CN203308280U - Vacuum chamber door opening and closing device based on pneumatic control - Google Patents
Vacuum chamber door opening and closing device based on pneumatic control Download PDFInfo
- Publication number
- CN203308280U CN203308280U CN2013202874650U CN201320287465U CN203308280U CN 203308280 U CN203308280 U CN 203308280U CN 2013202874650 U CN2013202874650 U CN 2013202874650U CN 201320287465 U CN201320287465 U CN 201320287465U CN 203308280 U CN203308280 U CN 203308280U
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- cylinder unit
- connecting plate
- piston
- vacuum chamber
- gripper shoe
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Abstract
The utility model discloses a vacuum chamber door opening and closing device based on pneumatic control, and belongs to control devices of vacuum chamber doors. The vacuum chamber door opening and closing device based on pneumatic control comprises a supporting plate, a supporting component, a first air cylinder unit, a second air cylinder unit and a connecting plate, wherein the supporting plate is movably arranged on the supporting component and can slide horizontally along the supporting component, an air cylinder rod of the first air cylinder unit is fixedly connected with the supporting plate and can drive the supporting plate to slide horizontally along the supporting component, the second air cylinder unit is arranged on the supporting plate, an air cylinder rod of the second air cylinder unit is movably connected with the connecting plate, one end of the connecting plate is movably connected with the supporting plate, and the other end of the connecting plate is a vacuum chamber door connecting end. Through organic connection of the supporting plate, the supporting component, the first air cylinder unit, the second air cylinder unit and the connecting plate, the opening and closing device can carry out not only horizontal sliding control but also overturning control over the connecting plate connected with the vacuum chamber door. In addition, the vacuum chamber door opening and closing device based on pneumatic control is simple in structure, carries out control in a pneumatic mode, is small in control space and can conveniently achieve automatic control.
Description
Technical field
The utility model relates to the control device of door for vacuum chamber, particularly relates to a kind of opening and closing device of door for vacuum chamber based on pneumatic control.
Background technology
Door for vacuum chamber connects extraneous interface as vacuum chamber, and it is convenient, laborsaving to require to open, can the sealed vacuum chamber after closing, and keep vacuum chamber vacuum.
Existing door for vacuum chamber opening and closing structure consists of three parts such as door for vacuum chamber 21, door hinge mechanism 22, door locking mechanisms 23 mostly.The unlatching of manual operation control gate and closing, the hinge of take is axle, the radius of gyration approximates greatly the diameter of door, needs larger space.But the structure of this manual control is no longer applicable to requiring the situation of Automatic Control.
As shown in the control structure of the existing Vacuum door provided as Fig. 1,2, at closing time, door for vacuum chamber rotates centered by the turning cylinder of door hinge, after closure, by door locking mechanism manual locking door for vacuum chamber.The shortcoming of this control structure is: (1) manual operation, can't realize Automatic Control.Radius of gyration when (2) door is opened is larger, larger for space requirement.
The utility model content
The utility model provides a kind of opening and closing device of door for vacuum chamber based on pneumatic control, can realize automatically controlling the open and close of door for vacuum chamber, solve manually control Vacuum door not only Existential Space require large and be not suitable for the problem that needs the occasion of automatically controlling.
The technical scheme solved the problems of the technologies described above is as follows:
The utility model provides a kind of opening and closing device of door for vacuum chamber based on pneumatic control, comprising:
Gripper shoe, support component, the first piston-cylinder unit, the second piston-cylinder unit and connecting plate; Wherein,
Described gripper shoe is movably arranged on described support component, can be along described support component horizontal sliding;
The cylinder rod of described the first piston-cylinder unit is fixedly connected with described gripper shoe, can drive described gripper shoe along described support component horizontal sliding;
Described the second piston-cylinder unit is arranged on described gripper shoe, and the cylinder rod of the second piston-cylinder unit and connecting plate are flexibly connected;
One end of described connecting plate and described gripper shoe are flexibly connected, and the other end is the door for vacuum chamber link.
The beneficial effects of the utility model are: by gripper shoe, support component, the first piston-cylinder unit, the second piston-cylinder unit and the organic connection of connecting plate, form the connecting plate that connects door for vacuum chamber can be controlled by horizontal sliding, the opening and closing device that can overturn again and control.It is simple in structure, controls with pneumatic mode, controls space little and realize that conveniently automation controls.
The accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme of the utility model embodiment, in below describing embodiment, the accompanying drawing of required use is briefly described, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skill in the art, under the prerequisite of not paying creative work, can also obtain other accompanying drawings according to these accompanying drawings.
The door for vacuum chamber control structure schematic diagram that Fig. 1 provides for prior art;
Fig. 2 is that the A-A of Fig. 1 is to view;
The structural representation of the door for vacuum chamber opening and closing device that Fig. 3 provides for the utility model embodiment;
The top view of the door for vacuum chamber opening and closing device that Fig. 4 provides for the utility model embodiment;
The parts that in figure, each label is corresponding are: the 21-door for vacuum chamber; The 22-door locking mechanism; The 23-door hinge mechanism;
1-the second piston-cylinder unit; The cylinder rod of 2-the second piston-cylinder unit; The 3-connecting plate; The 4-adjustment block; The 5-door for vacuum chamber; The 6-linkage; The 7-position limiting structure; The 8-guide peg; 9-the first piston-cylinder unit; 10-the first fixed connecting plate; 11-the second fixed connecting plate; The 12-supporting seat.
The specific embodiment
Below the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, rather than whole embodiment.Based on embodiment of the present utility model, those of ordinary skills, not making under the creative work prerequisite the every other embodiment obtained, belong to protection domain of the present utility model.
The utility model embodiment provides a kind of opening and closing device of door for vacuum chamber based on pneumatic control, and as shown in Figure 3, this opening and closing device specifically comprises: gripper shoe, support component, the first piston-cylinder unit 9, the second piston-cylinder unit 1 and connecting plate 3;
Wherein, gripper shoe is movably arranged on support component, can be along the support component horizontal sliding; Support component specifically forms (see figure 4) by two guide pegs 8 and four supporting seats 12, two guide pegs 8 be arranged in parallel, each is supported each guide peg 8 two ends by a supporting seat 12, and gripper shoe is movably arranged on two guide pegs 8, can be on two guide pegs 8 horizontal sliding;
The cylinder rod of the first piston-cylinder unit 9 is fixedly connected with gripper shoe, can drive gripper shoe along the support component horizontal sliding;
The second piston-cylinder unit 1 is arranged on gripper shoe, and the cylinder rod 2 of the second piston-cylinder unit 1 is flexibly connected with connecting plate 3;
One end of connecting plate 3 and gripper shoe are flexibly connected, and the other end is the door for vacuum chamber link.
In above-mentioned opening and closing device, the first piston-cylinder unit 9 is provided with and after its cylinder rod arrives ad-hoc location, sends put in place the primary importance sensor 13 of signal of switch; The second piston-cylinder unit 1 is provided with and after its cylinder rod arrives ad-hoc location, sends put in place the second place sensor 14 of signal of tumbler switch; Further this opening and closing device also comprises: controller 15, with first, second position sensor 13,14 of the first piston-cylinder unit 9 and the second piston-cylinder unit 1, be electrically connected to respectively, after at the transversal switch of the primary importance sensor 13 of receiving the first piston-cylinder unit 9, putting signal in place, the first piston-cylinder unit 9 is controlled; Also for the tumbler switch of the second place sensor 14 receiving the second piston-cylinder unit 1, put in place after signal, the second piston-cylinder unit 1 is controlled.
In above-mentioned opening and closing device, gripper shoe consists of the first fixed connecting plate 11 and the second fixed connecting plate 10, the second fixed connecting plate 10 is arranged on above the first fixed connecting plate 11, the second fixed connecting plate 10 and the first fixed connecting plate 11 are crisscross arranged, and the end that the second fixed connecting plate 10 stretches out an end outside the first fixed connecting plate 11 and connecting plate 3 is flexibly connected.One end of connecting plate 3 specifically is flexibly connected by linkage 6 and an end (i.e. an end of the second fixed connecting plate 10) of gripper shoe.
Above-mentioned opening and closing device also comprises: be connected to the adjustment block 4 on the door for vacuum chamber link of connecting plate 4, this adjustment block 4 is be used to connecting door for vacuum chamber 5, thereby can finely tune the relative position of door for vacuum chamber 5 with respect to the vacuum chamber doorframe, guarantee the opposing parallel relation of door for vacuum chamber 5 and vacuum chamber doorframe, to guarantee to close the accuracy of rear position, thereby guarantee seal.
Above-mentioned opening and closing device, at the first piston-cylinder unit 9(, be equivalent to the horizontal sliding cylinder) driving under, can drive gripper shoe and on the second piston-cylinder unit 1 and other parts horizontal sliding, and at the second piston-cylinder unit 1(, be equivalent to the cylinder that overturns) driving under, drive connecting plate 3 one ends and overturn along the flexible connection end is connected with gripper shoe.This opening and closing device in use, can be realized by the mode of horizontal sliding-upset opening of door for vacuum chamber like this, and the mode by upset-horizontal sliding realizes closing of door for vacuum chamber.
In above-mentioned opening and closing device, also be provided with position limiting structure 7 on the second fixed connecting plate 10 of gripper shoe, the position of position limiting structure 7 is corresponding with described connecting plate 3, can carry out spacing to the connecting plate 3 that upset puts in place.
Below in conjunction with accompanying drawing, the course of work, the utility model is described in further detail.
The opening and closing device of the utility model embodiment is a kind of air cylinder connecting rod driving mechanism, by the control to two cylinders, realize horizontal feed and the rotary movement of door for vacuum chamber, thereby automatically open, close door for vacuum chamber, and then the operations such as loading and unloading of cooperative mechanical arm, can realize full-automatic, the free of discontinuities control operation of the whole operation of equipment.
Simultaneously, vacuum equipment in the course of the work, need to be filled with in vacuum chamber mostly at present; as special gas such as silane, phosphine, ammonias; in case any danger occurs, this opening and closing device can be controlled door for vacuum chamber by long-range, thereby can effectively protect operator safety.
Shown in Fig. 1,2, this opening and closing device motion is divided into both direction, the i.e. flip-flop movement of the feed motion of horizontal direction and door for vacuum chamber; Have four extreme positions, namely level reaches position, level is closed and put in place, rotates the pass that puts in place and overturn and puts in place; Wherein,
Horizontal movement: namely the first piston-cylinder unit 9(is equivalent to the horizontal sliding table piston-cylinder unit) by the gripper shoe be formed by connecting by the first fixed connecting plate 11 and the second fixed connecting plate 10, driving whole mechanism and the door for vacuum chamber 5 be connected with connecting plate does away from or near the horizontal movement of vacuum chamber, it determines (being that level reaches position and the level pass puts in place) away from the extreme position with near vacuum chamber by the particular location that the primary importance sensor 13 be fixed on the first piston-cylinder unit 9 detects along two guide pegs 8 of support component.
A flip-flop movement: when horizontal movement is reached, control the second piston-cylinder unit 1(and be equivalent to the piston-cylinder unit that overturns) the compressed air direction, control the stretching motion of the cylinder rod of the second piston-cylinder unit 1, drive connecting plate 3, thereby the purpose (namely rotating the pass that puts in place and overturn puts in place) of door for vacuum chamber 5 is opened or closed to upset door for vacuum chamber 5, realization fully.
The specific works process of this opening and closing device is as follows:
The process of opening the door: by controlling the compressed air direction of the first piston-cylinder unit 9, controlling the first piston-cylinder unit 9 moves to the direction away from vacuum chamber along guide peg 8, when the level of moving to reaches bit position, drive vacuum chamber's door horizontal opening, primary importance sensor 13 feedback level of the first piston-cylinder unit 9 reach a signal, then control the compressed air direction of the second piston-cylinder unit 1, the cylinder rod of the second piston-cylinder unit 1 is moved along the direction that is retracted into cylinder body, driving 5 upsets of vacuum chamber's door opens, until receive the signal that puts in place that rotates of second place sensor 14 feedbacks, the whole process of opening the door finishes.
The process of closing the door: by controlling the compressed air direction of the second piston-cylinder unit 1, the cylinder rod of the second piston-cylinder unit 1 is moved along the direction that deviates from cylinder body, when moving to upset and close the position put in place, the signal that puts in place is closed in the 14 feedback upsets of second place sensor, then control the compressed air direction of the first piston-cylinder unit 9, the first piston-cylinder unit 9 is moved to the direction near vacuum chamber along guide peg 8, after level is closed and is put in place, primary importance sensor 13 feedback level are closed the signal that puts in place, and the whole process of closing the door finishes.
Opening and closing device of the present utility model, can be used on various forms of door for vacuum chamber, to the structure of subsidiary observation port above door for vacuum chamber, applicable too.Thereby can be conveniently to the unlatching of door for vacuum chamber or close and realize automatically and Long-distance Control.
The above; it is only the preferably specific embodiment of the utility model; but protection domain of the present utility model is not limited to this; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the variation that can expect easily or replacement, within all should being encompassed in protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of claims.
Claims (8)
1. the opening and closing device of the door for vacuum chamber based on pneumatic control, is characterized in that, comprising:
Gripper shoe, support component, the first piston-cylinder unit, the second piston-cylinder unit and connecting plate; Wherein,
Described gripper shoe is movably arranged on described support component, can be along described support component horizontal sliding;
The cylinder rod of described the first piston-cylinder unit is fixedly connected with described gripper shoe, can drive described gripper shoe along described support component horizontal sliding;
Described the second piston-cylinder unit is arranged on described gripper shoe, and the cylinder rod of the second piston-cylinder unit and connecting plate are flexibly connected;
One end of described connecting plate and described gripper shoe are flexibly connected, and the other end is the door for vacuum chamber link.
2. device as claimed in claim 1, is characterized in that, described the first piston-cylinder unit is provided with and after its cylinder rod arrives ad-hoc location, sends put in place the primary importance sensor of signal of switch;
Described the second piston-cylinder unit is provided with and after its cylinder rod arrives ad-hoc location, sends put in place the second place sensor of signal of tumbler switch.
3. device as claimed in claim 2, it is characterized in that, also comprise: controller, with first, second position sensor of the first piston-cylinder unit and the second piston-cylinder unit, be electrically connected to respectively, after at the transversal switch of the primary importance sensor of receiving described the first piston-cylinder unit, putting signal in place, the first piston-cylinder unit is controlled; Also for the tumbler switch of the second place sensor receiving described the second piston-cylinder unit, put in place after signal, the second piston-cylinder unit is controlled.
4. device as described as the claims 1 to 3 any one, described support component consists of two guide pegs and four supporting seats, two guide pegs be arranged in parallel, and each is supported each guide peg two ends by a supporting seat, and described gripper shoe is movably arranged on described two guide pegs.
5. device as described as the claims 1 to 3 any one, described gripper shoe consists of the first fixed connecting plate and the second fixed connecting plate, and described the second fixed connecting plate is arranged on above described the first fixed connecting plate.
6. device as described as the claims 1 to 3 any one, is characterized in that, also comprises: adjustment block is connected on the door for vacuum chamber link of described connecting plate.
7. device as described as the claims 1 to 3 any one, is characterized in that, an end of described connecting plate is flexibly connected by an end of linkage and described gripper shoe.
8. device as described as the claims 1 to 3 any one, is characterized in that, also comprises: the connecting plate after upset is carried out to spacing position limiting structure, be arranged on described gripper shoe, the position of position limiting structure is corresponding with described connecting plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202874650U CN203308280U (en) | 2013-05-23 | 2013-05-23 | Vacuum chamber door opening and closing device based on pneumatic control |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202874650U CN203308280U (en) | 2013-05-23 | 2013-05-23 | Vacuum chamber door opening and closing device based on pneumatic control |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203308280U true CN203308280U (en) | 2013-11-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013202874650U Expired - Fee Related CN203308280U (en) | 2013-05-23 | 2013-05-23 | Vacuum chamber door opening and closing device based on pneumatic control |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203308280U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109826526A (en) * | 2019-02-28 | 2019-05-31 | 山东嘉信工业装备有限公司 | A kind of bulking equipment Quick speed door opener |
| CN110640531A (en) * | 2019-10-31 | 2020-01-03 | 浙江纳迪克数控设备有限公司 | Loading and unloading device for machining center |
-
2013
- 2013-05-23 CN CN2013202874650U patent/CN203308280U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109826526A (en) * | 2019-02-28 | 2019-05-31 | 山东嘉信工业装备有限公司 | A kind of bulking equipment Quick speed door opener |
| CN110640531A (en) * | 2019-10-31 | 2020-01-03 | 浙江纳迪克数控设备有限公司 | Loading and unloading device for machining center |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131127 Termination date: 20200523 |