CN115931243B - Leak detection method, device, equipment and medium based on helium mass spectrometer leak detector - Google Patents
Leak detection method, device, equipment and medium based on helium mass spectrometer leak detector Download PDFInfo
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Abstract
The application relates to a leak detection method, a leak detection device, leak detection equipment and a leak detection medium based on a helium mass spectrometer leak detector, in particular to the technical field of vacuum leak detection. The method comprises the following steps: obtaining linear expressions corresponding to different leak rate sections respectively, wherein the linear expressions comprise linear relations between leak rates and the permeability of helium molecules; in the case of leak detection currently based on the helium mass spectrometer leak detector, recording the detected permeability of helium molecules as a first permeability; and substituting the first permeability into linear expressions respectively corresponding to different leak rate sections for comparison so as to determine the current leak rate. Based on the technical scheme, inaccuracy of leak rate calculation based on the same linearity can be avoided, and reliability of detection results of the helium mass spectrometer leak detector is improved.
Description
Technical Field
The application relates to the technical field of vacuum leak detection, in particular to a leak detection method, a leak detection device, a leak detection equipment and a leak detection medium based on a helium mass spectrometer leak detector.
Background
In the vacuum industry, detection of leaks is an important part of vacuum acquisition. Helium mass spectrometer leak detectors are an instrument for detecting leak rate of leaks made using helium as the indicator gas according to mass spectrometry principles.
The permeability of helium molecules of a helium mass spectrometer leak detector is linear with leak rate size. Since the air contains other elements (such as nitrogen, water vapor, etc.) except helium, trace gases originally contained in the air are ionized into ions under the bombardment of filament electrons and are absorbed by an amplifier as helium ions, trace elements in the air are insufficient to influence the linearity of the leak rate when the leak hole is large and the leak rate is large, and trace elements influence the calculation of the leak rate when the leak hole is small.
Therefore, how to improve the accuracy of leak rate detection is a problem to be solved.
Disclosure of Invention
The application provides a leak detection method, a device, equipment and a medium based on a helium mass spectrometer leak detector.
In one aspect, a method of leak detection based on a helium mass spectrometer leak detector is provided, the method comprising:
obtaining linear expressions corresponding to different leak rate sections respectively, wherein the linear expressions comprise linear relations between leak rates and the permeability of helium molecules;
in the case of leak detection currently based on the helium mass spectrometer leak detector, recording the detected permeability of helium molecules as a first permeability;
and substituting the first permeability into linear expressions respectively corresponding to different leak rate sections for comparison so as to determine the current leak rate.
In yet another aspect, there is provided a leak detection apparatus based on a helium mass spectrometer leak detector, the apparatus comprising:
the leakage rate segmentation module is used for obtaining linear expressions corresponding to different leakage rate segments respectively, wherein the linear expressions comprise linear relations between the leakage rate and the permeability of helium molecules;
the permeability detection module is used for recording the detected permeability of helium molecules as first permeability under the condition that leak detection is carried out on the basis of the helium mass spectrometer leak detector currently;
and the leak rate calculation module is used for substituting the first permeability into the linear expressions respectively corresponding to the different leak rate segments for comparison so as to determine the current leak rate.
In yet another aspect, a computer device is provided that includes a processor and a memory having at least one instruction stored therein that is loaded and executed by the processor to implement the helium mass spectrometer leak detector-based leak detection method described above.
In yet another aspect, a computer readable storage medium having stored therein at least one instruction loaded and executed by a processor to implement the helium mass spectrometer leak detector based leak detection method described above is provided.
In yet another aspect, a computer program product or computer program is provided, the computer program product or computer program comprising computer instructions stored in a computer readable storage medium. A processor of a computer device reads the computer instructions from a computer readable storage medium and executes the computer instructions to cause the computer device to perform the above-described leak detection method based on a helium mass spectrometer leak detector.
The technical scheme provided by the application can comprise the following beneficial effects:
and respectively establishing linear expressions for different leak rate sections, recording the detected permeability of helium molecules as first permeability when leak detection is carried out through the helium mass spectrometer leak detector, substituting the first permeability into the linear expressions respectively corresponding to the different leak rate sections for comparison so as to determine the current leak rate, thereby avoiding inaccuracy of leak rate calculation based on the same linearity and improving the reliability of the detection result of the helium mass spectrometer leak detector.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present application, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a method flow diagram illustrating a method of leak detection based on a helium mass spectrometer leak detector according to an example embodiment.
Fig. 2 is a method flow diagram illustrating a method of leak detection based on a helium mass spectrometer leak detector, according to an example embodiment.
Fig. 3 is a block diagram illustrating the structure of a leak detection apparatus based on a helium mass spectrometer leak detector according to an exemplary embodiment.
Fig. 4 is a schematic diagram of a computer device provided in accordance with an exemplary embodiment.
Detailed Description
The following description of the embodiments of the present application will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the application are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
It should be understood that the "indication" mentioned in the embodiments of the present application may be a direct indication, an indirect indication, or an indication having an association relationship. For example, a indicates B, which may mean that a indicates B directly, e.g., B may be obtained by a; it may also indicate that a indicates B indirectly, e.g. a indicates C, B may be obtained by C; it may also be indicated that there is an association between a and B.
In the description of the embodiments of the present application, the term "corresponding" may indicate that there is a direct correspondence or an indirect correspondence between the two, or may indicate that there is an association between the two, or may indicate a relationship between the two and the indicated, configured, etc.
In the embodiment of the present application, the "predefining" may be implemented by pre-storing corresponding codes, tables or other manners that may be used to indicate relevant information in devices (including, for example, terminal devices and network devices), and the present application is not limited to the specific implementation manner thereof.
Aiming at the problems that the linear relation between the permeability and the leak rate of helium molecules is broken under the condition of low leak rate and the calculation of the leak rate is influenced, in the embodiment of the application, a high-precision nonlinear detection algorithm based on a helium mass spectrometer leak detector is provided, so that the helium mass spectrometer leak detector is more accurate in detecting ultra-high vacuum low leak holes, and the reliability of the detection result of the helium mass spectrometer leak detector is improved.
The leak detection method based on the helium mass spectrometer leak detector provided by the embodiment of the application is further described below.
Fig. 1 is a method flow diagram illustrating a method of leak detection based on a helium mass spectrometer leak detector according to an example embodiment. As shown in fig. 1, the leak detection method based on a helium mass spectrometer leak detector may include the steps of:
step 110: and obtaining linear expressions corresponding to the different leak rate sections respectively, wherein the linear expressions comprise linear relations between the leak rate and the permeability of helium molecules.
The leak rate segments refer to carrying out partition processing on leak rate values, and each leak rate segment comprises a leak rate value in one partition.
In the embodiment of the application, linear expressions corresponding to different leak rate sections are established in advance, wherein the linear expressions comprise linear relations between leak rates and the permeability of helium molecules.
Illustratively, for the [ a, b ] leak rate segment, its linear expression is expression 1; for the [ b, c ] leak rate segment, its linear expression is expression 2; for the [ c, d ] leak rate segment, its linear expression is expression 3. Further, in the above expression, linear relation between leak rate and permeability of helium molecules is included.
Step 120: in the case of leak detection currently based on helium mass spectrometer leak detectors, the detected permeability of helium molecules is noted as the first permeability.
In the embodiment of the application, the helium mass spectrometer leak detector is currently in an operating state for leak detection, and the value of the detected permeability of helium molecules is the first permeability.
It will be appreciated that embodiments of the present application are not limited by the particular structure of the helium mass spectrometer leak detector, nor by the particular process of detecting the permeability of helium molecules based on the helium mass spectrometer leak detector.
Step 130: and substituting the first permeability into linear expressions respectively corresponding to different leak rate sections for comparison so as to determine the current leak rate.
In the embodiment of the application, after the first permeability is detected, linear expressions corresponding to different leakage rate segments can be combined and referenced, so that the leakage rate corresponding to the first permeability is determined.
In summary, according to the leak detection method based on the helium mass spectrometer leak detector provided by the embodiment, the linear expressions are respectively established for the different leak rate segments, when the helium mass spectrometer leak detector is used for leak detection, the detected permeability of helium molecules is recorded as the first permeability, and the first permeability is substituted into the linear expressions corresponding to the different leak rate segments respectively for comparison so as to determine the current leak rate, so that inaccuracy of leak rate calculation based on the same linearity can be avoided, and reliability of a detection result of the helium mass spectrometer leak detector is improved.
In an exemplary embodiment, the linear parameters are calculated for different leak rate segments through the feedback of the acquired data of a plurality of standard leak holes, so as to obtain the linear expressions corresponding to the leak rate segments respectively.
Fig. 2 is a method flow diagram illustrating a method of leak detection based on a helium mass spectrometer leak detector, according to an example embodiment. As shown in fig. 2, the leak detection method based on a helium mass spectrometer leak detector may include the steps of:
step 210: and respectively connecting the standard leak holes with different orders of magnitude into a helium mass spectrometer leak detector for data acquisition to obtain a plurality of groups of data acquisition results, wherein each group of data acquisition results comprise the standard leak hole and the permeability of helium molecules corresponding to the standard leak hole.
Wherein a standard leak is a device manufactured by man with a known constant leak rate. The standard leak is the corresponding leak rate.
In the embodiment of the application, standard leak holes with different orders of magnitude are used, and are respectively connected into the leak detection ports of the helium mass spectrometer leak detector for data acquisition, so that a plurality of groups of data acquisition results are obtained, wherein each group of data acquisition results comprises the standard leak hole and the permeability of helium molecules corresponding to the standard leak hole.
Step 220: based on the multiple groups of data acquisition results, calculating linear parameters of different leak rate sections.
Wherein the linearity parameters may include: slope values, constant terms, for representing a linear relationship between leak rate and permeability of helium molecules.
In one possible implementation, at least two sets of target data acquisition results are screened out from the multiple sets of data acquisition results aiming at target leak rate segments in different leak rate segments, and standard leak holes in the target data acquisition results belong to the range of the target leak rate segments; and performing least square fitting on at least two groups of target data acquisition results to obtain linear parameters corresponding to the target leak rate segments.
The least square fitting refers to a calculation mode of calculating a linear parameter by taking the sum of squares of errors between the obtained data and the actual data as the minimum.
In one possible implementation, in order to ensure leakage at a low leakage rateThe hole detection accuracy comprises a normal leak rate section and a plurality of low leak rate sections; wherein the normal leak rate section refers to a leak rate of the corresponding order of magnitude of more than or equal to 10- 10 Pa*m 3 The low leakage section refers to a leakage section of corresponding order of magnitude less than or equal to 10- 10 Pa*m 3 Leak rate segment/s.
Wherein the normal leak rate segment spans an order of magnitude greater than the low leak rate segment. Exemplary, the normal leak rate segment is 5×10- 6 To 5 x 10- 10 Pa*m 3 S; the low leakage rate section is 5 x 10- 10 To 5 x 10- 11 Pa*m 3 /s、5*10- 11 To 5 x 10- 12 Pa*m 3 /s。
Step 230: and obtaining linear expressions corresponding to the different leak rate sections respectively according to the linear parameters of the different leak rate sections.
In the embodiment of the application, the linear parameters of each leak rate segment are respectively substituted, so that the linear expressions respectively corresponding to different leak rate segments are obtained.
In one possible implementation, considering the influence of temperature and humidity on the leak rate, the linear expression further includes: a linear relationship between leak rate and temperature; and/or, the linear expression further includes: linear relationship between leak rate and humidity.
Illustratively, the linear expression for the leak rate segment is: y=f (x 1) ×g (x 2) (kx+b); wherein Y is a leakage rate value, X1 is a temperature value, X2 is a humidity value, X is a permeability of helium molecules, and K, B is a linear parameter.
Step 240: in the case of leak detection currently based on helium mass spectrometer leak detectors, the detected permeability of helium molecules is noted as the first permeability.
Step 250: and substituting the first permeability into linear expressions respectively corresponding to different leak rate sections for comparison so as to determine the current leak rate.
In one possible implementation manner, the detected first permeability is substituted into the linear expressions corresponding to each leak rate segment in sequence to calculate, then whether the leak rate value calculated by substituting the linear expression corresponding to the current leak rate segment belongs to the range of the current leak rate segment is judged, and if the calculated leak rate value belongs to the current leak rate segment, the leak rate value is taken as the leak rate corresponding to the first permeability.
For example: if the value of the permeability of helium molecules is detected to be the first permeability, for the [ a, b ] leak rate section, the linear expression of the value is expressed as expression 1, the leak rate value corresponding to the first permeability is calculated through expression 1, if the calculated value does not belong to the [ a, b ] leak rate section, then the value enters the expression of the next leak rate section to calculate, and so on.
In summary, according to the leak detection method based on the helium mass spectrometer leak detector provided by the embodiment, the leak rate part is segmented through feedback of the collected data results of the plurality of standard leak holes, and the low leak rate part comprises a plurality of low leak rate segments, and the linear parameter fixed by each leak rate segment is obtained through calculation, so that the linear expression corresponding to each leak rate segment is obtained, and the accuracy of the low leak rate detection calculation is ensured.
In addition, in the leak detection method based on the helium mass spectrometer leak detector provided by the embodiment, the influence of temperature and humidity on the leak rate is considered, and the linear expression further comprises the linear relation between the leak rate and the temperature and the linear relation between the leak rate and the humidity.
The leak detection method based on the helium mass spectrometer leak detector provided in the above embodiment will be described with reference to an example.
The whole experimental environment is one helium mass spectrometer leak detector, and the standard leak holes are several. The method comprises the following specific steps:
(1) And opening a leak detector switch, and adjusting the rotating speed of the molecular pump to be the lowest gear so that the leak detector is always in an operating state. The leak detector is operated continuously until the data collected by the collection module is relatively stable, namely, the background is stable.
(2) And respectively collecting temperature and humidity parameters. The relationship between the above parameters and leak rates is expressed as: y=f (x 1); y=g (x 2).
Wherein x1 is a temperature value, and x2 is a humidity value.
(3) 5 x 10- 12 Pa*m 3 The/s standard leak hole is connected to the leak detection port for collection in five minutesAnd the interval section, the acquired data section is stored after the filtering algorithm.
(4) Then take 5 x 10- 11 Pa*m 3 And (3) collecting the s standard leak holes, and storing the collected data segment after the collected data is stable through a filtering algorithm.
(5) Sequentially taking 5 x 10- 10 Pa*m 3 Standard leak/s and 5 x 10- 8 Pa*m 3 And (3) performing the same operation on the s standard leak hole, and storing the acquired data segment after the acquired data is stable through a filtering algorithm.
(6) Based on the acquired data, calculating the linear relation of each leak rate segment, and taking the value with the minimum square difference according to a least square method to further determine the linear parameter of each leak rate segment.
(7) Respectively obtain 5 x 10- 6 To 5 x 10- 10 Pa*m 3 /s；5*10- 10 To 5 x 10- 11 Pa*m 3 /s；5*10- 11 To 5 x 10- 12 Pa*m 3 Linear expression of the/s leak rate segment:
Y＝f(x1)*g(x2)*(K 1 X+B 1 )；
Y＝f(x1)*g(x2)*(K 2 X+B 2 )；
Y＝f(x1)*g(x2)*(K 3 X+B 3 )。
wherein Y is a leakage rate value, X1 is a temperature value, X2 is a humidity value, X is a permeability of helium molecules, and K, B is a linear parameter.
Wherein, each leak rate section adopts different linear parameters to calculate the leak rate: 5*10- 6 To 5 x 10- 10 Pa*m 3 The/s leak rate segment uses y=f (x 1) ×g (x 2) ×k 1 X+B 1 ) Calculation of 5.10- 10 To 5 x 10- 11 Pa*m 3 S is y=f (x 1) ×g (x 2) ×k 2 X+B 2 ) Calculation of 5.10- 11 To 5 x 10- 12 Pa*m 3 The/s leak rate segment uses y=f (x 1) ×g (x 2) ×k 3 X+B 3 ) And (5) performing calculation.
It will be appreciated that the gauge of the standard leak in the above examples is merely illustrative, and that other gauges of standard leak corresponding to different orders of magnitude may be employed in specific practice.
It will be appreciated that in the above example, the flow rate is varied to include a normal leak rate segment of 5 x 10- 6 To 5 x 10- 10 Pa*m 3 S, two low leak rate segments: 5*10- 10 To 5 x 10- 11 Pa*m 3 /s、5*10- 11 To 5 x 10- 12 Pa*m 3 And/s, the low leak rate section can be further divided into leak rate sections with finer granularity to respectively solve the linear expression so as to ensure the accuracy of leak detection of the low leak rate.
The method embodiments may be implemented by single embodiments or may be implemented by combination, which is not limited by the present application.
Fig. 3 is a block diagram illustrating the structure of a leak detection apparatus based on a helium mass spectrometer leak detector according to an exemplary embodiment. The device comprises:
the leak rate segmentation module 301 is configured to obtain linear expressions corresponding to different leak rate segments, where the linear expressions include a linear relationship between the leak rate and the permeability of helium molecules;
a permeability detection module 302 that, in the case of leak detection currently based on the helium mass spectrometer leak detector, marks the detected permeability of helium molecules as a first permeability;
and the leak rate calculation module 303 is configured to substitute the first permeability into linear expressions corresponding to different leak rate segments, and compare the linear expressions to determine a current leak rate.
In one possible implementation, the leak rate segmentation module 301 is configured to:
respectively accessing standard leak holes with different orders of magnitude into the helium mass spectrometer leak detector for data acquisition to obtain a plurality of groups of data acquisition results, wherein each group of data acquisition results comprise the standard leak holes and the permeability of helium molecules corresponding to the standard leak holes;
based on the multiple groups of data acquisition results, calculating linear parameters of different leak rate sections;
and obtaining linear expressions corresponding to the different leak rate sections respectively according to the linear parameters of the different leak rate sections.
In one possible implementation, the leak rate segmentation module 301 is configured to:
screening at least two groups of target data acquisition results from the multiple groups of data acquisition results aiming at target leak rate sections in the different leak rate sections, wherein standard leak holes in the target data acquisition results belong to the range of the target leak rate sections;
and performing least square fitting on the at least two groups of target data acquisition results to obtain linear parameters corresponding to the target leak rate segments.
In one possible implementation, the leak rate calculation module 303 is configured to:
substituting the detected first permeability into linear expressions corresponding to each leak rate segment in sequence to calculate;
and taking the leakage rate value as the leakage rate corresponding to the first permeability under the condition that the leakage rate value calculated by substituting the linear expression corresponding to the current leakage rate segment belongs to the range of the current leakage rate segment.
In one possible implementation, the leak rate segment includes a normal leak rate segment and a plurality of low leak rate segments;
wherein the normal leak rate section refers to a corresponding order of magnitude greater than or equal to 10 -10 Pa*m 3 A leak rate segment of/s, said low leak rate segment referring to a corresponding order of magnitude less than or equal to 10 -10 Pa*m 3 Leak rate segment/s.
In one possible implementation, the linear expression further includes: a linear relationship between leak rate and temperature;
and/or the number of the groups of groups,
the linear expression further includes: linear relationship between leak rate and humidity.
It should be noted that: the leak detection device based on the helium mass spectrometer leak detector provided in the above embodiment is only exemplified by the division of the above functional modules, and in practical application, the above functional allocation may be performed by different functional modules according to needs, that is, the internal structure of the apparatus is divided into different functional modules, so as to complete all or part of the functions described above. In addition, the apparatus and the method embodiments provided in the foregoing embodiments belong to the same concept, and specific implementation processes of the apparatus and the method embodiments are detailed in the method embodiments and are not repeated herein.
Referring to fig. 4, a schematic diagram of a computer device according to an exemplary embodiment of the present application is provided, where the computer device includes a memory and a processor, and the memory is configured to store a computer program, where the computer program is executed by the processor, to implement the leak detection method based on the helium mass spectrometer leak detector.
The processor may be a central processing unit (Central Processing Unit, CPU). The processor may also be any other general purpose processor, digital signal processor (Digital Signal Processor, DSP), application specific integrated circuit (Application Specific Integrated Circuit, ASIC), field programmable gate array (Field-Programmable Gate Array, FPGA) or other programmable logic device, discrete gate or transistor logic, discrete hardware components, or any combination thereof.
The memory, as a non-transitory computer readable storage medium, may be used to store non-transitory software programs, non-transitory computer-executable programs, and modules, such as program instructions/modules, corresponding to the methods in embodiments of the present application. The processor executes various functional applications of the processor and data processing, i.e., implements the methods of the method embodiments described above, by running non-transitory software programs, instructions, and modules stored in memory.
The memory may include a memory program area and a memory data area, wherein the memory program area may store an operating system, at least one application program required for a function; the storage data area may store data created by the processor, etc. In addition, the memory may include high-speed random access memory, and may also include non-transitory memory, such as at least one magnetic disk storage device, flash memory device, or other non-transitory solid state storage device. In some implementations, the memory optionally includes memory remotely located relative to the processor, the remote memory being connectable to the processor through a network. Examples of such networks include, but are not limited to, the internet, intranets, local area networks, mobile communication networks, and combinations thereof.
In an exemplary embodiment, a computer readable storage medium is also provided for storing at least one computer program that is loaded and executed by a processor to implement all or part of the steps of the above method. For example, the computer readable storage medium may be Read-Only Memory (ROM), random-access Memory (Random Access Memory, RAM), compact disc Read-Only Memory (CD-ROM), magnetic tape, floppy disk, optical data storage device, and the like.
Other embodiments of the application will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. This application is intended to cover any variations, uses, or adaptations of the application following, in general, the principles of the application and including such departures from the present disclosure as come within known or customary practice within the art to which the application pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the application being indicated by the following claims.
It is to be understood that the application is not limited to the precise arrangements and instrumentalities shown in the drawings, which have been described above, and that various modifications and changes may be effected without departing from the scope thereof. The scope of the application is limited only by the appended claims.
Claims (8)
1. A method of leak detection based on a helium mass spectrometer leak detector, the method comprising:
obtaining linear expressions corresponding to different leak rate sections respectively, wherein the linear expressions comprise linear relations between leak rates and the permeability of helium molecules;
in the case of leak detection currently based on the helium mass spectrometer leak detector, recording the detected permeability of helium molecules as a first permeability;
substituting the first permeability into linear expressions respectively corresponding to different leak rate sections for comparison so as to determine the current leak rate;
comparing the first permeability with the linear expressions respectively corresponding to different leak rate segments to determine the current leak rate, including:
substituting the detected first permeability into linear expressions corresponding to each leak rate segment in sequence to calculate;
and taking the leakage rate value as the leakage rate corresponding to the first permeability under the condition that the leakage rate value calculated by substituting the linear expression corresponding to the current leakage rate segment belongs to the range of the current leakage rate segment.
2. The method of claim 1, wherein the obtaining linear expressions for the different leak rate segments, respectively, comprises:
respectively accessing standard leak holes with different orders of magnitude into the helium mass spectrometer leak detector for data acquisition to obtain a plurality of groups of data acquisition results, wherein each group of data acquisition results comprise the standard leak holes and the permeability of helium molecules corresponding to the standard leak holes;
based on the multiple groups of data acquisition results, calculating linear parameters of different leak rate sections;
and obtaining linear expressions corresponding to the different leak rate sections respectively according to the linear parameters of the different leak rate sections.
3. The method of claim 2, wherein calculating linear parameters for different leak rate segments based on the plurality of sets of data acquisition results comprises:
screening at least two groups of target data acquisition results from the multiple groups of data acquisition results aiming at target leak rate sections in the different leak rate sections, wherein standard leak holes in the target data acquisition results belong to the range of the target leak rate sections;
and performing least square fitting on the at least two groups of target data acquisition results to obtain linear parameters corresponding to the target leak rate segments.
4. The method of claim 1, wherein the step of determining the position of the substrate comprises,
the leakage rate section comprises a normal leakage rate section and a plurality of low leakage rate sections;
wherein the normal leak rate section refers to a corresponding order of magnitude greater than or equal to 10 -10 Pa*m 3 A leak rate segment of/s, said low leak rate segment referring to a corresponding order of magnitude less than or equal to 10 -10 Pa*m 3 Leak rate segment/s.
5. The method of claim 1, wherein the step of determining the position of the substrate comprises,
the linear expression further includes: a linear relationship between leak rate and temperature;
and/or the number of the groups of groups,
the linear expression further includes: linear relationship between leak rate and humidity.
6. A leak detection apparatus based on a helium mass spectrometer leak detector, the apparatus comprising:
the leakage rate segmentation module is used for obtaining linear expressions corresponding to different leakage rate segments respectively, wherein the linear expressions comprise linear relations between the leakage rate and the permeability of helium molecules;
the permeability detection module is used for recording the detected permeability of helium molecules as first permeability under the condition that leak detection is carried out on the basis of the helium mass spectrometer leak detector currently;
the leakage rate calculation module is used for substituting the first permeability into linear expressions corresponding to different leakage rate segments respectively for comparison so as to determine the current leakage rate;
the leak rate calculation module is specifically configured to sequentially substitute the detected first permeability into linear expressions corresponding to each leak rate segment to perform calculation; and taking the leakage rate value as the leakage rate corresponding to the first permeability under the condition that the leakage rate value calculated by substituting the linear expression corresponding to the current leakage rate segment belongs to the range of the current leakage rate segment.
7. A computer device comprising a processor and a memory having stored therein at least one instruction, at least one program, code set, or instruction set that is loaded and executed by the processor to implement a helium mass spectrometer-based leak detection method according to any one of claims 1 to 5.
8. A computer readable storage medium having stored therein at least one instruction, at least one program, code set, or instruction set loaded and executed by a processor to implement a leak detection method for a helium mass spectrometer leak detector according to any one of claims 1 to 5.
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| CN109141771A (en) * | 2018-10-23 | 2019-01-04 | 安徽皖仪科技股份有限公司 | The method of helium mass spectrometer leak detector realization hydrogen test leak |
| CN115200793A (en) * | 2022-07-15 | 2022-10-18 | 上海市计量测试技术研究院 | Vacuum helium leak hole calibration method |
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