CN104746010B - PVD equipment - Google Patents
PVD equipment Download PDFInfo
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- CN104746010B CN104746010B CN201310752085.4A CN201310752085A CN104746010B CN 104746010 B CN104746010 B CN 104746010B CN 201310752085 A CN201310752085 A CN 201310752085A CN 104746010 B CN104746010 B CN 104746010B
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- motor
- electromagnetic brake
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- uncapping
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Abstract
The invention provides a kind of PVD equipment, including motor and four sub-chamber, four sub-chamber arrange in matrix pattern, and the motor is used to be turned on and off the upper lid of the sub-chamber.Wherein, the quantity of motor is two, respectively the first motor and the second motor, symmetrical two centre positions of the sub-chamber for being arranged in the same side of two motors.The two ends of first motor are connected respectively to positioned at the upper lid of the Liang Ge sub-chamber of the same side, are covered in Liang Ge sub-chamber and is opened or closed under the driving of first motor.The two ends of the second motor are connected respectively to positioned at the upper lid of the Liang Ge sub-chamber of opposite side, are covered in Liang Ge sub-chamber and is opened or closed under the driving of second motor.PVD equipment of the invention, reduces the usage quantity of motor, realizes effective utilization of motor resource.Simultaneously as the reduction of number of motors, reduces the physical dimension of equipment, the cost of equipment is reduced.
Description
Technical field
The present invention relates to semiconductor manufacturing facility technical field, more particularly to a kind of PVD equipment.
Background technology
Traditional PVD equipment（Physical Vapor Deposition, abbreviation PVD, physical vapour deposition (PVD)）, its technique
Chamber is made up of four sub- chamber system A, B, C and D, and four sub-chamber circumferentially direction is uniform.Four sub-chamber have respectively
From independent process system, when whole equipment carries out technical process, four sub-chamber can also carry out independent technical process.
Four sub- chamber systems are provided simultaneously with respective upper lid, and four upper lid opening and closing are completely independent, each have
There is respective motor of uncapping, to carry out independent maintenance to respective sub- processing chamber.But in ripe semiconductor equipment product
In, maintenance time only accounts for part few in equipment service life, and the number of times uncapped to equipment is also limited, and this is resulted in
The waste of motor resource.And because the power of motor of uncapping that equipment is used is all larger, appearance and size is big, expensive, not only accounts for
With the physical dimension of equipment, and also add the cost of equipment.
The content of the invention
Based on this, it is necessary to there is a problem of motor resource redundancy for legacy equipment, there is provided one kind effectively utilizes motor
The PVD equipment of resource.
To achieve the above object, the present invention is adopted the following technical scheme that：
A kind of PVD equipment, including motor and four sub-chamber, four sub-chamber arrange in matrix pattern, each son
Symmetry is set, and the motor is used to be turned on and off the upper lid of the sub-chamber；
The quantity of the motor is two, respectively the first motor and the second motor, the symmetrical setting of two motors
In two centre positions of the sub-chamber positioned at the same side；
The two ends of first motor are connected respectively to positioned at the upper lid of two sub-chamber of the same side, described in two
Covered in sub-chamber and opened or closed under the driving of first motor；
The two ends of second motor are connected respectively to positioned at the upper lid of two sub-chamber of opposite side, described in two
Covered in sub-chamber and opened or closed under the driving of second motor.
Wherein, also including column of uncapping, the column of uncapping is arranged on the side of the sub-chamber；
The quantity of the column of uncapping is multiple；Column of being uncapped described in each two constitutes the support pedestal of the sub-chamber.
Wherein, also including regulating center bearing base；The regulating center bearing base is fixed on the top of the column of uncapping；
The quantity of the regulating center bearing base is identical with the quantity of the column of uncapping.
Wherein, also including welding support and the upper electrode system of uncapping, the welding support of uncapping includes rotating shaft and cantilever beam；
The two ends of the rotating shaft extend through two regulating center bearing bases being arranged in the same sub-chamber；
The cantilever beam is fixedly connected with the upper electrode system.
Wherein, the quantity of the upper electrode system is identical with the quantity of the welding support of uncapping, and equal to the sub- chamber
The quantity of room.
Wherein, also including the first electromagnetic brake and the second electromagnetic brake；
First electromagnetic brake is energization brake type electromagnetic brake, one end of first electromagnetic brake and institute
Rotating shaft is stated to be fixedly connected；First motor described in the other end of first electromagnetic brake and second motor are electrically connected；
When first electromagnetic brake is powered, the other end of first electromagnetic brake and first motor and the
The connecting shaft connection of two motors；When first electromagnetic brake is powered off, the other end of first electromagnetic brake with it is described
The connecting shaft of the first motor and the second motor disconnects.
Wherein, second electromagnetic brake is power-off brake formula electromagnetic brake, second electromagnetic brake and institute
Show welding support electrical connection of uncapping；
When second electromagnetic brake is powered, second electromagnetic brake breaks with the rotating shaft of the welding support of uncapping
Open；When second electromagnetic brake is powered off, second electromagnetic brake is connected with the rotating shaft of the welding support of uncapping.
Wherein, also including electromagnetic brake fixed seat, the electromagnetic brake fixed seat is arranged far from the motor
Uncap the outside of column；
Second electromagnetic brake is arranged in the electromagnetic brake fixed seat；The electromagnetic brake fixed seat
Quantity is identical with the second electromagnetic brake quantity.
Wherein, also including motor fixing seat, the quantity of the motor fixing seat is multiple；
Multiple motor fixing seats are separately positioned on close to the outside of the column of uncapping of the motor.
Wherein, also including chamber observation window, the quantity of the chamber observation window is identical with the quantity of the sub-chamber.
The beneficial effects of the invention are as follows：
PVD equipment of the invention, by an opening and closing for the upper lid of motor control Liang Ge sub-chamber, reduces electricity
The usage quantity of machine, realizes effective utilization of motor resource.Simultaneously as the reduction of number of motors, reduces the knot of equipment
Structure size, reduces the cost of equipment.
Brief description of the drawings
Fig. 1 is the overall structure diagram of the embodiment of PVD equipment of the invention；
Fig. 2 is the partial structural diagram in Fig. 1；
Fig. 3 is the top view of Fig. 2.
Specific embodiment
In order that technical scheme is clearer, below in conjunction with accompanying drawing, further is made to PVD equipment of the invention
Detailed description.It should be appreciated that specific embodiment described herein is only used to explain that the present invention is not intended to limit the present invention.
Referring to Fig. 1 to Fig. 3, as shown in figure 1, the overall structure diagram of the embodiment of PVD equipment of the invention includes son
Chamber A, sub-chamber B, sub-chamber C, sub-chamber D, the first motor 101a and the second motor 101b.Wherein, four sub- symmetries
Set, form matrix pattern.Axisymmetrical of two motors relative to sub-chamber A and sub-chamber D is set.And sub-chamber A and sub- chamber
Room B shares the first motor 101a, and the first motor 101a is arranged on the centre position of sub-chamber A and sub-chamber B, for driving sub- chamber
The opening and closing of the upper lid of room A and sub-chamber B.Correspondingly, sub-chamber C and sub-chamber D shares the second motor 101b, the second electricity
Machine 101b is arranged on the centre position of sub-chamber C and sub-chamber D, for drive sub-chamber C and sub-chamber D upper lid unlatching and
Close.So cause that the quantity of motor reduces half than prior art, greatly reduces equipment cost, and structure is more tight
Gather, reduce the physical dimension of equipment.
By an opening and closing for the upper lid of motor control Liang Ge sub-chamber, the usage quantity of motor is reduced, it is real
Effective utilization of motor resource is showed.Simultaneously as the reduction of number of motors, reduces the physical dimension of equipment, reduce and set
Standby cost.
As shown in Fig. 2 the partial structural diagram of the embodiment of PVD equipment of the invention, including the first motor 101a,
One electromagnetic brake 205a, the second electromagnetic brake 205b, welding support 103 of uncapping, regulating center bearing base 104, column of uncapping
106th, chamber observation ward 107, electromagnetic brake fixed seat 208 and motor fixing seat 209.
Used as a kind of embodiment, column 106 of uncapping is arranged on the side of sub-chamber, and column 106 of uncapping quantity
It is multiple.In the present embodiment, uncap column 106 quantity for eight, and two columns 106 of uncapping constitute each sub-chamber
Support bearing.As in Fig. 2, having four columns 106 of uncapping, two of which column 106 of uncapping constitutes the support of sub-chamber A and holds
Seat, two other column 106 of uncapping constitutes the support bearing of sub-chamber B.
More preferably, regulating center bearing base 104 is arranged on the top of column 106 of uncapping, and the quantity of regulating center bearing base 104 with open
The quantity of lid column 106 is identical.In the present embodiment, the quantity of regulating center bearing base 104 is eight, so that each is uncapped
The top of column 106 is mounted on a regulating center bearing base 104.
More preferably, uncap welding support 103 quantity it is identical with the quantity of sub-chamber, i.e., be provided with each sub-chamber
One welding support 103 of uncapping.Wherein, each welding support 103 of uncapping includes rotating shaft and cantilever beam.The two ends difference of rotating shaft
Through two regulating center bearing bases 104 being arranged in same sub-chamber.The quantity of the cantilever beam of each welding support 103 of uncapping is
Two, two cantilever beams are fixedly connected with upper electrode system.In the present embodiment, the quantity of upper electrode system is four, respectively
It is upper electrode system 105A, upper electrode system 105B, upper electrode system 105C and upper electrode system 105D.So so that each
There is a upper electrode system in sub-chamber, so as to realize the unlatching of the upper lid of single sub-chamber.
Used as a kind of embodiment, electromagnetic brake is the first electromagnetic brake 205a and the second electromagnetic brake
205b, and the quantity of the first electromagnetic brake and the second electromagnetic brake is four.In Fig. 2, two the first electromagnetic brakes
205a is electrically connected with the first motor 101a respectively.Accordingly, two the second electromagnetic brake 205b respectively with welding support of uncapping
103 electrical connections.
More preferably, the first electromagnetic brake 205a be energization brake type electromagnetic brake, and the first electromagnetic brake one
Hold and be fixedly connected with the rotating shaft of welding support 103 of uncapping.When the first electromagnetic brake is powered, the first electromagnetic brake it is another
End be connected with the connecting shaft of the first motor and the second motor, when the first electromagnetic brake is powered off, the first electromagnetic brake it is another
One end disconnects with the connecting shaft of the first motor and the second motor.So after electricity on the first electromagnetic brake, the first electromagnetic braking
Device is held tightly with the connecting shaft of motor, and then realizes that motor is connected with the rotating shaft of welding support 103 of uncapping.So turned by motor
Welding support 103 is uncapped in dynamic angle control can be along two axis of regulating center bearing base 104 being arranged in same sub-chamber
Rotation, so that the upper electrode system being fixedly connected with the cantilever beam of welding support 103 of uncapping is opened, the function that realization is uncapped.
In Fig. 2, two the first electromagnetic brake 205a are electrically connected with the first motor 101a respectively, on the first electromagnetic brake after electricity, the
The connecting shaft of one electromagnetic brake and the first motor 101a is held tightly, and then realizes turning for the first motor and welding support 103 of uncapping
Axle is connected.
More preferably, the second electromagnetic brake 205b be power-off brake formula electromagnetic brake, and the second electromagnetic brake with open
Lid welding support 103 is electrically connected.I.e. when the second electromagnetic brake is powered, the second electromagnetic brake and welding support 103 of uncapping
Rotating shaft disconnect；When the second electromagnetic brake is powered off, the second electromagnetic brake is connected with the rotating shaft of welding support 103 of uncapping.
And in same sub-chamber, the second electromagnetic brake and the first electromagnetic brake are relative to the rotating shaft of welding support 103 of uncapping
Center is symmetrical arranged.In Fig. 2, for sub-chamber a-quadrant, the first electromagnetic brake 205a and the second electromagnetic brake 205b
Center relative to the rotating shaft of welding support 103 of uncapping is symmetrical arranged.In other sub-chamber, the first electromagnetic brake with
The setting of the second electromagnetic brake is identical with sub-chamber A.
More preferably, electromagnetic brake fixed seat 208 is arranged far from the outside of the column of uncapping of motor.Should be clearly
It is, for signified outside is the rotating shaft of relative welding support 103 of uncapping in the present embodiment.Side where rotating shaft main body is
Uncap the inner side of column, accordingly, it is the outside of column of uncapping that rotating shaft runs through the side where extension after column of uncapping.The
Two electromagnetic brakes are arranged in electromagnetic brake fixed seat 208, and the second electromagnetic brake is relative with the first electromagnetic brake
Set in the Central Symmetry of rotating shaft.In the present embodiment, the quantity of electromagnetic brake fixed seat 208 and the second electromagnetic brake
Quantity is consistent, i.e., the quantity of electromagnetic brake fixed seat 208 is four.So, set in each electromagnetic brake fixed seat 208
There is second electromagnetic brake, for the electromagnetic brake of support second.
More preferably, the quantity of motor fixing seat 209 is multiple.In the present embodiment, the quantity of motor fixing seat 209 is four
It is individual.And four motor fixing seats 209 are separately positioned on close to the outside of the column 106 of uncapping of motor, and two motor fixing seats
One motor of support, in such as Fig. 2, two the first motor of support 101a of motor fixing seat 209.The quantity of chamber observation window 107 with
The quantity of the sub-chamber is identical, and in the present embodiment, the quantity of chamber observation window is four, can be in each sub-chamber
Process carries out Real Time Observation.
The PVD equipment of the present embodiment illustrated below：
As shown in Figure 1 to Figure 3, for the region of sub-chamber A, left side uncap column 106 outside install motor fixing seat
209, the first motor 101a is attached in motor fixing seat 209.Right side uncap column 106 outside install electromagnetic brake fix
Seat 208, the second electromagnetic brake 205b is fixed in electromagnetic brake mounting seat 208.The right side of the first electromagnetic brake 205a
Rotating shaft with welding support 103 of uncapping is fixedly connected, and passes on left rotating shaft and is connected with the first motor 101a.Uncap welding support
The two ends of 103 rotating shaft are each passed through the regulating center bearing base 104 of both sides, two cantilever beams and the upper electricity of welding support 103 of uncapping
Electrode systems 105A is fixedly connected.
For the region of sub-chamber B, right side uncap column 106 outside install motor fixing seat 209, the first motor 101a
It is attached in motor fixing seat 209.The uncap outside of column 106 of left side is installed by electromagnetic brake fixed seat 208, the second electromagnetic system
Dynamic device 205b is fixed in electromagnetic brake mounting seat 208.First electromagnetic brake 205a left sides and welding support 103 of uncapping
Rotating shaft is fixedly connected, and right side is connected by rotating shaft with the first motor 101a.The uncap two ends of rotating shaft of welding support 103 are worn respectively
The regulating center bearing base 104 of both sides is crossed, the arms beam of welding support 103 of uncapping is fixedly connected with upper electrode system 105B.
The structure for opening upper-cover in sub-chamber C and sub-chamber D regions and sub-chamber A and sub-chamber B regions it is identical.
It is as follows that sub-chamber a-quadrant opens the workflow covered with sub-chamber B regions：
During original state, the first electromagnetic brake 205a is energization brake type brake, now the first electromagnetic brake
205a is Disconnected mode, i.e., now the connecting shaft of the first electromagnetic brake 205a and the first motor 101a is in disengaged position.This
The first motors of Shi Ruguo 101a is rotated, and any action is not had.And the second electromagnetic brake 205b is power-off brake formula brake,
Now the second electromagnetic brake 205b is closed mode, i.e. now the second electromagnetic brake 205b and welding support 103 of uncapping
Rotating shaft is in connection status.Now sub-chamber A passes through corresponding second electromagnetism respectively with the welding support 103 of uncapping of sub-chamber B
Brake 205b realizes being connected with respective electromagnetic brake fixed seat 208, so as to realize the fixed company of relative column 106 of uncapping
Connect, i.e., original state when, two upper lids are in self-locking state, not rotatably.
When needing to open the upper lid of sub-chamber a-quadrant, the first electromagnetic brake 205a is powered, now the first electromagnetic braking
Device 205a realizes being connected with the connecting shaft of the first motor 101a.Second electromagnetic brake 205b is powered, welding support of now uncapping
103 rotating shaft departs from the second electromagnetic brake 205b.When the first motor 101a is rotated, the welding of uncapping of sub-chamber A is driven
Support 103 is rotated and rotated along the axis of the regulating center bearing base 104 of both sides, so that consolidating with the cantilever beam of welding support 103 of uncapping
The upper electrode system 105A of fixed connection is opened, and realizes the unlatching covered on sub-chamber a-quadrant.After opening to the position for needing, the
One motor 101a stops operating, the second electromagnetic brake 205b power-off, rotating shaft and second electromagnetic braking of welding support 103 of uncapping
Device 205b is connected, the first electromagnetic brake 205a power-off, the connecting shaft reality of the first electromagnetic brake 205a and the first motor 101a
Now depart from.Welding support 103 of now uncapping realizes self-locking by the second electromagnetic brake 205b.So it is achieved that and covers
The safe self-locking of optional position, and self-locking need not be realized by motor, it is to avoid motor is damaged, the use longevity of motor is extended
Life.
When needing to open the upper lid in sub-chamber B regions, the first electromagnetic brake 205a is powered, now the first electromagnetic braking
Device 205a realizes being connected with the connecting shaft of the first motor 101a.Second electromagnetic brake 205b is powered, welding support of now uncapping
103 rotating shaft departs from the second electromagnetic brake 205b.When the first motor 101a is rotated, the welding of uncapping of sub-chamber A is driven
Support 103 is rotated and rotated along the axis of the regulating center bearing base 104 of both sides, so that consolidating with the cantilever beam of welding support 103 of uncapping
The upper electrode system 105A of fixed connection is opened, and realizes the unlatching covered on sub-chamber a-quadrant.After opening to the position for needing, the
One motor 101a stops operating, the second electromagnetic brake 205b power-off, rotating shaft and second electromagnetic braking of welding support 103 of uncapping
Device 205b is connected.First electromagnetic brake 205a is powered off, the connecting shaft reality of the first electromagnetic brake 205a and the first motor 101a
Now depart from, welding support 103 of now uncapping realizes self-locking by the second electromagnetic brake 205b.So it is achieved that and covers
The safe self-locking of optional position, and self-locking need not be realized by motor, it is to avoid motor is damaged, the use longevity of motor is extended
Life.
The course of work and the sub-chamber A that are covered in the unlatching in sub-chamber C and sub-chamber D regions and sub-chamber B regions it is identical.
PVD equipment of the invention, has passed through an opening and closing for the upper lid of motor control Liang Ge sub-chamber, reduces
The usage quantity of motor, realizes effective utilization of motor resource.Simultaneously as the reduction of number of motors, reduces equipment
Physical dimension, reduces the cost of equipment.By using cooperatively for electromagnetic brake and motor so that motor realizes an electricity
Machine controls two functions of upper lid.Meanwhile, the use of electromagnetic brake realizes lid safe self-locking at an arbitrary position, and
Self-locking need not be realized by motor, it is to avoid damage motor, extend the service life of motor.
Embodiment described above only expresses several embodiments of the invention, and its description is more specific and detailed, but simultaneously
Therefore the limitation to the scope of the claims of the present invention can not be interpreted as.It should be pointed out that for one of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to guarantor of the invention
Shield scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
1. a kind of PVD equipment, including motor and four sub-chamber, four sub-chamber arrange in matrix pattern, each sub- chamber
Room is symmetrical arranged, and the motor is used to be turned on and off the upper lid of the sub-chamber, it is characterised in that：
The quantity of the motor is two, and respectively the first motor and the second motor, two symmetrical settings of the motor are in place
In two centre positions of the sub-chamber of the same side；
The two ends of first motor, two sub- chambers are connected respectively to positioned at the upper lid of two sub-chamber of the same side
Room shares first motor, is covered in two sub-chamber and is opened or closed under the driving of first motor；
The two ends of second motor, two sub- chambers are connected respectively to positioned at the upper lid of two sub-chamber of opposite side
Room shares second motor, is covered in two sub-chamber and is opened or closed under the driving of second motor.
2. PVD equipment according to claim 1, it is characterised in that：
Also include column of uncapping, the column of uncapping is arranged on the side of the sub-chamber；
The quantity of the column of uncapping is multiple；Column of being uncapped described in each two constitutes the support pedestal of the sub-chamber.
3. PVD equipment according to claim 2, it is characterised in that：
Also include regulating center bearing base；The regulating center bearing base is fixed on the top of the column of uncapping；
The quantity of the regulating center bearing base is identical with the quantity of the column of uncapping.
4. PVD equipment according to claim 3, it is characterised in that：
Also include uncap welding support and upper electrode system, the welding support of uncapping includes rotating shaft and cantilever beam；
The two ends of the rotating shaft extend through two regulating center bearing bases being arranged in the same sub-chamber；
The cantilever beam is fixedly connected with the upper electrode system.
5. PVD equipment according to claim 4, it is characterised in that：
The quantity of the upper electrode system is identical with the quantity of the welding support of uncapping, and equal to the quantity of the sub-chamber.
6. PVD equipment according to claim 5, it is characterised in that：
Also include the first electromagnetic brake and the second electromagnetic brake；
First electromagnetic brake be energization brake type electromagnetic brake, one end of first electromagnetic brake with described turn
Axle is fixedly connected；First motor described in the other end of first electromagnetic brake and second motor are electrically connected；
When first electromagnetic brake is powered, the other end of first electromagnetic brake and first motor and the second electricity
The connecting shaft connection of machine；When first electromagnetic brake is powered off, the other end of first electromagnetic brake and described first
The connecting shaft of motor and the second motor disconnects.
7. PVD equipment according to claim 6, it is characterised in that：
Second electromagnetic brake is power-off brake formula electromagnetic brake, second electromagnetic brake and shown welding of uncapping
Support is electrically connected；
When second electromagnetic brake is powered, second electromagnetic brake disconnects with the rotating shaft of the welding support of uncapping；
When second electromagnetic brake is powered off, second electromagnetic brake is connected with the rotating shaft of the welding support of uncapping.
8. PVD equipment according to claim 7, it is characterised in that：
Also include electromagnetic brake fixed seat, the electromagnetic brake fixed seat is arranged far from the column of uncapping of the motor
Outside；
Second electromagnetic brake is arranged in the electromagnetic brake fixed seat；The quantity of the electromagnetic brake fixed seat
It is identical with the second electromagnetic brake quantity.
9. PVD equipment according to claim 8, it is characterised in that：
Also include motor fixing seat, the quantity of the motor fixing seat is multiple；
Multiple motor fixing seats are separately positioned on close to the outside of the column of uncapping of the motor.
10. PVD equipment according to claim 1, it is characterised in that：
Also include chamber observation window, the quantity of the chamber observation window is identical with the quantity of the sub-chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310752085.4A CN104746010B (en) | 2013-12-31 | 2013-12-31 | PVD equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310752085.4A CN104746010B (en) | 2013-12-31 | 2013-12-31 | PVD equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104746010A CN104746010A (en) | 2015-07-01 |
| CN104746010B true CN104746010B (en) | 2017-06-06 |
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ID=53586248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310752085.4A Active CN104746010B (en) | 2013-12-31 | 2013-12-31 | PVD equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN104746010B (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101673810A (en) * | 2009-09-03 | 2010-03-17 | 东莞宏威数码机械有限公司 | Opening and closing mechanism of cavity cover |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08176796A (en) * | 1994-12-27 | 1996-07-09 | Sony Corp | Vacuum vapor deposition device |
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2013
- 2013-12-31 CN CN201310752085.4A patent/CN104746010B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101673810A (en) * | 2009-09-03 | 2010-03-17 | 东莞宏威数码机械有限公司 | Opening and closing mechanism of cavity cover |
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| Publication number | Publication date |
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| CN104746010A (en) | 2015-07-01 |
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Address after: 100176 No. 8 Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Beijing, Wenchang Road, No. 8, No. Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |