CN101673810B - Opening and closing mechanism of cavity cover - Google Patents
Opening and closing mechanism of cavity cover Download PDFInfo
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- CN101673810B CN101673810B CN200910042397XA CN200910042397A CN101673810B CN 101673810 B CN101673810 B CN 101673810B CN 200910042397X A CN200910042397X A CN 200910042397XA CN 200910042397 A CN200910042397 A CN 200910042397A CN 101673810 B CN101673810 B CN 101673810B
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- chamber lid
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Abstract
The invention discloses an opening and closing mechanism of a cavity cover, which comprises a control unit, a driving mechanism, a transmission mechanism, two actuating mechanisms and an equipment cavity with a cavity cover, wherein the transmission mechanism comprises a transmission shaft, a speed reducer, a worm, a worm gear, a connecting shaft and a supporting body in a hollow structure, the supporting body is fixedly connected with one side wall of a cavity body, the connecting shaft penetrates through the supporting body and is parallel to the cavity cover, both ends of the connecting shaft are respectively connected with the two actuating mechanisms, the worm gear is fixed on the connecting shaft and is positioned in the supporting body, the worm is arranged in the supporting body and is vertically engaged with the worm gear, an output shaft of the speed reducer is connected with one end of the worm, an input shaft is connected with one end of the transmission shaft, the other end of the transmission shaft is connected with the driving mechanism, the control unit controls the movement of the driving mechanism, and the driving mechanism synchronously drives the two actuating mechanisms by the transmission mechanism so as to realize the opening and the closing of the cavity cover. The invention has simple structure, convenient operation, labour saving, high safety and accuracy, can not deform the cavity cover easily and ensures the high vacuum degree of vacuum equipment in OLED production.
Description
Technical field
The present invention relates to a kind of opener, relate in particular to a kind of unlatching, closing organ that is applicable to cavity door in the vacuum equipment or cavity lid.
Background technology
OLED (Organic Light-Emitting Diode), because its self luminous characteristic, need backlight unlike TFT-LCD, therefore visibility is big, brightness is high, and voltage requirements is low, add advantages such as fast, in light weight, the thin thickness of reaction, simple structure, be regarded as one of product of tool future of 21 century; OLED is in present all Display Techniques, unique Display Technique of making large scale, high brightness, the soft screen of high-resolution, can make the thickness the same with paper because numerous advantages of OLED, make OLED be unique on using can and the TFT-LCD technology of mentioning in the same breath.The basic technology of OLED comprises substrate manufacture, photoetching, substrate processing, film forming, encapsulation, burn-in test and IC connection etc., in the production technology of OLED, in order to guarantee higher cleannes, usually need in true cavity equipment, finish various technologies, therefore vacuum cavity equipment runs through the whole production processing procedure, also is one of the most general, most important equipment.
In actual production, the parts of inside cavity usually need to change, transform, debug, inside cavity also usually needs cleaning, therefore the chamber lid need be opened and safeguard, in the process of safeguarding, should guarantee commissioning staff's safety and stablizing of chamber lid, guarantee the convenience of debugging again, debugging is finished after,, need again the chamber in the decline process covered and control and locate in order to guarantee the sealing of vacuum cavity.But with the development of OLED technology, the substrate of making OLED also tends to the large tracts of land development, so corresponding vacuum cavity equipment also is tending towards large scale development, the size and the weight of chamber lid also increase thereupon.Because the chamber lid in now a lot of vacuum cavity equipment is to be made by very thick steel plate, generally all be difficult to finish by manpower, moreover this kind operation also exists bigger personal safety hidden danger, so need operate by mechanical device, therefore a kind of chamber lid is opened with closed mechanism for opening/closing just arisen at the historic moment, and whether the opening and closing mechanism of cavity cover design rationally directly influences problems such as vacuum effectiveness, the convenience of production efficiency, maintenance, fail safe.
A kind of cylinder type cap-opening mechanism of prior art, cover plate is realized opening and closing under the effect of cylinder, this kind mechanism generally can only be opened to cover plate certain angle, influence the operator to a certain extent to the operation in the cavity, and when cover plate need be risen higher the time, can make cylinder arm guide rail very long again, take bigger space and influence outward appearance; Another kind is with the direct lifting of cover plate by guide rail, promptly promote decline in vertical, reach the purpose of keying, in this technology, can relate to following problem: the one, when cover plate is elevated to certain position, because the weight of cover plate self, cover plate will inevitably produce plastic deformation, when cover plate closing, will cause poorly sealed, thereby be difficult to the vacuum degree that reaches higher; The 2nd, in the time the parts in the cavity need being taken out, will produce the constant problem of operation, even because cover plate is raised to the extreme higher position, also can cause parts to take out difficulty, especially the parts that need take out are very heavy, and manpower need be used hoisting mechanism can't finish the time, and this design can have influence on the operation of hoisting mechanism, further strengthen the difficulty of maintenance, influenced production efficiency simultaneously; Another is that the cover plate vertical is elevated to certain position, again cover plate is moved horizontally, this design exists the vertical and horizontal movement of cover plate, increased the complexity of opener virtually, simultaneously, this kind design also can make cover plate can produce bigger plastic deformation, and moving horizontally also of cover plate can cause interference to miscellaneous equipment around the cavity equipment, when particularly the size of cover plate is very big.
Therefore, be badly in need of a kind of convenience, laborsaving, safe, simple in structure, be difficult for making chamber lid distortion, guarantee chamber lid good airproof performance, vacuum degree height, and the high opening and closing mechanism of cavity cover of performance accuracy.
Summary of the invention
The object of the present invention is to provide a kind of convenience, laborsaving, safe, simple in structure, be difficult for making chamber lid distortion, guarantee chamber lid good airproof performance, vacuum degree height, and the high opening and closing mechanism of cavity cover of performance accuracy.
For achieving the above object, technical scheme of the present invention is: a kind of opening and closing mechanism of cavity cover is provided, comprise control unit, driving mechanism, transmission mechanism, two actuators and have the equipment chamber of chamber lid, described two actuators are fixedly connected on described chamber and cover and be parallel to each other, described transmission mechanism is fixedly connected on a sidewall of equipment chamber cavity and between described two actuators, one end of described transmission mechanism is connected with described actuator, the other end is connected with described driving mechanism, described control unit is controlled described driving mechanism motion, described driving mechanism is by the synchronous drive two described actuators of described transmission mechanism, realize the keying of described chamber lid, wherein, described transmission mechanism comprises power transmission shaft, decelerator, worm screw, worm gear, connecting axle and be the supporter of hollow structure, described supporter is fixedlyed connected with a sidewall of described cavity and between described two actuators, described connecting axle runs through described supporter and is parallel to described chamber lid, the two ends of described connecting axle are connected with described two actuators respectively, described worm gear is fixed on the described connecting axle and is positioned at described supporter, described worm screw be arranged in the described supporter and with described worm gear Vertical Meshing, described worm screw one end is connected with the output shaft of described decelerator, described input shaft of speed reducer is connected with an end of described power transmission shaft, and the other end of described power transmission shaft is connected with driving mechanism.
Preferably, described supporter also comprises a base plate, and described base plate is positioned at the bottom of described supporter and parallel with described connecting axle, and described worm gear and worm screw are positioned at described supporter, and described decelerator is fixed in the below of described base plate and is connected with described worm screw; More specifically, described supporter also comprises a supporting bracket, described supporting bracket is positioned at described base plate top and is parallel to described base plate, described decelerator is fixed in the below of described base plate and the output shaft of described decelerator runs through described base plate, described worm gear and worm screw are positioned at the top of described supporting bracket, described worm screw vertically is installed on the described supporting bracket by bearing and runs through described supporting bracket, and described worm screw and described decelerator are connected by shaft coupling between described base plate and described supporting bracket.Decelerator is with the moment of torsion rotation output of power transmission shaft, moving by worm screw, worm gear drives connecting axle, the rotation of connecting axle drives the chamber lid and moves around connecting axle, realize the opening and closing of chamber lid, utilize decelerator to cooperate worm screw, worm gear transmission power, more laborsaving, safe, stable simultaneously realization is than the transmission of large speed ratio.
Preferably, described transmission mechanism also comprises at least two carriages, and described carriage is installed on its sidewall perpendicular to described cavity of both sides of described supporter, and described connecting axle runs through described carriage, and described carriage is used to support described connecting axle, makes described connecting axle more firm.
Preferably, described actuator comprises pillar and handle, described handle is arranged at described chamber and covers, described handle is fixedlyed connected with an end of described pillar by bearing pin, the other end of described pillar is connected with described connecting axle, described pillar is positioned at the described side of covering, chamber and does not contact with described chamber lid, has avoided the chamber to cover in the process of opening and has run into cavity; Handle is arranged at the chamber and covers, the manually auxiliary keying of finishing the chamber lid of the process that is used for opening.
Preferably, described opening and closing mechanism of cavity cover also comprises transducer and limit switch, described transducer is used for the position of described chamber lid is detected, described limit switch is used for the extreme higher position and the extreme lower position of described chamber lid are detected, described transducer and limit switch send to control unit with the chamber lid position signalling that collects, control unit sends to driving mechanism after with signal processing, the controlling and driving motion of mechanism, driving mechanism is by the angular speed and the angle of the lid rotation of transmission mechanism control chamber, realize the accurate motion of chamber lid, make the chamber lid rest on predeterminated position accurately, guaranteed that the chamber covers the high accuracy in the opening and closing process, high security, but the maximum position of test chamber lid unlatching and the extreme lower position of closing guarantee the air-tightness after the chamber lid is closed simultaneously, guarantee the condition of high vacuum degree of whole cavity mechanism for opening/closing.
Preferably, described opening and closing mechanism of cavity cover also comprises air spring, described air spring one end is arranged at described chamber and covers, the other end is arranged on the described cavity, when resting on a certain position in the process of chamber lid opening and closing, air spring supplemental support chamber lid further guarantees stability and fail safe in the lid motion process of chamber.
Preferably, described driving mechanism is handwheel or servomotor.Select for use handwheel to drive, can further simplify the structure and the control method of whole opening and closing mechanism of cavity cover, make simple to operate; When selecting motor-driven, can realize that the chamber lid opens and closes whole automation requirement, reaches the purpose of closed-loop control; According to the height that the opening and closing mechanism of cavity cover automation requires, select handwheel or motor as driving mechanism freely, make this equipment adaptedness higher.
Preferably, described driving mechanism also comprises electromagnetic brake.When the chamber lid is heavier, that keeps opening and closing mechanism of cavity cover staticly just need provide bigger output torque, and the static time is longer sometimes, the auto-lock function of using servomotor can cause motor overheating or amplifier overload, selects electromagnetic brake to improve the accuracy and the fail safe of opening and closing mechanism of cavity cover.
Compared with prior art, because the transmission mechanism of opening and closing mechanism of cavity cover of the present invention has power transmission shaft, decelerator, worm screw, worm gear, connecting axle and be the supporter of hollow structure, described supporter is fixedlyed connected with a sidewall of described cavity and between described two actuators, described connecting axle runs through described supporter and is parallel to described chamber lid, the two ends of described connecting axle are connected with described two actuators respectively, described worm gear is fixed on the described connecting axle and is positioned at described supporter, described worm screw be arranged in the described supporter and with described worm gear Vertical Meshing, described worm screw one end is connected with the output shaft of described decelerator, described input shaft of speed reducer is connected with an end of described power transmission shaft, and the other end of described power transmission shaft is connected with driving mechanism; Described power transmission shaft receives the transfer of torque of driving mechanism, and be transferred to worm screw after the output shaft rotation output through decelerator, the worm gear that worm movement drives perpendicular engagement rotates, the worm gear drives connecting axle rotates, the rotational synchronization of connecting axle drives the motion of two actuators, drive chamber lid at last around the connecting axle motion, realize the unlatching of chamber lid or close; Because utilize decelerator to cooperate worm screw, worm gear to transmit power, it is more laborsaving to make transmission cross title, realize than the large speed ratio transmission, and fail safe, stability are stronger; The chamber is covered in the operation of opening or closing had higher performance accuracy; After opening largely, do not need to raise or move horizontally because the chamber is covered, avoided the plastic deformation of chamber lid, the chamber is covered after open operation, still had higher sealing, guarantee the vacuum degree of whole chamber cover opening mechanism; Simultaneously, this cavity mechanism for opening/closing is simple in structure, easy to operate.
Description of drawings
Fig. 1 is the overall structure schematic diagram of opening and closing mechanism of cavity cover first embodiment of the present invention.
Fig. 2 is the cross section structure schematic diagram of the transmission mechanism of opening and closing mechanism of cavity cover of the present invention.
Fig. 3 is the enlarged diagram of A part among Fig. 2.
Fig. 4 is the theory diagram of opening and closing mechanism of cavity cover of the present invention.
Fig. 5 is the overall structure schematic diagram of opening and closing mechanism of cavity cover second embodiment of the present invention.
Fig. 6 is the overall structure schematic diagram of opening and closing mechanism of cavity cover the 3rd embodiment of the present invention.
Embodiment
With reference now to accompanying drawing, describe embodiments of the invention, the similar elements label is represented similar elements in the accompanying drawing.
As Fig. 1, shown in Figure 2, opening and closing mechanism of cavity cover of the present invention comprises control unit (figure does not show), driving mechanism 200, transmission mechanism 300, two actuators 400 and equipment chamber 100, equipment chamber 100 comprises chamber lid 101 and cavity 102, chamber lid 101 is arranged on the cavity 102, two actuators 400 are parallel to each other and are fixedly connected on the chamber lid 101, transmission mechanism 300 is fixedly connected on a sidewall of cavity 102 and between two actuators 400, one end of transmission mechanism 300 is connected with actuator 400, the other end is connected with driving mechanism 200, driving mechanism 200 drives actuator's 400 motions by transmission mechanism 300, actuator 400 drives 101 motions of chamber lid, realizes the opening and closing of chamber lid 101; The transmission mechanism 300 of opening and closing mechanism of cavity cover of the present invention comprises power transmission shaft 301, decelerator 302, worm screw 303, worm gear 304, connecting axle 305 and be the supporter 306 of hollow structure, supporter 306 comprises a base plate 308 and a supporting bracket 307, base plate 308 is positioned at the bottom of supporter 306 and is parallel to chamber lid 101, supporting bracket 307 is positioned at base plate 308 tops and is parallel to base plate 308, decelerator 302 is fixedly connected on base plate 308 belows, the power shaft of decelerator 302 is connected with driving mechanism 200 by power transmission shaft 301, the output shaft of decelerator 302 runs through described base plate 308, worm screw 303 two ends vertically are installed between supporting bracket 307 and supporter 306 inwalls by bearing, and the end that worm screw 303 is installed on supporting bracket 307 runs through described supporting bracket 307,307 pairs of worm screws 303 of supporting bracket play a supportive role, worm screw 303 is run through supporting bracket 307 1 ends and is connected by shaft coupling 310 with the output of decelerator 302, and shaft coupling 310 is between supporting bracket 307 and base plate 308; Connecting axle 305 runs through supporter 306 and is arranged at the top of supporting bracket 307 abreast, worm gear 304 is fixed on the connecting axle 305 and is positioned at supporter 306, worm gear 304 and worm screw 303 Vertical Meshing, the two ends of connecting axle 305 are connected with two pillars 401 of two actuators 400 respectively; Actuator 400 also comprises handle 402, and handle 402 is arranged on the chamber lid 101, and handle 402 is fixedlyed connected with an end of pillar 401 by bearing pin, and the other end of pillar 401 is connected with connecting axle 305, and pillar 401 is positioned at the chamber and covers 101 tops and do not cover 101 with the chamber and contact; Driving mechanism 200 motions, power transmission shaft 301 arrives the torque transfer of driving mechanism 200 power shaft of decelerator 302, be transferred to worm screw 303 after the output shaft rotation output through decelerator 302, the rotation of worm screw 303 drives worm gear 304 and rotates, worm gear 304 drives connecting axle 305 motions, connecting axle 305 drives chamber lid 101 around connecting axle 305 motions by two pillars 401 and two handles 402, realizes the opening and closing of chamber lid 101.
As Fig. 1, shown in Figure 4, opening and closing mechanism of cavity cover of the present invention also comprises two carriages 500 and two air springs 600, carriage 500 is installed on the both sides of supporter 306 and perpendicular to the sidewall of cavity 102, two carriages 500 are run through at connecting axle 305 two ends, and carriage 500 is used for support and connection axle 305; Air spring 600 is arranged between chamber lid 101 and the cavity 102, air spring 600 1 ends are arranged on the chamber lid 101, the other end be arranged at cavity 102 with the orthogonal two side of supporter 306 place sidewalls on, be used for covering the process of 101 opening and closing, supplemental support chamber lid 101 in the chamber; Air spring 600 can be free gas spring, arbitrarily stop the supple of gas or steam spring, self-locking type air spring etc., self-locking type air spring preferably, and the self-locking type air spring has self-lock ability, preferably the stability of holding chamber lid 101.Opening and closing mechanism of cavity cover of the present invention also comprises transducer and limit switch, transducer comprises the receiver 702 that is used to send the reflector 701 of signal and is used to receive reflector 701 signals, reflector 701 is arranged on the chamber lid 101, and corresponding receiver 702 is arranged on the cavity 102; Reflector 701 also can be arranged on the cavity 102, and its 702 of corresponding receiver is arranged on the chamber lid 101; Reflector 701 can be infrared transmitter or light-emitting diode, and corresponding receiver 702 was infrared receiver when reflector 701 was infrared transmitter, and corresponding receiver 702 was photoelectrical coupler when reflector 701 was light-emitting diode; Reflector 701 and receiver 702 are used for the motion state information of acquisition cavity lid 101, after the information of gathering sends to control unit, control unit sends to driving mechanism 200 after state information identification is handled, the motion of controlling and driving mechanism 200, thereby the motion of control chamber lid 101; Limit switch is two pressure switches 703,704, and pressure switch 704 is arranged on the cavity 102, is used for test chamber and covers 101 extreme lower position state informations; Pressure switch 703 is arranged on the supporter 306, is used for test chamber and covers 101 extreme higher position state informations.The driving mechanism 200 of opening and closing mechanism of cavity cover of the present invention is handwheel or motor, motor can be equipped with brake, motor is servomotor preferably, corresponding actuator is electromagnetic brake preferably, because when chamber lid 101 is heavier, keeps the static motor that needs that covers 101 mechanisms in the chamber bigger output torque is provided, and the static time is longer sometimes, the electromagnetic brake that alternative costs are lower, motor overheating or the amplifier overload that can avoid using the auto-lock function of servomotor to cause.
Following structure accompanying drawing describes the structure and the operation principle of the embodiment of the invention in detail.
As Fig. 1, Fig. 2, Fig. 3, shown in Figure 4, execute in the example at first of opening and closing mechanism of cavity cover of the present invention, driving mechanism 200 is a handwheel, be connected by bearing 311 between handwheel 200 and the decelerator 302, decelerator 302 power shafts one end is provided with bearing pedestal 312, bearing 311 be installed in the bearing pedestal 312 and one end and bearing pedestal 312 inconsistent, the other end is fixing by bearing cap 313, power transmission shaft 301 is sheathed in the bearing 311 and with handwheel 200 and decelerator 302 and is connected, in the present embodiment, power transmission shaft 301 is the power shaft of decelerator 302, be that the power shaft of decelerator 302 is sheathed in the bearing 311 and with handwheel 200 and is connected, the power shaft that drives decelerator 302 by handwheel 200 rotates, the output shaft of decelerator 302 drives worm screw 303 and rotates, and then drive worm gear 304 and connecting axle 305 rotations, connecting axle 305 drives 101 motions of chamber lid by pillar 401 and the handle 402 that connects thereon, and then make chamber lid 101 open or close, thereby adjust the opening and closing speed and the amplitude of chamber lid 101 by the rotary speed of control handwheel 200; Decelerator 302 can be planetary gear or worm and gear; Worm screw 303 is a single start worm, worm gear 304 be worm sector and fan-shaped angle greater than 80 °, be more preferably 90 °.In the present embodiment, except that application sensors and limit switch are accurately judged the positions that chamber lid 101 opens or close, also be provided with buzzer, be used for making to external world prompting.When if desired the chamber being covered 101 unlatchings or being closed to the optional position, input cavity covers 101 angle positions that need unlatching or close in advance, in the process that chamber lid 101 is opened or closed, reflector 701 on the chamber lid 101 transmits a signal to the receiver 702 on the cavity 102, the signal that control unit receives according to receiver 702 is judged angle and the speed that chamber lid 101 is opened or closed, if when judging the angle that reaches input in advance, signal after control unit will be handled outputs to buzzer, buzzer warning, stop the rotation of handwheel 200, and then make chamber lid 101 stop at predefined position, after chamber lid 101 stops, 600 pairs of chamber lids 101 of self-locking type air spring have the supplemental support effect, guarantee the stability of chamber lid 101, accurately locate owing to can cover 101 positions of opening or closing, and the supporting role of air spring 600 is arranged the chamber, improve the precision and the operating efficiency of integral device, strengthen its fail safe simultaneously; Need be opened to maximum position as fruit caving lid 101, then when chamber lid 101 is elevated to the extreme higher position, chamber lid 101 pressure switches 703 that can touch on the supporter 306, when the pressure that touches reaches preset requirement, pressure switch 703 is sent signal to control unit, control unit sends to buzzer after with this signal processing, and buzzer warning stops the rotation of handwheel 200; When chamber lid 101 is closed, the pressure switch 704 that chamber lid 101 falls to touching on the cavity 102, when the pressure that touches reaches preset requirement, pressure switch 704 is sent signal to control unit, control unit sends to buzzer after with this signal processing, and buzzer warning stops the rotation of handwheel 200, guarantee to have better seal after chamber lid 101 is closed, guarantee the condition of high vacuum degree of equipment work.
As Fig. 4, shown in Figure 5, second of opening and closing mechanism of cavity cover of the present invention is executed example and is used under the situation that automation has relatively high expectations, this embodiment compares with first embodiment, only be the difference of driving mechanism 200, use motor as driving mechanism 200 in the present embodiment, therefore can realize the automation of opening and closing mechanism of cavity cover integral body, reach the purpose of closed-loop control.Motor 200 is connected with power transmission shaft 301 1 ends by shaft coupling, power transmission shaft 301 other ends are connected by the power shaft of shaft coupling with decelerator 302, the power shaft that drives decelerator 302 by motor 200 rotates, the output shaft of decelerator 302 drives worm screw 303, worm gear 304 and connecting axle 305 graded movements, and then, realize the opening and closing of chamber lid 101 by pillar 401 and handle 402 motion drive chamber lid 101 motions.When if desired the chamber being covered 101 unlatchings or being closed to the optional position, input cavity covers 101 angles that need unlatching or close in advance, in the process that chamber lid 101 is opened or closed, reflector 701 on the chamber lid 101 transmits a signal to the receiver 702 on the cavity 102, the signal that control unit receives according to receiver 702 is judged angle and the speed that chamber lid 101 is opened, when judgement reaches the angle of input in advance, signal after control unit will be handled outputs to motor 200, motor 200 is stopped operating, make chamber lid 101 be parked in predeterminated position, simultaneously this signal is outputed to buzzer, buzzer warning; After chamber lid 101 stopped, 600 pairs of chamber lids 101 of self-locking type air spring had the supplemental support effect; Need be opened to maximum position as fruit caving lid 101, then when chamber lid 101 is elevated to the extreme higher position, chamber lid 101 pressure switches 703 that can touch on the supporter 306, when the pressure that touches reaches preset requirement, pressure switch 703 is sent signal to control unit, and control unit sends to motor 200, motor 200 stop motions after with this signal processing, simultaneously this signal is outputed to buzzer, buzzer warning; When chamber lid 101 is closed, the pressure switch 704 that chamber lid 101 falls to touching on the cavity 102, when the pressure that touches reaches preset requirement, pressure switch 704 is sent signal to control unit, control unit sends to motor 200 after with this signal processing, motor 200 stops operating, and simultaneously this signal is outputed to buzzer, buzzer warning.
As shown in Figure 6, third embodiment of the invention is applicable to and does not need the equipment chamber 100 of often opening or to the automation of integral device when less demanding, the opening and closing mechanism of cavity cover of present embodiment is compared with the opening and closing mechanism of cavity cover among first embodiment, there are not transducer and limit switch, but all use handwheel identical as driving mechanism 200 and other structures, in the present embodiment, stopping means can be set to carry out spacing to the extreme higher position of chamber lid 101 unlatchings, as a guide vane end stop is set on supporter 306, or pin is set on supporter 306 carries out spacing; Among this embodiment, drive decelerator 302, worm screw 303, worm gear 304 connecting axles 305 graded movements by handwheel 200, and then by pillar 401 on the connecting axle 305 and handle 402 drive chamber lid 101 motions, realize the opening and closing of chamber lid 101, further simplify the structure and the control method of opening and closing mechanism of cavity cover.
Because the transmission mechanism 300 of opening and closing mechanism of cavity cover of the present invention has power transmission shaft 301, decelerator 302, worm screw 303, worm gear 304, connecting axle 305 and be the supporter 306 of hollow structure, described supporter 306 is fixedlyed connected with a sidewall of described cavity 102, described connecting axle 305 runs through described supporter 306 and is parallel to described chamber lid 101, the two ends of described connecting axle 305 are connected with described two actuators 400 respectively, described worm gear 304 is fixed on the described connecting axle 305 and is positioned at described supporter 306, described worm screw 303 be arranged in the described supporter 306 and with described worm gear 304 Vertical Meshing, described worm screw 303 1 ends are connected with the output shaft of described decelerator 302, the power shaft of described decelerator 302 is connected with an end of described power transmission shaft 301, and the other end of described power transmission shaft 301 is connected with driving mechanism 200; Described power transmission shaft 301 receives the transfer of torque of driving mechanism 200, and be transferred to worm screw 303 after the output shaft rotation output through decelerator 302, the worm gear 304 that worm screw 303 motions drive perpendicular engagement rotates, worm gear 304 drives connecting axle 305 and rotates, the rotational synchronization of connecting axle 305 drives 400 motions of two actuators, drive chamber lid 101 at last around connecting axle 305 motions, the realization chamber is covered 101 unlatching or is closed; Owing to utilize decelerator 302 to cooperate worm screws 303, worm gear 304 to transmit power, make transmission process more laborsaving, realize than the large speed ratio transmission, and fail safe, stability are higher; Also make chamber lid 101 in the operation of opening or closing, have higher performance accuracy; Because chamber lid 101 does not need to raise or move horizontally after opening largely, has avoided the plastic deformation of chamber lid 101, makes chamber lid 101 still have higher sealing after open operation, guarantees the vacuum degree of whole opening and closing mechanism of cavity cover; Simultaneously, this opening and closing mechanism of cavity cover is simple in structure, and is easy to operate.
The chamber of opening and closing mechanism of cavity cover of the present invention is covered 101 positions and is not limited to top, also can be the positions such as sidepiece of cavity 102; The control unit of opening and closing mechanism of cavity cover of the present invention and principle etc. are well known to those of ordinary skill in the art, no longer are described in detail at this.
Above disclosed only is the preferred embodiments of the present invention, can not limit the present invention's interest field certainly with this, and therefore the equivalent variations of being done according to the present patent application claim still belongs to the scope that the present invention is contained.
Claims (9)
1. opening and closing mechanism of cavity cover, comprise control unit, driving mechanism, transmission mechanism, two actuators and have the equipment chamber of chamber lid, described two actuators are fixedly connected on described chamber and cover and be parallel to each other, described transmission mechanism is fixedly connected on a sidewall of equipment chamber cavity and between described two actuators, one end of described transmission mechanism is connected with described actuator, the other end is connected with described driving mechanism, described control unit is controlled described driving mechanism motion, described driving mechanism is by the synchronous drive two described actuators of described transmission mechanism, realize the keying of described chamber lid, it is characterized in that: described transmission mechanism comprises power transmission shaft, decelerator, worm screw, worm gear, connecting axle and be the supporter of hollow structure, described supporter is fixedlyed connected with a sidewall of described cavity and between described two actuators, described connecting axle runs through described supporter and is parallel to described chamber lid, the two ends of described connecting axle are connected with described two actuators respectively, described worm gear is fixed on the described connecting axle and is positioned at described supporter, described worm screw be arranged in the described supporter and with described worm gear Vertical Meshing, described worm screw one end is connected with the output shaft of described decelerator, described input shaft of speed reducer is connected with an end of described power transmission shaft, and the other end of described power transmission shaft is connected with driving mechanism.
2. opening and closing mechanism of cavity cover as claimed in claim 1, it is characterized in that: described supporter also comprises a base plate, described base plate is positioned at the bottom of described supporter and parallel with described connecting axle, described worm gear and worm screw are positioned at described supporter, and described decelerator is fixed in the below of described base plate and is connected with described worm screw.
3. opening and closing mechanism of cavity cover as claimed in claim 2, it is characterized in that: described supporter also comprises a supporting bracket, described supporting bracket is positioned at described base plate top and is parallel to described base plate, described decelerator is fixed in the below of described base plate and the output shaft of described decelerator runs through described base plate, described worm gear and worm screw are positioned at the top of described supporting bracket, described worm screw vertically is installed on the described supporting bracket by bearing and runs through described supporting bracket, and described worm screw and described decelerator are connected by shaft coupling between described base plate and described supporting bracket.
4. opening and closing mechanism of cavity cover as claimed in claim 1 is characterized in that: described transmission mechanism also comprises at least two carriages, and described carriage is installed on its sidewall perpendicular to described cavity of both sides of described supporter, and described connecting axle runs through described carriage.
5. opening and closing mechanism of cavity cover as claimed in claim 1, it is characterized in that: described actuator comprises pillar and handle, described handle is arranged at described chamber and covers, described handle is fixedlyed connected with an end of described pillar by bearing pin, the other end of described pillar is connected with described connecting axle, and described pillar is positioned at the described side of covering, chamber and does not contact with described chamber lid.
6. opening and closing mechanism of cavity cover as claimed in claim 1, it is characterized in that: described opening and closing mechanism of cavity cover also comprises transducer and limit switch, described transducer is used for the position of described chamber lid is detected, and described limit switch is used for the extreme higher position and the extreme lower position of described chamber lid are detected.
7. opening and closing mechanism of cavity cover as claimed in claim 1 is characterized in that: described opening and closing mechanism of cavity cover also comprises air spring, and described air spring one end is arranged at described chamber and covers, and the other end is arranged on the described cavity.
8. opening and closing mechanism of cavity cover as claimed in claim 1 is characterized in that: described driving mechanism is handwheel or servomotor.
9. opening and closing mechanism of cavity cover as claimed in claim 8 is characterized in that: described driving mechanism also comprises electromagnetic brake.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910042397XA CN101673810B (en) | 2009-09-03 | 2009-09-03 | Opening and closing mechanism of cavity cover |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910042397XA CN101673810B (en) | 2009-09-03 | 2009-09-03 | Opening and closing mechanism of cavity cover |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101673810A CN101673810A (en) | 2010-03-17 |
| CN101673810B true CN101673810B (en) | 2011-06-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910042397XA Expired - Fee Related CN101673810B (en) | 2009-09-03 | 2009-09-03 | Opening and closing mechanism of cavity cover |
Country Status (1)
| Country | Link |
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| CN (1) | CN101673810B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104746010B (en) * | 2013-12-31 | 2017-06-06 | 北京北方微电子基地设备工艺研究中心有限责任公司 | PVD equipment |
| CN105369207B (en) * | 2015-12-02 | 2018-03-30 | 武汉华星光电技术有限公司 | The apparatus and method of expendable part in quick-replaceable vacuum cavity |
| CN107067992B (en) * | 2017-03-31 | 2022-02-18 | 深圳市洲明科技股份有限公司 | LED display screen with protection device |
| KR101921644B1 (en) * | 2017-04-04 | 2019-02-13 | 주식회사 파인솔루션 | gear box type open and close device for top lid |
| CN114717509B (en) * | 2022-06-09 | 2022-09-13 | 上海陛通半导体能源科技股份有限公司 | Cavity lid open and shut structure and vapor deposition equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1924659A (en) * | 2005-08-31 | 2007-03-07 | 东京毅力科创株式会社 | Substrate processing device and substrate processing system |
| CN1983515A (en) * | 2005-12-14 | 2007-06-20 | 东京毅力科创株式会社 | Substrate processing apparatus and lid supporting apparatus for the substrate processing apparatus |
| CN201508831U (en) * | 2009-09-03 | 2010-06-16 | 东莞宏威数码机械有限公司 | Opening mechanism |
-
2009
- 2009-09-03 CN CN200910042397XA patent/CN101673810B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1924659A (en) * | 2005-08-31 | 2007-03-07 | 东京毅力科创株式会社 | Substrate processing device and substrate processing system |
| CN1983515A (en) * | 2005-12-14 | 2007-06-20 | 东京毅力科创株式会社 | Substrate processing apparatus and lid supporting apparatus for the substrate processing apparatus |
| CN201508831U (en) * | 2009-09-03 | 2010-06-16 | 东莞宏威数码机械有限公司 | Opening mechanism |
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| CN101673810A (en) | 2010-03-17 |
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