CN101676712B - Optical detecting system and method thereof - Google Patents
Optical detecting system and method thereof Download PDFInfo
- Publication number
- CN101676712B CN101676712B CN2008101496456A CN200810149645A CN101676712B CN 101676712 B CN101676712 B CN 101676712B CN 2008101496456 A CN2008101496456 A CN 2008101496456A CN 200810149645 A CN200810149645 A CN 200810149645A CN 101676712 B CN101676712 B CN 101676712B
- Authority
- CN
- China
- Prior art keywords
- shade
- determinand
- gray
- value
- change
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The invention discloses an optical detecting system and a method thereof. Raised flaws on a tested object of a solar cell are detected by shadow, the gray scale value of the tested object is measured by irradiating the tested objected with slant light; a shadow region is distinguished by comparing gray scale value variation of the tested object; the gray scale variation rate of the shadow region gray scale value and the tested object gray scale value is calculated to capture corresponding height value from the self-prestored corresponding relationship of the gray scale variation rate; the corresponding relationship is correspondence of the gray scale variation rate and the height value; and finally, when the captured height value exceeds a preset threshold, the position of the shadow region, which corresponds to the tested object, is the raised flaw. Thus, the invention can quickly compare and judge the raised flow without precise height calculation and conforms to rapid test requirements of a production line.
Description
Technical field
The present invention refers to be used for checking the optical detection system and the method for solar cell flaw especially about a kind of optical detection system and method.
Background technology
In today that earth energy is petered out, solar cell becomes the energy products new lover of a new generation, and the current conversion efficiency that still belongs to the silicon wafer solar cell is preferable.With the solar cell of silicon wafer, comprise photoinduction layer and gum substrate that smectic phase changes on the solar battery structure, visiblely on the photoinduction laminar surface be the silicon wafer of tool color and the lead that is printed on the silicon wafer surface.
Because the lattice of silicon wafer is wayward, particularly polysilicon is more complicated, seems the homochromy of the mottled different depths by seeing in appearance.Detecting (Automated Optical Inspection with automated optical; When AOI) detecting flaw, with traditional front lighting irradiation, image taking sensor receives the shade of gray value that reflected light records determinand again; But makes because of shade of gray value lattice is complicated through regular meeting and to obscure, thereby inspection can not check flaw, the particularly flaw of solar cell surface projection, with front lighting irradiation regular meeting discover less than, can't head it off in existing automated optical detects.
Therefore, fundamental purpose of the present invention is to provide a kind of optical detection system and method for checking solar cell projection flaw, to improve the problems referred to above.
Summary of the invention
The object of the present invention is to provide a kind of optical detection system and method for checking the solar cell flaw, can detect the flaw of solar cell surface projection; Further, it is required that the present invention considers that also production line high-speed detects, and in an efficient manner, can detect the protruding flaw of solar cell surface fast.
Optical detection of the present invention system is in order to detect the protruding flaw of a determinand.This optical detection system comprises a light source, an imageing sensor, a storage unit and a processing unit.
This light source with this determinand of oblique irradiate light to produce reflected light.This imageing sensor receives reflected light to record the shade of gray value of this determinand.
This cell stores one corresponding relation, this corresponding relation is a shade of gray rate of change height value pairing with it.This processing unit captures corresponding height value with the corresponding relation of this shade of gray rate of change in this storage unit then in order to the shade of gray rate of change of the shade of gray value of calculating this determinand.
Wherein, when height value that this storage unit captured surpassed predetermined threshold value, this processing unit judged that this shade of gray rate of change institute is this projection flaw corresponding to the position of this determinand.
Beneficial functional of the present invention is, the present invention checks the optical detection system and the method for solar cell flaw, utilize processing unit to capture corresponding height value with the corresponding relation of shade of gray rate of change in storage unit, though the non-the most accurate numerical value of this height value, but therefore can be in extremely efficient mode, detect the protruding flaw of solar cell surface fast, reach the fiduciary level of the online reality of production and the requirement of efficient.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 cuts open synoptic diagram for the outward appearance and the side of solar cell among the present invention;
Fig. 2 is the synoptic diagram of optical detection of the present invention system place automated test device;
Fig. 3 is the side cut-away view of optical detection of the present invention system;
Fig. 4 is the function block diagram of optical detection of the present invention system;
Fig. 5 is the synoptic diagram of rear surface of solar cell projection flaw;
Fig. 6 is the process flow diagram of optical detecting method of the present invention.
Wherein, Reference numeral
Sheet equipment 22 advances in optical detection system 23
Sorting device 26 storage boxes 27
Mechanical arm 28 light sources 30
Following light source module 3004 skew ray source modules 3006
Shadow region 85
Embodiment
The outward appearance and the side that see also solar cell 10 among Fig. 1 the present invention are cutd open synoptic diagram.The preferable target of determinand of the present invention is a solar cell 10, and by sectional side view as seen, solar cell 10 upper and lower being coincided by a photoinduction layer 12 and a gum substrate 14 form; To face outside drawing as seen, face photoinduction layer 12 with projecting direction, further comprise a conductor area 1202 and a silicon wafer zone 1204.No matter be polysilicon or mono-crystalline structures, the color in silicon wafer zone 1204 is skewness often, and being needs the suitable technological means could be automatically and carry out the go-on-go of flaw fast at solar cell 10.
See also the synoptic diagram of Fig. 2 optical detection of the present invention system 23 place automated test devices 20.Optical detection system 23 is arranged in the automated test device 20; The leading portion of automated test device 20 is for advancing sheet equipment 22, this advances sheet equipment except solar cell 10 being advanced sheet on the conveying belt 21, be provided with an optical detection system 23 in the bottom, according to the flaw of establishing and detect gum substrate 14 surfaces, solar cell 10 back.
The stage casing of automated test device 20 is provided with optical detection system 23 for detecting main equipment 24 above conveying belt 21, can be used for detecting the flaw on solar cell 10 front lighting inductive layers 12 surfaces.
The back segment of automated test device 20 is a sorting device 26, in the both sides of conveying belt 21 many storage boxes 27 are arranged, to flaw and flawless solar cell 10 be arranged after the go-on-go, transport and in the different storage box 27 that is placed in, make things convenient for shipment for follow-up with mechanical arm 28.
See also the side cut-away view of Fig. 3 optical detection of the present invention system 23.Optical detection of the present invention system 23 is with the protruding flaw of the determinand of shadow Detection such as solar cell 10.Optical detection system as seen from Figure 3 23 comprises a light source 30 and an imageing sensor 32.
Last light source module 3002 and following 3004 pairs of solar cells of light source module 10 produce front lightings.Skew ray source module 3006 is that these light source assemblies 3006A is located at the different azimuth of relative solar cell 10 with the light source assembly 3006A to the oblique light of solar cell 10 generations, so that solar cell 10 is produced multidirectional skew ray.Be combined into required light by above-mentioned these light source modules, some provides light source module that front lighting is provided, and some light source module provides skew ray, and some light source module provides light to come filtering noise.
Cooperate Fig. 3 further to see also Fig. 4, Fig. 4 is the function block diagram of optical detection of the present invention system 23.Optical detection system 23 more comprises a storage unit 36 and a processing unit 34 except an aforesaid light source 30 and an imageing sensor 32.
It is good that storage unit 36 adopts non-volatility memorizer, store a correspondence in advance and concern 3602 in storage unit 36, corresponding relation 3602 is recorded as the corresponding of many shade of gray rate of change and many height value in the mode of question blank (lookup table), can be considered a kind of database (database).
Wherein, when the height value that is captured when storage unit 36 surpasses predetermined threshold value, processing unit 34 judges that these shade of gray rate of change institute is this projection flaw corresponding to the position of solar cell 10, and is follow-up conveniently to make sorting device 26 split the solar cell 10 of the protruding flaws of these tools.
Further specify, wherein the variation of the shade of gray value of processing unit 34 comparison solar cells 10 is further recognized a shadow region with described variation.After defining this shadow region, processing unit 34 then calculates the shade of gray rate of change of the shade of gray value of the shade of gray value of this shadow region and solar cell 10; Wherein the shade of gray value of solar cell 10 can adopt the average shade of gray value of solar cell 10.And, when the height value that is captured when storage unit 36 surpasses predetermined threshold value, processing unit 34 judge these shadow regions be this projection flaw corresponding to the position of solar cell 10.
Like this, for finding the protruding flaw on the solar cell 10, do not need really to calculate the true or precise height of protruding flaw, only need correspondence by question blank, though default corresponding relation 3602 is not the most accurate, but be mode comparatively fast really, because whether 23 care of this optical detection system exceed threshold value, accurate height value can be ignored on the contrary, can save system resource like this and increase the efficient of handling, helpful to producing online quick check solar cell 10 protruding flaws.
See also the synoptic diagram of Fig. 5 solar cell 10 back sides projection flaw.Optical detection of the present invention system 23 is except the protruding flaw that can check solar cell 10 fronts, also can check the protruding flaw at solar cell 10 back sides, solar cell 10 back sides as shown in the figure, can measure its protruding flaw according to shade 85, can be by aforesaid method, to test out fast.
See also the process flow diagram of Fig. 6 optical detecting method of the present invention.A kind of optical detecting method of the present invention, with the protruding flaw that shade 85 detects as the solar cell 10 of solar cell 10, this optical detecting method comprises the following step:
Step S02: with an oblique irradiate light solar cell 10 to produce reflected light.Wherein, with respect to the different azimuth of solar cell 10, it is good that solar cell 10 is produced multidirectional skew ray.
Step S04: receive reflected light to record the shade of gray value of solar cell 10.
Step S06: the variation of the shade of gray value of comparison solar cell 10, to recognize a shadow region 85, the shade of gray rate of change of the shade of gray value of calculating shadow region 85 and the shade of gray value of solar cell 10.
Step S08: with this shade of gray rate of change corresponding height value of acquisition in the corresponding relation 3602 of pre-storage, wherein to be the shade of gray rate of change with height value corresponding for corresponding relation 3602.
Step S10: judge that this height value surpasses predetermined threshold value?
Step S11: when the height value that is captured surpasses predetermined threshold value, judge that then 85 positions corresponding to solar cell 10, this shadow region are this projection flaw.
Therefore, by optical detection system 23 and the method for the present invention with check solar cell 10 flaws, utilize processing unit 34 with the corresponding relation 3602 acquisitions corresponding height value of shade of gray rate of change in storage unit 36, though the non-the most accurate numerical value of this height value, but therefore can be in extremely efficient mode, detect the protruding flaw on solar cell 10 surfaces fast, reach the fiduciary level of the online reality of production and the requirement of efficient.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (8)
1. an optical detection system is characterized in that, in order to detect the protruding flaw of a determinand, this optical detection system comprises:
One light source, with this determinand of oblique irradiate light to produce reflected light;
One imageing sensor receives reflected light to record the shade of gray value of this determinand;
One storage unit stores a corresponding relation, and this corresponding relation is a shade of gray rate of change height value pairing with it; And
One processing unit, the shade of gray rate of change in order to the shade of gray value of calculating this determinand captures corresponding height value with the corresponding relation of this shade of gray rate of change in this storage unit then;
Wherein, when height value that this storage unit captured surpassed predetermined threshold value, this processing unit judged that this shade of gray rate of change institute is this projection flaw corresponding to the position of this determinand.
2. optical detection according to claim 1 system, it is characterized in that, this processing unit is compared the variation of the shade of gray value of this determinand, further recognize a shadow region with described variation, this processing unit calculates the shade of gray rate of change of the shade of gray value of the shade of gray value of this shadow region and this determinand; And when height value that this storage unit captured surpassed predetermined threshold value, this processing unit judged that this shadow region institute is this projection flaw corresponding to the position of this determinand.
3. optical detection according to claim 2 system, it is characterized in that, described this processing unit calculates the shade of gray rate of change of the shade of gray value of the shade of gray value of this shadow region and this determinand, and wherein the shade of gray value of this determinand is the average shade of gray value of this determinand.
4. optical detection according to claim 1 system is characterized in that this determinand is a solar cell.
5. optical detection according to claim 1 system is characterized in that this light source comprises a plurality of light source assemblies, and these light source assemblies are located at the different azimuth of this determinand relatively, so that this determinand is produced multidirectional skew ray.
6. optical detecting method, the protruding flaw with shadow Detection one determinand is characterized in that, this optical detecting method comprises the following step:
With this determinand of oblique irradiate light to produce reflected light;
Receive reflected light to record the shade of gray value of this determinand;
Compare the variation of the shade of gray value of this determinand,, calculate the shade of gray rate of change of the shade of gray value of the shade of gray value of this shadow region and this determinand to recognize a shadow region;
With the acquisition and the corresponding height value of this shade of gray rate of change in a corresponding relation of pre-storage of this shade of gray rate of change; And
Judge that whether this height value surpasses predetermined threshold value, when the height value that is captured surpasses predetermined threshold value, judge that then this shadow region institute is this projection flaw corresponding to the position of this determinand.
7. optical detecting method according to claim 6 is characterized in that, this determinand is a solar cell.
8. optical detecting method according to claim 6 is characterized in that, with respect to the different azimuth of this determinand, this determinand is produced multidirectional skew ray.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101496456A CN101676712B (en) | 2008-09-16 | 2008-09-16 | Optical detecting system and method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101496456A CN101676712B (en) | 2008-09-16 | 2008-09-16 | Optical detecting system and method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101676712A CN101676712A (en) | 2010-03-24 |
| CN101676712B true CN101676712B (en) | 2011-03-23 |
Family
ID=42029351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101496456A Active CN101676712B (en) | 2008-09-16 | 2008-09-16 | Optical detecting system and method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101676712B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102739889B (en) * | 2011-04-07 | 2017-02-08 | 东莞市巷泉印刷有限公司 | Printing configuration method of multifunctional machine |
| CN102983207A (en) * | 2011-09-05 | 2013-03-20 | 惠特科技股份有限公司 | Defect inspection method of solar energy module |
| TWI473989B (en) * | 2011-11-03 | 2015-02-21 | Univ Nat Kaohsiung Applied Sci | Automatic optical inspection system for defect detection of dental floss stick |
| CN102520537B (en) * | 2011-12-02 | 2015-02-11 | 深圳市华星光电技术有限公司 | Automatic optical inspection method and automatic optical inspection equipment |
| CN104214607B (en) * | 2014-08-28 | 2016-04-27 | 江阴新基电子设备有限公司 | Multichannel multi-angle combined light source device in vision detection system |
| CN109103118A (en) * | 2017-06-21 | 2018-12-28 | 致茂电子(苏州)有限公司 | The detection method and detection system of solar battery |
| CN109374632A (en) * | 2018-10-08 | 2019-02-22 | 惠科股份有限公司 | A kind of detection method and system of display panel |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0978717A1 (en) * | 1998-02-19 | 2000-02-09 | Asahi Glass Company Ltd. | Plate glass shatter testing method, device, imaging method for glass testing and image signal processing method |
| US6100990A (en) * | 1999-06-14 | 2000-08-08 | Ford Motor Company | Method and apparatus for determining reflective optical quality using gray-scale patterns |
| CN1296288A (en) * | 1999-10-20 | 2001-05-23 | 奎比克视频株式会社 | System and method for checking outward appearance of semiconductor device |
-
2008
- 2008-09-16 CN CN2008101496456A patent/CN101676712B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0978717A1 (en) * | 1998-02-19 | 2000-02-09 | Asahi Glass Company Ltd. | Plate glass shatter testing method, device, imaging method for glass testing and image signal processing method |
| US6100990A (en) * | 1999-06-14 | 2000-08-08 | Ford Motor Company | Method and apparatus for determining reflective optical quality using gray-scale patterns |
| CN1296288A (en) * | 1999-10-20 | 2001-05-23 | 奎比克视频株式会社 | System and method for checking outward appearance of semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101676712A (en) | 2010-03-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101676712B (en) | Optical detecting system and method thereof | |
| CN109084957B (en) | Defect detection and color sorting method and system for photovoltaic solar crystalline silicon cell | |
| CN106952260B (en) | Solar cell defect detection system and method based on CIS image acquisition | |
| TWI653450B (en) | Linear inspection system | |
| CN109765240B (en) | Device and method for detecting stitch defects of industrial parts | |
| CN208721366U (en) | The defects detection and colour sorting system of photovoltaic solar crystal-silicon battery slice | |
| CN101988904A (en) | Solar cell defect detection method | |
| CN102168952A (en) | Detection method and detection device of welding deformation | |
| CN102384908A (en) | Device and method for checking internal defects of base plate | |
| CN102621152A (en) | Surface defect detecting system of crystalline silicon polished wafer | |
| CN103712568B (en) | The reflective feature detection system of a kind of plastic pallet based on machine vision | |
| CN104512579A (en) | Defect detecting method for bracing wire on transparent packing material | |
| CN104181130A (en) | Silicon chip and solar cell on-line sorting device based on photoluminescence method | |
| CN106409716A (en) | Detection system and detection method of electronic component | |
| CN202676615U (en) | Silicon chip detecting device | |
| US10724965B2 (en) | Systems and methods for crack detection | |
| CN101676696B (en) | Optical testing system for testing early-period confirmation contrast sample of solar cell and method | |
| CN102128838A (en) | Internal defect inspection device and method for substrate | |
| JP5274043B2 (en) | Semiconductor substrate inspection equipment | |
| CN101752462B (en) | Laser processing state detection method and apparatus and method for manufacturing solar cell board | |
| KR20130008187A (en) | Measurment device for flux and method for measurment thereof | |
| CN104237243A (en) | Solar silicon slice detection system and method | |
| CN101676684A (en) | Optical detection system and method for detecting solar cells | |
| Lydia et al. | Analysis on solar panel crack detection using optimization techniques | |
| CN201803957U (en) | Non-contact type device for detecting defect of solar battery |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |