CN101691203A - Method and device for alignment and assembly of glass micro nanofluidic chip - Google Patents
Method and device for alignment and assembly of glass micro nanofluidic chip Download PDFInfo
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- CN101691203A CN101691203A CN200910307123A CN200910307123A CN101691203A CN 101691203 A CN101691203 A CN 101691203A CN 200910307123 A CN200910307123 A CN 200910307123A CN 200910307123 A CN200910307123 A CN 200910307123A CN 101691203 A CN101691203 A CN 101691203A
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Abstract
The invention discloses a method and a device for the alignment and assembly of a glass micro nanofluidic chip and belongs to the field of microelement assembly. In the method for the alignment and assembly of the glass micro nanofluidic chip, a microscope is adopted to observe the alignment condition of the glass micro nanofluidic chip, and a method of a fixed substrate and a movable cover plate is adopted to realize the micro nanochannel alignment between the cover plate and the substrate. The device observes the alignment condition of the glass micro nanofluidic chip by the inverted high-power microscope and drives a vacuum sucker absorbing the cover plate to move by a three-dimensional micro motion table, thereby realizing the three-dimensional micro motion of the cover plate. The device consists of the three-dimensional micro motion table, the vacuum absorption device, the inverted microscope and a micro hot plate. The method and the device can reduce the manufacturing period of the chip, reduce the manufacturing cost and difficulty of the chip and meet the increasing complex inter-channel alignment requirements.
Description
Technical field
The present invention is a kind of to aim at assembly method and device at the glass micro-nano-fluidic control chip that all has micro-structural on substrate and the cover plate, belongs to microminiature device assembling field, relates to using vacuum suction and three-dimensional little moving to aim at the method and the device of assembling.
Background technology
On glass material, can process high-precision micro-structural, and the geometry of the micro-structural of being processed and surface characteristic be difficult for changing with the variation of environment, have very big meaning for micro-total analysis system and microfluidic system.The making of glass micro-nano-fluidic control chip comprises the micro-nano channel formation, aims at assembling, pre-connection and bonding.Different micro-structurals is worked into respectively on substrate and the cover plate, helps to change the form of chip structure, shorten the manufacturing cycle of chip and the manufacturing cost of reduction chip.After the substrate of glass micro-nano-fluidic control chip and the micro-nano passage on the cover plate machine, will be with the micro-nano channel alignment on substrate and the cover plate, to guarantee the relative positional accuracy between the micro-nano passage on substrate and the cover plate.But complicated along with chip structure, the interchannel aligning assembly work of micro-nano becomes more and more difficult, must need a kind of special aligning assembly method and device to finish the interchannel aligning assembly work of micro-nano.
In to foreign patent retrieval, do not find to relate to the relevant patent that micro-nano-fluidic control chip is aimed at assembly method and device.In to Chinese patent retrieval, relate to micro-nano-fluidic control chip and aim at the patent of assembly method and device and be: be used for the micro-alignment device of transparent micro-fluidic chip assembling, license number: ZL200420092837.5; This patent need adopt specific markers point on the chip, finishes the aligning assembling of chip.The thickness of chip and material have very big influence for the identification of gauge point, and the success rate of chip being aimed at assembling has certain influence.
At present, relate in the document of publishing and can be used for micro-nano-fluidic control chip and aim at the method for assembling and device little assembly method and device and little assembly robot system based on vision towards micro-nano-fluidic control chip are arranged.As document " Phase-ChangingSacrificial Layer Fabrication of Multilayer Polymer Microfluidic Devices " (Anal.Chem.2008,80, method and the device introduced in 333-339) based on the aligning bonding of the multilayer PMMA micro-fluidic chip of vision.Do not provide the detailed introduction of this device in the article.
At present, the robot system that much is used for little assembling is arranged.Adopt little assembly robot system to finish the aligning assembly work of glass micro-nano-fluidic control chip, with high costs.
Summary of the invention
The invention provides a kind of glass micro-nano-fluidic control chip and aim at assembly method and aim at assembling device, the micro-nano passage aims at the aligning rapidly and accurately between the realization chip channel on the substrate that can be used in complicated glass micro-nano-fluidic control chip and the cover plate.
The technical solution used in the present invention is as follows:
A kind of glass micro-nano-fluidic control chip is aimed at assembly method, and this method adopts the alignment of microscopic glass micro-nano-fluidic control chip, adopts fixed substrate, and the method for mobile cover plate realizes micro-nano channel alignment between cover plate and the substrate.Concrete grammar is as follows:
(1) glass micro-nano-fluidic control chip is made up of cover plate and substrate, and the passage of nanoscale is arranged on the substrate, and the passage of micro-meter scale is arranged on the cover plate; Adopt fixed substrate, the method for mobile cover plate makes cover plate have the plane of passage to move along substrate, realizes micro-nano channel alignment between cover plate and the substrate.
(2) adopt the method fixed substrate of " pasting-lean on ".
(3) adopt vacuum adsorption method to pick up cover plate.
(4) adopt precision fine motion device to drive moving of cover plate.
(5) adopt the method for little heating to carry out hot pre-connection to aiming at chip.
The aligning assembling device of glass micro-nano-fluidic control chip is made up of the little mobile station apparatus of three-dimensional, vacuum absorption device, inverted microscope and micro-hotplate four parts.The little mobile station apparatus of three-dimensional is installed on the inverted microscope objective table, the little mobile station apparatus of three-dimensional is connected with vacuum absorption device by vacuum cup.Inverted microscope mainly is made up of microscope control cabinet, microscope vision system, microscope carrier etc.Three-dimensional little mobile station apparatus mainly is made up of spiral micrometer differential head, spiral micrometer differential head mount pad, cover plate, chip container, magnetic stripe, connecting plate, vacuum cup, vacuum cup installing plate, L-square, manual unidirectional little travelling carriage, right angle installing plate, the little travelling carriage of manual bidirectional etc.
Spiral micrometer differential head is installed on the spiral micrometer differential head mount pad, then mounted spiral micrometer differential head mount pad and one of connecting plate are fixed on the microscope carrier, cover plate is placed in the corresponding circular groove of microscope carrier, again chip container is placed on the cover plate, and contact with two fixed blocks on the cover plate, the little travelling carriage of manual bidirectional is connected with connecting plate, by the right angle installing plate manual unidirectional little travelling carriage is connected with the little travelling carriage of manual bidirectional, L-square is connected with manual unidirectional little travelling carriage, the vacuum cup installing plate is connected with L-square, at last vacuum cup is installed on the vacuum cup installing plate.It has functions such as fixed substrate and micro-nano structure adjustment aligning.
Vacuum absorption device mainly is made up of vavuum pump, vacuum regulating valve, three-way magnetic valve, vacuum filter, the adapter of T shape, flexible pipe, dc source, power switch, three-way magnetic valve switch, indicator lamp, casing etc.Dc source, three-way magnetic valve, vacuum filter are fixed on the bottom panel of casing, vacuum regulating valve is fixed on the rear board of casing, power switch, three-way magnetic valve switch and indicator lamp are fixed on the front panel of casing, with flexible pipe vavuum pump, vacuum regulating valve, three-way magnetic valve, vacuum filter and the adapter of T shape are coupled together at last; With lead dc source, power switch, three-way magnetic valve switch and indicator lamp are coupled together.
Adopt said chip to aim at the aligning assembling device that assembly method is made, this device adopts is inverted high-power microscope observation glass micro-nano-fluidic control chip alignment; Adopt the magnetic stripe fixed substrate, different magnetic stripes can be changed according to the size of chip, the difference of shape in the convenient position of adjusting substrate; The vacuum cup that adopts three-dimensional little travelling carriage mechanism to drive the absorption cover plate moves, thereby realizes the three-dimensional little mobile of cover plate, makes cover plate have the plane of passage to move along substrate; Realize micro-nano channel alignment between cover plate and the substrate; Adopt micro-hotplate to carry out hot pre-connection to aiming at chip, making has the pre-connection of suitable intensity power between cover plate and the substrate, is issued to dislocation-free and does not have the effect that comes off at the experiment condition of having a mind to collision and overturn.
The invention has the beneficial effects as follows and to carry out accurately and apace aiming to chip channel.Adopt in the process that the present invention aims at chip channel, can observe the position of passage by inverted microscope in real time, so that the operator utilizes three-dimensional little mobile station apparatus to adjust the position of passage, thereby realize the aligning of chip channel, simple to operate, shorten the manufacturing cycle of chip, reduced the manufacturing cost and the difficulty of chip.
Description of drawings
Fig. 1 is the structural representation of glass micro-nano-fluidic control chip alignment device.
Fig. 2 is the structural representation of vacuum absorption device.
Fig. 3 is the schematic diagram of gas circuit of vacuum absorption device.
Fig. 4 (A) is the structural representation of cover plate.
Fig. 4 (B) is the structural representation of substrate.
Fig. 4 (C) is the structural representation of chip channel after aiming at.
Among the figure: 1 microscope control cabinet, 2 microscope vision systems, 3 microscope carriers, 4 spiral micrometer differential heads, 5 spiral micrometer differential head mount pads, 6 cover plates, 7 chip container, 8 substrates, 9 magnetic stripes, 10 cover plates, 11 connecting plates, 12 vacuum cups, 13 vacuum cup installing plates, 14 L-squares, 15 manual unidirectional little travelling carriages, 16 right angle installing plates, the little travelling carriage of 17 manual bidirectionals, 18 vacuum absorption device control cabinets, 19T shape is taken over, 20 casings, 21 dc sources, 22 three-way magnetic valves, 23 vacuum regulating valves, 24 vacuum filters, 25 power switches, 26 three-way magnetic valve switches, 27 indicator lamps, 28 vavuum pumps, 29 liquid storage tanks, 30 microchannels, 31 receive the channel array group.
The specific embodiment
The specific embodiment below in conjunction with the description of drawings this patent.
Embodiment 1: three-dimensional little mobile station apparatus
The structure of the 1 three-dimensional little mobile station apparatus that the present invention relates to of explanation in conjunction with the accompanying drawings.Three-dimensional little mobile station apparatus mainly is made up of spiral micrometer differential head 4, spiral micrometer differential head mount pad 5, cover plate 6, chip container 7, magnetic stripe 9, connecting plate 11, vacuum cup 12, vacuum cup installing plate 13, L-square 14, manual unidirectional little travelling carriage 15, right angle installing plate 16, the little travelling carriage 17 of manual bidirectional etc.Spiral micrometer differential head 4 is installed on the spiral micrometer differential head mount pad 5, then mounted spiral micrometer differential head mount pad 5 is fixed on the microscope carrier 3 with connecting plate 11, cover plate 6 is placed in the microscope carrier 3 corresponding circular grooves, again chip container 7 is placed on the cover plate 6, and contact with two fixed blocks on the cover plate 6, spiral handle by rotating screw micrometer differential head 4, just can fix and unclamp chip container 7, the little travelling carriage 17 of manual bidirectional is connected with connecting plate 11, by right angle installing plate 16 manual unidirectional little travelling carriage 15 is connected with the little travelling carriage 17 of manual bidirectional, so just can realize three-dimensional little moving, L-square 14 is connected with manual unidirectional little travelling carriage 15, vacuum cup installing plate 13 is connected with L-square 14, at last vacuum cup 12 is installed on the vacuum cup installing plate 13.According to the difference of the chip of required aligning, can adjust size, quantity, shape and the installation site on vacuum cup installing plate 13 of vacuum cup 12.
Embodiment 2: vacuum absorption device
The structure of 2 vacuum absorption devices that the present invention relates to of explanation in conjunction with the accompanying drawings.Vacuum absorption device mainly is made up of T shape adapter 19, casing 20, dc source 21, three-way magnetic valve 22, vacuum regulating valve 23, vacuum filter 24, power switch 25, three-way magnetic valve switch 26, indicator lamp 27, vavuum pump 28 etc.Dc source 21, three-way magnetic valve 22, vacuum filter 24 are fixed on the bottom panel of casing 20, vacuum regulating valve 23 is fixed on the rear board of casing 20, make its outside at casing 20, so that check and adjust vacuum pressure, power switch 25, three-way magnetic valve switch 26 and indicator lamp 27 are fixed on the front panel of casing 20, so that operator's operation.
Embodiment 3: the absorption of vacuum absorption device
The absorption principle of 3 vacuum absorption devices that the present invention relates to of explanation in conjunction with the accompanying drawings.Successively vavuum pump 28, the vacuum regulating valve 23 that has pressure vacuum gauge, three-way magnetic valve 22, vacuum filter 24, T shape adapter 19, vacuum cup 12 are communicated with flexible pipe.When opening vavuum pump 28, this moment, three-way magnetic valve 22 was closed, and had the gas circuit of vacuum cup 12 and the normal open mouth of three-way magnetic valve 22 and connected, with the atmosphere conducting.When opening three-way magnetic valve 22, vavuum pump 28 is along gas circuit and vacuum cup 12 conductings, and can hold chip this moment with vacuum cup 12.Behind complete operation, close three-way magnetic valve 22, this moment vacuum cup 12 with the atmosphere conducting, after after a while, the pressure that has in the gas circuit of vacuum cup 12 is identical with atmospheric pressure, at this moment, cover plate 10 separates with vacuum cup 12.
Embodiment 4: the aligning assembling of glass micro-nano-fluidic control chip
4 illustrate that the aligning of a kind of glass micro-nano-fluidic control chip that the present invention relates to assembles example in conjunction with the accompanying drawings.
(1) cleans.Chip container 7, substrate 8, magnetic stripe 9 and cover plate 10 are cleaned up respectively.
(2) substrate and chip container is fixing.The substrate 8 that processes channel design and cleaned is put into chip container 7, two magnetic stripes 9 are placed on the both sides of chip container 7 bottom surfaces respectively, make it place the side of substrate 8 positions, and utilize its magnetic polarity location to clamp, using the same method leans against magnetic stripe 9 at the place, other three sides of substrate 8 positions, realizes the fixing of substrate 8; The cover plate 10 that processes channel design and cleaned is placed on the substrate 8, lubricated for strengthening, between cover plate 10 and substrate 8, add lubricating film, then chip container 7 is pushed on the cover plate 6, and contact with two fixed blocks on the cover plate 6, adjust the position of chip container 7, the spiral handle of rotating screw micrometer differential head 4 makes the front end of spiral micrometer differential head 4 withstand chip container 7, by two fixed block fixed chip containers 7 on the cover plate 6.
(3) absorption chip.Find the position of cover plate 10 and substrate 8 upper channels by inverted microscope observation, the position of coarse adjustment microchannel, adjust to cover plate 10 and the passage on the substrate 8 within sweep of the eye same, and make cover plate 10 vertical with the passage cardinal principle on the substrate 8, spiral handle by the little travelling carriage 17 of rotation manual bidirectional, adjust the position of vacuum cup 12 and cover plate 10, rotation is the spiral handle of unidirectional little travelling carriage 15 manually, thereby vacuum cup 12 is contacted with cover plate 10 up to vacuum cup 12 near cover plate 10 downwards lentamente fully.Turn on the power switch 25 this moment successively, and vavuum pump 28 after the inspection vacuum air-channel is normal, is opened three-way magnetic valve switch 26, makes vacuum cup 12 hold cover plate 10.
(4) channel alignment of chip.By rotating the manually spiral handle of unidirectional little travelling carriage 15, control cover plate 10 moves towards substrate 8, when the lubricating film shape on the substrate 8 changes, stop to move of cover plate 10, the operator is by microscope vision system 2 observation alignments then, rotate the spiral handle of the little travelling carriage 17 of manual bidirectional simultaneously, cover plate 10 moved along the upper surface of substrate 8 is little, lentamente with microchannel 30 with receive channel array group 31 and aim at.
(5) taking-up of chip.Close three-way magnetic valve switch 26 and make vacuum cup 12 and atmosphere conducting, powered-down switch 25 cuts out vavuum pump 28.Through after a while, slowly the spiral handle of the manual unidirectional little travelling carriage 15 of rotation moves up vacuum cup 12, separates with cover plate 10 gradually, again vacuum cup 12 is moved to the extreme higher position that it can reach.The spiral handle of rotating screw micrometer differential head 4 separates its front end and chip container 7, takes out the chip container 7 that chip is housed lentamente along microscope carrier 3 then.
(6) pre-connection of chip.Utilize the composite construction heating of micro-hotplate to chip, make the volatilization of part lubricating film, residual fraction links to each other with the hydrogen bond form with the glass surface dangling bonds with individual layer lubricating film molecule, make the pre-connection power that has suitable intensity between substrate 8 and the cover plate 10, be issued to dislocation-free and do not have the effect that comes off at the experiment condition of having a mind to collision and overturn.
(7) thermal bonding of chip.The chip that pre-connection is good moves to thermal bonding in the Muffle furnace, and take out the cooling back naturally, obtains glass micro-nano-fluidic control chip.
The aligning assembly method and the device of the glass micro-nano-fluidic control chip that is provided in conjunction with the processing method and this patent of glass micro-nano-fluidic control chip can process glass micro-nano-fluidic control chip.
Claims (5)
1. a glass micro-nano-fluidic control chip is aimed at the method for assembling, and it is characterized in that following steps:
(1) glass micro-nano-fluidic control chip is made up of cover plate and substrate, and the passage of nanoscale is arranged on the substrate, and the passage of micro-meter scale is arranged on the cover plate; Adopt the method for fixed substrate, moving cover plate, make cover plate have the plane of passage to move, realize micro-nano channel alignment between cover plate and the substrate along substrate;
(2) adopt the method fixed substrate of " pasting-lean on ".
(3) adopt vacuum adsorption method to pick up cover plate;
(4) adopt precision fine motion device to drive moving of cover plate;
(5) adopt the method for little heating to carry out hot pre-connection to aiming at chip.
2. application rights requires the aligning assembling device of 1 described method, and its feature also is: this aligning assembling device is made up of the little mobile station apparatus of three-dimensional, vacuum absorption device, inverted microscope and micro-hotplate four parts; The little mobile station apparatus of three-dimensional is installed on the inverted microscope objective table [3], the little mobile station apparatus of three-dimensional is connected with vacuum absorption device by vacuum cup [12]; Inverted microscope comprises microscope control cabinet [1], microscope vision system [2] and microscope carrier [3]; Three-dimensional little mobile station apparatus mainly is made up of spiral micrometer differential head [4], spiral micrometer differential head mount pad [5], cover plate [6], chip container [7], magnetic stripe [9], connecting plate [11], vacuum cup [12], vacuum cup installing plate [13], L-square [14], manual unidirectional little travelling carriage [15], right angle installing plate [16] and the little travelling carriage of manual bidirectional [17] etc.;
Spiral micrometer differential head [4] is installed on the spiral micrometer differential head mount pad [5], then mounted spiral micrometer differential head mount pad [5] and [11] one of connecting plates are fixed on the microscope carrier [3], cover plate [6] is placed in the corresponding circular groove of microscope carrier [3], again chip container [7] is placed on the cover plate [6], and contact with two fixed blocks on the cover plate [6], the little travelling carriage of manual bidirectional [17] is connected with connecting plate [11], by right angle installing plate [16] manual unidirectional little travelling carriage [15] is connected with the little travelling carriage of manual bidirectional [17], L-square [14] is connected with manual unidirectional little travelling carriage [15], vacuum cup installing plate [13] is connected with L-square [14], at last vacuum cup [12] is installed on the vacuum cup installing plate [13];
Vacuum absorption device is mainly taken over [19], flexible pipe, dc source [21], power switch [25], three-way magnetic valve switch [26], indicator lamp [27], casing [20] etc. by vavuum pump [28], vacuum regulating valve [23], three-way magnetic valve [22], vacuum filter [24], T shape and is formed; Dc source [21], three-way magnetic valve [22], vacuum filter [24] are fixed on the bottom panel of casing [20], vacuum regulating valve [23] is fixed on the rear board of casing [20], power switch [25], three-way magnetic valve switch [26] and indicator lamp [27] are fixed on the front panel of casing [20], with flexible pipe vavuum pump [28], vacuum regulating valve [23], three-way magnetic valve [22], vacuum filter [24] and T shape are taken over [19] at last and couple together; With lead dc source [21], power switch [25], three-way magnetic valve switch [26] and indicator lamp [27] are coupled together.
3. a kind of glass micro-nano-fluidic control chip according to claim 1 is aimed at the method for assembling, its feature also is: substrate [8] fixing, substrate [8] is put into chip container [7], two magnetic stripes [9] are placed on the both sides of chip container [7] bottom surface respectively, make its side that places substrate [8] position, and utilize its magnetic polarity location to clamp; Using the same method leans against magnetic stripe [9] at the place, other three sides of substrate [8] position, realizes the fixing of substrate [8].
4. a kind of glass micro-nano-fluidic control chip according to claim 1 is aimed at the method for assembling, its feature also is: chip container [7] fixing, chip container [7] is pushed on the cover plate [6], and contact with two fixed blocks on the cover plate [6], adjust the position of chip container [7], the spiral handle of rotating screw micrometer differential head [4] makes the front end of spiral micrometer differential head [4] withstand chip container [7], by two the fixed block fixed chip containers [7] on the cover plate [6].
5. a kind of glass micro-nano-fluidic control chip according to claim 1 is aimed at the method for assembling, and its feature also is: vacuum cup [12] and vacuum cup installing plate [13] removable transsexual; According to the difference of the chip of required aligning, adjust size, quantity, shape and the installation site on vacuum cup installing plate [13] of vacuum cup [12].
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009103071239A CN101691203B (en) | 2009-09-17 | 2009-09-17 | Method and device for alignment and assembly of glass micro nanofluidic chip |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2009103071239A CN101691203B (en) | 2009-09-17 | 2009-09-17 | Method and device for alignment and assembly of glass micro nanofluidic chip |
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| CN101691203A true CN101691203A (en) | 2010-04-07 |
| CN101691203B CN101691203B (en) | 2012-07-04 |
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| CN107677206A (en) * | 2017-11-03 | 2018-02-09 | 中国科学院自动化研究所（洛阳）机器人与智能装备创新研究院 | A kind of lithium battery pole slice dimension measuring apparatus |
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| CN106053392A (en) * | 2016-05-19 | 2016-10-26 | 西北大学 | Device based on micro-nano fluid control reflection interference spectral imaging system and realization method |
| CN106053392B (en) * | 2016-05-19 | 2019-12-10 | 西北大学 | Device based on micro-nanofluidic reflection interference spectral imaging system and implementation method |
| CN106239086B (en) * | 2016-08-23 | 2019-03-15 | 中国科学院自动化研究所 | A kind of clamping device and method of micro-pipe part |
| CN106239086A (en) * | 2016-08-23 | 2016-12-21 | 中国科学院自动化研究所 | The clamping device of a kind of micro-tube components and method |
| CN106365113A (en) * | 2016-10-26 | 2017-02-01 | 华东师范大学 | Automatic calibration type operating platform for stacking two-dimensional lamellar heterogeneous material |
| CN107101581A (en) * | 2017-06-26 | 2017-08-29 | 东北电力大学 | The alignment device and assembly method of a kind of micro-nano-fluidic control chip |
| CN107703059A (en) * | 2017-09-30 | 2018-02-16 | 北京航空航天大学 | A kind of sensing chip clamping of micro-meter scale working distance microcobjective and flow control apparatus |
| CN107703059B (en) * | 2017-09-30 | 2019-12-27 | 北京航空航天大学 | Sensor chip clamping and flow control device of micro objective with micron-scale working distance |
| CN107677206A (en) * | 2017-11-03 | 2018-02-09 | 中国科学院自动化研究所（洛阳）机器人与智能装备创新研究院 | A kind of lithium battery pole slice dimension measuring apparatus |
| CN108581469A (en) * | 2018-05-10 | 2018-09-28 | 大连理工大学 | A kind of locking device and assembly method for micro parts automatic assembling |
| CN112485142A (en) * | 2020-11-20 | 2021-03-12 | 中国直升机设计研究所 | Brinell hardness indentation measuring device |
| CN112485142B (en) * | 2020-11-20 | 2023-04-18 | 中国直升机设计研究所 | Brinell hardness indentation measuring device |
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| CN101691203B (en) | 2012-07-04 |
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