CN101702067B - Terahertz plane adsorbing material - Google Patents
Terahertz plane adsorbing material Download PDFInfo
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- CN101702067B CN101702067B CN2009102160644A CN200910216064A CN101702067B CN 101702067 B CN101702067 B CN 101702067B CN 2009102160644 A CN2009102160644 A CN 2009102160644A CN 200910216064 A CN200910216064 A CN 200910216064A CN 101702067 B CN101702067 B CN 101702067B
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Abstract
The invention provides a terahertz plane adsorbing material, belonging to the technical field of electromagnetic function materials and relating to an electromagnetic-wave absorbing material. The terahertz plane adsorbing material comprises a substrate, a metal reflecting layer, a dielectric layer and an artificial electromagnetic medium layer; wherein, the metal reflecting layer is a continuous metal film and is arranged on the surface of the substrate; the dielectric layer is arranged between the metal reflecting layer and the artificial electromagnetic medium layer; the artificial electromagnetic medium layer is composed of artificial electromagnetic medium units which are arrayed periodically, each unit is a centro-symmetric figure formed by metal film lines with line width which is t and comprises two sing-opening metal rings which are connected backwards with long edges at two sides of an electric snap ring resonator. The terahertz plane adsorbing material provided by the invention has two strong-absorption frequency ranges, so as to provide selective adsorption and detection at different frequency ranges, and the terahertz radiation with wider spectral range can be adsorbed, so as to improve the performance and efficiency of the terahertz plane adsorbing material.
Description
Technical field
The invention belongs to function solenoid material technology field, relate to electromagnetic wave absorbent material, especially the THz wave absorbing material.
Background technology
Terahertz (THz) ripple is meant frequency from 0.1THz to 10THz, the electromagnetic wave between millimeter wave and infrared light.This frequency range is the frequency range of macroelectronics to the transition of microcosmic photonics, can cover distinct advantages such as semiconductor, plasma, organism and biomacromolecule characteristic spectrum.The THz technology can be widely used in fields such as radar, remote sensing, Homeland Security and anti-terrorism, high data communication of maintaining secrecy and transmission, atmosphere and environmental monitoring, biological information extraction in real time and medical diagnosis.Therefore, THz research has great application value to national economy and national security.
Artificial electromagnetic medium (Metamaterials) is that a kind of artificial unit is arranged the material that is constituted according to certain rules, and wherein therefore the size of artificial unit is a kind of uniform electromagnetic media with respect to operation wavelength much smaller than operation wavelength.The advantage of artificial electromagnetic medium is to adjust artificially structure, the size of artificial unit and distributes the electromagnetic attributes of control material, thereby obtains the performance of multiple novelty.The most frequently used artificial unit of forming the artificial electromagnetic medium be the split ring resonator (Split Ring Resonator, SRR).The most basic split ring resonator is the becket that a class has single radial cut as shown in Figure 1, and electromagnetic electric field and magnetic-field component are all had response.Can constitute the split ring resonator of a class symmetry by basic split ring, as shown in Figure 2, they can regard two same basic split rings as in opposite directions or opposing being formed by connecting, and this opening resonant ring only has response to the electric field in the plane, is called again and establishes choma resonator (eSRR) by cable.
Utilize the artificial electromagnetic medium can prepare, perfect lens, multiple novel artificial material such as stealth material as left-handed medium.People such as the H.Tao of Boston Univ USA had designed the terahertz plane adsorbing material (as shown in Figure 3) of the first kind based on the artificial electromagnetic medium in 2008.This material has three-decker, and bottom is the rectangle bonding jumper, and the second layer is the polyimide dielectric layer, and the 3rd layer is artificial electromagnetic medium layer.First kind absorbing material needs two step photoetching and alignment procedures in preparation process, absorption maximum is 70%.H.Tao has proposed the second class terahertz plane adsorbing material subsequently, and this structure still is a kind of three-decker, but bottom is the continuous metal film, and the second layer still is the polyimide dielectric layer, the artificial unit of the 3rd layer of artificial electromagnetic medium layer.The second class absorbing material only needs one lithography step in preparation, simplified photoetching process and alignment procedures, thereby its preparation is more prone to.Simultaneously, this material all has a strong absorption more than 90% to the THz wave of 0～50 degree angle incident.
The absorption mechanism of three-layer type Terahertz plane absorbing material is as follows: at first, by refractive index n (w) and the impedance z (w) that designs artificial electromagnetic media layer, can allow the THz wave of special frequency channel enter in the absorbing material fully; Secondly, the underlying metal plane layer makes not this material of transmissive of THz wave, and like this, electromagnetic wave will be limited in this material internal until complete loss, can obtain approaching 100% THz wave in theory and absorb.This approaching perfectly absorber can be applied to the terahertz imaging detector, Non-Destructive Testing, and be used for spectroscopy and heat emitters or the like.
But all at present plane formula Terahertz absorbing materials all are one-segment responses by force, promptly have only a stronger Terahertz absorption frequency.In fact, Terahertz absorbing material with multiband has even more important using value, such as the multifrequency absorbing material absorb for selectivity and survey THz wave provide may, can absorb the terahertz emission of bigger spectral range simultaneously, improved the performance and the efficient of absorber.Therefore in addition,, all have a plurality of characteristic absorption peaks, utilize the multifrequency absorber just can to explosive and drugs are surveyed and imaging at terahertz wave band for drugs and explosive.Although multiband Terahertz absorber can have abundanter range of application, up to the present still without any a kind of proposition of multiband Terahertz absorbing material.
Summary of the invention
The invention provides a kind of terahertz plane adsorbing material, this material has two and absorbs frequency range, and each absorption peak all has the absorption intensity more than 80%.Be to be applied to terahertz radiation heat determination device, Terahertz stealth technology, terahertz imaging and spectral technique, and the potential novel absorbing material of Terahertz heat emitters.
Detailed technology scheme of the present invention is:
A kind of terahertz plane adsorbing material by shown in Fig. 3,4, comprises substrate, metallic reflector, dielectric layer and artificial electromagnetic medium layer.Wherein, described metallic reflector is the continuous metal film, and its thickness and is positioned at substrate surface greater than the skin depth (usually more than 200 nanometers) of work THz wave.Described dielectric layer between metallic reflector and artificial electromagnetic medium layer, can adopt organic high score usually polymeric media material or inorganic ceramic dielectric material.Described artificial electromagnetic medium layer is made of the artificial electromagnetic media unit of periodic arrangement.Each artificial electromagnetic media unit is the centrosymmetric image (as shown in Figure 4) that the live width metallic film line strip that is t becomes, establish the choma resonator by cable by what two single radial cut beckets were formed by connecting in opposite directions in the middle of comprising, wherein the opening of two single radial cut beckets interconnects, and forms the opening of establishing the choma resonator by cable; Also comprise two with establish the single radial cut becket that long limit, choma resonator both sides is connected dorsad by cable.Whole artificial electromagnetic media unit is long to be b, and wide is a; The length that the centre is established the choma resonator by cable is a, and wide is 1; The opening that the centre is established the choma resonator by cable is identical with the opening shape of both sides single radial cut becket, and its extended distance is d, and A/F is w.
Compare with other existing THz wave absorbing materials, the present invention has the following advantages:
1, terahertz plane adsorbing material proposed by the invention has two strong frequency ranges that absorb, and can provide the selectivity of different frequency range to absorb and detection.Can absorb simultaneously the terahertz emission of bigger spectral range, improve the performance and the efficient of terahertz plane adsorbing material.
2, the surface impedance coupling is more prone to regulate.The ultimate principle of the strong absorbing material of electromagnetic wave is by the impedance of reconciliation statement surface layer and the impedance matching of air, reduces the reflection of electromagnetic wave on the interface, thereby it is inner and be absorbed to make that incident electromagnetic wave can almost all enter absorbing material.Too nuclear money popin face absorbing material proposed by the invention, the controllability of device resistance design is better, makes the Terahertz designs that obtains near absorbing fully more easy.
3, the terahertz plane adsorbing material interpreter of the present invention's proposition has the function of energy conversion, can make corresponding energy converter.It at first all gathers the different directions incident electromagnetic wave in the dielectric layer, especially focuses on the position of resonance type metal openings and enhancing greatly.If change the dielectric layer material into other functional material, just the electromagnetic wave of assembling may be converted to heat energy, the energy that electric energy etc. are multi-form.
Description of drawings
Two kinds of single radial cut becket resonator structure synoptic diagram the most basic of Fig. 1.
A kind of choma resonator structure synoptic diagram of establishing by cable that Fig. 2 is formed by connecting in opposite directions by two single radial cut beckets.
Fig. 3 terahertz plane adsorbing material schematic cross-section.
Artificial electromagnetic media unit structural representation in Fig. 4 terahertz plane adsorbing material provided by the invention.
Fig. 5 by CST Electromagnetic Simulation software to the reflection of terahertz plane adsorbing material provided by the invention and the simulation result of absorption spectra.
Fig. 6 is by the reflectance spectrum of the provided by the invention a kind of concrete terahertz plane adsorbing material of terahertz time-domain spectroscopy instrument (THz-TDS) test.
Embodiment
Design one and have two at 0.2-3THz and absorb frequency ranges, absorptivity all reaches the terahertz plane adsorbing material more than 85%.Utilize CST software, make up sandwich construction as shown in Figure 3, comprise substrate, metallic reflector, dielectric layer and artificial electromagnetic medium layer.Artificial electromagnetic media unit structure as shown in Figure 4, it is the centrosymmetric image (as shown in Figure 4) that the live width metallic film line strip that is t becomes, establish the choma resonator by cable by what two single radial cut beckets were formed by connecting in opposite directions in the middle of comprising, wherein the opening of two single radial cut beckets interconnects, and forms the opening of establishing the choma resonator by cable; Also comprise two with establish the single radial cut becket that long limit, choma resonator both sides is connected dorsad by cable.Whole artificial electromagnetic media unit is long to be b, and wide is a; The length that the centre is established the choma resonator by cable is a, and wide is l; The opening that the centre is established the choma resonator by cable is identical with the opening shape of both sides single radial cut becket, and its extended distance is d, and A/F is w.Calculating used material and parameter comprises; Substrate is the single crystalline Si sheet.The intermediate isolating layer adopts polyimide, its ε=3.5+0.011i, μ=1.Metallic reflector and artificial electromagnetic medium layer all adopt Au, and it is 4.09 * 10 that its electricity is led
7S.
By design of Simulation, the device parameters that obtains is (unit micron): a=60, b=136, d=4,1=28.6, t=6, w=14.The repetition period of unit permutation is 140 * 120 microns.
One-piece construction: 8 microns of separation layers, 0.2 micron on artificial electromagnetic medium layer.It doesn't matter for substrate thickness and device performance, and getting substrate thickness among the design is 500 microns.
Emulation THz wave absorbing material transmission spectrum that is obtained by above parameter and absorption spectra have two strong absorption peaks at 0.502THz and 0.942THz annex as shown in Figure 5, and the halfwidth of absorption peak is about 20GHz and 60GHz.The absorption intensity of two absorption peaks is all greater than 99.99%.
Utilize magnetron sputtering technique and reactive ion beam etching (RIBE) technology, according to designing requirement, prepare concrete terahertz plane adsorbing material because the deviation brought of actual fabrication technology, make the terahertz plane adsorbing material specifically prepared structure and and size and design minute differences is arranged.
The reflection parameters of plane absorbing material of having utilized terahertz time-domain spectroscopy system (THz-TDS) technical testing, as shown in Figure 6.Exist two strong Terahertzs to absorb frequency ranges, one at 0.46THz, absorptivity 83%, and another absorption peak is near 0.93THz, and absorptivity is 65%.
Claims (3)
1. a terahertz plane adsorbing material comprises substrate, metallic reflector, dielectric layer and artificial electromagnetic medium layer; Wherein, described metallic reflector is the continuous metal film, and its thickness and is positioned at substrate surface greater than the skin depth of work THz wave; Described dielectric layer is between metallic reflector and artificial electromagnetic medium layer; It is characterized in that described artificial electromagnetic medium layer is made of the artificial electromagnetic media unit of periodic arrangement; Each artificial electromagnetic media unit is the centrosymmetric image that the live width metallic film line strip that is t becomes, establish the choma resonator by cable by what two single radial cut beckets were formed by connecting in opposite directions in the middle of comprising, wherein the opening of two single radial cut beckets interconnects, and forms the opening of establishing the choma resonator by cable; Also comprise two with establish the single radial cut becket that long limit, choma resonator both sides is connected dorsad by cable; Each artificial electromagnetic media unit is long to be b, and wide is a; The length that the centre is established the choma resonator by cable is a, and wide is 1; The opening that the centre is established the choma resonator by cable is identical with the opening shape of both sides single radial cut becket, and its extended distance is d, and A/F is w.
2. terahertz plane adsorbing material according to claim 1 is characterized in that, described dielectric layer material adopts organic high molecular polymer dielectric material or inorganic ceramic dielectric material.
3. terahertz plane adsorbing material according to claim 2 is characterized in that, described dielectric layer material adopts polyimide.
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