CN113686493B - Calibration system and calibration method for helium mass spectrometer leak detector - Google Patents
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- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
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Abstract
The invention discloses a calibration system of a helium mass spectrometer leak detector, which belongs to the technical field of helium mass spectrometer leak detectors and comprises an acquisition module, a processing module and a calibration module, wherein the acquisition module comprises a first acquisition unit, a second acquisition unit and a third acquisition unit, and the first acquisition unit is used for acquiring electrical information of the helium mass spectrometer leak detector; the second acquisition unit is used for acquiring pumping information of the helium mass spectrometer leak detector; the third acquisition unit is used for acquiring mass spectrum information of the helium mass spectrometer leak detector; the processing module is used for extracting and processing the characteristics of each item of collected data to obtain a characteristic processing set; the calibration module is used for analyzing and calibrating the helium mass spectrometer leak detector according to the characteristic processing set to obtain a calibration result; the invention also discloses a calibration method of the helium mass spectrometer leak detector calibration system; the method is used for solving the technical problem that the effect of calibrating the helium mass spectrometer leak detector in the existing scheme is poor.
Description
Technical Field
The invention relates to the technical field of helium mass spectrometer leak detectors, in particular to a calibration system and a calibration method of a helium mass spectrometer leak detector.
Background
The helium mass spectrometer leak detector is a mass spectrometer which uses helium as leak-showing gas and uses a gas analyzer to detect the helium to realize leak detection; helium readily passes through the leak and diffuses rapidly; when the gas leakage detection device is used, the gas is sprayed to a detected container connected with a gas analyzer, and if a leakage hole exists in the detected container, the position of the leakage hole and the size of the gas leakage can be obtained through detection.
When the existing helium mass spectrometer leak detector is used, the helium mass spectrometer leak detector is only detected and calibrated in a single detection mode, for example, the detection result of the helium mass spectrometer leak detector is not accurate due to the fact that the detection analysis is only carried out on power, voltage and current during operation, and therefore the effect of calibrating the helium mass spectrometer leak detector is poor.
Disclosure of Invention
The invention aims to provide a calibration system and a calibration method for a helium mass spectrometer leak detector, which solve the following technical problems: how to solve the not good problem of effect of helium mass spectrometer leak detector calibration among the current scheme.
The purpose of the invention can be realized by the following technical scheme:
the calibration system of the helium mass spectrometer leak detector comprises an acquisition module, a processing module and a calibration module, wherein the acquisition module comprises a first acquisition unit, a second acquisition unit and a third acquisition unit, and the first acquisition unit is used for acquiring electrical information of the helium mass spectrometer leak detector; the second acquisition unit is used for acquiring pumping information of the helium mass spectrometer leak detector; the third acquisition unit is used for acquiring mass spectrum information of the helium mass spectrometer leak detector; the processing module is used for extracting and processing the characteristics of each item of collected data to obtain a characteristic processing set; the calibration module is used for analyzing and calibrating the helium mass spectrometer leak detector according to the characteristic processing set to obtain a calibration result.
The calibration device further comprises a storage module and a prompt module, wherein the storage module is used for storing the calibration result and various preset data; and the prompting module prompts the calibration of the helium mass spectrometer leak detector according to the calibration result.
Further, the electrical information includes a device model, a rated power, an operating power, a rated voltage, and an operating voltage; the pumping information comprises pump model, pump standard power, pump running power, pumping speed and gas volume; the mass spectral information includes the wire type, wire current, and heat rating.
Further, the specific steps of performing feature extraction and processing on each item of collected data include: respectively classifying numbers and texts in the electrical information, the air extraction information and the mass spectrum information to obtain electrical classification information, air extraction classification information and mass spectrum classification information; the electric classification information comprises an electric digital label set and an electric text label set; the air extraction classification information comprises an air extraction digital label set and an air extraction text label set; the mass spectrum classification information comprises a mass spectrum digital tag set and a mass spectrum text tag set;
respectively marking each number in the electric digital label set, the air extraction digital label set and the mass spectrum digital label set, and respectively marking the rated power, the operating power, the rated voltage and the operating voltage in the electric digital label set as B1, B2, B3 and B4; obtaining an electrical digital mark set; the pump standard power, pump operating power, pump evacuation rate, and gas volume in the digital taggant of the evacuation are labeled C1, C2, C3, and C4, respectively; obtaining an air extraction digital mark set; marking the lead current and the rated heat in the mass spectrum digital label concentration as D1 and D2 respectively; obtaining a mass spectrum digital mark set;
respectively carrying out digital processing on each text in the electric text label set, the air extraction text label set and the mass spectrum text label set, and marking the equipment model in the electric text label set as SX; matching the equipment model with a preset equipment model association table to obtain a corresponding set type association value and marking as G1; obtaining an electric text mark set; marking the pump model in the air extraction text label set as BX; matching the pump type with a preset pump type association table to obtain a corresponding pump type association value, and marking as G2; obtaining an air-extracting text mark set; marking the lead type in the mass spectrum text label set as DL; matching the wire type with a preset wire type association table to obtain a corresponding line type association value and marking as G3; obtaining a mass spectrum text mark set; the electric digital mark set and the electric text mark set form an electric mark collection set; the air extraction digital mark set and the air extraction text mark set form an air extraction mark collection; the mass spectrum digital mark set and the mass spectrum text mark set form a mass spectrum mark collection set; and (4) carrying out classification combination on the electric mark collection, the air extraction mark collection and the mass spectrum mark collection to obtain a feature processing collection.
Further, the calibration module comprises a first calibration unit, a second calibration unit and a third calibration unit, wherein the first calibration unit is used for calculating and analyzing the electric mark collection set in the feature processing set to obtain a first calibration set; the second calibration unit is used for calculating and analyzing the pumping mark collection in the feature processing set to obtain a second calibration set; the third calibration unit is used for calculating and analyzing the mass spectrum mark collection set in the feature processing set to obtain a third calibration set.
Further, the specific steps of the first calibration unit for calculating and analyzing the electrical signature sets in the feature processing set include: acquiring various items of data in the electrical mark set, carrying out normalization processing and value taking, and utilizing a formula
And calculating and acquiring an electrical matching coefficient, wherein mu is represented as an electrical compensation factor, the value is 1.96741, a1 and a2 are represented as different proportionality coefficients, the electrical matching coefficient is matched with a preset electrical matching threshold, and if the electrical matching coefficient is larger than the electrical matching threshold, a first calibration instruction is generated.
Further, the specific steps of the second calibration unit for calculating and analyzing the set of pumping signatures in the feature processing set include: obtaining an extraction signatureAll the data in the collection are normalized and valued, and a formula is used
Calculating and obtaining a pumping matching coefficient of pumping, wherein eta is expressed as a pumping compensation factor, the value of eta is 0.85547, b1 and b2 are expressed as different proportionality coefficients, QS is expressed as a standard pumping speed corresponding to the type of the pump, and QT is expressed as a standard pumping volume corresponding to the type of the pump; and matching the matching coefficient with a preset matching threshold, and if the matching coefficient is greater than the matching threshold, generating a second calibration instruction.
Further, the specific steps of the third calibration unit for calculating and analyzing the mass spectrum marker set in the feature processing set include: acquiring various data in a mass spectrum marking set, carrying out normalization processing and value taking, and calculating by using a formula ZP (beta multiplied by G3 x (D1 multiplied by D1 multiplied by R-D2) multiplied by t to acquire a mass matching coefficient of a mass spectrum, wherein beta is expressed as a mass spectrum compensation factor, the value is 0.63842, R is expressed as a lead resistance, and t is expressed as the detection duration; matching the quality matching coefficient with a preset quality matching range, and if the quality matching coefficient does not belong to the quality matching range, generating a third calibration instruction; the electric matching coefficient and the first calibration instruction, the extraction matching coefficient and the second calibration instruction, the quality matching coefficient and the third calibration instruction form a calibration result.
The calibration method of the helium mass spectrometer leak detector calibration system comprises the following specific steps: collecting electrical information, pumping information and mass spectrum information of the helium mass spectrometer leak detector; performing feature extraction and processing on the collected electrical information, the air extraction information and the mass spectrum information to obtain a feature processing set comprising an electrical mark collection, an air extraction mark collection and a mass spectrum mark collection; analyzing and calibrating the helium mass spectrometer leak detector according to the feature processing set to obtain a calibration result comprising an electrical matching coefficient, a first calibration instruction, a matching coefficient extraction, a second calibration instruction, a quality matching coefficient and a third calibration instruction; and calibrating the helium mass spectrometer leak detector according to the first calibration instruction, the second calibration instruction and the third calibration instruction.
The invention has the beneficial effects that:
the acquisition module is used for acquiring the electrical information, the pumping information and the mass spectrum information of the helium mass spectrometer leak detector and acquiring data from different aspects, so that the diversity of the data is improved, and the accuracy of subsequent data calculation can be improved; the collected data are subjected to feature extraction and processing through the processing module to obtain a feature processing set, and the efficiency of data calculation can be improved by processing the collected data; analyzing and calibrating the helium mass spectrometer leak detector through a calibration module according to the characteristic processing set to obtain a calibration result; the data acquisition and the computational analysis are carried out on the helium mass spectrometer leak detector from different aspects, so that the helium mass spectrometer leak detector can be detected from different aspects, effective data support is further provided for the calibration of the helium mass spectrometer leak detector, and the defect that the effect of the calibration of the helium mass spectrometer leak detector is poor due to the fact that the detection is carried out through a single detection mode in the existing scheme is overcome.
Drawings
The invention will be further described with reference to the accompanying drawings.
FIG. 1 is a block diagram of a calibration system for a helium mass spectrometer leak detector of the present invention.
Fig. 2 is a block diagram of the acquisition module of the present invention.
FIG. 3 is a block diagram of the calibration module of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, the calibration system for a helium mass spectrometer leak detector of the present invention includes an acquisition module, a processing module, a calibration module, a storage module and a prompt module, where the storage module is configured to store a calibration result and preset data items, including but not limited to an equipment model association table, a pump model association table, a lead type association table, an electrical matching threshold, a matching threshold and a quality matching range; the prompting module prompts the calibration of the helium mass spectrometer leak detector according to the calibration result;
the helium mass spectrometer leak detector is a special leak detector using helium as leak indicating gas, and has the characteristics of stable performance and high sensitivity; helium mass spectrometer leak detectors generally comprise three parts, an electrical part, a pumping system and a mass spectrometer chamber; wherein, the air pumping system comprises a molecular pump or a mechanical pump and a dry pump; the mass spectrum chamber comprises an ion source, an analyzer, a collector and a cold cathode ionization gauge, wherein the cold cathode replaces a hot cathode to serve as the ion source of the ionization vacuum gauge, and the vacuum degree is measured through discharge current under low pressure by utilizing the ionization and pressure-related characteristics of gas molecules; the core component of the helium mass spectrometer leak detector is a vacuum gauge for detecting helium partial pressure, the vacuum gauge is also called a mass spectrometer or an analyzer, the vacuum gauge can be a Pirani vacuum gauge, a platinum wire with two ends connected with electrodes is arranged in the Pirani vacuum gauge, when current is supplied to the platinum wire through the electrodes, the platinum wire can generate heat, gas molecules collide with the platinum wire, the heat of the platinum wire is removed through heat radiation or fixed heat conduction and other modes, the operation of the vacuum gauge is detected and analyzed from the heat direction, and whether the operation of a mass spectrometer chamber needs to be calibrated or not is judged; in the embodiment, data acquisition and analysis are respectively carried out on different components in the helium mass spectrometer leak detector, and whether the helium mass spectrometer leak detector needs to be calibrated or not is judged from different aspects, so that the accuracy of calibration and analysis can be effectively improved.
Referring to fig. 2, the acquisition module includes a first acquisition unit, a second acquisition unit, and a third acquisition unit, where the first acquisition unit is configured to acquire electrical information of the helium mass spectrometer leak detector, where the electrical information includes a device model, a rated power, an operating power, a rated voltage, and an operating voltage; the second acquisition unit is used for acquiring pumping information of the helium mass spectrometer leak detector, and the pumping information comprises a pump type, pump standard power, pump running power, pumping rate and gas volume; the third acquisition unit is used for acquiring mass spectrum information of the helium mass spectrometer leak detector, wherein the mass spectrum information comprises a lead type, a lead current and rated heat; wherein, each item of rated data can be obtained based on the big data of the prior helium mass spectrometer leak detector;
the processing module is used for extracting and processing the characteristics of each item of collected data to obtain a characteristic processing set; the method comprises the following specific steps: respectively classifying numbers and texts in the electrical information, the air extraction information and the mass spectrum information to obtain electrical classification information, air extraction classification information and mass spectrum classification information; the electric classification information comprises an electric digital label set and an electric text label set; the air extraction classification information comprises an air extraction digital label set and an air extraction text label set; the mass spectrum classification information comprises a mass spectrum digital tag set and a mass spectrum text tag set;
respectively marking each number in the electric digital label set, the air extraction digital label set and the mass spectrum digital label set, and respectively marking the rated power, the operating power, the rated voltage and the operating voltage in the electric digital label set as B1, B2, B3 and B4; obtaining an electrical digital mark set; the pump standard power, pump operating power, pumping rate and gas volume in the pumping digital tag set are labeled as C1, C2, C3 and C4 respectively; obtaining an air extraction digital mark set; marking the lead current and the rated heat in the mass spectrum digital label concentration as D1 and D2 respectively; obtaining a mass spectrum digital mark set;
respectively carrying out digital processing on each text in the electric text label set, the air extraction text label set and the mass spectrum text label set, and marking the model of equipment in the electric text label set as SX; matching the equipment model with an equipment model association table preset in a storage module to obtain a corresponding set type association value and marking as G1; obtaining an electric text mark set; marking the pump model in the air extraction text label set as BX; matching the pump type with a preset pump type association table in a storage module to obtain a corresponding pump type association value, and marking the pump type association value as G2; obtaining an air-extracting text mark set; marking the lead type in the mass spectrum text label set as DL; matching the wire type with a wire type association table preset in a storage module to obtain a corresponding wire type association value and marking the wire type association value as G3; obtaining a mass spectrum text mark set; the electric digital mark set and the electric text mark set form an electric mark collection set; the air extraction digital mark set and the air extraction text mark set form an air extraction mark set; the mass spectrum digital mark set and the mass spectrum text mark set form a mass spectrum mark collection set; and (4) carrying out classification combination on the electric mark collection, the air extraction mark collection and the mass spectrum mark collection to obtain a feature processing collection.
In the embodiment, the collected data are extracted and classified, so that different types of data are processed in different modes, subsequent data calculation is facilitated, the efficiency and accuracy of data calculation can be effectively improved, and data support is provided for calibration.
Referring to fig. 3, the calibration module is configured to analyze and calibrate the helium mass spectrometer leak detector according to the feature processing set, so as to obtain a calibration result; the calibration module comprises a first calibration unit, a second calibration unit and a third calibration unit, wherein the first calibration unit is used for calculating and analyzing an electrical mark collection set in the feature processing set to obtain a first calibration set; the method comprises the following steps: acquiring various data in the electrical mark collection to carry out normalization processing and value taking, and utilizing a formula
Calculating and obtaining an electrical matching coefficient, wherein mu is represented as an electrical compensation factor, the value is 1.96741, a1 and a2 are represented as different proportionality coefficients, the electrical matching coefficient is matched with a preset electrical matching threshold, if the electrical matching coefficient is not greater than the electrical matching threshold, it is judged that the electrical operation is normal and calibration is not needed, and a first operation signal is generated; if the electrical matching coefficient is larger than the electrical matching threshold value, generating a first calibration instruction; the device model, the rated power, the operating power, the rated voltage and the operating voltage in the electrical information are calculated and analyzed, and the data are linked through calculation, so that the helium mass spectrometer leak detector can be electrically calibrated for detection and analysis.
The second calibration unit is used for calculating and analyzing the pumping mark collection in the feature processing set to obtain a second calibration set; the method comprises the following steps: acquiring various data in the extraction mark set, carrying out normalization processing and value taking, and utilizing a formula
Calculating an acquisition bleedWherein η is expressed as an air extraction compensation factor and is 0.85547, b1 and b2 are expressed as different proportionality coefficients, QS is expressed as a standard air extraction rate corresponding to the pump type, and QT is expressed as a standard air extraction volume corresponding to the pump type; matching the pumping matching coefficient with a preset pumping matching threshold value, if the pumping matching coefficient is not greater than the pumping matching threshold value, judging that the pumping operation is normal and calibration is not needed, and generating a second operation signal; if the matching coefficient is larger than the matching threshold value, generating a second calibration instruction; the method comprises the steps of calculating and analyzing the pump type, the pump standard power, the pump running power, the pumping rate and the gas volume in pumping information, establishing connection among various data through calculation, and carrying out detection and analysis on calibration of the helium mass spectrometer leak detector in the pumping aspect.
The third calibration unit is used for calculating and analyzing the mass spectrum mark collection set in the feature processing set to obtain a third calibration set; the method comprises the following steps: acquiring various data in a mass spectrum marking set, carrying out normalization processing and value taking, and calculating by using a formula ZP (beta multiplied by G3 x (D1 multiplied by D1 multiplied by R-D2) multiplied by t to acquire a mass matching coefficient of a mass spectrum, wherein beta is expressed as a mass spectrum compensation factor, the value is 0.63842, R is expressed as a lead resistance, and t is expressed as the detection duration; matching the mass matching coefficient with a preset mass matching range, if the mass matching coefficient belongs to the mass matching range, judging that the mass spectrum is normal in operation and does not need to be calibrated, and generating a third operation signal; if the quality matching coefficient does not belong to the quality matching range, generating a third calibration instruction; the method comprises the following steps of calculating and analyzing the type of a lead, the current of the lead and the rated heat in mass spectrum information, establishing connection among various data through calculation, and performing detection and analysis on the calibration of the helium mass spectrometer in the aspect of mass spectrum;
the electric matching coefficient and the first calibration instruction, the extraction matching coefficient and the second calibration instruction, the quality matching coefficient and the third calibration instruction form a calibration result.
In this embodiment, through dividing into different parts with helium mass spectrometer leak detector to carry out data acquisition and computational analysis respectively, can detect helium mass spectrometer leak detector from the aspect of difference, discovery helium mass spectrometer leak detector's that can be accurate is unusual and in time calibrates, can effectively solve among the current scheme helium mass spectrometer leak detector's calibration mode single, leads to the not good defect of effect of calibration.
The calibration method of the helium mass spectrometer leak detector calibration system comprises the following specific steps: collecting electrical information, pumping information and mass spectrum information of the helium mass spectrometer leak detector; performing feature extraction and processing on the collected electrical information, the air extraction information and the mass spectrum information to obtain a feature processing set comprising an electrical mark collection, an air extraction mark collection and a mass spectrum mark collection; analyzing and calibrating the helium mass spectrometer leak detector according to the characteristic processing set to obtain a calibration result containing an electric matching coefficient, a first calibration instruction, a matching extraction coefficient, a second calibration instruction, a quality matching coefficient and a third calibration instruction; and calibrating the helium mass spectrometer leak detector according to the first calibration instruction, the second calibration instruction and the third calibration instruction until a first operation signal, a second operation signal and a third operation signal are generated.
The formulas in the invention are all a formula which is obtained by removing dimensions and taking numerical value calculation, and software simulation is carried out by collecting a large amount of data to obtain the formula closest to the real condition, and the preset proportionality coefficient and the threshold value in the formula are set by the technical personnel in the field according to the actual condition or are obtained by simulating a large amount of data.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in a specific case by those skilled in the art.
While one embodiment of the present invention has been described in detail, the description is only a preferred embodiment of the present invention and should not be taken as limiting the scope of the invention. All equivalent changes and modifications made within the scope of the present invention shall fall within the scope of the present invention.
Claims (4)
1. A calibration system for a helium mass spectrometer leak detector, comprising: the acquisition module comprises a first acquisition unit, a second acquisition unit and a third acquisition unit, wherein the first acquisition unit acquires electrical information of the helium mass spectrometer leak detector; the second acquisition unit acquires pumping information of the helium mass spectrometer leak detector; the third acquisition unit acquires mass spectrum information of the helium mass spectrometer leak detector; the processing module extracts and processes the characteristics of the acquired data to obtain a characteristic processing set; the calibration module comprises a first calibration unit, a second calibration unit and a third calibration unit; each calibration unit in the calibration module analyzes and calibrates the helium mass spectrometer leak detector according to the feature processing set to obtain a calibration result containing an electrical matching coefficient, a first calibration instruction, a matching coefficient, a second calibration instruction, a quality matching coefficient and a third calibration instruction;
the calibration device also comprises a storage module and a prompt module, wherein the storage module is used for storing the calibration result and various preset data; the prompting module prompts the calibration of the helium mass spectrometer leak detector according to the calibration result;
the electrical information comprises equipment model, rated power, running power, rated voltage and running voltage; the pumping information comprises pump model, pump standard power, pump running power, pumping speed and gas volume; the mass spectrum information comprises the type of the wire, the current of the wire and the rated heat;
respectively classifying numbers and texts in the electrical information, the air extraction information and the mass spectrum information to obtain electrical classification information, air extraction classification information and mass spectrum classification information; respectively marking each item of number in the electric classification information, the air extraction classification information and the mass spectrum classification information and carrying out digital processing on each item of text to obtain a feature processing set comprising an electric mark collection, an air extraction mark collection and a mass spectrum mark collection;
the first calibration unit is used for calculating and analyzing the electric mark collection in the feature processing set to obtain a first calibration set; the second calibration unit is used for calculating and analyzing the pumping mark collection in the feature processing set to obtain a second calibration set; the third calibration unit is used for calculating and analyzing the mass spectrum mark collection set in the feature processing set to obtain a third calibration set;
the specific steps of calculating and analyzing the electrical signature collection in the feature processing set comprise: using formulas
And calculating and acquiring an electrical matching coefficient, wherein mu is represented as an electrical compensation factor, a1 and a2 are represented as different proportionality coefficients, G1 is represented as a design related value corresponding to the equipment model, B1 is represented as rated power, B2 is represented as running power, B3 is represented as rated voltage, B4 is represented as running voltage, the electrical matching coefficient is matched with a preset electrical matching threshold value, and if the electrical matching coefficient is larger than the electrical matching threshold value, a first calibration instruction is generated.
2. The helium mass spectrometer leak detector calibration system of claim 1, wherein the specific steps of calculating and analyzing the set of pump-down signatures in the feature processing set comprise: using formulas
Calculating and obtaining a pumping matching coefficient of pumping, wherein eta is expressed as a pumping compensation factor, b1 and b2 are expressed as different proportionality coefficients, QS is expressed as a standard pumping speed corresponding to a pump type, QT is expressed as a standard pumping volume corresponding to the pump type, G2 is expressed as a pump type correlation value corresponding to the pump type, C1 is expressed as pump standard power, C2 is expressed as pump running power, C3 is expressed as a pumping speed, and C4 is expressed as a gas volume; and matching the matching coefficient with a preset matching threshold, and if the matching coefficient is greater than the matching threshold, generating a second calibration instruction.
3. The helium mass spectrometer leak detector calibration system of claim 2, wherein the specific steps of calculating and analyzing the mass spectrometer signature sets in the signature processing set comprise: calculating and acquiring a mass matching coefficient of a mass spectrum by using a formula ZP (beta is multiplied by G3 x (D1 is multiplied by D1 is multiplied by R-D2) x t, wherein beta is expressed as a mass spectrum compensation factor, R is expressed as a lead resistance, t is expressed as a detection time length, G3 is expressed as a linear correlation value corresponding to a lead type, D1 is expressed as a lead current, and D2 is expressed as a rated heat quantity; matching the quality matching coefficient with a preset quality matching range, and if the quality matching coefficient does not belong to the quality matching range, generating a third calibration instruction; the electric matching coefficient and the first calibration instruction, the extraction matching coefficient and the second calibration instruction, the quality matching coefficient and the third calibration instruction form a calibration result.
4. A method of calibrating a helium mass spectrometer leak detector calibration system as defined in claim 3, comprising the steps of: collecting electrical information, pumping information and mass spectrum information of the helium mass spectrometer leak detector; performing feature extraction and processing on the collected electrical information, the air extraction information and the mass spectrum information to obtain a feature processing set comprising an electrical mark collection, an air extraction mark collection and a mass spectrum mark collection; analyzing and calibrating the helium mass spectrometer leak detector according to the feature processing set to obtain a calibration result comprising an electrical matching coefficient, a first calibration instruction, a matching coefficient extraction, a second calibration instruction, a quality matching coefficient and a third calibration instruction; and calibrating the helium mass spectrometer leak detector according to the first calibration instruction, the second calibration instruction and the third calibration instruction.
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