CN200969344Y

CN200969344Y - Wafer box and its wafer fastener

Info

Publication number: CN200969344Y
Application number: CNU2006201487947U
Authority: CN
Inventors: 邱铭隆; 吕保仪
Original assignee: JIADENG PRECISE INDUSTRY Co Ltd
Current assignee: JIADENG PRECISE INDUSTRY Co Ltd; Gudeng Precision Industrial Co Ltd
Priority date: 2006-10-16
Filing date: 2006-10-16
Publication date: 2007-10-31
Anticipated expiration: 2016-10-16

Abstract

The utility model relates to a wafer fixedly holding device used for fixedly holding wafer stored in wafer box. The wafer fixedly holding device of the utility model includes a support base, a push rod which are fixedly arranged on the wafer box cover, two rotating arms and two wafer shift levers, each rotating arm therein has a first rod body and a second rod body, and the first rod body is horizontally pivoted on the support base, while the second rod body is horizontally pivoted on the push rod, the push rod contacts the two wafer shift levers which vertically pivot respectively to two sides of the support base, the wafer shift levers are driven to rotate around the pivoting shaft of the wafer shift levers at horizontal direction when the push rod moves.

Description

Wafer case and wafer holding unit thereof

Technical field

The utility model relates to a kind of wafer (wafer) holding unit, and is particularly related to a kind of wafer holding unit that is installed on the wafer case (wafer pod).

Background technology

The storage of the utility model and wafer and collect relevantly normally stores wafer with wafer case (wafer pod) on semi-conductor industry, mainly be to suffer the damage of other article or instrument and equipment for fear of wafer, and guarantee that wafer is not subjected to dust pollution.

Please refer to Figure 1A and Figure 1B, represented is the wafer lid 11 and the wafer case chassis 22 of known wafer case 10, wafer case chassis 22 is provided with for the brilliant boat (cassette) 21 of putting wafer 23, the combination on wafer lid 11 and wafer case chassis 22 forms confined space, and brilliant boat 21 is positioned at confined space.

It should be noted that, for wafer 23 can be fixed after putting into brilliant boat 21, and can and then not move along with the rocking vibration of wafer case 10 thereby cause the damaged of wafer 23 or produce dust, the design collocation of wafer case 10 has first fixing structure 12 and second fixing structure 13, in order to fixing wafer 23.Please refer to Figure 1B,

fixing structure

12 and 13 belongs to linkage, can be quadric chain or five-bar mechanism.When wafer lid 11 combines with wafer case chassis 22,

fixing structure

12 and 13 can form with wafer case chassis 22 and contact and be subjected to the compressing on wafer case chassis 22 and allow

fixing structure

12 and 13 produce passing near the push rod of wafer 23 in vertical direction, and wafer 23 is held.

Yet, because the passing direction of

fixing structure

12 and 13 push rod in vertical direction is not to be the direction of level fully, that is to say the storing direction of the passing direction of push rod and wafer 23 and not parallel, therefore, in the process that push rod is passed, often cause beating and then causing the damaged of wafer 23 and produce undesired dust of wafer 23 easily because of the friction between push rod and the wafer 23.

In view of the foregoing, the utility model proposes a kind of wafer case and wafer holding unit thereof, the wafer case that wafer holding unit of the present utility model is installed in wafer case covers, when it combines with the wafer case chassis at the wafer lid, can apply the retain strength parallel and wafer is fixed wafer, and can not produce the problem that above-mentioned known technology meets with the wafer placement direction.

Summary of the invention

Wafer fixing structure based on above-mentioned known wafer case can't overcome the breakage that causes wafer fully, and the problem that produces undesired dust, and the utility model proposes a kind of novel wafer holding unit then.

A purpose of the present utility model is to provide a kind of wafer holding unit, and it can allow, and wafer is fixing not to be rocked, and can not cause damage to wafer.

Another purpose of the present utility model is to provide a kind of wafer holding unit, and it can allow, and wafer is fixing not to be rocked, and can not produce dust.

Wafer holding unit of the present utility model includes supporting base, push rod, two turning arms and two the wafer driving levers that are fixedly arranged on wafer case (wafer pod) and cover, wherein each turning arm has first body of rod and second body of rod, and be connected on the supporting base with first body of rod horizontal pivot, and be connected on the push rod with second body of rod horizontal pivot, push rod and form with vertical two wafer driving levers that are articulated in the supporting base both sides respectively contacts, and can drive the wafer driving lever and rotate in the horizontal direction around its drive-connecting shaft when the push rod displacement.

Among one embodiment, push rod has two first rollers that lay respectively at both sides, and when the wafer lid combined with the wafer case chassis, first roller contacted with the formation of wafer case chassis and forces push rod to move.In addition, also be provided with four second rollers on the push rod, it lays respectively near the two ends of second body of rod of two turning arms, forms between second roller and the wafer driving lever to contact, and second roller can be followed push rod to move synchronously and then drive the wafer driving lever around its drive-connecting shaft rotation.

On the other hand, pivot joint between each wafer driving lever and the supporting base is that elasticity articulates, thus, after combining between wafer lid and the wafer case chassis was disengaged, the wafer driving lever can be because the effect of elastic restoring force and from getting back to original position with the wafer position contacting.

On the one hand, the material that the first above-mentioned roller, second roller and the preferable employing of wafer driving lever have the high abrasion characteristic for example is polyether-ether-ketone (Polyether ether ketone) again.

The utility model is compared with known wafer holding unit, have following advantage: the first, the direction of the retain strength of wafer holding unit moment donor wafer of the present utility model is parallel with the storing direction of wafer, the strength average mark of fixing is dissipated to each wafer, thereby has reduced the possibility of wafer breakage and generation dust widely; The second, element such as the roller of wafer holding unit of the present utility model, wafer driving lever all adopts the material of high-wearing feature, can avoid the generation of dust.

Description of drawings

Figure 1A is a schematic diagram, represents the wafer lid and the wafer case chassis of known wafer case.

Figure 1B is a schematic diagram, the wafer lid of expression Figure 1A and the combination on wafer case chassis.

Fig. 2 A is a stereogram, the wafer lid of expression the utility model one embodiment and installing wafer holding unit thereon.

Fig. 2 B is a stereogram, the wafer case chassis of expression the utility model one embodiment and the relation of wafer holding unit.

Fig. 2 C is a stereogram, the wafer holding unit of presentation graphs 2A.

Fig. 2 D is a stereogram, the wafer holding unit of presentation graphs 2A.

The main element description of symbols

10 wafer case

11 wafer lids

12 first fixing structures

13 second fixing structures

21 brilliant boats

22 wafer case chassis

23 wafers

100 wafer lids

201 brilliant boats

202 wafer case chassis

30 wafer holding units

301 supporting bases

302 push rods

303 turning arms

303a first body of rod

303b second body of rod

304 wafer driving levers

304a plastics shell fragment

305 first rollers

306 second rollers

Embodiment

Please refer to Fig. 2 A and Fig. 2 B, wafer holding unit 30 of the present utility model is installed on the wafer lid 100 of wafer case (wafer pod), wafer lid 100 combines with wafer case chassis 202 and forms confined space, wafer case chassis 202 is provided with brilliant boat 201, be provided with placing a plurality of wafers 203, brilliant boat 201 is positioned at this confined space.Wafer holding unit 30 of the present utility model consists predominantly of supporting base 301, push rod 302, two turning arms 303 and two wafer driving levers 304, wherein supporting base 301 is fixedly arranged on the wafer lid 100, forms by two turning arms 303 between push rod 302 and the supporting base 301 to be connected.

Please refer to Fig. 2 A and Fig. 2 C, two turning arm 303 settings separated by a distance, each turning arm 303 has first body of rod 303a and second body of rod 303b, each turning arm 303 is connected on the supporting base 301 with first body of rod 303a horizontal pivot, and be connected on the rectangular push rod 302 with second body of rod 303b horizontal pivot, thus, supporting base 301, push rod 302 and two turning arms 303 4 form linkage.In the present embodiment, have dust and produce when turning arm 303 rubs with push rod 302 and supporting base 301, the material of turning arm 303 adopts the polyether-ether-ketone (Polyether ether ketone) with high abrasion characteristic.

In addition, please refer to Fig. 2 A and Fig. 2 D, two wafer driving levers 304 vertically are articulated in the both sides of supporting base 301 respectively, and contact with the part of push rod 302, can drive wafer driving lever 304 when push rod 302 is moved around the rotation of its drive-connecting shaft, and can with the same direction of the storing direction of wafer 203 on apply retain strength and wafer 203 fixed.

Please refer to Fig. 2 B and Fig. 2 D, among the embodiment, push rod 302 has two first rollers 305 that lay respectively at both sides, and when wafer lid 100 combined with wafer case chassis 202, first roller 305 contacted with 202 formation of wafer case chassis and forces push rod 302 to move.In the present embodiment, have dust and produce when these rollers 305 rub with wafer case chassis 202, the material of these rollers 305 is to adopt the polyether-ether-ketone (Polyether ether ketone) with high abrasion characteristic.

Please refer to Fig. 2 C and Fig. 2 D, in the present embodiment, also be provided with four second rollers 306 on the push rod 302, it lays respectively near the two ends of second body of rod 303b of two turning arms 303, form between second roller 306 and the wafer driving lever 304 and contact, second roller 306 and then push rod 302 moves and then drives wafer driving lever 304 synchronously around its drive-connecting shaft rotation.Same, when these rollers 306 rub with wafer driving lever 304, having dust and produce, the material of these rollers 306 and wafer driving lever 304 has also adopted the polyether-ether-ketone (Polyether ether ketone) with high abrasion characteristic.

On the other hand, please refer to Fig. 2 D, the pivot joint between each wafer driving lever 304 and the supporting base 301 is that elasticity articulates, and is to finish by plastics shell fragment 304a in the present embodiment.Thus, after combining between wafer lid 100 and the wafer case chassis 202 is disengaged, push rod 302 can be because the gravity of itself be got back to original position, and wafer driving lever 304 also can be because of the elastic restoring force of plastics shell fragment 304a from getting back to original position with wafer 203 position contacting.

In sum, wafer holding unit of the present utility model is except allowing the appropriate collection and fixed wafer of wafer case, can also exempt the above-mentioned problem that is present in the known technology, and have following advantage: the first, wafer holding unit of the present utility model is parallel with the storing direction of wafer for the direction of the retain strength that wafer applied, the strength average mark of fixing is dissipated to each wafer, thereby has reduced the chance of wafer breakage and generation dust widely; The second, element such as the roller of wafer holding unit of the present utility model, wafer driving lever all adopts the material of high-wearing feature, further avoids causing the generation of dust.

More than, the utility model clearly demonstrates by each embodiment and accompanying drawing thereof.Yet, the person of ordinary skill in the field be when being appreciated that, each embodiment of the present utility model only be exemplary at this but not be restricted, that is, do not breaking away within the utility model connotation and the scope, the variation of above-mentioned each element and correction are the utility model and contain.Therefore, the utility model should be defined by its claim.

Claims

1. a wafer case has wafer case chassis and wafer lid, and this wafer case chassis is provided with brilliant boat, is provided with placing a plurality of wafers, and this wafer lid combines with this wafer case chassis and forms confined space, makes this crystalline substance boat be positioned at this confined space; It is characterized in that: this wafer case has the wafer holding unit, comprises:

Supporting base, it is fixedly arranged on this wafer case and covers;

Push rod;

Two turning arms, each turning arm have first body of rod and second body of rod, and each turning arm is connected on this supporting base with this first body of rod horizontal pivot, and are connected on this push rod with this second body of rod horizontal pivot; And

Two wafer driving levers vertically are articulated in the both sides of this supporting base respectively, and contact with the part of this push rod;

Wherein, the displacement of this push rod drives above-mentioned these wafer driving levers around its drive-connecting shaft rotation.

2. wafer case according to claim 1 is characterized in that this push rod has two first rollers, and when this wafer lid combined with this wafer case chassis, above-mentioned these first rollers contacted with this wafer case chassis formation and force this push rod to move.

3. wafer case according to claim 2, the material that it is characterized in that above-mentioned these first rollers is a polyether-ether-ketone.

4. wafer case according to claim 1, it is characterized in that this push rod is provided with two second rollers, it lays respectively near the two ends of this second body of rod, and above-mentioned these second rollers contact with above-mentioned these wafer driving levers respectively, in order to drive above-mentioned these wafer driving levers around its drive-connecting shaft rotation.

5. wafer case according to claim 4, the material that it is characterized in that above-mentioned these second rollers is a polyether-ether-ketone.

6. wafer case according to claim 1, the material that it is characterized in that above-mentioned these wafer driving levers is a polyether-ether-ketone.

7. wafer case according to claim 1 is characterized in that the rectangle that is shaped as of this push rod.

8. wafer case according to claim 1 is characterized in that the pivot joint between above-mentioned these wafer driving levers and this supporting base is that elasticity articulates.

9. wafer case according to claim 8 is characterized in that this elasticity articulates to finish by the plastics shell fragment.

10. wafer case according to claim 1, the material that it is characterized in that this turning arm is a polyether-ether-ketone.