CN101710091B - Graphite type atomic oxygen density sensor - Google Patents
Graphite type atomic oxygen density sensor Download PDFInfo
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- CN101710091B CN101710091B CN2009102357525A CN200910235752A CN101710091B CN 101710091 B CN101710091 B CN 101710091B CN 2009102357525 A CN2009102357525 A CN 2009102357525A CN 200910235752 A CN200910235752 A CN 200910235752A CN 101710091 B CN101710091 B CN 101710091B
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- atomic oxygen
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- graphite film
- ceramic substrate
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Abstract
The invention relates to a graphite type atomic oxygen density sensor, which belongs to the technical field of gas detection. The graphite type atomic oxygen density sensor comprises a base, an insulation pad, a ceramic substrate, a graphite film, a cover plate, a leading wire and a gold electrode, wherein the insulation pad is arranged in the base; the ceramic substrate is arranged above the insulation pad; the graphite film and the electrode are deposited on the ceramic substrate; and the graphite film is connected with the electrode. The graphite type atomic oxygen density sensor is prepared by the following steps: preparing the gold electrode on the ceramic substrate, and then preparing the graphite film in the middle of the gold electrode to form a graphite film resistor; forming a through hole of which the size is the same as that of the graphite film on the cover plate and the insulation pad; and putting the ceramic substrate on the base, tightly connecting the leading wire to the gold electrode, then covering the insulation pad and the cover plate, and screwing down the cover plate on the base by using screws to form the graphite type atomic oxygen density sensor. The graphite type atomic oxygen density sensor can be used for detecting the atomic oxygen density of a ground simulation device and the atomic oxygen density in a space environment.
Description
Technical field
This patent relates to a kind of graphite type atomic oxygen density sensor.The atomic oxygen density that sensor can be used in ground-based simulation equipment and the Low Earth Orbit environment is surveyed, and belongs to the detection of gas field.
Background technology
At the Low Earth Orbit of 200km-700km, elemental oxygen is the principal ingredient of remaining atmosphere, and its density is 10
9～10
5Atoms/cm
3About.Though density is not very big, because the high-speed flight (7.8km/s) of spacecraft, the unit interval inner impact then reaches 10 to the elemental oxygen quantity on the spacecraft per surface area
13～10
15Atoms/cm
2S, quantity is quite surprising.
Elemental oxygen is very strong oxygenant, chemical property is extremely active, machinery, optical property, electric property that can make the spacecraft surfacing etc. changes, thereby influences the serviceable life of material, is one of principal element of low orbit spacecraft surfacing performance degradation.The usability of spacecraft surfacing in the atomic oxygen environment of space is not only relevant with the atomic oxygen erodes rate of material itself with the life-span, and be also relevant at the atomic oxygen density that rail meets with spacecraft.And the space atomic oxygen density, have only the distribution of having grasped the space elemental oxygen, Changing Pattern and effect that the spacecraft surfacing is produced after, could estimate serviceable life of spacecraft surfacing exactly.Therefore, need survey the space elemental oxygen.Developing fast and accurately, the elemental oxygen detector is a main method of obtaining the space atomic oxygen density.And atomic oxygen sensor is the core component of detector, is determining the performance and the life-span of detector.
Atomic oxygen sensor mainly contains types such as graphite, silver, osmium, zinc paste.Wherein, silver forms solid-state loose silver oxide with the elemental oxygen reaction, and the continuation of elemental oxygen and internal layer silverskin is reacted inhibition, and the variation of probe resistivity is non-linear, and detecting error is bigger; Osmium and elemental oxygen reaction rate are low, the time resolution rate variance; The zinc paste sensor needs regeneration in atomic oxygen environment, complex structure, and power consumption is big.Compare with above-mentioned atomic oxygen sensor, the graphite atomic oxygen sensor has that structure is simple relatively, reaction velocity is fast, good linearity, can continuous probe advantage.
Summary of the invention
The objective of the invention is in order to overcome slow, the shortcoming that can not continuous coverage of other atomic oxygen density sensing arrangement complexity, reaction velocity, propose a kind of graphite type atomic oxygen density sensor, be used for the atomic oxygen density of continuous probe ground-based simulation equipment and space environment.
The objective of the invention is to be achieved through the following technical solutions.
A kind of graphite type atomic oxygen density sensor of the present invention comprises base, insulating mat, ceramic substrate, graphite film, cover plate, lead-in wire, gold electrode; Its annexation is: insulating mat is placed within the base, and ceramic substrate is placed on the insulating mat; Deposition graphite film and gold electrode on the ceramic substrate, graphite film links to each other with gold electrode; Lead-in wire links to each other with electrode, and is last, and cover plate and base are screwed down, and forms graphite type atomic oxygen density sensor.
Described ceramic substrate is made by the aluminium oxide ceramics more than 96%.
On with a slice ceramic substrate, prepare two measure-alike graphite film resistor, one of them graphite film resistor can be exposed in the elemental oxygen, and another graphite film resistor does not expose in the elemental oxygen, as reference resistance.
Its preparation method is: the gold electrode of two pairs of same sizes of sputtering sedimentation on ceramic substrate, in the middle of gold electrode, print graphite film then, and form the graphite film resistor of two same sizes; On cover plate and insulating mat, open a size and the measure-alike through hole of graphite film; Ceramic substrate is put on the base, and lead-in wire closely links to each other with gold electrode, covers insulating mat and cover plate then, and with screw cover plate and base is tightened.
The principle of such scheme is: utilize the oxidation of elemental oxygen to graphite material, make graphite oxidation generate CO or CO
2Gaseous volatilization falls, and the thickness attenuation of graphite film causes the graphite resistance value to increase; By measuring the resistance value that graphite increases, can calculate graphite by the volume of elemental oxygen oxidation; Because with a kind of graphite film atomic oxygen erodes rate is a fixed value, therefore, can calculate and degrade atomic oxygen flux and the density that graphite film stands.
Beneficial effect
The present invention's advantage compared with prior art is: the present invention adopts graphite film as the elemental oxygen sensitive thin film, compare with silverskin sensor, osmium film sensors and zinc paste sensor, advantage such as have that response speed is fast, resistance variations and the good linearity of action of atomic oxygen time, life-span are long, simple for production can be measured atomic oxygen density continuously.
Description of drawings
Fig. 1-graphite sensor assembling figure of the present invention;
Fig. 2-electrode and lead-in wire;
Fig. 3-graphite film;
Fig. 4-cover plate;
Atomic oxygen density curve in the on-axis source microwave atomic oxygen ground-based simulation equipment of Fig. 5-record with graphite sensor of the present invention;
Atomic oxygen flux and time relation curve in the on-axis source microwave atomic oxygen ground-based simulation equipment of Fig. 6-record with graphite sensor of the present invention;
Among the figure, 1-base, 2-insulating mat, 3-ceramic substrate, 4-graphite film, 5-cover plate, 6-lead-in wire, 7-gold electrode.
Embodiment
Below in conjunction with accompanying drawing the present invention is further described.
As shown in Figure 1, be a kind of graphite type atomic oxygen density sensor of the present invention, citation form promptly of the present invention.It is made up of base 1, insulating mat 2, ceramic substrate 3, graphite film 4, cover plate 5, lead-in wire 6 and gold electrode 7.Wherein, insulating mat 2 is placed within the base 1, and ceramic substrate 3 is placed on the insulating mat 2; Deposition graphite film 4 and electrode 7 on the ceramic substrate 3, graphite film 4 links to each other with electrode 7; Lead-in wire 6 links to each other with electrode 7, and is last, cover plate 5 and base 1 screwed down composition graphite type atomic oxygen density detector.
The function of graphite type atomic oxygen density sensor is the space exploration atomic oxygen density.Graphite type atomic oxygen density sensor is placed space atomic oxygen environment or ground elemental oxygen equipment, and graphite film and elemental oxygen produce oxidation, and the resistance of graphite film is changed.By measuring the resistance variations of graphite film, extrapolate in the unit interval and the elemental oxygen quantity of graphite effect, thereby reach the purpose of measuring atomic oxygen density.Provide foundation the serviceable life in atomic oxygen environment for estimating material.
This atomic oxygen sensor is put into on-axis source microwave atomic oxygen ground-based simulation equipment, recorded atomic oxygen density and flux.In process of the test, owing to keep discharge parameter constant, therefore, the density of elemental oxygen does not change, and behind the sensor steady operation, the atomic oxygen density that records is a straight line, and the linear increase along with the increase of time of accumulative total flux illustrates that this working sensor is normal, functional.As Fig. 5, shown in Figure 6.
Claims (2)
1. graphite type atomic oxygen density sensor, it is characterized in that: comprise base (1), first insulating mat, second insulating mat, ceramic substrate (3), graphite film (4), cover plate (5), lead-in wire (6) and gold electrode (7), its annexation is: first insulating mat is placed on the base, and ceramic substrate is placed on first insulating mat; Deposition graphite film and gold electrode on the ceramic substrate, graphite film links to each other with gold electrode; Its preparation process is: the gold electrode that at first prepares two pairs of same sizes on ceramic substrate, then at gold electrode intermediate preparation graphite film, form the graphite film resistor of two same sizes, one of them graphite film resistor is exposed in the elemental oxygen, another graphite film resistor does not expose in the elemental oxygen, as reference resistance; On the cover plate and second insulating mat, open a size and the measure-alike through hole of graphite film; Lead-in wire closely links to each other with gold electrode, covers second insulating mat and cover plate then, and with screw cover plate and base is tightened, and forms graphite type atomic oxygen density sensor.
2. graphite type atomic oxygen density acquisition sensor according to claim 1 is characterized in that: described ceramic substrate is made by the aluminium oxide ceramics more than 96%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102357525A CN101710091B (en) | 2009-10-13 | 2009-10-13 | Graphite type atomic oxygen density sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102357525A CN101710091B (en) | 2009-10-13 | 2009-10-13 | Graphite type atomic oxygen density sensor |
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| Publication Number | Publication Date |
|---|---|
| CN101710091A CN101710091A (en) | 2010-05-19 |
| CN101710091B true CN101710091B (en) | 2011-10-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009102357525A Active CN101710091B (en) | 2009-10-13 | 2009-10-13 | Graphite type atomic oxygen density sensor |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107748185A (en) * | 2017-09-01 | 2018-03-02 | 兰州空间技术物理研究所 | A kind of elemental oxygen fluence measuring method and atomic oxygen sensor |
| CN109060894A (en) * | 2018-07-09 | 2018-12-21 | 兰州空间技术物理研究所 | A kind of atomic oxygen sensor and preparation method thereof based on grapheme material |
| CN109781787A (en) * | 2019-01-15 | 2019-05-21 | 北京卫星环境工程研究所 | The elemental oxygen detection device and manufacturing method of polymer and conductive film MULTILAYER COMPOSITE |
| CN113945485A (en) * | 2021-11-22 | 2022-01-18 | 上海空间电源研究所 | Device and method for measuring atomic oxygen flux density |
-
2009
- 2009-10-13 CN CN2009102357525A patent/CN101710091B/en active Active
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| Publication number | Publication date |
|---|---|
| CN101710091A (en) | 2010-05-19 |
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