CN101709498A - Electrophoresis equipment for thin film deposition - Google Patents
Electrophoresis equipment for thin film deposition Download PDFInfo
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- CN101709498A CN101709498A CN200910273199A CN200910273199A CN101709498A CN 101709498 A CN101709498 A CN 101709498A CN 200910273199 A CN200910273199 A CN 200910273199A CN 200910273199 A CN200910273199 A CN 200910273199A CN 101709498 A CN101709498 A CN 101709498A
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- film deposition
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Abstract
The invention provides electrophoresis equipment for thin film deposition. An electrophoresis tank and four support bars are installed on a base; horizontal sliding chutes are born among the four support bars; two electrode clamps are inserted between the two horizontal sliding chutes; both sides of the horizontal sliding chutes are respectively provided with micrometer caliper heads; the micrometer caliper heads are connected with the adjacent electrode clamps through insulating connecting pieces; the rotating micrometer caliper heads push the connected electrode clamps to horizontally move in the sliding chutes; springs are connected between the rotating micrometer caliper heads and the electrode clamps; the bottoms of the two electrode clamps respectively clamp electrodes; and the electrodes are positioned in the electrophoresis tank. The invention can precisely regulate the electrode interval and has convenient, stable and reliable operation.
Description
Technical field
The present invention relates to a kind of electrophoresis equipment of using electrophoretic technique depositional coating on conductive substrates.
Background technology
The current thin film deposition generally all adopts the equipment of assembling voluntarily, as with beaker or other groove shape container as electrophoresis chamber, with the fixing conductive electrode of common anchor clamps, generally be difficult to accurate control electrode spacing and keep it parallel and be in vertically, or keeping interelectrode distance motionless, experimental error is bigger.Because most of organic solvents all are corrosive, and under long situation by higher volts DS, corrosion can be very serious, and counter electrode anchor clamps and groove all have very big damage, also can have influence on experiment itself.Simultaneously, for the fixing position of electrophoresis chamber, only changing the position of electrode, also is to be difficult to realize.
Summary of the invention
The objective of the invention is to overcome the defective of current easily assembled voluntarily film deposition electrophoresis equipment, provide a kind of thin film deposition adjustable electrophoresis equipment, but the minute adjustment interelectrode distance is easy to operate, stable, reliable.
Electrophoresis equipment for thin film deposition comprises a base 8, lays electrophoresis chamber 7 on the base 8, is fixed with a support bar 2 respectively on 7 four jiaos of the electrophoresis chambers on the base 8, carries horizontal concrete chute between support bar; The top board 4 and the base plate 5 of horizontal concrete chute have a slideway, are inserted with two electrode holders 1 between two slideways, and the top board 4 slideway edges delineation of horizontal concrete chute has scale marks; The both sides of horizontal concrete chute are respectively equipped with a screw micrometer head 3, screw micrometer head 3 connects close electrode holder by insulated connecting piece 10, the rotating screw micrometer head electrode holder that promotes to join moves horizontally in chute, also is connected to spring between rotating screw micrometer head 3 and the electrode holder 1; Two electrode holders bottom is clamping one electrode 1-5 respectively, and electrode is positioned at electrophoresis chamber 7.
Thin film deposition has following advantage with accurate adjustable electrophoresis equipment:
With the simple and easy electrophoresis equipment of existing self-assembly relatively, advantage is: (1) electrode position accurate adjustable: electrode is controlled by the screw micrometer head in the spacing of level, and variable range is 1.2cm～6.2cm, minimum adjustable 0.01mm, and can fixing; At vertical direction, electrode can whole move, self maintenance level, moving range 10cm; In the deposition process, two electrodes remain parallel to each other, and are in vertical direction, greatly reduce the error of experiment.(2) security measures is good, and the key position of electrophoresis chamber all has insulation protection, and electrophoresis can be not dangerous under high-voltage.(3) easy to use, the electrode holder top is external direct current power supply directly, selects range as required; The vertical scale of horizontal concrete chute, the intuitively spacing of show electrode; The groove of leaving on the base is used to lay electrophoresis chamber, the also convenient simultaneously taking-up that deposits the time slot that finishes.Existing electrophoresis chamber all can not have above-mentioned functions simultaneously.
Description of drawings
Fig. 1 is the front view of structural representation of the present invention.
Fig. 2 is the vertical view of structural representation of the present invention.
Fig. 3 is the structure iron of electrode holder 1 of the present invention.
Fig. 4 is the structure iron of electrophoresis chamber 7 of the present invention.
Fig. 5 is the structure iron of horizontal concrete chute base plate 5 of the present invention.
Fig. 6 is the structure iron of horizontal concrete chute top board 4 of the present invention.
Fig. 7 is base 8 structure iron of the present invention.
Embodiment
With reference to Fig. 1 and 2, electrophoresis equipment comprises a base 8, lays electrophoresis chamber 7 on the base 8, is fixed with a support bar 2 respectively on 7 four jiaos of the electrophoresis chambers on the base 8, carries horizontal concrete chute between support bar.Horizontal concrete chute comprises top board 4 and base plate 5, keeps the better parallel degree in order to guarantee two plates, and the stainless steel cylinder 6 by four equal heights between two plates connects.
In order to realize that level interval is adjustable between the electrode holder, on the top board 4 of chute and base plate 5, have a slideway (as shown in Figure 5), scale marks 4-1 (as shown in Figure 6) has also been delineated at top board 4 slideway edges, and two electrode holders 1 are inserted between two slideways.The both sides of horizontal concrete chute are respectively equipped with a screw micrometer head 3, screw micrometer head 3 is fixed on the base plate 5, screw micrometer head 3 connects the electrode holder close with it by insulated connecting piece 10, and the rotating screw micrometer head electrode holder that can promote to join moves horizontally in chute.Have spring to join between electrode holder 1 and the screw micrometer head fixing part, spring is in the state that is stretched all the time, and only under the situation of rotating screw micrometer head, electrode holder 1 could move to the centre in assurance.
The electrode holder structure is seen shown in Figure 3, and it comprises head 1-1, middle portion 1-3 and three parts of foot piece 1-4.Head 1-1 stretches out chute top board 4, is used for external direct current power supply; Middle portion 1-3 is wider than head 1-1 and afterbody 1-4, is clipped between chute top board 4 and the base plate 5, is square structure, and middle portion 1-3 side is connected with screw micrometer head 3 by insulated connecting piece, guarantees that electrode holder can be steady when sliding.Foot piece 1-4 stretches out the bottom chute base plate 5 and is used for holding electrode 1-5.Foot piece 1-4 is specifically designed to square cylinder, is being undertaken in the process of horizontal roll adjustment by moving two electrode holders 1 like this, guarantees that effectively two electrode 1-5's is parallel.The position of foot piece 1-4 holding electrode is designed to a form of grooves, electrode 1-5 is held end and puts into groove, adopting nut 1-6 to be tightened again, do not adopt other method of clamping such as clip here, is to keep vertically because the foot piece 1-4 of groove and square cylinder can guarantee electrode.
By horizontal concrete chute and screw micrometer head 3, thereby horizontal anchor clamps can oppositely move the adjusting that realizes level interval in level.In order to realize that electrode 1-5 is in the vertically oppositely adjusting of height, the present invention adopts the mode of the level and smooth groove of integrated moving water to realize, be specially: on four support bars 2, be with a nut respectively, four angles of base plate 8 are taken and are placed on the nut, if need to regulate electrode height, only need the height location of setting nut on support bar.
Because the mordant organic solvent of the most of employing of electrophoresis liquid is so need equipment to have erosion resistance.Base 8 among the present invention adopts through surface-treated aluminium, and the top board 4 of chute and base plate 5 adopt epoxy plate, and electrophoresis chamber 7 adopts polytetrafluoroethylmaterial material, and electrode holder 1 adopts titanium alloy material to make.The electrode holder that voltage is transported to the Ti alloy material adopts, and also can not get rusty under High Level DC Voltage.Because the electrophoresis chamber material is erosion-resisting tetrafluoroethylene, suitable solvent scope is wide, is applicable to the electrophoresis operation in multiple organic solvent such as ethanol, methyl ethyl diketone, ethylene glycol monomethyl ether and the water.
Working process is specially: electrode 1-5 is clipped on the electrode holder 1, and conducting surface is inside, and electrode is fixed with nut 1-6; An amount of electrophoresis liquid is poured in the electrophoresis chamber 7, raise electrode 1-5 on the vertical direction, electrophoresis chamber is placed in the groove of base 8, then, adjust four nuts on the support bar 2 simultaneously, make electrode 1-5 enter the electrophoresis liquid appropriate depth, adjustment finishes, and turn screw micrometer head 3 is adjusted the level interval of electrode 1-5, adjustment finishes, level interval can maintain static, and connects direct supply from electrode holder 1 head 1-1, begins to carry out electrophoretic experimental study.Deposition finishes, and the nut of the vertical support bar 2 of turn is raised horizontal concrete chute, takes out electrophoresis chamber 7 from the groove of base 8, unscrews the nut 1-6 of electrode holder 1, takes out the electrode 1-5. of depositional coating.By this instrument, can deposit the film of water base, non-water base multiple material, be applicable to comprise stainless steel substrates ITO, Si/SiO
2/ Ti/Pt, Al
2O
3/ Ag, Al
2O
3/ Pt can be used for measuring the unit surface weightening finish-depositing time in the electrophoresis process in interior multiple electrode substrate, and unit surface weightening finish-institute executes voltage, unit surface weightening finish-interelectrode distance, the research of multiple curve such as strength of current-time.
The present invention is different from general bioanalysis with electrophoresis equipment originally, invention utilizes the electrophoresis process depositional coating, its principle is under the effect of DC electric field, carries the ceramic powder suspension liquid generation swimming of electric charge in the aqueous solution or the non-aqueous solution, is deposited on electrode surface and makes ceramic membrane.The electrophoretic deposition rete all has Application Prospect in the preparation of ferroelectric material, dielectric materials and some fields, forward position such as multi-ferroic material.At present also not about the patent of experiment with the electrophoresis equipment of easy depositional coating.
Claims (8)
1. electrophoresis equipment for thin film deposition comprises a base (8), lays electrophoresis chamber (7) on the base (8), also is fixed with four support bars on the base (8), carries horizontal concrete chute between four support bars; Top board of horizontal concrete chute (4) and base plate (5) have a slideway, are inserted with two electrode holders (1) between two slideways, and scale marks has been drawn at the slideway edge of horizontal concrete chute top board (4); The both sides of horizontal concrete chute are respectively equipped with a screw micrometer head (3), screw micrometer head (3) connects the most close electrode holder by insulated connecting piece (10), the rotating screw micrometer head electrode holder that can promote to join moves horizontally in chute, also is connected to spring between rotating screw micrometer head (3) and the electrode holder (1); Two electrode holders bottom is clamping one electrode (1-5) respectively, and electrode is positioned at electrophoresis chamber (7).
2. electrophoresis equipment for thin film deposition according to claim 1 is characterized in that, the part that electrode holder (1) stretches out the horizontal concrete chute base plate is a square cylinder.
3. electrophoresis equipment for thin film deposition according to claim 2 is characterized in that, the bottom of described electrode holder (1) has a groove, and electrode (1-5) is fixed in this groove by nut (1-6).
4. according to claim 1 or 2 or 3 described electrophoresis equipment for thin film deposition, it is characterized in that described electrode holder (1) adopts titanium alloy material.
5. electrophoresis equipment for thin film deposition according to claim 1 is characterized in that, described electrophoresis chamber (7) is a square groove.
6. electrophoresis equipment for thin film deposition according to claim 1 is characterized in that, is with the nut in order to the load level chute on the described support bar (2).
7. electrophoresis equipment for thin film deposition according to claim 1 is characterized in that, described base (8) surface has a groove, and electrophoresis chamber (7) is put into groove.
8. electrophoresis equipment for thin film deposition according to claim 1 is characterized in that, is connected with the cylinder (6) of four equal heights between top board of described horizontal concrete chute (4) and the base plate (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102731994A CN101709498B (en) | 2009-12-14 | 2009-12-14 | Electrophoresis equipment for thin film deposition |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102731994A CN101709498B (en) | 2009-12-14 | 2009-12-14 | Electrophoresis equipment for thin film deposition |
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| CN101709498A true CN101709498A (en) | 2010-05-19 |
| CN101709498B CN101709498B (en) | 2011-09-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009102731994A Expired - Fee Related CN101709498B (en) | 2009-12-14 | 2009-12-14 | Electrophoresis equipment for thin film deposition |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102288668A (en) * | 2011-07-26 | 2011-12-21 | 吉林大学 | Electrophoresis tank using electroconductive diamond film as electrode |
| TWI460314B (en) * | 2012-12-04 | 2014-11-11 | Univ Shu Te | Electrophoresis equipment with heating function |
| CN104213181A (en) * | 2014-09-18 | 2014-12-17 | 丹阳市新光电子有限公司 | Electric-shock-prevention lifting electroplating device |
| CN105714363A (en) * | 2016-04-28 | 2016-06-29 | 江苏理工学院 | Electro-deposition clamp |
| CN105821441A (en) * | 2016-05-21 | 2016-08-03 | 江苏诚信药业有限公司 | Technology system for preparing glutathione through electrolysis method |
| CN105821442A (en) * | 2016-05-21 | 2016-08-03 | 江苏诚信药业有限公司 | Electrolysis system for preparing reduced glutathione |
| CN105821437A (en) * | 2016-05-21 | 2016-08-03 | 江苏诚信药业有限公司 | Device for preparing tripeptide compound |
| CN105821438A (en) * | 2016-05-21 | 2016-08-03 | 江苏诚信药业有限公司 | Device for preparing amino acid derivatives |
| CN108970402A (en) * | 2018-07-16 | 2018-12-11 | 陈叶 | A kind of medicine electrophoresis structure-improved |
| CN110554001A (en) * | 2019-09-06 | 2019-12-10 | 清华大学合肥公共安全研究院 | Optical system structure of laser methane telemetering device |
-
2009
- 2009-12-14 CN CN2009102731994A patent/CN101709498B/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102288668A (en) * | 2011-07-26 | 2011-12-21 | 吉林大学 | Electrophoresis tank using electroconductive diamond film as electrode |
| TWI460314B (en) * | 2012-12-04 | 2014-11-11 | Univ Shu Te | Electrophoresis equipment with heating function |
| CN104213181A (en) * | 2014-09-18 | 2014-12-17 | 丹阳市新光电子有限公司 | Electric-shock-prevention lifting electroplating device |
| CN104213181B (en) * | 2014-09-18 | 2016-05-18 | 丹阳市新光电子有限公司 | A kind of lifting electroplanting device of protection against electric shock |
| CN105714363A (en) * | 2016-04-28 | 2016-06-29 | 江苏理工学院 | Electro-deposition clamp |
| CN105714363B (en) * | 2016-04-28 | 2018-01-05 | 江苏理工学院 | Electro-deposition fixture |
| CN105821441A (en) * | 2016-05-21 | 2016-08-03 | 江苏诚信药业有限公司 | Technology system for preparing glutathione through electrolysis method |
| CN105821442A (en) * | 2016-05-21 | 2016-08-03 | 江苏诚信药业有限公司 | Electrolysis system for preparing reduced glutathione |
| CN105821437A (en) * | 2016-05-21 | 2016-08-03 | 江苏诚信药业有限公司 | Device for preparing tripeptide compound |
| CN105821438A (en) * | 2016-05-21 | 2016-08-03 | 江苏诚信药业有限公司 | Device for preparing amino acid derivatives |
| CN108970402A (en) * | 2018-07-16 | 2018-12-11 | 陈叶 | A kind of medicine electrophoresis structure-improved |
| CN110554001A (en) * | 2019-09-06 | 2019-12-10 | 清华大学合肥公共安全研究院 | Optical system structure of laser methane telemetering device |
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| Publication number | Publication date |
|---|---|
| CN101709498B (en) | 2011-09-14 |
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