CN101685787A - Front opening type wafer box with pulleys - Google Patents
Front opening type wafer box with pulleys Download PDFInfo
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- CN101685787A CN101685787A CN200810161049A CN200810161049A CN101685787A CN 101685787 A CN101685787 A CN 101685787A CN 200810161049 A CN200810161049 A CN 200810161049A CN 200810161049 A CN200810161049 A CN 200810161049A CN 101685787 A CN101685787 A CN 101685787A
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- box body
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Abstract
The invention relates to a front opening type wafer box which mainly comprises a box body and a door body, wherein a plurality of slots are arranged in the box body to contain a plurality of wafers, and one side surface of the box body forms an opening for inputting and outputting the wafers; and the door body is provided with an outer surface and an inner surface, combined with the opening of thebox body by the inner surface and used for protecting the wafers placed in the box body. The front opening type wafer box is characterized in that a plurality of pairs of pulleys are configured on the inner edge in the opening position of the box body.
Description
Technical field
The present invention relates to a kind of front-open wafer box, particularly dispose the front-open wafer box of pulley on the inner edge about a kind of opening part in box body, in order to collision and the friction between the Men Tiyu box body that reduces front-open wafer box.
Background technology
Therefore semiconductor wafer can be moved to different work stations owing to need the processing of the various different flow processs of process and need to cooperate process apparatus.The carrying of wafer for convenience and avoid being subjected to external pollution, regular meeting utilizes an airtight container to carry for automation equipment.Please refer to shown in Figure 1ly, be the wafer case schematic diagram of prior art.This wafer case is a kind of front-open wafer box 1 (Front OpeningUnified Pod; FOUP); have a box body 10 and a body 20; but box body 10 inside are provided with the ccontaining a plurality of wafers of a plurality of slot 11 levels; and have an opening 12 in a side of box body 10 and can supply carrying and loading of wafer; and door body 20 has an outer surface 21 and an inner surface 22, and door body 20 is to be combined with the opening 12 of box body 10 by inner surface 22, in order to a plurality of wafers of protection box body 10 inside.In the above-mentioned front-open wafer box; the inner surface 22 of door body 20 is the opening part importings by box body 10; mutually combine with box body 10 again and form the wafer of an enclosure space with protection box body 10 inside; yet; when importing door body 20 to box body 10; contacting of door body 20 and box body 10 partly is large-area collision and friction, easily so produce grit (particle), box body 10 inside are polluted and influences the wafer that places box body 10 inside.
Summary of the invention
For addressing the above problem, a main purpose of the present invention is to provide a kind of rollered front-open wafer box, configuration is many to pulley on the inner edge of the box body of this front open type wafer case, so when the door body imports box body, its contact partly only limits to the area of pulley, the area of can significantly reducing friction avoids grit to produce, and reduces pollution risk.
Another main purpose of the present invention is to provide a kind of rollered front-open wafer box, ring is established an inflatable gas seal member on the door body of this front open type wafer case, then dispose door latch apparatus between the outer surface of door body and inner surface, so after the door body imports box body via pulley, the door latch apparatus Men Tiyu box body that locks immediately, by inflatable gas seal member being inflated, make that wafer and the outside atmosphere in the wafer case isolated to form airtight conditions.
Another main purpose of the present invention is to provide a rollered front-open wafer box, configurable limit part module on the inner surface of the door body of this front open type wafer case, so after the door body imports box body via pulley, be positioned at the limiting piece module fixed wafer effectively on the body inner surface.
For reaching above-mentioned projects; the present invention discloses a kind of rollered front-open wafer box; mainly comprise a box body; box body inside is provided with a plurality of slots with ccontaining a plurality of wafers; and forming an opening in a side of box body can be for the input and the output of a plurality of wafers; and body; have an outer surface and an inner surface; the door body is to combine with the opening of box body with inner surface; and in order to protect a plurality of wafers of this box body inside, wherein front-open wafer box is characterised in that: configuration is many to pulley on the inner edge of the opening part of box body.
The present invention then discloses a kind of rollered front-open wafer box; mainly comprise a box body; formed by four adjacent sidewalls; and form an opening in a side; and another side of opening forms a rear wall relatively; one opposing sidewalls of box body inside is provided with a plurality of slots with ccontaining a plurality of wafers; and body; have an outer surface and an inner surface; the door body combines with the opening of box body with inner surface; and in order to protect a plurality of wafers of box body inside, wherein front-open wafer box is characterised in that: at least one pair of pulley of configuration on the inner edge of each adjacent wall of the opening part of box body.
Description of drawings
Fig. 1 is the schematic diagram of existing front-open wafer box.
Fig. 2 A is the structural representation of a kind of front-open wafer box of the present invention.
Fig. 2 B is the schematic diagram of configuration mode of pulley of the present invention and the schematic diagram of amplification thereof.
Fig. 2 C is the schematic diagram of pulley of the present invention.
Fig. 3 A and Fig. 3 B are the schematic diagram that door body of the present invention imports the box body mode.
Fig. 4 A is the schematic diagram of the door body of a kind of front-open wafer box of the present invention.
Fig. 4 B is the schematic diagram of configuration mode of pulley of the present invention and the schematic diagram of amplification thereof.
Fig. 5 is the schematic diagram of the door latch apparatus of a kind of front-open wafer box of the present invention.
Fig. 6 is the part enlarged diagram of the door latch apparatus among Fig. 5 of the present invention.
Fig. 7 A～Fig. 7 C is the enlarged diagram of the carriage of door latch apparatus of the present invention.
Schematic diagram when Fig. 8 is closing of door latch apparatus of the present invention.
Fig. 9 is the schematic diagram of a kind of front-open wafer box of the present invention.
Figure 10 is the schematic diagram of a kind of its wafer limiting piece module of front-open wafer box of the present invention.
Figure 11 is fixed in the schematic diagram of a body for its wafer limiting piece module of a kind of front-open wafer box of the present invention.
Figure 12 is the schematic diagram of its wafer limiting piece module of a kind of front-open wafer box of the present invention in the restriction wafer.
Figure 13 A is the integrally formed schematic diagram of its left and right sides wafer limiting piece module of a kind of front-open wafer box of the present invention.
Figure 13 B is the schematic diagram that the integrally formed structure of its left and right sides wafer limiting piece module of a kind of front-open wafer box of the present invention is fixed in a body.
Figure 14 is the schematic diagram of another kind of front-open wafer box of the present invention.
Figure 15 is the schematic diagram of another kind of its wafer limiting piece module of front-open wafer box of the present invention.
Figure 16 A is that its wafer limiting piece of another kind of front-open wafer box of the present invention rigidly connects the schematic diagram that touches wafer.
Figure 16 B is the schematic diagram of its wafer limiting piece of another kind of front-open wafer box of the present invention in the restriction wafer.
Figure 17 is the schematic diagram of another front-open wafer box of the present invention.
Figure 18 is the schematic diagram of another its wafer limiting piece module of front-open wafer box of the present invention.
Figure 19 A is the not schematic diagram of contact wafer of its wafer limiting piece of another front-open wafer box of the present invention.
Figure 19 B is the schematic diagram of its wafer limiting piece of another front-open wafer box of the present invention in the restriction wafer.
Figure 20 is the top view of door body internal surface configurations one inflatable gas seal member of the present invention.
Figure 21 is the cutaway view of front-open wafer box of the present invention after the door body is closed.
[main element symbol description]
1 front-open wafer box, 22 inner surfaces
10 box bodys, 23 interior walls
101 sidewalls, 24 sunk areas
102 rear walls 25 protrude platform
103 corners, 26 outstanding posts
11 slots, 30 limiting piece modules
12 openings, 31 bases
13 pulley 31S minor faces
131 wheel shafts
The long limit of 31L
132 wheel bodys, the 32 curved portions that prolong
The semicircular protuberance of 133 stop part 32C
14 pulley holding part 32G central authorities guide groove
15 containing holes, 33 installing holes
16 pulley support portions, 34 holes
20 body 400 limiting piece modules
21 outer surfaces, 40 limited parts
41 base portions, 118 movable pins
42 bends, 60 door latch apparatus
43 62 elliptic cams of cranking arm
44 first contact jaws, 622 location notchs
45 second contact jaws, 64 carriages
500 limiting piece modules, 642 chutes
50 limited parts, 644 location pulleys
51 base portions, 646 plane pins
52 first 66 pulleys of cranking arm
53 second 662 pulleys of cranking arm
54 first contact jaws, 664 pulleys
55 second contact jaws, 68 Location resilient pieces
56 the 3rd contact jaws, 70 inflatable gas seal members
57 hinges, 80 charge valves
Embodiment
Because the present invention discloses a kind of Carrier box of box for photomask, particularly a kind of in the Carrier box of box for photomask a plurality of fixtures of configuration, and fix box for photomask in the Carrier box by these fixtures.Because some light shields that the present invention used or the detailed manufacturing or the processing procedure of box for photomask utilize prior art to reach, so in following explanation, do not do complete description.And the accompanying drawing in the literary composition in following, also not according to the actual complete drafting of relative dimensions, its effect is only being expressed the schematic diagram relevant with the utility model feature.
At first, please refer to Fig. 2 A, it is according to a preferred embodiment schematic diagram of front-open wafer box of the present utility model.Shown in Fig. 2 A; front-open wafer box 1 mainly comprises a box body 10; formed by four adjacent sidewalls 101; and form an opening 12 in a side; and another side of opening 12 forms a rear wall 102 relatively; one opposing sidewalls 101 of box body 10 inside is provided with a plurality of slots 11; in order to ccontaining a plurality of wafers (not being shown among this figure); and body 20; have an outer surface 21 and an inner surface 22; door body 20 is to combine with the opening 12 of box body 10 with inner surface 22; and in order to protect a plurality of wafers of box body 10 inside; wherein front-open wafer box 1 is characterised in that: configuration or also can all be disposed at least one pair of pulley 13 at the most to pulley 13 on the inner edge at opening 12 places of box body 10 on the inner edge of each adjacent wall 101 at opening 12 places of box body 10.
Please refer to Fig. 2 B and Fig. 2 C, for a kind of pulley of the present invention and be disposed at the schematic diagram of box body.At first, shown in Fig. 2 C, the structure of this pulley 13 is made up of a wheel shaft 131 and a wheel body 132, or by integrated mode also make can, wherein wheel body 132 is made by rubber or high molecule plastic material.Then, please refer to Fig. 2 B, for above-mentioned pulley 13 is disposed in the box body 10, on the inner edge of the adjacent wall 101 at opening 12 places of box body 10, be provided with many in addition to pulley holding part 14, use for paired pulley 13 and embed, and pulley holding part 14 can be the form of a storage tank or containing hole and presents, therefore can be in storage tank or around the containing hole configuration one fixture (not being shown among the figure) in addition, be located in the box body 10 in order to pulley 13 is buckled.And be the external form that cooperates pulley 13, so the cross pattern of the shape approximation of the ccontaining opening of pulley holding part 14.In a preferred embodiment of the present invention, pulley 13 is disposed on each adjacent sidewall 101 of box body 10 inside, and is that adjacent wall 101 formed corners 103 with box body 10 inside are center and configuration in pairs, shown in Fig. 2 B.Therefore, when door body 20 imports box body 10, please refer to Fig. 3 A and Fig. 3 B, the area that partly only limits to pulley 13 that contacts of door body 20 and box body 10, therefore the collision that can significantly reduce friction area and reduce door body 20 and box body 10 avoids grit to produce, and reduces pollution risk.
Then, please refer to Fig. 4 A, it is according to another preferred embodiment schematic diagram of front-open wafer box of the present utility model.Shown in Fig. 4 A; front-open wafer box 1 mainly comprises a box body 10; formed by four adjacent sidewalls 101; and form an opening 12 in a side; and another side of opening 12 forms a rear wall 102 relatively; one opposing sidewalls 101 of box body 10 inside is provided with a plurality of slots 11; in order to ccontaining a plurality of wafers (not being shown among this figure); and body 20; have an outer surface 21 and an inner surface 22; the outer surface 21 of this body 20 has an interior wall 23 that is surrounded on a body 20; door body 20 is to combine with the opening 12 of box body 10 with inner surface 22; and in order to a plurality of wafers of protection box body 10 inside, wherein front-open wafer box 1 is characterised in that: on the interior wall 23 of the outer surface 21 of door body 20 configuration many to pulley 13, or also can on each adjacent interior wall 23 of the outer surface 21 of box body 10, all dispose at least one pair of pulley 13.
Please refer to Fig. 4 B, wheels arrangements of the present invention is in the schematic diagram of door body.At first, shown in Fig. 2 C, the structure of this pulley 13 is made up of a wheel shaft 131 and a wheel body 132, or make by integrated mode and also can, two ends in the wheel shaft 131 of pulley 13 can be provided with a stop part 133 (shown in Fig. 4 B) in addition in addition, and wherein wheel body 132 is made by rubber or high molecule plastic material.Then, please refer to Fig. 4 B, for above-mentioned pulley 13 is disposed in the body 20, on the adjacent interior wall 23 of the outer surface 21 of door body 20, be provided with many in addition to pulley holding part 14, use for paired pulley 13 and embed, and can be the form of a storage tank or containing hole 15, pulley holding part 14 presents, therefore can dispose a fixture (not being shown among the figure) or pulley support portion 16 in storage tank or around the containing hole 15 in addition, in order to being buckled, pulley 13 is located in the body 20, the relative left and right sides of the configurable containing hole 15 in pulley holding part 14 of this pulley support portion 16 wherein, and being provided with one, pulley support portion 16 takes turns axial trough 17, embed in order to the wheel shaft 131 that pulley 13 is provided, and fixing with stop part 133, make pulley 13 be difficult for deviating from pulley support portion 16.In a preferred embodiment of the present invention, pulley 13 is disposed on each adjacent interior wall 23 of outer surface 21 of a body 20, and is that adjacent interior wall 23 formed corners 103 with the outer surface 21 of door body 20 are center and configuration in pairs, shown in Fig. 4 B.Therefore, when door body 20 imports box bodys 10, the area that partly only limits to pulley 13 that contacts of door body 20 and box body 10, the collision that therefore can significantly reduce friction area and reduce door body 20 and box body 10 avoids grit to produce, and the reduction pollution risk.
Except that above-mentioned content, please continue A with reference to Fig. 2, the present invention encircles on the door body 20 of front-open wafer box 1 in addition and establishes an inflatable gas seal member 70, after door body 20 was directed into box body 10, the slit that door body 20 and box body are 10 can make that the inside of front-open wafer box 1 can keep airtight conditions by the inflation of inflatable gas seal member 70; In addition, the door outer surface 21 of body 20 and 22 at least one door latch apparatus 60 of configuration of inner surface in front-open wafer box 1, after making that door body 20 is directed into box body 10, by door latch apparatus 60 door body 20 and box body 10 are combined into one, and make that door body 20 can not break away from box body 10 in front-open wafer box 1 transportation; In addition, in front-open wafer box 1 the door body 20 inner surface 22 on the configuration at least one limiting piece module (not being shown among this figure), it can be directed in the process of box body 10 at door body 20, by this limiting piece module wafer is fixed in the box body 10, in transportation, produces displacement to avoid the wafer in the front-open wafer box 1.The related description of above-mentioned door latch apparatus 60, limiting piece module and gas seal member 70 etc. will be distinguished exposure in detail in following content.
Please refer to Fig. 5, be door latch apparatus 60 top views in the door body 20 of front-open wafer box of the present invention.As shown in Figure 5, comprise a pair of door latch apparatus 60 between door outer surface of body 20 and the inner surface, wherein each door latch apparatus 60 is disposed between a body 20 outer surfaces and the inner surface by an elliptic cam 62, carriage 64, at least one pulley 66 a pair of and 62 liang of end in contact of elliptic cam and is embedded in the chute 642 of carriage 64 and Location resilient piece 68 that at least one and carriage 64 link into an integrated entity is formed.Then, please refer to Fig. 6, be the enlarged diagram of the elliptic cam among Fig. 5 62 with carriage 64 contact jaws.As shown in Figure 6, in a preferred embodiment of the present invention, carriage 64 with the locating of 62 liang of termination contact of elliptic cam, can dispose a location pulley 644 again, when elliptic cam 62 rotates, can reduce the frictional force of 62 of carriage 64 and elliptic cams; In addition, can make when elliptic cam 62 rotates also that location pulley 644 can be very smooth-going slips into location notch 622 by the design of a plurality of location notchs 622 on the elliptic cam 62, the restriction point when rotating as elliptic cam 62.In an embodiment of the present invention, elliptic cam 62 can be a metal material, and it also can be that the high molecule plastic material forms, and the present invention is not limited.
Then, please refer to Fig. 7 A to Fig. 7 C, be the schematic diagram of the carriage 64 of door latch apparatus 60 of the present invention.Configuration one location pulley 644 on one end of carriage 64, and on another opposite end, then be the plane 646 of an entity, then form a chute 642 between two ends, 642 of this chutes can be embedded in together mutually with the pulley 66 (shown in Fig. 7 B) in being fixed on a body 20.In addition, carriage 64 is near pulley 644 ends of close location, and then the end with Location resilient piece 68 links together, and the other end of Location resilient piece 68 then is fixed on the body 20.So when door body 20 will be closed the opening 12 of box body 10, can earlier door body 20 be combined with box body 10, rotate elliptic cam 62 then; When elliptic cam 62 rotates, carriage 64 can be advanced by the edge direction of elliptic cam 62 to door body 20, make the physical plane 646 of carriage 64 passed the door bolt hole 27 on the body 20 and stretch into be arranged near the box body 10 opening part edges and with door bolt hole 27 corresponding jacks (not being shown in figure), make the action that box body 10 and door body 20 are combined into one and close box body 10 to finish.Location resilient piece 68 at this moment, can make Location resilient piece 68 be compressed, so when door body 20 will be opened, along with elliptic cam 62 rotates, also can drive the position that carriage 64 returns to opening according to the power that Hooke's law provided.In an embodiment of the present invention, carriage 64 and Location resilient piece 68 can be metal materials, and it also can be that the high molecule plastic material forms, and the present invention is not limited.And the material of pulley 66 is not also limited.
In addition, shown in Fig. 7 B, in a preferred embodiment, pulley 66 is configured in the inside of a body 20 in couples, and each other at a distance of a suitable distance.Therefore, when pulley 662 and pulley 664 are embedded in the chute 642 of carriage 64, this can be correct to pulley 66 and plane 646 smooth-going ground guided slidable device 64 passed door bolt hole 27 on the body 20.
To emphasize at this, the present invention is in aforesaid process, all are operating process that an elliptic cam 62 and carriage 64 illustrate door latch apparatus 60, but in fact, each elliptic cam 62 contacts with a pair of carriage 64, and each body 20 inside then disposes a pair of door latch apparatus 60 (as shown in Figure 5: this moment, door of the present invention body 20 was to be in the state of opening).Because the cam in the door latch apparatus 60 of the present invention is a kind of elliptic cam 62, this elliptic cam 62 forms a pair of latches perforate (not being shown among the figure) on the outer surface 21 of door body 20.Because elliptic cam 62 has long short radius X of radius Y and, the present invention comes to come and go the starting component that moves as control carriage 64 by the difference between the different radii of this elliptic cam 62; For example, can be if want with on the dual-side of door the body 20 or following mobile 10mm～30mm of carriage 64, so that the front end of carriage 64 can be passed a body 20, then reaching than major radius of Ci Shi elliptic cam 62 will have 10mm～30mm at least than the length difference between the short radius.Because elliptic cam 62 is when door body 20 is opened, its two ends than short radius are to contact with a pair of carriage 64 that is positioned at two ends, clearly, after door body 20 and box body 10 cover, can be by rotating elliptic cam 62, make the carriage 64 that is positioned at two ends become and the contacting of elliptic cam 62 than major radius; Because, reaching than major radius of elliptic cam 62 will have 10mm～30mm at least than the length difference between the short radius, so when elliptic cam 62 rotates one to major radius Y locational location notch 622, can make the preceding transverse plane 646 of carriage 64 pass the door bolt hole 27 on the body 20, as shown in Figure 8.To emphasize that at this because carriage 64 is near near location pulley 644 ends, link together with an end of Location resilient piece 68, the other end of Location resilient piece 68 then is fixed on the body 20.So when elliptic cam 62 turns to the locational location notch 622 of major radius Y, carriage 64 can be pushed away by the door bolt hole 27 of elliptic cam 62 on door body 20 edges, at this moment, can make Location resilient piece 68 be compressed, so when door body 20 will be opened, turn to along with elliptic cam 62 in the process of the locational location notch 622 of short radius X, Location resilient piece 68 also can drive the position (being that elliptic cam 62 rests on the locational location notch 622 of short radius X) that carriage 64 returns to opening according to the power that Hooke's law provided.
Then, see also shown in Figure 9ly, be the schematic diagram of a kind of wafer case of the present invention.This wafer case is a kind of front-open wafer box, mainly comprise a box body 10 and a body 20, be provided with a plurality of slots 11 with ccontaining a plurality of wafers in the inside of box body 10, and there is an opening 12 that the input and the output of wafer can be provided in one of them side of box body 10, door body 20 then is to have an outer surface 21 and an inner surface 22, outer surface 21 at least one bolt perforate (not being shown among the figure) of configuration of door body 20, in order to open or the sealing front-open wafer box, and dispose a sunk area 24 and sunk area 24 at the middle approximately place of the inner surface 22 of door body 20 is to protrude between the platforms 25 two, and wherein two internal configurations of protruding platforms 25 aforesaid door latch apparatus 60.The main purpose of this sunk area 24 is a plurality of wafers that are used for accepting box body 10 inside, to reduce the anteroposterior diameter size of entire wafer box, and on two protrusion platforms 25, respectively dispose a wafer limiting piece module 30, except limiting wafer toward opening direction moves, also can be used to the amount that control wafer enters sunk area 24.
The length of above-mentioned door body 20 inner surfaces 22 sunk areas 24 is relevant with slot 11 spacings and the number of wafers of box body 10 inside.With 12 o'clock wafer, for the spacing between the wafer, existing standard code between industry can be held robotic arm simultaneously and stretches into and carry out wafer input and output in the hope of reaching maximum crystal chip bearing density; And common wafer case approximately can ccontaining 25 wafer at present.Yet the width of sunk area 24 of the present invention and the degree of depth can be more flexible, when the thickness of door body 20 remains unchanged, with the degree of depth of sunk area 24 establish bigger, then can allow wafer to enter sunk area 24, and this moment sunk area 24 width also need with increase.
Secondly, see also Figure 10 and shown in Figure 11, for its wafer limiting piece module of a kind of wafer case of the present invention and be fixed in the schematic diagram of a body.Wafer limiting piece module 30 has a strip base 31, strip base 31 has two long limit 31L and two minor face 31S, there is a long limit 31L adjacent among the two long limit 31L with sunk area 24, and on above-mentioned adjacent long limit 31L, form a plurality of spaced curved portions 32 that prolong, each curved protuberance 32C that forms approximate half-circular between portion 32 and its free end that prolongs, and on the protuberance 32C of approximate half-circular, dispose a central guide groove 32G, contact with wafer with central guide groove 32G, can limit corresponding wafer and move toward opening direction by semicircular protuberance 32C.
Its central guide groove 32G of the protuberance 32C of above-mentioned approximate half-circular is used for accepting wafer, and the width of central guide groove 32G can be identical with the thickness of wafer, can allow wafer be absorbed among this central guide groove 32G, to avoid moving up and down of wafer.And can coat a kind of wear-resisting consumptive material on the surface of central its contact wafer of guide groove 32G, and for example: the PEEK material, to reduce friction to wafer.In addition, the structure that wafer limiting piece module 30 can be one of the forming, and can be formed or made by a kind of material, for example: with base 31 and curvedly prolong that portion 32 makes with a kind of material and at the curved semicircular protuberance 32C that forms another kind of material in the portion 32 again that prolongs by two kinds of different materials.Clearly, the base 31 of strip forms an angle with the curved portion 32 that prolongs, and this angle is about 10～60 degree.Because the wafer limiting piece module 30 of sunk area 24 both sides be a symmetry, therefore, when wafer limiting piece module 30 during at the restriction wafer (as shown in figure 12), can produce one only toward center wafer point direction push away with joint efforts, can not cause rocking about wafer.And wafer limiting piece module 30 is except limiting wafer toward opening direction moves, also allow wafer almost completely fall into sunk area 24, the anteroposterior diameter size of wafer case is dwindled, and allow the center of gravity of overall chip box concentrate on the centre of wafer case, to increase the stability of wafer case.And as shown in figure 10, because jagged between the curved a plurality of semicircular protuberance 32C that prolongs in the portion 32, therefore curvedly prolong portion 32 bullet shape can relatively be arranged, can allow the compressing of wafer and a little distortion is arranged.
In addition, by Figure 11 and Figure 12 as can be known, base 31 has a plurality of installing holes 33, with respect to these a few installing holes 33 places outstanding post 26 is arranged then on the inner surface 22, wafer limiting piece module 30 is fixed on the protrusion platform 25 of a body 20 inner surfaces 22 sunk areas 24 both sides in the mode that snaps in (snap on).Certainly, for the convenience of producing, also like can wafer limiting piece module 30 is directly integrally formed with door body 20 inner surfaces 22, to avoid coming off of wafer limiting piece module 30.Then, please refer to Figure 13 A and Figure 13 B, the wafer limiting piece module 30 of sunk area 24 both sides can also be integrally formed, and this integrally formed structure has a hole 34 with the sunk area 24 to the body 20 of answering the door.And this integrally formed structure can be fixed in a body 20 inner surfaces 22 also or directly integrally formed with body 20 inner surface 22 with the mode that snaps in (snap on).
Secondly, see also shown in Figure 14ly, be the schematic diagram of another kind of wafer case of the present invention.This front open type wafer case is identical with the wafer case of above-mentioned Fig. 9, comprises a box body 10 and a body 20, and the wafer limiting piece module 400 that different is is fixed in a body 20 inner surfaces 22 sunk areas 24 both sides is different with above-mentioned wafer limiting piece module 30.Shown in Figure 15 and Figure 16 A, the wafer limiting piece module 400 of sunk area 24 both sides is made up of a plurality of spaced wafer limiting piece 40, and wafer limiting piece 40 relative on the limiting piece module 400 of each wafer limiting piece 40 and sunk area 24 another sides aligns, wherein each limited part 40 has a base portion 41, base portion 41 is fixed on a body 20 inner surfaces 22, and base portion 41 has the contiguous sunk area 24 of a side and at above-mentioned side after the opening direction of box body 10 extends into a bend 42, transferring sunk area 24 centre to extends into one and cranks arm 43, make these a plurality of 43 both sides, top that are disposed at sunk area 24 of cranking arm, and 43 having one first contact jaw 44 with the place of bend 42 handing-over above-mentioned cranking arm, 43 the free end of cranking arm then has one second contact jaw 45.Shown in Figure 16 A, the elastic construction that each wafer limiting piece 40 can be one of the forming (for example: the thermoplastic elastic structure), when door body 20 do not combine with box body 10 or just will in conjunction with the time, first contact jaw 44 of wafer limiting piece 40 and online (44-45) of second contact jaw 45 with the door body 20 medial surface 22 parallel to each other.At this moment, wafer is earlier with 45 contacts of second contact jaw, when wafer contacts second contact jaw 45, can make bend 42 produce deformation and lever drives cranks arm 43, makes i.e. first contact jaw 44 contact wafer in order of another contact jaw of cranking arm on 43.At this moment, shown in Figure 16 B, door body 20 follows the inner surface 22 of door body 20 to form an angle with first contact jaw 44 of box body 10 driving fits and wafer limiting piece 40 and online (44-45) of second contact jaw 45.Very clearly, each wafer limiting piece 40 is to produce with two contact jaws and wafer contact, can firmly hold wafer or the restriction wafer moves toward opening direction, can reduce wafer in transportation, the generation particle dust because of vibrations.In addition, also allow wafer effectively fall into sunk area 24, to shorten the anteroposterior diameter size of wafer case.
Above-mentioned wafer limiting piece 40 its bends 42 be an elastic construction (for example: the thermoplastic elastic structure), the angle that one bending is arranged, therefore when door body 20 and box body 10 driving fit never during to driving fit, this angle of bend can change, make first contact jaw 44 in regular turn second contact jaw 45 contact with wafer.In addition, bend 42 43 can be two kinds of unlike materials with cranking arm, and similarly is the plastics of different hardness, can make bend 42 produce bigger deformation and cranks arm and 43 be not easy deformation.And first contact jaw 44 and second contact jaw 45 also can respectively have a depression, and wafer can be absorbed in the depression, avoid wafer to move up and down.In addition, a plurality of wafer limiting pieces 40 can be formed at a base, and this base is fixed in the inner surface 22 of a body 20.Certainly, a plurality of wafer limiting pieces 40 also can reduce and produce required cost for directly integrally formed with the inner surface 22 of door body 20.
Then, see also shown in Figure 17ly, be the schematic diagram of another wafer case of the present invention.This front open type wafer case is identical with the wafer case of above-mentioned Figure 14, comprises a box body 10 and a body 20, and different is that wafer limiting piece module 500 its each wafer limiting pieces that are fixed in a body 20 inner surfaces 22 sunk area both sides have three contact jaws.Shown in Figure 18 and Figure 19 A, the wafer limiting piece module 500 of sunk area 24 both sides is rearranged by a plurality of wafer limiting piece 50, and wafer limiting piece 50 relative on the limiting piece module 500 of each wafer limiting piece 50 and sunk area 24 another sides aligns, wherein each wafer limiting piece 50 has a base portion 51, one end of base portion 51 is fixed on the inner surface 22 of a body 20, and its other end and one first is cranked arm and 52 is connected, this first cranks arm and 52 has two free ends, wherein form one first contact jaw 54 than free end away from sunk area 24 centre, and also further crank arm and 53 be connected with one second near another free ends of sunk area 24 centre, second cranks arm 53 has one second contact jaw 55 and one the 3rd contact jaw 56.
Since the base portion 51 of wafer limiting piece 50 be an elastic construction (for example: the thermoplastic elastic structure), at least has a knee, when door body 20 do not combine with box body 10 or just will in conjunction with the time, it is 53 smooth or be suspended on sunk area 24 surface a little and go up or tops that second of wafer limiting piece 50 is cranked arm.At this moment, wafer when wafer contacts first contact jaw 54, can make base portion 51 produce deformation earlier with 54 contacts of first contact jaw, be that the knee angle produces and changes and lever drives first is cranked arm and 52 and second cranked arm 53, make second second contact jaw 55 and the 3rd contact jaw 56 contact wafers of cranking arm on 53.At this moment, shown in Figure 19 B, when door body 20 during with box body 10 driving fits, second cranks arm 53 by crank arm 52 lever drives and away from the surface of sunk area 24 of base portion 51 and first, and first contact jaw 54 of wafer limiting piece 50, second contact jaw 55 and the 3rd contact jaw 56 are with the wafer contact.Clearly, because each wafer limiting piece 50 provides three contact jaws in wafer, can more firmly limit wafer and move or opening moves than the direction of both sides toward the opening direction centre.Certainly, present embodiment can also be cranked arm first and be disposed a hinge 57 between two free ends of 52 and on the side near door body 20 inner surfaces 22, this hinge 57 is fixed in a body 20 inner surfaces 22, so when base portion 51 deformation or during angle change of its knee more firmly lever drives first crank arm and 52 and second crank arm 53, first contact jaw 54, second contact jaw 55 and the 3rd contact jaw 56 all can be contacted with wafer closely.
And as the embodiment of aforementioned two contact jaws, the elastic construction that these a plurality of wafer limiting pieces 50 each wafer limiting piece 50 wherein can be one of the forming (for example: the thermoplastic elastic structure), its base portion 51 and first crank arm 52 or second crank arm 53 can also for unlike material or elastic construction (for example: the thermoplastic elastic structure), similarly be the plastics of different hardness, can make base portion 51 that bigger deformation is arranged and crank arm to be not easy deformation.Certainly, first contact jaw 54, second contact jaw 55 and the 3rd contact jaw 56 can also have a depression, and wafer is absorbed in the depression, avoid wafer to move up and down.And above-mentioned a plurality of wafer limiting piece 50 can also be formed at a base earlier, and this base is fixed in the inner surface 22 of a body 20 or a plurality of wafer limiting piece 50 is directly directly integrally formed with the inner surfaces 22 of door body 20.
In addition, the inner surface 22 of door body 20 of the present invention can be a plane, can not cave in, and dispose at least one door latch apparatus 60 between inner surface 22 and outer surface 21, and dispose a pair of door latch apparatus 60 in the preferred embodiment.Because door latch apparatus 60 is identical with aforesaid embodiment, so repeat no more.In addition, when body 20 and box body 10 are covered, therefore can fix a plurality of wafers that have been positioned in the box body 10, can on the inner surface 22 on above-mentioned plane, dispose at least one limiting piece module or dispose at least one limiting piece module near the place of middle section.And the present invention is not limited the structure or the form of this limiting piece module, so it can comprise aforesaid limiting piece module 30, limiting piece module 400 or limiting piece module 500 or similar structure.Similarly, because the detailed construction of limiting piece module is identical with aforesaid embodiment, so repeat no more.
Clearly, door latch apparatus 60 of the present invention under the drive of elliptic cam 62, the back and forth movement that it advances and retreats, and not on any vertically (promptly vertically) direction, do not produce displacement, therefore, door latch apparatus 60 of the present invention is a better simply design.When door body 20 of the present invention covers with box body 10, the a plurality of wafer limiting pieces 50 that are fixed in a body 20 inner surfaces 22 contact with wafer, and cam 62 drives a pair of carriage 64 and moves to the edge of door body 20, then the preceding transverse plane 646 of carriage 64 is passed the door bolt hole 27 on the body 20 and fix near box body 10 opening part edges and with door bolt hole 27 corresponding jacks in.At last, can inflate the inflatable gas seal member (not being shown among the figure) that is disposed between a body 20 and the box body 10 via an aerating device again, so that box body 10 inside and external isolation.
Then, please refer to Figure 20, be the top view of configuration one inflatable gas seal member on door body 20 inner surfaces 22 of the present invention.As shown in figure 20, the middle section of door body 20 inner surfaces 22 forms a sunk area 24, and protrusion platform 25 inside of the both sides of sunk area 24 then dispose door latch apparatus 60.Simultaneously, on the edge around door body 20 inner surfaces 22, configuration one is around the inflatable gas seal member 70 around the door body 20.When door body 20 via after being positioned at pulley 13 on the box body 10 and being directed into box body 10, the inner surface 22 of door body 20 has been positioned at the inside of box body 10, at this moment, the slit that door body 20 and box body are 10 promptly can make the inside of front-open wafer box 1 can keep airtight conditions by the inflation of inflatable gas seal member 70.In a preferred embodiment of the present invention, this inflatable gas seal member 70 is a kind of inflatable airtight circles (sealing ring), the inner tube of a tyre of the similar bicycle tire of the principle of its inflation, can charge into gas through the inflation inlet (not being shown among the figure) on the inflatable gas seal member 70, so that inflatable gas seal member 70 expands, in order to reaching airtight conditions between door body 20 and the box body 10, make the unlikely atmospheric humidity that is subjected to of wafer that is stored in front-open wafer box inside influence.Clearly, the inflation inlet on the inflatable gas seal member 70 is embedded on the body 20.In addition, the material of inflatable gas seal member 70 in the present embodiment can be a rubber parts, but also can be by the formed elastic component of high molecule plastic material.
Be stressed that at this, the present invention drives carriage 64 at the disclosed door latch apparatus 60 of Fig. 5 via elliptic cam 62 and carry out back and forth movement on single plane, so the vent cover on door body 20 and box body 10 is fashionable, rotation via elliptic cam 62, make the plane pin 646 of carriage 64 front ends pass the door bolt hole 27 on the body 20 and fix on box body 10, to reach the effect of locking.Clearly, though the box body 10 of this moment has locked together with door body 20, box body 10 and 20 of bodies of door do not form airtight, therefore, can reach airtight by the inflatable gas seal member 70 of present embodiment (Figure 20).Clearly, because box body 10 has locked together with door body 20, form evenly airtight so can inflate the bulbs of pressure that produced by inflatable gas seal member 70.And in the time will beating opening door body 20, then can earlier inflatable gas seal member 70 be carried out pressure release after, rotate elliptic cam 62 again, make the plane pin 646 of carriage 64 break away from box bodys 10 and door body 20.
Please continuing to be the cut open formula figure of front-open wafer box of the present invention after the door body is closed again with reference to Figure 21.As shown in figure 21, when door body 20 via after being positioned at pulley 13 on the box body 10 and being directed into box body 10, promptly finish closing of box body 10; At this moment, pin 646 can be driven and pass door bolt hole 27 on the body 20, and fixes on box body 10; Then, immediately the inflatable gas seal member 70 that is positioned on the body 20 is inflated, made inflatable gas seal member 70 will make box body 10 and door body 20 formation airtight by expanding.
In addition, for fear of in the process of opening door body 20, the front-open wafer box atmosphere outside pours the pollution that causes wafer in the box body 10 fast, in another preferred embodiment of the present invention, further form at least one charge valve 80 on box body 10, this charge valve 80 can be inflated the inside of box body 10.Therefore, when door body 20 close box body 10 and the expansion by inflatable gas seal member 70 in box body 10 and 20 of door bodies form airtight after, can inflate the charge valve on the box body 10 80 via an aerating device (not being shown among the figure), for example: charge into nitrogen or other inert gas etc., make the air pressure of box body 10 inside press (promptly forming so-called malleation) greater than atmosphere outside.After this, if the inflatable gas seal member on the door body 20 70 is lost heart abolishing when airtight, because the air pressure of box body 10 inside presses greater than atmosphere outside, therefore, gas inside can be to external leakage, and can not cause atmosphere outside to press the phenomenon that pours into box body 10 inside.
In addition, can also further include at least one extraction valve 81 on the box body 10, when above-mentioned aerating device is inflated charge valve 80, can utilize an air extractor (not being shown among the figure) to carry out bleeding of trace simultaneously through this extraction valve 81, so can fill the entire wafer box full more quickly.And above-mentioned at least one extraction valve 81 can be placed in the position of close box body 10 openings 12, and at least one charge valve 80 can be placed in than away from box body 10 openings 12, and the gas that charges into can totally and promptly be with the particulates in the box body 10 from box body 10 inside through opening 12 or extraction valve 81.
The above is preferred embodiment of the present invention only, is not in order to limit interest field of the present invention; Simultaneously above description should be understood and be implemented for the special personage who knows the present technique field, so other does not break away from the equivalence of being finished under the disclosed spirit and change or modification, all should be included in the interest field of application.
Claims (10)
1, a kind of front-open wafer box; mainly comprise a box body; this box body inside is provided with a plurality of slots with ccontaining a plurality of wafers; and forming an opening in a side of this box body can be for the input and the output of these a plurality of wafers; and a body, having an outer surface and an inner surface, this body is to combine with this opening of this box body with this inner surface; and in order to protect these a plurality of wafers of this box body inside, wherein this front-open wafer box is characterised in that:
Configuration is many to pulley on the inner edge of the opening part of this box body.
2, front-open wafer box as claimed in claim 1 is characterized in that, this to wheels arrangements on an opposing sidewalls of this box body inside.
3, front-open wafer box as claimed in claim 1 is characterized in that, this is that corner with this box body inside is that the center disposes in pairs to pulley.
4, front-open wafer box as claimed in claim 1 is characterized in that, disposes a pulley holding part in the opening inner edge place of this box body.
5, a kind of front-open wafer box; mainly comprise a box body; this box body inside is provided with a plurality of slots with ccontaining a plurality of wafers; and forming an opening in a side of this box body can be for the input and the output of these a plurality of wafers; and a body, having an outer surface and an inner surface, this body is to combine with this opening of this box body with this inner surface; and in order to protect these a plurality of wafers of this box body inside, wherein this front-open wafer box is characterised in that:
At least one pair of pulley of configuration on the inner edge of each adjacent wall of the opening part of this box body.
6, a kind of front-open wafer box; mainly comprise a box body; this box body inside is provided with a plurality of slots with ccontaining a plurality of wafers; and forming an opening in a side of this box body can be for the input and the output of these a plurality of wafers; and body; have an outer surface and an inner surface; the outer surface of this body has an interior wall around this body; this body is to combine with this opening of this box body with this inner surface; and in order to protect these a plurality of wafers of this box body inside, wherein this front-open wafer box is characterised in that:
Configuration is many to pulley on the interior wall of the outer surface of this body.
7, front-open wafer box as claimed in claim 6 is characterized in that, this to wheels arrangements on a relative interior wall of the outer surface of this body.
8, front-open wafer box as claimed in claim 6 is characterized in that, this is that corner with the interior wall inside of this body is that the center disposes in pairs to pulley.
9, front-open wafer box as claimed in claim 6 is characterized in that, disposes a pulley holding part in the interior wall place of the outer surface of this body.
10; a kind of front-open wafer box; mainly comprise a box body; this box body inside is provided with a plurality of slots with ccontaining a plurality of wafers; and forming an opening in a side of this box body can be for the input and the output of these a plurality of wafers; and body; have an outer surface and an inner surface; the outer surface of this body has an interior wall around this body; this body is to combine with this opening of this box body with this inner surface; and in order to protect these a plurality of wafers of this box body inside, wherein this front-open wafer box is characterised in that: at least one pair of pulley of configuration on the adjacent interior wall of each of the outer surface of this body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810161049XA CN101685787B (en) | 2008-09-24 | 2008-09-24 | Front opening type wafer box with pulleys |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810161049XA CN101685787B (en) | 2008-09-24 | 2008-09-24 | Front opening type wafer box with pulleys |
Publications (2)
| Publication Number | Publication Date |
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| CN101685787A true CN101685787A (en) | 2010-03-31 |
| CN101685787B CN101685787B (en) | 2011-07-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200810161049XA Active CN101685787B (en) | 2008-09-24 | 2008-09-24 | Front opening type wafer box with pulleys |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103165499A (en) * | 2011-12-13 | 2013-06-19 | 家登精密工业股份有限公司 | Front-opening wafer box with latch structure |
| CN110641841A (en) * | 2018-06-27 | 2020-01-03 | 家登精密工业股份有限公司 | Wafer frame carrier |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200969344Y (en) * | 2006-10-16 | 2007-10-31 | 家登精密工业股份有限公司 | Wafer box and its wafer fastener |
-
2008
- 2008-09-24 CN CN200810161049XA patent/CN101685787B/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103165499A (en) * | 2011-12-13 | 2013-06-19 | 家登精密工业股份有限公司 | Front-opening wafer box with latch structure |
| CN103165499B (en) * | 2011-12-13 | 2015-12-16 | 家登精密工业股份有限公司 | Front-opening wafer box with latch structure |
| CN110641841A (en) * | 2018-06-27 | 2020-01-03 | 家登精密工业股份有限公司 | Wafer frame carrier |
| CN110641841B (en) * | 2018-06-27 | 2021-04-20 | 家登精密工业股份有限公司 | Wafer frame carrier |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101685787B (en) | 2011-07-06 |
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