CN101710017B - Leak detection method of vacuum system - Google Patents
Leak detection method of vacuum system Download PDFInfo
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- CN101710017B CN101710017B CN2009102593161A CN200910259316A CN101710017B CN 101710017 B CN101710017 B CN 101710017B CN 2009102593161 A CN2009102593161 A CN 2009102593161A CN 200910259316 A CN200910259316 A CN 200910259316A CN 101710017 B CN101710017 B CN 101710017B
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- vacuum
- mass spectrometer
- quadrupole mass
- vacuum tank
- leak detection
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Abstract
The invention relates to a leak detection method of a vacuum system, in particular to a method for implementing the leak detection of the vacuum system by adopting a quadrupole mass spectrometer, which belongs to the technical field of measurement. A leak detection device consists of a block valve, a vacuum gauge, a vacuum container, a quadrupole mass spectrometer and an air pump set, wherein the block valve is connected with the vacuum container through a pipe; the air pump set is connected with the vacuum container to pump air out from the container; and the vacuum gauge and the quadrupole mass spectrometer are connected together with the vacuum container. The device and the method have the advantages that leak detection of the vacuum system is implemented by adopting a method which analyzes residual gas compositions inside the vacuum system by means of the quadrupole mass spectrometer, thereby sovling leak detection problems of tiny leak holes; and the device also has high sensitivity, efficiency and reliability during leak detection.
Description
Technical field
The method of a kind of vacuum system leak detection of the present invention particularly adopts quadrupole mass spectrometer to realize the method for vacuum system leak detection, belongs to field of measuring technique.
Background technology
Vacuum leak hunting is exactly will show with certain means to leak a certain side that material is added to the wall of tested workpiece, suspects at opposite side that the place that leakage is arranged is detected by what small opening was overflowed with instrument or a certain method and shows the leakage material, thereby reach the purpose of detection.Document " reach peace. vacuum design handbook (the 3rd edition) National Defense Industry Press; 2004. " in introduced present vacuum system the leak hunting method that generally adopts, the document is pointed out in vacuum leak hunting, usually adopt helium mass spectrometer leak detector to hunt leak, method is that helium mass spectrometer leak detector is connected to the bleed high vacuum end of forepump of unit of vacuum system, leak the position that the winding-up of material helium may be leaked with showing, the reading by helium mass spectrometer leak detector changes and has determined whether leakage.
The weak point of this method is to work as the extreme pressure of vacuum system less than 10
-7During Pa, common helium mass spectrometer leak detector can't detect minimum leak rate, and (the leak rate value is less than 10
-12Pa.m
3/ s) small opening.
Summary of the invention
The objective of the invention is provides a kind of device and method of vacuum system leak detection in order to overcome the weak point of existing leakage detecting instrument and method, and this method adopts quadrupole mass spectrometer to carry out the method that minimum small opening is hunted leak, and has solved the leak detection problem of vacuum system.
The objective of the invention is to be achieved through the following technical solutions.
The device of the vacuum system leak detection that the present invention adopts is made up of shutdown valve, vacuum gauge, vacuum tank, quadrupole mass spectrometer and the unit of bleeding; Its annexation is: shutdown valve links to each other with vacuum tank by pipeline, and the unit of bleeding links to each other with vacuum tank and therefrom gas bleeding, and vacuum gauge, quadrupole mass spectrometer and vacuum tank connect together.
The method of a kind of vacuum system leak detection of the present invention, its concrete implementation step is as follows:
1) the moving unit of bleeding of shoulder, gas bleeding from vacuum tank;
2) shutdown valve, vacuum gauge, vacuum tank and quadrupole mass spectrometer are carried out bakeout degassing, after baking temperature rises to separately peak respectively with the uniform speed, keep 60～80h, and then reduce to room temperature gradually with the uniform speed, continue the 24～48h that bleeds, with the vacuum tightness in the vacuum gauge monitoring vacuum tank, the extreme pressure in vacuum tank is less than 10
-7The Pa order of magnitude;
3) open the quadrupole mass spectrometer power supply, after pilot lamp Ready becomes green,, SEM and Emission are lighted by software by the working software of computer run quadrupole mass spectrometer;
4) more than quadrupole mass spectrometer working stability 1～3h;
5) determine by the spectrogram of quadrupole mass spectrometer analysis residual gas whether vacuum tank has leakage.
Described step 2) vacuum gauge in is superelevation/extra-high vacuum ionization gauge.
The present invention's beneficial effect compared with prior art is:
1) realizes vacuum system is hunted leak by the method for utilizing quadrupole mass spectrometer to analyze vacuum system residual gas composition, solved the leak detection problem of minimum small opening;
2) Jian Lou sensitivity, efficient and reliability height.
Description of drawings
Fig. 1 is the structure drawing of device of vacuum system leak detection of the present invention;
Wherein, 1-shutdown valve, 2-vacuum gauge, 3-vacuum tank, 4-quadrupole mass spectrometer, the 5-unit of bleeding.
Embodiment
As shown in Figure 1, for the device of vacuum system leak detection of the present invention, form by shutdown valve 1, vacuum gauge 2, vacuum tank 3, quadrupole mass spectrometer 4 and the unit 5 of bleeding.
Embodiment
1) starts the unit 5 of bleeding, gas bleeding from vacuum tank 3.
2) to shutdown valve 1, vacuum gauge 2, vacuum tank 3 and quadrupole mass spectrometer 4 carry out bakeout degassing, the highest baking temperature of vacuum tank 3 is 300 ℃, shutdown valve 1, the highest baking temperature of vacuum gauge 2 and quadrupole mass spectrometer 4 is 150 ℃, begin to heat up from room temperature with the uniform speed of 30 ℃/h, intensification keeps 72h after reaching separately maximum temperature, uniform speed with 30 ℃/h lowers the temperature then, when temperature reaches 100 ℃, stopping baking allowing it lower the temperature naturally, continue then to bleed, with the vacuum tightness in the vacuum gauge 2 monitoring vacuum tanks 3, the extreme pressure in vacuum tank 3 reaches 10
-8The Pa order of magnitude.
3) open quadrupole mass spectrometer 4 power supplys, after pilot lamp Ready becomes green,, SEM and Emission are lighted by software by the working software of computer run quadrupole mass spectrometer 4;
4) quadrupole mass spectrometer 4 working stability 3h;
5) spectrogram of analyzing residual gas by quadrupole mass spectrometer 4 determines whether vacuum tank 3 has leakage, and concrete determination methods is:
A, elder generation carry out simulated spectrum scanning with quadrupole mass spectrometer 4 in the mass range of (1～50) amu, if N
2, O
2The ratio of peak of two kinds of gases is approximately 4: 1, but also has the Ar peak, and then vacuum tank 3 has leakage;
B, for through the vacuum tank 3 of thorough bakeout degassing, the airborne N described in the dependence method (a)
2-O
2Distribution characteristics might can't identify small opening, this be because usually wall in for a long time to O
2Have the strong effect of bleeding, therefore in spectrogram, can't see O
2, and N
2Usually covered by CO, at this moment available quadrupole mass spectrometer 4 is 14 (N in mass number
2 ++) and 40 (Ar
+) the spectrum peak located judges that if its spectrum peak is very high, then vacuum tank 3 has leakage.
Claims (2)
1. the method for vacuum system leak detection, it is characterized in that: the vacuum system leakage detection apparatus that this method adopts is made up of shutdown valve (1), vacuum gauge (2), vacuum tank (3), quadrupole mass spectrometer (4) and the unit of bleeding (5); Its annexation is: shutdown valve (1) links to each other with vacuum tank (3) by pipeline, and the unit of bleeding (5) links to each other with vacuum tank (3) and therefrom gas bleeding, and vacuum gauge (2), quadrupole mass spectrometer (4) connect together with vacuum tank (3);
The concrete steps of this method are:
1) starts the unit (5) of bleeding, gas bleeding from vacuum tank (3);
2) shutdown valve (1), vacuum gauge (2), vacuum tank (3) and quadrupole mass spectrometer (4) are carried out bakeout degassing, after baking temperature rises to separately peak respectively with the uniform speed, keep 60～80h, and then reduce to room temperature gradually with the uniform speed, continue the 24～48h that bleeds, with the vacuum tightness in vacuum gauge (2) the monitoring vacuum tank (3), the extreme pressure in vacuum tank (3) is less than 10
-7The Pa order of magnitude;
3) open quadrupole mass spectrometer (4) power supply, after pilot lamp Ready becomes green,, SEM and Emission are lighted by software by the working software of computer run quadrupole mass spectrometer (4);
4) more than quadrupole mass spectrometer (4) working stability 1～3h;
5) determine by the spectrogram of quadrupole mass spectrometer (4) analysis residual gas whether vacuum tank (3) has leakage.
2. according to the method for a kind of vacuum system leak detection described in the claim 1, it is characterized in that: the vacuum gauge described step 2) is superelevation/extra-high vacuum ionization gauge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102593161A CN101710017B (en) | 2009-12-17 | 2009-12-17 | Leak detection method of vacuum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102593161A CN101710017B (en) | 2009-12-17 | 2009-12-17 | Leak detection method of vacuum system |
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| Publication Number | Publication Date |
|---|---|
| CN101710017A CN101710017A (en) | 2010-05-19 |
| CN101710017B true CN101710017B (en) | 2011-02-16 |
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|---|---|---|---|
| CN2009102593161A Active CN101710017B (en) | 2009-12-17 | 2009-12-17 | Leak detection method of vacuum system |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102928154B (en) * | 2012-11-27 | 2014-05-28 | 中国航天科技集团公司第五研究院第五一〇研究所 | Method for reducing error in polar altitude vacuum measurement of ESD (Electro Simulated Desorption) neutral particles |
| WO2014180469A1 (en) * | 2013-05-07 | 2014-11-13 | Lüdolph Management GmbH | Leak test arrangement and leak test method |
| CN104697579B (en) * | 2015-02-10 | 2017-05-24 | 兰州空间技术物理研究所 | Cryogenic container comprehensive performance detecting device |
| CN112542254A (en) * | 2020-11-24 | 2021-03-23 | 中国科学院合肥物质科学研究院 | Remote leak detection system applied to fusion reactor and leak detection method thereof |
| CN113686493B (en) * | 2021-08-25 | 2022-05-31 | 安徽诺益科技有限公司 | Calibration system and calibration method for helium mass spectrometer leak detector |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19504278A1 (en) * | 1995-02-09 | 1996-08-14 | Leybold Ag | Test gas leak detector |
| US5561240A (en) * | 1994-06-29 | 1996-10-01 | Nihon Shinku Gijutsu Kabushiki Kaisha | Leak detecting apparatus using compound turbo-molecular pump |
| CN101470045A (en) * | 2007-12-28 | 2009-07-01 | 中国航天科技集团公司第五研究院第五一〇研究所 | Ni-H2 accumulator hydrogen working medium leakage detection system |
-
2009
- 2009-12-17 CN CN2009102593161A patent/CN101710017B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5561240A (en) * | 1994-06-29 | 1996-10-01 | Nihon Shinku Gijutsu Kabushiki Kaisha | Leak detecting apparatus using compound turbo-molecular pump |
| DE19504278A1 (en) * | 1995-02-09 | 1996-08-14 | Leybold Ag | Test gas leak detector |
| CN101470045A (en) * | 2007-12-28 | 2009-07-01 | 中国航天科技集团公司第五研究院第五一〇研究所 | Ni-H2 accumulator hydrogen working medium leakage detection system |
Non-Patent Citations (3)
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| 姜万顺.四极质谱计在容器累计检漏中的应用.《真空与低温》.1986,(第4期),21-25. * |
| 成永军，等.极高真空校准室内残余气体的成分分析.《真空科学与技术学报》.2010,第30卷(第1期),54-59. |
| 成永军等.极高真空校准室内残余气体的成分分析.《真空科学与技术学报》.2010,第30卷(第1期),54-59. * |
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| CN101710017A (en) | 2010-05-19 |
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