CN101710092A - Method for designing graphite type atomic oxygen density sensor - Google Patents
Method for designing graphite type atomic oxygen density sensor Download PDFInfo
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- CN101710092A CN101710092A CN200910235753A CN200910235753A CN101710092A CN 101710092 A CN101710092 A CN 101710092A CN 200910235753 A CN200910235753 A CN 200910235753A CN 200910235753 A CN200910235753 A CN 200910235753A CN 101710092 A CN101710092 A CN 101710092A
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- atomic oxygen
- graphite film
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Abstract
The invention relates to a method for designing a graphite type atomic oxygen density sensor, which belongs to the technical field of gas detection. The method comprises the following steps of: firstly, preparing two pairs of gold electrodes with the same sizes on an aluminum oxide ceramic substrate, and preparing a graphite film in the middle of the gold electrodes to form two graphite film resistors with the same sizes; secondly, forming a through hole of which the size is the same as that of the graphite film on a cover plate and an insulation pad; and finally, placing the ceramic substrate on a base, tightly connecting a leading wire to the gold electrodes, then covering the insulation pad and the cover plate, and screwing down the cover plate on the base by using screws to form the atomic oxygen density sensor. When the sensor is exposed in atomic oxygen, the atomic oxygen corrodes the graphite film to increase the resistance of the graphite film. The graphite type atomic oxygen density sensor measures the resistance changes of the graphite film in a unit time and calculates the density of the atomic oxygen acting on the graphite film to fulfill the aim of detecting the density of the atomic oxygen. The graphite type atomic oxygen density sensor has good continuous response characteristic to the atomic oxygen and can be used for detecting the atomic oxygen density of a ground simulation device and the atomic oxygen density in a space environment.
Description
Technical field
This patent relates to a kind of preparation method of graphite type atomic oxygen density sensor.The atomic oxygen density that sensor can be used in ground-based simulation equipment and the Low Earth Orbit environment is surveyed, and belongs to the detection of gas field.
Background technology
At the Low Earth Orbit of 200km-700km, elemental oxygen is the principal ingredient of remaining atmosphere, and its density is 10
9～10
5Atoms/cm
3About.Though density is not very big, because the high-speed flight (7.8km/s) of spacecraft, the unit interval inner impact then reaches 10 to the elemental oxygen quantity on the spacecraft per surface area
13～10
15Atoms/cm
2S, quantity is quite surprising.
Elemental oxygen is very strong oxygenant, chemical property is extremely active, machinery, optical property, electric property that can make the spacecraft surfacing etc. changes, thereby influences the serviceable life of material, is one of principal element of low orbit spacecraft surfacing performance degradation.The usability of spacecraft surfacing in the atomic oxygen environment of space is not only relevant with the atomic oxygen erodes rate of material itself with the life-span, and be also relevant at the atomic oxygen density that rail meets with spacecraft.And the space atomic oxygen density, have only the distribution of having grasped the space elemental oxygen, Changing Pattern and effect that the spacecraft surfacing is produced after, could estimate serviceable life of spacecraft surfacing exactly.Therefore, need survey the space elemental oxygen.Developing fast and accurately, the elemental oxygen detector is a main method of obtaining the space atomic oxygen density.And atomic oxygen sensor is the core component of detector, is determining the performance and the life-span of detector.
Atomic oxygen sensor mainly contains types such as graphite, silver, osmium, zinc paste.Wherein, silver forms solid-state loose silver oxide with the elemental oxygen reaction, and the continuation of elemental oxygen and internal layer silverskin is reacted inhibition, and the variation of probe resistivity is non-linear, and detecting error is bigger; Osmium and elemental oxygen reaction rate are low, the time resolution rate variance; The zinc paste sensor needs regeneration in atomic oxygen environment, complex structure, and power consumption is big.Compare with above-mentioned atomic oxygen sensor, the graphite atomic oxygen sensor has that structure is simple relatively, reaction velocity is fast, good linearity, can continuous probe characteristics.
Summary of the invention
The objective of the invention is in order to overcome slow, the shortcoming that can not continuous coverage of other atomic oxygen density sensing arrangement complexity, reaction velocity, propose a kind of method for designing of graphite type atomic oxygen density sensor, be used for the atomic oxygen density of continuous probe ground-based simulation equipment and space environment.
The objective of the invention is to be achieved through the following technical solutions.
A kind of graphite type atomic oxygen density sensor of the present invention comprises base, insulating mat, potsherd, graphite film, cover plate, lead-in wire, gold electrode composition; Its annexation is: insulating mat is placed within the base, places on the ceramic substrate on the insulating mat; Deposition graphite film and electrode on the ceramic substrate, graphite film links to each other with electrode; Lead-in wire links to each other with electrode, and is last, and cover plate and base are screwed down, and forms the graphite type atomic oxygen density detector.
The method for designing of a kind of graphite type atomic oxygen density sensor of the present invention is: the gold electrode that at first prepares two pairs of same sizes on ceramic substrate, then at gold electrode intermediate preparation graphite film, form the graphite film resistor of two same sizes, one of them graphite film resistor is exposed in the elemental oxygen, another graphite film resistor does not expose in the elemental oxygen, as reference resistance; On cover plate and insulating mat, open a size and the measure-alike through hole of graphite film; Ceramic substrate places on the base, and lead closely links to each other with gold electrode, covers insulating mat and cover plate then, and with screw cover plate and base is tightened, and is graphite type atomic oxygen density sensor;
Described ceramic substrate is made by the aluminium oxide ceramics more than 96%;
When sensor was exposed in the elemental oxygen, the atomic oxygen erodes graphite film increased graphite film resistor; By the variation of measuring unit's graphite resistance in the time, calculate and act on atomic oxygen density size on the graphite film, promptly detectable atomic oxygen density.
The principle of such scheme is: utilize the oxidation of elemental oxygen to graphite material, make graphite oxidation generate CO or CO
2Gaseous volatilization falls, and the thickness attenuation of graphite film causes the graphite resistance value to increase; By measuring the resistance value that graphite increases, can calculate graphite by the volume of elemental oxygen oxidation; Because with a kind of graphite film atomic oxygen erodes rate is a fixed value, therefore, can calculate and degrade atomic oxygen flux and the density that graphite film stands.
Beneficial effect
The present invention's advantage compared with prior art is: the present invention adopts graphite film as the elemental oxygen sensitive thin film, compare with silverskin sensor, osmium film sensors and zinc paste sensor, advantage such as have that response speed is fast, resistance variations and the good linearity of action of atomic oxygen time, life-span are long, simple for production can be measured atomic oxygen density continuously.
Description of drawings
Fig. 1-graphite sensor assembling figure of the present invention;
Fig. 2-electrode and lead-in wire;
Fig. 3-graphite film;
Fig. 4-cover plate;
Atomic oxygen density curve in the on-axis source microwave atomic oxygen ground-based simulation equipment of Fig. 5-record with graphite sensor of the present invention;
On-axis source microwave atomic oxygen ground-based simulation equipment atomic oxygen flux and the time relation curve of Fig. 6-record with graphite sensor of the present invention;
Among the figure: 1-base, 2-insulating mat, 3-potsherd, 4-graphite film, 5-cover plate, 6-lead-in wire, 7-gold electrode.
Embodiment
Below in conjunction with accompanying drawing the present invention is further described.
As shown in Figure 1, be a kind of graphite type atomic oxygen density sensor of the present invention, it is made up of base 1, insulating mat 2, ceramic substrate 3, graphite film 4, cover plate 5, lead-in wire 6 and gold electrode 7.Wherein, insulating mat 2 is placed within the base 1, places on the ceramic substrate 3 on the insulating mat 2; Deposition graphite film 4 and electrode 7 on the ceramic substrate 3, graphite film 4 links to each other with electrode 7; Lead-in wire 6 links to each other with electrode 7, and is last, cover plate 5 and base 1 screwed down composition graphite type atomic oxygen density detector.
Preparation method of the present invention is: the gold electrode 7 of two pairs of same sizes of sputtering sedimentation on ceramic substrate 3 at first, and printing graphite film 4 in the middle of gold electrode then forms the graphite film resistor of two same sizes; On cover plate 5 and insulating mat 2, open a size and the measure-alike through hole of graphite film; Ceramic substrate 3 is put on the base 1, and lead-in wire 6 closely links to each other with gold electrode 7, covers insulating mat and cover plate then, and with screw cover plate and base is tightened.
The function of graphite type atomic oxygen density sensor is the space exploration atomic oxygen density.Graphite type atomic oxygen density sensor is placed space atomic oxygen environment or ground elemental oxygen equipment, and graphite film and elemental oxygen produce oxidation, and the resistance of graphite film is changed.By measuring the resistance variations of graphite film, extrapolate in the unit interval elemental oxygen quantity with the graphite effect, measure atomic oxygen density thereby reach.Thereby provide foundation the serviceable life in atomic oxygen environment for estimating material.
As Fig. 5, Fig. 6, this atomic oxygen sensor is put into on-axis source microwave atomic oxygen ground-based simulation equipment, recorded atomic oxygen density and flux.In process of the test, owing to keep discharge parameter constant, therefore, the density of elemental oxygen does not change, and behind the sensor steady operation, the atomic oxygen density that records is a straight line, and the linear increase along with the increase of time of accumulative total flux illustrates that this working sensor is normal, functional.
Claims (1)
1. the method for designing of a graphite type atomic oxygen density sensor, comprise base (1), insulating mat (2), ceramic substrate (3), graphite film (4), cover plate (5), lead-in wire (6) and gold electrode (7), it is characterized in that: the gold electrode that at first on ceramic substrate, prepares two pairs of same sizes, then at gold electrode intermediate preparation graphite film, form the graphite film resistor of two same sizes, one of them graphite film resistor is exposed in the elemental oxygen, another graphite film resistor does not expose in the elemental oxygen, as reference resistance; On cover plate and insulating mat, open a size and the measure-alike through hole of graphite film; Ceramic substrate places on the base, and lead closely links to each other with gold electrode, covers insulating mat and cover plate then, and with screw cover plate and base is tightened, and is graphite type atomic oxygen density sensor;
Described ceramic substrate is made by the aluminium oxide ceramics more than 96%;
When sensor was exposed in the elemental oxygen, the atomic oxygen erodes graphite film increased graphite film resistor; By the variation of measuring unit's graphite resistance in the time, calculate and act on atomic oxygen density size on the graphite film, promptly detectable atomic oxygen density.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910235753XA CN101710092B (en) | 2009-10-13 | 2009-10-13 | Method for designing graphite type atomic oxygen density sensor |
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|---|---|---|---|
| CN200910235753XA CN101710092B (en) | 2009-10-13 | 2009-10-13 | Method for designing graphite type atomic oxygen density sensor |
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| CN101710092B CN101710092B (en) | 2011-10-05 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102455273A (en) * | 2010-10-28 | 2012-05-16 | 北京卫星环境工程研究所 | Method for measuring atomic oxygen flux density |
| CN102998342A (en) * | 2012-11-26 | 2013-03-27 | 中国人民解放军国防科学技术大学 | Silver film resistor-type atomic oxygen sensor, atomic oxygen detector and application methods thereof |
| CN107748185A (en) * | 2017-09-01 | 2018-03-02 | 兰州空间技术物理研究所 | A kind of elemental oxygen fluence measuring method and atomic oxygen sensor |
| CN111157585A (en) * | 2020-01-03 | 2020-05-15 | 北京卫星环境工程研究所 | Space atomic oxygen fluence detection method based on graphene |
-
2009
- 2009-10-13 CN CN200910235753XA patent/CN101710092B/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102455273A (en) * | 2010-10-28 | 2012-05-16 | 北京卫星环境工程研究所 | Method for measuring atomic oxygen flux density |
| CN102455273B (en) * | 2010-10-28 | 2015-04-08 | 北京卫星环境工程研究所 | Method for measuring atomic oxygen flux density |
| CN102998342A (en) * | 2012-11-26 | 2013-03-27 | 中国人民解放军国防科学技术大学 | Silver film resistor-type atomic oxygen sensor, atomic oxygen detector and application methods thereof |
| CN107748185A (en) * | 2017-09-01 | 2018-03-02 | 兰州空间技术物理研究所 | A kind of elemental oxygen fluence measuring method and atomic oxygen sensor |
| CN111157585A (en) * | 2020-01-03 | 2020-05-15 | 北京卫星环境工程研究所 | Space atomic oxygen fluence detection method based on graphene |
| CN111157585B (en) * | 2020-01-03 | 2022-10-28 | 北京卫星环境工程研究所 | Space atomic oxygen fluence detection method based on graphene |
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| Publication number | Publication date |
|---|---|
| CN101710092B (en) | 2011-10-05 |
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