CN106053392A - Device based on micro-nano fluid control reflection interference spectral imaging system and realization method - Google Patents
Device based on micro-nano fluid control reflection interference spectral imaging system and realization method Download PDFInfo
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
Abstract
The invention discloses a device based on a micro-nano fluid control reflection interference spectral imaging system and a realization method. The device comprises a micro fluid pump, a micro fluid control sample cell system, an optical microscope, a C-port optical path switcher, a CCD sensor, a spectrometer, a positioning light source, a detection light source, and a computer. The C-port optical path switcher is connected to the positioning light source, the CCD sensor, and the spectrometer through optical fibers; the CCD sensor and the spectrometer are both connected to the computer, and the computer software collects detection data and analyzes the results. According to the system, the object lens of the microscope is taken as the optical probe; compared with the conventional method that takes a detector as the probe, the system has the advantages that a fixing device for fixing a probe is not needed, the optical path integration degree of the system is improved; moreover, an imaging and positioning system is used to obtain the specific position of a sample, and thus the detection precision is improved. The morphology feature imaging of samples and reflection interference spectrum collection can be switched in real time, and thus the in-situ dynamic realtime detection of an analysis sample can be realized.
Description
Technical field
The present invention relates to device based on micro-nano-fluidic control reflection interference spectrum imaging system and implementation method.
Background technology
A kind of detection method based on micro-nano-fluidic control reflection interference spectrum imaging system is convenient, precision is high, noncontact, non-broken
Bad property detection sample, can directly observe and gather surface topography and the reflected interference signal of micro-example.Wherein, reflection interference light
Spectrum Spectrum Method need not coherent source so that its simple in construction, capacity of resisting disturbance is higher, can be applied to the inspection of micro-example very well
Surveying, reflection interference spectrum imaging technique has more realistic meaning and practical value.Such as, in microbiological art, reflection interference
Its kind and quantity, by detection microorganism, are studied by spectrum imaging system；In field of food safety, by micro-to index
Biosurveillance can assess security status of food；In ecological monitoring field, for monitoring related microorganisms flora in ecological environment
Change.At Material Field, can directly observe and gather the spectroscopic datas such as the surface topography of sample and reflection, absorption, transmission, can expire
Foot most of biologies, Physical Experiment requirement.Therefore, optical sensing based on reflection interference spectrum imaging system detection device is all
Multi-field suffering from extensively is applied, and market application foreground is the most considerable, it has also become popular research topic both domestic and external.
At present, there are the minority device about reflection interference spectrum imaging system and the relevant report of implementation method both at home and abroad.
Wu Jianmin seminar of Zhejiang University uses the reflection interference spectrum technology of porous silica material microfluidic system, detects microorganism in real time
The growth of escherichia coli (E.coil) and metabolism, its shortcoming is that porous silica material is at water environment and corresponding PH physiological environment
Lower instability and do not have optical microphotograph imaging system, it is impossible to be accurately positioned the position of test.Australia, Dusan et al. with
Woelm Alumina is base material, utilizes reflection interference Spectrum Method to detect circulating tumor cell, and this device utilizes fibre-optical probe
The reflected interference signal of light in detection biochip.The method uses fibre-optical probe detection sample to obtain interference spectrum signal, nothing
Method is accurately positioned test position and the shape characteristic of tiny sampler.
Summary of the invention
For above-mentioned problems of the prior art, it is an object of the invention to provide a kind of based on micro-nano-fluidic control reflection
The device of interference spectrum imaging system and implementation method, can in situ, realtime dynamic observation gathering by nano-pore array structure
The pattern of sample and reflection interference spectrum thereof in the microchannel interior bottom surface of composition.
In order to realize above-mentioned task, the present invention by the following technical solutions:
Device based on micro-nano-fluidic control reflection interference spectrum imaging system, including miniflow pump, micro-fluidic sample cell system, light
Learning microscope, C mouth optical path switcher, ccd sensor, computer, spectrogrph and positioned light source, wherein, C mouth optical path switcher is even
Connect optical microscope, the object lens of optical microscope just to micro-fluidic sample cell system, C mouth optical path switcher by optical fiber respectively with
Positioned light source, ccd sensor and spectrogrph connect, and ccd sensor and spectrogrph are all connected with computer.
Further, the flow rate of liquid of described miniflow pump is more than 0.001ml/min.
Further, described micro-fluidic sample cell system is micro-nano compound structure, and the scope wide, high of microchannel is:
10 μm～100 μm.
Further, described micro-fluidic sample cell system is micro-nano compound structure, and the bottom of microchannel is by nano-pore battle array
Array structure is constituted, and a diameter of 20-180nm of single nano-pore, nanohole array thickness is 2 μm-10 μm.
Further, the amplification of the object lens of described optical microscope is 5-100 times, and numerical aperture is more than 0.3.
Further, described probe source is the light source of optical power detection, and power is 1-100W, and wave band is 200nm-
2800nm。
Further, the applicable wave band of C mouth optical path switcher is 200nm-2500nm, and applicable microscope interfaces is C mouth.
Further, ccd sensor uses the high resolution CCD camera carrying zoom lens, its zoom lens focal length model
Enclosing for 12-36mm, pixel count is more than 1024 × 1024, and pixel dimension is less than 5.2 μ m 5.2 μm.
Further, the wave band of spectrogrph is 200-2800nm, and signal to noise ratio is more than or equal to 1000:1.
Device based on micro-nano-fluidic control reflection interference spectrum imaging system carries out the implementation method of reflection interference spectrum imaging,
Specifically include following steps:
Step one, micro-fluidic sample cell system is fixed on the object stage of optical microscope, and sample amounts is noted by miniflow pump
Penetrate in micro-fluidic sample cell system；
Step 2, the light that probe source sends is irradiated in micro-fluidic sample cell system through the object lens of optical microscope
Sample on, sample reflection interference light is pooled on object lens, and sequentially passes through optical microscope and C mouth optical path switcher；
Step 3, the reflection interference light through C mouth optical path switcher is divided into two-beam, and light beam enters via ccd sensor
Row cell array image acquisition, the information collected is delivered in computer via optical fiber, and another light beam is changed via spectrogrph
Obtaining the spectral signal of intensity-wavelength, the spectral signal of intensity-wavelength is delivered in computer via optical fiber, by software system
System analysis obtains reflection interference spectrogram；
Step 4, the light that positioned light source sends is irradiated to sample through the object lens of C mouth optical path switcher and optical microscope
On product, sample reflection interference light converges on object lens, and the sample reflection interference light of convergence is through C mouth optical path switcher, via CCD
Sensor carries out cell array image acquisition, and the information collected is delivered in computer via optical fiber, passes through Computer display
Imaging；Realize reflection interference detection and the pattern imaging of sample.
Compared with prior art, the present invention has following technical effect that
1, the present invention is designed with miniflow pump, it is possible to micro-sampling is carried out fixing quantity, it is achieved thereby that dynamically detect.
2, the present invention use microscopical object lens as the means phase using probe in optic probe, with prior art
Ratio, it is not necessary to be provided for the fixing device of fixing probe, connects into as alignment system provides possibility for microscope, improves system
System light path integration degree.
3, in the present invention, interference of light spectroscopic system light path shares a microscope light with imaging alignment system light path
Road, it is achieved that the spectra collection of sample and real-time, the in-situ investigation of imaging, the imaging alignment system of increase can clearly observe institute
The shape characteristic of test sample product.
4, the present invention adds imaging alignment system, it is possible to determine the particular location of sample, make testing result more smart
Really；And the shape characteristic imaging achieving sample switches and detection in real time in real time with what reflection interference spectrum gathered.
5, have employed C mouth switch in the present invention, C mouth optical path switcher is sensed with positioned light source, CCD respectively by optical fiber
Device and spectrogrph connect, it is possible to realize that spectra collection positions with imaging is synchronization carried out.
To sum up, the shape characteristic imaging that present invention achieves sample switches and former in real time with what reflection interference spectrum gathered
Position, Real-time and Dynamic Detection, the small-signal optical information of acquisition is comprehensive, and meanwhile, the detection process of the present invention is convenient, quick, essence
Degree height.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of the present invention；
Fig. 2 is the scanning electron microscope pattern of microchannel inner bottom part porous nano alumina substrate in micro-fluidic sample cell system
Figure, (a) is surface topography map；B () is sectional view；
Fig. 3 is the reflection interference light of the single strand dna that the detection of micro-fluidic sample cell system is solidificated on nanoporous wall
Spectrogram, (a) reflection interference spectrum figure, (b) fast Fourier transform collection of illustrative plates；
Fig. 4 is micro-fluidic sample cell system exploratory probe single strand dna and have single base mismatch and three base mispairings
The reflection interference spectrum figure of complementary dna sequence hydridization, (a) reflection interference collection of illustrative plates, (b) fast Fourier transform collection of illustrative plates.
In figure, label represents: 1 miniflow pump, 2 micro-fluidic sample cell systems, 3 object lens, 4 optical microscopes, 5 C
Mouth optical path switcher, 6 ccd sensors, 7 computers, 8 spectrogrphs, 9 positioned light sources.
With embodiment the solution of the present invention done below in conjunction with the accompanying drawings and explain in further detail and illustrate.
Detailed description of the invention
Defer to technique scheme, see Fig. 1, the dress based on micro-nano-fluidic control reflection interference spectrum imaging system of the present invention
Put, including miniflow pump 1, micro-fluidic sample cell system 2, optical microscope 4, C mouth optical path switcher 5, ccd sensor 6, computer
7, spectrogrph 8, positioned light source 9, wherein, C mouth optical path switcher 5 connects optical microscope 4, and the object lens 3 of optical microscope 4 are the most right
Micro-fluidic sample cell system 2, C mouth optical path switcher 5 is by optical fiber respectively with positioned light source 9, ccd sensor 6 and spectrogrph 8 even
Connecing, ccd sensor 6 and spectrogrph 8 are all connected with computer 7.Detection data are gathered by computer software is unified and analyzes
Assembly of the invention operation principle is: the light that the built-in probe source of microscope reflection unit sends passes through optical fiber
Object lens 3 through optical microscope 4 are radiated on the sample of micro-fluidic sample cell system 2；Sample reflection interference light converges to thing
On mirror 3, the sample reflection interference light of convergence sequentially passes through optical microscope 4 and C mouth optical path switcher 5；Switch through C mouth light path
The reflection interference light of device 5 is divided into two-beam, and light beam carries out cell array image acquisition via ccd sensor 6, gathers information warp
It is delivered in computer be carried out imaging by the corresponding imaging software of computer by optical fiber；Another light beam is converted to via spectrogrph 8
The spectral signal of intensity-wavelength, the spectral signal of intensity-wavelength is delivered in computer 7 by computer corresponding light via optical fiber
Spectrum software system carries out data collection and analysis.For the reference path of imaging location, positioned light source 9 light sent is via optical fiber
Being sent to C mouth optical path switcher 5, the object lens 3 through optical microscope 4 are radiated on sample；Sample reflection interference light converges in
On object lens 3, the sample reflection interference light of convergence, through the object lens 3 and C mouth optical path switcher 5 of optical microscope 4, passes via CCD
Sensor 6 carries out cell array image acquisition, and the information collected is delivered in computer 7 via optical fiber, corresponding by computer
Imaging software carries out sample imaging.
Assembly of the invention arranges miniflow pump 1, it is possible to micro-sampling is carried out fixing quantity, it is achieved thereby that dynamically examine
Survey；Assembly of the invention uses microscopical object lens as optic probe, compared with the means using probe in prior art,
Need not be provided for the fixing device of fixing probe, connect into as alignment system provides possibility for microscope so that light path
Integration degree is higher；In the present invention, the light path of interference of light spectroscopic system and imaging alignment system shares a microscopes optical path,
Achieve spectra collection and the original position of imaging, the detection of dynamic realtime of sample；The imaging alignment system increased can clearly be seen
Examine the shape characteristic of institute's test sample product, it is achieved the shape characteristic imaging of sample and reflection interference spectrum gather switching in real time and original position,
Dynamic realtime detects.
Described miniflow pump 1, flow rate of liquid is 0.004ml/min；Accessory used is that plastic nano tightens accessory, pipe used
For PEEK pipe 1/16OD.
Described micro-fluidic sample cell system 2 is micro-nano compound structure, and the scope wide, high of microchannel is: 10 μm～100
μm.The bottom of microchannel is made up of nano-pore array structure, a diameter of 20-180nm of single nano-pore, nanohole array thickness
It is 2 μm-10 μm.
Micrometer structure is less than 25 μ m 10 μ m 15 μm, and nanostructure diameter is that thickness is for being more than less than or equal to 50nm
8um。
The amplification of the object lens 3 of described optical microscope 4 is 10 times, numerical aperture 0.7；
Described probe source is uniform source of light Halogen light, and power is 100W, wave band: 350～1100nm.
In order to ensure that spectra collection and imaging location can synchronize be carried out, C mouth optical path switcher 5 (50%-50%) suitable
Being 200nm～2500nm with wave band, applicable microscope interfaces is C mouth.
Ccd sensor 6 uses and carries the high resolution CCD camera of zoom lens, its zoom lens focal range be 12～
36mm, pixel count is more than 1024 × 1024, and pixel dimension is less than 5.2 μ m 5.2 μm.
Spectrogrph 8 is refrigeration profile battle array back-illuminated type spectrogrph, gathers the optical signal from sample, is changed by optical interference signals
Become the spectral signal of intensity-wavelength.The wave band of spectrogrph is 325～1100nm, and signal to noise ratio is 1000:1.
In order to determine the particular location of test sample so that testing result is more accurate, and positioned light source 9 is HL2000 halogen
Light source, wavelength band is 350～2500nm, and colour temperature is 2915K.
Device based on micro-fluidic reflection interference spectrum imaging system described in the application of the present invention carries out reflection interference light
The implementation method of spectrum imaging, specifically includes following steps:
Step one, micro-fluidic sample cell system 2 is fixed on the object stage of optical microscope 4, and miniflow pump 1 is by sample amounts
It is injected in micro-fluidic sample cell system 2.
Step 2, the light that the built-in probe source of the reflection unit of optical microscope sends is through the thing of optical microscope 4
Mirror 3 is irradiated on the sample in micro-fluidic sample cell system 2, and sample reflection interference light converges on object lens 3, and sequentially passes through light
Learn microscope 4 and C mouth optical path switcher 5.
Step 3, the reflection interference light through C mouth optical path switcher 5 is divided into two-beam, and light beam is via ccd sensor 6
Carrying out cell array image acquisition, the information collected is delivered in computer by corresponding software system sample via optical fiber
Carrying out imaging, another light beam is converted to the spectral signal of intensity-wavelength via spectrogrph 8, the spectral signal warp of intensity-wavelength
It is delivered in computer 7 be carried out Data acquisition and issuance by the corresponding software system of computer by optical fiber.
Step 4, the light that positioned light source 9 sends is irradiated to through the object lens 3 of C mouth optical path switcher 5 and optical microscope 4
On sample, sample reflection interference light converges on object lens 3, and the sample reflection interference light of convergence is through C mouth optical path switcher 5, warp
Being carried out cell array image acquisition by ccd sensor 6, the information collected is delivered in computer 7 via optical fiber, by calculating
Machine 7 is shown as picture；So far reflection interference and the imaging of sample are realized.
The implementation method of the reflection interference spectrum imaging of the present invention, it is possible to be accurately positioned the particular location of sample, improves inspection
Survey precision；Realize the shape characteristic imaging of sample and the switching in real time of reflection interference spectrum data acquisition and original position, dynamic realtime
Detection.
Embodiment:
Device based on micro-nano-fluidic control reflection interference spectrum imaging system given below and the embodiment of implementation method.
In the present embodiment, device based on micro-nano-fluidic control reflection interference spectrum imaging system includes miniflow pump 1, micro-fluidic sample
Product cell system 2, optical microscope 4, C mouth optical path switcher 5, ccd sensor 6, computer 7, spectrogrph 8, positioned light source 9 and spy
Light-metering source.
Miniflow pump, flow rates 0.004ml/min；Micro-fluidic sample cell system 2 is micro-nano structure, and micrometer structure is 25 μ
Mx10 μm x15 μm, nanostructure diameter is 50nm, and thickness is 8um；The amplification of the object lens 3 of optical microscope 4 is 10 times,
Numerical aperture 0.70；The probe source of optical microscope 4 is uniform source of light Halogen light, and power is 100W, wave band: 350～
1100nm；The applicable wave band of C mouth optical path switcher 5 (50%-50%) is 200nm～2500nm；Applicable microscope interfaces is C
Mouthful；Ccd sensor 6 uses the high resolution CCD camera carrying zoom lens, and its zoom lens focal range is 12～36mm,
Pixel count 1024 × 1024, pixel dimension 5.2 μ m 5.2 μm；Spectrogrph 8 is for test sample, and freeze profile battle array back-illuminated type light
Spectrometer gathers the optical signal from sample, and optical interference signals is converted into the spectral signal of intensity-wavelength.The wherein ripple of spectrogrph
Section: 325～1100nm；Signal to noise ratio is 1000:1；Positioned light source 9 is for detecting the particular location of optical detection sample, and light source is
HL2000 halogen light source, wavelength band: 350～2500nm；Colour temperature: 2915K.
The implementation method of the optical interference of the present embodiment, specifically includes following steps:
Step one, uses a diameter of 50nm, and thickness is nanostructured and 25 μ of the nanoporous anodic aluminum oxide of 8 μm
Mx10 μm x15 μm PMMA is combined as micro-fluidic sample cell system 2 by anode key.Sample single stranded DNA is entered micro-by liquid-transfering gun
In stream control sample cell system 2 and be fixed in pond as probe, miniflow pump 1 with the speed of 0.004ml/min quantitative by sample
Complementary DNA enters micro-fluidic sample cell system 2；
Step 2, probe source is the Halogen light of 1000W, and emergent light is through the reflected light path of optical microscope 4, by putting
Big multiple is the object lens 3 of 10 times and numerical aperture 0.70, is radiated at thickness and is about on the nano-porous alumina sample of 8 μm；Sample
Product reflection interference light converges on object lens 3, and the light of convergence is through optical microscope 4 and C mouth optical path switcher 5 (50%-50%)；
Step 3, the light of convergence is divided into two-beam through C mouth optical path switcher 5, and light beam is more than 1024 via pixel count
After ccd sensor 6 conversion of × 1024, via optical fiber, the image information collected is passed to computer 7；Another light beam via
Wavelength band is 360～2500nm, and core diameter is 600 μm, and the microcell optical fiber of a length of 2.0m is delivered in spectrogrph 8, and light is at light
Computer 7 is passed information to by optical fiber after spectrometer 8 internal conversion；
Step 4, by the Halogen light positioned light source 9 that power is 1000W via C mouth optical path switcher 5 and optical microscope 4
Object lens 3 be radiated on sample；Sample reflection interference light converges on object lens 3, and the sample reflection interference light of convergence is through C mouth light
Road switch 5, is delivered in computer 7 after changing via ccd sensor 6, is shown as picture in computer 7；So far base is realized
The reflection interference spectrogram of sample and imaging in reflection interference spectrum imaging system.
Experimental analysis:
Fig. 2 is the nanoporous anodic aluminum oxide that assembly of the invention obtains the micro-fluidic sample cell system of above-described embodiment
Scanning electron microscope (SEM) surface topography map of substrate and sectional view.
Fig. 3 is that micro-fluidic sample cell system detects the single strand dna reflection interference light being solidificated on nanoporous hole wall
Spectrogram, by the reflection interference spectrum figure after spectral matching factor, the FFT after being processed by fast Fourier transform (FFT) data is schemed
Spectrum, wherein, corresponding effectively optical thickness (EOT) collection of illustrative plates of peak value abscissa detects in micro-fluidic sample cell system, sample list
The solidification situation of chain DNA；(a) figure in Fig. 3 and (b) figure, line segment represents the most respectively according to peak value AAO+Au with
probeDNA.(a) figure in Fig. 3 is original position reflection interference spectrum (RIFS) figure of substrate and DNA probe molecule, former by RIFS
Logos Fabry-Perot-type equation m λ=2nL, effective optical thickness OTeff=nL, along with DNA molecular is solidificated on substrate hole wall, with
The change of refractive index n and L, cause the RIFS of DNA probe molecule to move right relative to base material, in order to increase RIFS's
Signal to noise ratio and identification, use fast Fourier change (FFT), it is possible to observe more intuitively along with the biomolecule such as DNA are entered
Enter nano material, cause optical interference (OTeff) change, see the figure (b) in Fig. 3.
Fig. 4 is that apparatus of the present invention obtain the DNA probe of above-described embodiment and have three base mispairings and single base mismatch
After complementary dna sequence hydridization detection reflection interference spectrum figure, and by fast Fourier transform (FFT) data process after
FFT spectrogram, wherein, corresponding effectively optical thickness (EOT) collection of illustrative plates of peak value abscissa detects DNA in micro-fluidic sample cell system
The detection of the interphase interaction of molecule；In (a) figure in Fig. 4 and (b) figure, line segment represents the most respectively according to peak value
CompDNA, MMC and MM3C.Fig. 4 is DNA probe in actual detection, and the DNA complementary with DNA probe molecule trapping divides
Son, and there is the complementary DNA strand of three base mispairings and single base mismatch.Different base mispairing is we have found that from (b) figure
Different change can be caused, with this, feasibility of RIFS technology, susceptiveness and specificity are described.
Claims (10)
1. device based on micro-nano-fluidic control reflection interference spectrum imaging system, it is characterised in that include miniflow pump (1), micro-fluidic
Sample cell system (2), optical microscope (4), C mouth optical path switcher (5), ccd sensor (6), computer (7), spectrogrph (8)
With positioned light source (9), wherein, C mouth optical path switcher (5) connects optical microscope (4), and the object lens (3) of optical microscope (4) are just
To micro-fluidic sample cell system (2), C mouth optical path switcher (5) by optical fiber respectively with positioned light source (9), ccd sensor (6)
Connecting with spectrogrph (8), ccd sensor (6) and spectrogrph (8) are all connected with computer (7).
2. device based on micro-nano-fluidic control reflection interference spectrum imaging system as claimed in claim 1, it is characterised in that described
The flow rate of liquid of miniflow pump is more than 0.001ml/min.
3. device based on micro-nano-fluidic control reflection interference spectrum imaging system as claimed in claim 1, it is characterised in that described
Micro-fluidic sample cell system (2) is micro-nano compound structure, and the scope wide, high of microchannel is: 10 μm～100 μm.
4. device based on micro-nano-fluidic control reflection interference spectrum imaging system as claimed in claim 1, it is characterised in that described
Micro-fluidic sample cell system (2) is micro-nano compound structure, and the bottom of microchannel is made up of nano-pore array structure, single nanometer
Bore dia is 20-180nm, and nanohole array thickness is 2 μm-10 μm.
5. device based on micro-nano-fluidic control reflection interference spectrum imaging system as claimed in claim 1, it is characterised in that described
The amplification of the object lens (3) of optical microscope (4) is 5-100 times, and numerical aperture is more than 0.3.
6. device based on micro-nano-fluidic control reflection interference spectrum imaging system as claimed in claim 1, it is characterised in that described
Probe source is the light source of optical power detection, and power is 1-100W, and wave band is 200nm-2800nm.
7. device based on micro-nano-fluidic control reflection interference spectrum imaging system as claimed in claim 1, it is characterised in that C mouth
The applicable wave band of optical path switcher (5) is 200nm-2500nm, and applicable microscope interfaces is C mouth.
8. device based on micro-nano-fluidic control reflection interference spectrum imaging system as claimed in claim 1, it is characterised in that CCD
Sensor (6) uses the high resolution CCD camera carrying zoom lens, and its zoom lens focal range is 12-36mm, pixel count
More than 1024 × 1024, pixel dimension is less than 5.2 μ m 5.2 μm.
9. device based on micro-nano-fluidic control reflection interference spectrum imaging system as claimed in claim 1, it is characterised in that spectrum
The wave band of instrument (8) is 200-2800nm, and signal to noise ratio is more than or equal to 1000:1.
10. meet in claim 1-9 described in any claim is based on micro-nano-fluidic control reflection interference spectrum imaging system
Device carries out the implementation method of reflection interference spectrum imaging, it is characterised in that specifically include following steps:
Step one, micro-fluidic sample cell system (2) is fixed on the object stage of optical microscope (4), and miniflow pump (1) is fixed by sample
Amount is injected in micro-fluidic sample cell system (2)；
Step 2, the light that probe source the sends object lens (3) through optical microscope (4) are irradiated to micro-fluidic sample cell system
(2) on the sample in, sample reflection interference light is pooled on object lens (3), and sequentially passes through optical microscope (4) and C mouth light path
Switch (5)；
Step 3, the reflection interference light through C mouth optical path switcher (5) is divided into two-beam, and light beam is via ccd sensor (6)
Carrying out cell array image acquisition, the information collected is delivered in computer via optical fiber, and another light beam is via spectrogrph (8)
Being converted to the spectral signal of intensity-wavelength, the spectral signal of intensity-wavelength is delivered in computer (7) via optical fiber, passes through
Software system analysis obtains reflection interference spectrogram；
Step 4, the light that positioned light source (9) sends is through the object lens (3) of C mouth optical path switcher (5) and optical microscope (4)
Being irradiated on sample, sample reflection interference light converges on object lens (3), and the sample reflection interference light of convergence is cut through C mouth light path
Parallel operation (5), carries out cell array image acquisition via ccd sensor (6), and the information collected is delivered to computer via optical fiber
(7), in, it is shown as picture by computer (7)；Realize reflection interference detection and the pattern imaging of sample.
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