plant the time more than 50%, improve production efficiency greatly.
(2) prevent to fall in the charging process material accident.In the charging process,, in heat-processed, cause easily striking sparks and cause the damage of the inner graphite piece of thermal field because operator's error drops to thermal field inside with some fritter particles easily.After installing heat insulation big lid additional, be equivalent to place the hermetic barrier device one, can prevent effectively that when filling with substance small powder piece from falling in the thermal field, strengthened the security of charging link, can effectively prolong thermal field work-ing life, reduce cost on thermal field top.
Claims (4)
1. a monocrystal-pulling insulated feeding method is characterized in that, this method is specifically implemented according to following steps:
After step 1, single crystal growing furnace were torn stove open, operator had dressed safety appliance, adopted high temperature resistant cleaning device, and the volatile matter on main chamber's stove tube (9), main heat-preservation cylinder (8) and graphite heater bodies of heater such as (4) and the thermal field graphite device is cleaned up;
Step 2, lay heat insulation big lid (1) in main heat-preservation cylinder (8) top, be used for upwards evaporable hot gas flow obstruct of thermal field, described heat insulation big lid (1) is a disc-shape, contact placement with the inwall of main chamber's stove tube (9), the internal diameter of the external diameter of heat insulation big lid (1) and main chamber's stove tube (9) adapts, and the circular hole (10) that equates with plumbago crucible (7) external diameter is dug at the center of heat insulation big lid (1);
Step 3, plumbago crucible (7) and quartz crucible (6) are positioned on the graphite pressure pin (5) successively the crystal raw material of in quartz crucible (6), packing into then;
After step 4, charging finish, on quartz crucible (6), build and protect material lid (2), the described material lid (2) that protects is provided with along circumference and protects along (11), protects along the internal diameter of (11) external diameter greater than quartz crucible (6), protects along the external diameter of (11) external diameter less than plumbago crucible (7);
Step 5, more heat insulation big lid (1) is taken out, remove and protect material lid (2), close stove, begin the crystal-pulling of next heat.
2. method according to claim 1 is characterized in that, described heat insulation big lid (1) is selected solid graphite felt, alumina-silicate ceramic fibre goods or calcium silicate products for use.
3. method according to claim 1 is characterized in that, the external diameter of described heat insulation big lid (1) is 500mm-1500mm, and internal diameter is 200mm-1200mm, and thickness is 10mm-100mm.
4. method according to claim 1 is characterized in that, described material lid (2) upper surface that protects is provided with two handles (3).
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010301244 CN101760773B (en) | 2010-02-04 | 2010-02-04 | Monocrystal-pulling insulated feeding method and device thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010301244 CN101760773B (en) | 2010-02-04 | 2010-02-04 | Monocrystal-pulling insulated feeding method and device thereof |
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| CN101760773A CN101760773A (en) | 2010-06-30 |
| CN101760773B true CN101760773B (en) | 2011-11-09 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102212873A (en) * | 2011-05-20 | 2011-10-12 | 浙江星宇能源科技有限公司 | Method for charging mono-crystal furnace |
| CN109097822B (en) * | 2018-09-29 | 2020-11-03 | 包头美科硅能源有限公司 | Method for reducing carbon content in single crystal ingot |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1417386A (en) * | 2001-11-01 | 2003-05-14 | 北京有色金属研究总院 | Heat shielding method and heat shield for vertically pulling crystal furnace |
| CN1500918A (en) * | 2002-11-12 | 2004-06-02 | 王永鸿 | Growth apparatus for vertical pulling single crystal |
| CN201351185Y (en) * | 2009-02-05 | 2009-11-25 | 嘉兴嘉晶电子有限公司 | Single crystal furnace thermal field batching feeding device |
-
2010
- 2010-02-04 CN CN 201010301244 patent/CN101760773B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1417386A (en) * | 2001-11-01 | 2003-05-14 | 北京有色金属研究总院 | Heat shielding method and heat shield for vertically pulling crystal furnace |
| CN1500918A (en) * | 2002-11-12 | 2004-06-02 | 王永鸿 | Growth apparatus for vertical pulling single crystal |
| CN201351185Y (en) * | 2009-02-05 | 2009-11-25 | 嘉兴嘉晶电子有限公司 | Single crystal furnace thermal field batching feeding device |
Non-Patent Citations (2)
| Title |
|---|
| JP平2-283693A 1990.11.21 |
| JP昭55-113693A 1980.09.02 |
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Assignee: Yinchuan LONGi Silicon Material Co.,Ltd. Assignor: Xi'an longI silicon materials Limited by Share Ltd| Xi'an longI silicon technology limited company| Ningxia longI silicon materials Co., Ltd.| Xi'an Ximei monocrystalline silicon Contract record no.: 2012610000005 Denomination of invention: Monocrystal-pulling insulated feeding method and device thereof Granted publication date: 20111109 License type: Exclusive License Open date: 20100630 Record date: 20120119 |
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