CN101710191B - Annular radiation type blazed grating - Google Patents
Annular radiation type blazed grating Download PDFInfo
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- CN101710191B CN101710191B CN200910228451XA CN200910228451A CN101710191B CN 101710191 B CN101710191 B CN 101710191B CN 200910228451X A CN200910228451X A CN 200910228451XA CN 200910228451 A CN200910228451 A CN 200910228451A CN 101710191 B CN101710191 B CN 101710191B
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- blazed grating
- grating
- tooth
- blazed
- annular
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Abstract
The present invention relates to an annular radiation type blazed grating which comprises an annular grating baseplate, blazed grating teeth (3) and diffraction surfaces (4), wherein the blazed grating teeth (3) are etched on the annular grating baseplate, and the diffraction surfaces (4) are positioned at one side of notched ridge lines (2) of the blazed grating teeth. The annular radiation type blazed grating is characterized in that the blazed grating teeth (3) are periodically arranged on the circumference of the annular grating baseplate, each blazed grating tooth (3) is in a radiation type, the projection of the upper surface of the annular grating baseplate is fan-shaped, and the bottommost parts of scale marks on the blazed grating teeth (3) are positioned on a plane (6); the diffraction surfaces (4) of the blazed grating teeth (3) are larger planes on one side of the notched ridge lines (2); and a plane formed from straight lines (11) and (12) perpendicular to the notched ridge lines(2) of the blazed grating teeth and the plane (6) intersect at a straight line (13), the straight line (13) and each diffraction surface (4) form a blaze angle (14), and the blaze angle (14) is unchanged for each blazed grating tooth. Compared with the prior art, the annular radiation type blazed grating has the beam deflection performance which other round or annular blazed gratings do not have, and the annular radiation type blazed grating is convenient to manufacture and has the characteristic of high diffraction effect. On the aspect of economic benefit, the annular radiation type blazed grating can be widely applied to occasions needing beam deflection, spectral analysis and the like, particularly to the deflection of revolving beams.
Description
Technical field
The present invention relates to spatial light interconnection, binary optical and micro-optic technical field, particularly relate to a kind of novel optical grating construction.
Background technology
The development that is applied as modern sensing, optical focus, beam deflection, spectral technique etc. of grating technology provides new platform, especially the invention of blazed grating, utilize the cutting face of blazed grating to present certain included angle with the grating face, make and interfere the zero level principal maximum between the central principal maximum of single cutting face diffraction and multiple-grooved face separately, luminous energy is transferred to certain first-order diffraction from interfering the zero level principal maximum, made grating diffration efficient significantly improve.
At present, conventional blazed grating such as patent CN200810069913.3, the grating that CN200410025197.0 etc. mention, its characteristics all are the direction of diffraction light perpendicular to score line, can realize direction of beam propagation deflection.But above-mentioned grating is the linear pattern grating, and its grating cutting tooth is parallel to each other.Patent US005144483A mentions a kind of circular blazed grating, and its grating cutting tooth is concentric circles and distributes, the vertical cutting face of its diffraction direction, but the beam deflection direction is pointed to the axle center of disk, and all the beam deflection direction with the blazed grating of this patent is different.
In the spatial beam coupling process, the light beam that needs sometimes to transmit as the coupling occasion between spatial beam and the disc waveguide, can not realized above-mentioned functions but still there is a kind of optical device now to a certain specific direction deflection one angle.Patent CN200410013761.7 mentions another kind of circular reflection-type diffraction grating, can make light beam along the incident direction diffracted back, still, this grating but can't the implementation space light beam and disc waveguide between coupling.In addition, patent CN01820333.7 mentions the multichannel deflection that a kind of double balzed grating can be realized light beam, and this grating is the improvement of conventional line style grating, structurally with this patent essential distinction is arranged.
Do not have a kind of circular grating now, its grating cutting tooth is circumference, radial distribution, can realize that incident light is along the radial direction deflection perpendicular to ring.，
Summary of the invention
In view of above-mentioned technical matters, the present invention proposes a kind of annular radiation type blazed grating, advantage in conjunction with blazed grating, utilize its high-diffraction efficiency and the beam deflection performance of its uniqueness, realize vertical incidence spatial beam and disc waveguide coupling, the light of each grating tooth diffraction is all perpendicular to diameter, and diffraction light reaches specific biography light effect along the corresponding deflection of tangent to periphery direction.
The present invention proposes a kind of annular radiation type blazed grating, comprise the blazed grating tooth 3 of etching on a circular grating substrate and its and the diffraction surfaces 4 that is positioned at cutting ridge line 2 one sides of blazed grating tooth, it is characterized in that, described blazed grating tooth 3 is periodic arrangement on circular grating substrate circumference, each blazed grating tooth 3 is radial pattern, it is fan-shaped being projected as of the upper surface of described circular grating substrate, and the bottommost of blazed grating tooth 3 grooves all is positioned on first plane 6; The diffraction surfaces 4 of described blazed grating tooth is for being positioned at the bigger plane of cutting ridge line 2 one sides; Second plane of forming perpendicular to two straight lines 11,12 of the cutting ridge line 2 of blazed grating tooth intersects at the 3rd straight line 13, the three straight lines 13 and diffraction surfaces 4 formation blazing angles 14 with first plane 6, and blazing angle 14 is constant for each blazed grating tooth.
Each blazed grating tooth 3 is periphery or plane at the end face of the internal and external circumference of circular grating substrate.
Described cutting ridge line 2 surrounds first virtual circumference 5 on outer shroud.
Described first plane 6 is perpendicular to axis of symmetry 1, and the cutting ridge line 2 of blazed grating tooth 3 surrounds second virtual circumference 7 on interior ring.
The cutting ridge line 2 of described blazed grating tooth 3 runs through each first virtual circumference 5 and second virtual circumference 7.
Described circular grating substrate is interior ring hollow structure.
Compared with prior art, patent of the present invention possesses other circular or not available beam deflection performances of annular blazed grating, and grating easily makes, and has the high characteristics of diffraction efficiency.Aspect economic benefit, but patent widespread use of the present invention needs the deflection of occasions, particularly rotary beam such as beam deflection, spectral analysis.Its market outlook is good, has the good technical conversion base.Because patent of the present invention is our independent intellectual property right, has social benefit widely.
Description of drawings
Fig. 1 is the part sketch plan of radiation type blazed grating of the present invention.
Fig. 2 is the sectional view along the grating line direction of the present invention
Fig. 3 is the diffraction surfaces of blazed grating monodentate of the present invention.
Embodiment
The realization principle of technical scheme of the present invention is: etching M blazed grating cutting tooth on a circular grating substrate, each grating cutting tooth parameter is identical, on circumference with 2 π/M rad periodic arrangement.Each grating tooth is that a radian is 2 π/M rad in the projection of upper surface, and radius is from r
0To r
1Fan-shaped.Each grating tooth r on internal and external circumference
0, r
1End face be periphery or plane because light beam is mainly at r
0To r
1Radius on incident, so less demanding to the border.By the blazing angle of design grating, can obtain the beam deflection angle that needs.Upper surface profile behind the base plate carving and corrosion is a conical surface, and the top of the conical surface and each grating tooth joins.
The method that this grating is realized has ion beam milling, photoetching process, mechanical microfabrication techniques and cast thereof and impression.
Below in conjunction with accompanying drawing this patent is further specified.
As shown in Figure 1, the axis of symmetry 1 of annular blazed grating, the cutting ridge line 2 that respectively glitters converges to axis of symmetry 1.Blazed grating tooth 3 is etching on the substrate of an annular, comprises the diffraction surfaces 4 of cutting ridge line one side of glittering, the virtual circumference 5 that the cutting ridge line 2 that glitters is surrounded.The bottommost of blazed grating tooth 3 grooves all is positioned on the plane 6, and plane 6 is perpendicular to axis of symmetry 1, blazed grating tooth 3 virtual circumference that the ridge line surrounds on interior ring 7.
Grating integral body is ring-type, and grating line runs through each virtual circumference (being virtual circumference 5, virtual circumference 7).If the internal diameter of annular is r
0, corresponding grating constant is d (r
0), external diameter is r
1, corresponding grating constant is d (r
1), the grating number of teeth is M, satisfies 2 π r=Md (r) so, d (r)=2 π r/M is so obtain d (r)/d (r
1)=r/r
1, d (r
1)/d (r
0)=r
1/ r
0, the grating constant difference of Gu Butongbanjingchu is the frequency conversion grating.Because the bore D of circular grating is bigger, and interior external radius is more or less the same, satisfy D＞＞d.Therefore the grating formula of this blazed grating can be similar to conventional grating formula and represent that be d (sini+sin θ)=m λ, wherein incident angle is i, and angle of diffraction is θ, and m is the order of diffraction of diffraction light.
As shown in Figure 2, comprise in ring go up that circumference 7 forms hollow space 8; The tangent plane that the top 9 of blazed grating tooth 3 is surrounded is a conical surface, but owing to the interior external radius of circular grating is more or less the same, so the conical surface can be approximated to be planar annular.When light 10 incided the grating face, the direction of propagation of diffracted ray was perpendicular to radius, rather than pointed to 1.
As shown in Figure 3, comprise the diffraction surfaces 4 of blazed grating, straight line 11,12 intersects at straight line 13 perpendicular to glitter cutting ridge line 2,11 and 12 plane and the planes of forming 6, and straight line 13 is exactly a blazing angle 14 with the angle on plane 4.Blazing angle is set at diffraction of light angle according to demand, and diffraction light is set at 1 order diffraction light, and the incident angle of light is identical with blazing angle γ, gets d (r) (sin γ+sin θ)=λ by grating formula, and θ is an angle of diffraction.
The specific embodiment of the present invention (transmissive state) is given an example, according to the structural drawing that Fig. 1 provides, and each blazed grating tooth of etching, the both sides of tooth are the plane, and the inclination angle is constant.Blazed grating after the etching, incident light incide on the grating tooth, and diffraction light satisfies the grating equation of blazed grating.The light of each grating tooth diffraction is all perpendicular to diameter, and diffraction light is along the corresponding deflection of tangent to periphery direction.
Claims (6)
1. annular radiation type blazed grating, comprise the blazed grating tooth (3) of etching on a circular grating substrate and its and the diffraction surfaces (4) that is positioned at cutting ridge line (2) one sides of blazed grating tooth, it is characterized in that, described blazed grating tooth (3) is periodic arrangement on circular grating substrate circumference, each blazed grating tooth (3) is radial pattern, it is fan-shaped being projected as of the upper surface of described circular grating substrate, and the bottommost of blazed grating tooth (3) groove all is positioned on first plane (6); The diffraction surfaces of described blazed grating tooth (4) is for being positioned at the bigger plane of cutting ridge line (2) one sides; Second plane and first plane (6) formed perpendicular to two straight lines (11,12) of the cutting ridge line (2) of blazed grating tooth intersect at the 3rd straight line (13), the 3rd straight line (13) forms blazing angle (14) with diffraction surfaces (4), and blazing angle (14) is constant for each blazed grating tooth.
2. annular radiation type blazed grating as claimed in claim 1 is characterized in that, each blazed grating tooth (3) is periphery or plane at the end face of the internal and external circumference of circular grating substrate.
3. annular radiation type blazed grating as claimed in claim 1 is characterized in that, the cutting ridge line (2) of described each blazed grating tooth (3) converges to axis of symmetry (1), and described cutting ridge line (2) surrounds first virtual circumference (5) on outer shroud.
4. annular radiation type blazed grating as claimed in claim 1 is characterized in that, described first plane (6) is perpendicular to axis of symmetry (1), and the cutting ridge line (2) of blazed grating tooth (3) surrounds second virtual circumference (7) on interior ring.
5. annular radiation type blazed grating as claimed in claim 1 is characterized in that, the cutting ridge line (2) of described blazed grating tooth (3) runs through each first virtual circumference (5) and second virtual circumference (7).
6. annular radiation type blazed grating as claimed in claim 4 is characterized in that, described circular grating substrate is interior ring hollow structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910228451XA CN101710191B (en) | 2009-11-17 | 2009-11-17 | Annular radiation type blazed grating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910228451XA CN101710191B (en) | 2009-11-17 | 2009-11-17 | Annular radiation type blazed grating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101710191A CN101710191A (en) | 2010-05-19 |
| CN101710191B true CN101710191B (en) | 2011-08-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910228451XA Expired - Fee Related CN101710191B (en) | 2009-11-17 | 2009-11-17 | Annular radiation type blazed grating |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103064262B (en) | 2013-01-17 | 2015-10-28 | 清华大学 | A kind of raster phase modulator for laser interference lithographic system |
| CN104990871A (en) * | 2015-06-16 | 2015-10-21 | 电子科技大学 | Optical waveguide biochemical sensor with grating annulet intermodulation structure |
| CN105929587B (en) * | 2016-06-24 | 2022-09-30 | 京东方科技集团股份有限公司 | Display device |
| CN107238940B (en) * | 2017-07-14 | 2020-07-07 | 长春理工大学 | Lobster eye structure with micro-shaping surface |
| CN107728314B (en) * | 2017-08-17 | 2020-12-04 | 中国科学院光电技术研究所 | Array beam deflection method based on rotary double blazed gratings |
| CN108710177B (en) * | 2018-04-20 | 2020-02-07 | 天津大学 | Off-axis optical fiber rotary connector |
| CN114911058B (en) * | 2022-05-16 | 2024-04-09 | 北京至格科技有限公司 | Method for realizing single-chip full color by utilizing diffraction optical waveguide, diffraction optical waveguide and equipment |
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| CN101710191A (en) | 2010-05-19 |
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Granted publication date: 20110817 Termination date: 20201117 |