CN101673696B - Front-opening unified pod with wafer constraints arranged on door - Google Patents
Front-opening unified pod with wafer constraints arranged on door Download PDFInfo
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- CN101673696B CN101673696B CN2008101491429A CN200810149142A CN101673696B CN 101673696 B CN101673696 B CN 101673696B CN 2008101491429 A CN2008101491429 A CN 2008101491429A CN 200810149142 A CN200810149142 A CN 200810149142A CN 101673696 B CN101673696 B CN 101673696B
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Abstract
The invention relates to a front-opening unified pod with wafer constraints arranged on a door, which comprises a pod body, wherein a lateral surface of the pod body is provided with an opening, the inside of the pod body is provided with a plurality of slots for accommodating a plurality of wafers, and a door body is combined with the opening of the pod body to protect the wafers in the pod body. The front-opening unified pod is characterized in that: a position adjacent to the center of the inner surface of the door body is provided with two rows of a plurality of spaced and aligned wafer constraints, wherein each wafer constraint is provided with a base; one end of the base is fixed on the inner surface of the door body, while the other end is connected with a crank arm; the crank arm is provided with a first contact end and a second contact end, and thus the wafer constraints can constrain the wafers to move towards the opening by the first contact ends and the second contact ends sequentially.
Description
Technical field
The present invention is about a kind of wafer case, and particularly about a kind of wafer case with wafer limiting piece (waferconstraint), above-mentioned wafer limiting piece has a plurality of contact jaws in order to firmly to limit moving of wafer.
Background technology
Therefore semiconductor wafer can be moved to different work stations owing to need the processing of the various different flow processs of process and need to cooperate process apparatus.The carrying of wafer for convenience and avoid being subjected to external pollution, regular meeting utilizes an airtight container to carry for automation equipment.Please refer to shown in Figure 1ly, be the wafer case schematic diagram of prior art.This wafer case is a kind of front-open wafer box (Front Opening Unified Pod; FOUP); have a box body 10 and a body 20; but box body 10 inside are provided with the ccontaining a plurality of wafers of a plurality of slot 11 levels; and have an opening 12 in a side of box body 10 and can supply carrying and loading of wafer; and door body 20 has an outer surface 21 and an inner surface 22, and door body 20 combines with the opening 12 of box body 10 by inner surface 22, in order to a plurality of wafers of protection box body 10 inside.In addition, at least one bolt perforate 23 of configuration on the outer surface 21 of door body 20 is in order to open or the sealing front-open wafer box.In above-mentioned front-open wafer box, because the semiconductor wafer level land places box body 10 inside, therefore, a wafer limiting piece (waferconstraint) need be arranged in the front-open wafer box handling process, move because of the opening direction that vibrations produce dystopy or past box body 10 to avoid wafer.
Please refer to shown in Figure 2ly, be the generalized section of existing a kind of wafer limiting piece when the restriction wafer.Wafer limiting piece 100 is arranged among a body 20 its inner surfaces 22 2 row's perforation (Opening) O, utilize 110 of the elasticity arms of a plurality of symmetrical wafer limiting pieces 100 not to be held on each wafer sheet, in transport process, move because of the opening direction of vibrations dystopy or past box body 10 to avoid wafer.Yet said structure needs to offer two row perforation O on door body 20 inner surfaces 22 and to set up again to insert on wafer limiting piece 100 and fasten 110P and be fixed in the mode that plugs in the O that bores a hole with circular rings.So being configured in manufacturing, assembling all shows complicated and digs and establish a plurality of perforation O and easily cause the airtight bad and dead angle when becoming a body 20 cleaning, dryings.In addition, each wafer limiting piece 100 of case only can provide a strong point in wafer before above-mentioned, seem more built on the sand and direction of its restriction wafer mainly concentrates on the centre place of opening direction that these all can cause and produce friction between wafer and the wafer limiting piece 100 and produce particle dust, pollution wafer.
Summary of the invention
According to its wafer limiting piece complex structure of wafer case of prior art and cause problems such as airtight bad and particle dust easily, a main purpose of the present invention is to provide a kind of wafer case of tool wafer limiting piece, its wafer limiting piece of this wafer case places a body inner surface near the centre both sides, wherein each wafer limiting piece has a plurality of contact jaws, except avoiding wafer to produce dystopy or toward the opening direction centre moves because of vibrations, also can limit toward the direction of opening and move, can avoid producing friction between wafer and the wafer limiting piece and the generation particle dust than dual-side, pollute wafer.
Another main purpose of the present invention is to provide a kind of wafer case of tool wafer limiting piece, its wafer limiting piece of this wafer case places a body inner surface near the centre both sides, wherein each wafer limiting piece has a plurality of contact jaws, above-mentioned a plurality of contact jaw produces with wafer in regular turn and contacts, more stable support is provided thus, avoids between wafer and the wafer limiting piece producing friction and produce particle dust, pollute wafer.
Another main purpose again of the present invention is to provide a kind of wafer case of tool wafer limiting piece, its wafer limiting piece of this wafer case places a body inner surface near the centre both sides, wherein wafer limiting piece is integrally formed with door body inner surface, and except simple in structure, it is also lower to make required cost.
For reaching above-mentioned projects, the present invention discloses a kind of wafer case of tool wafer limiting piece, comprise a box body and a body, be provided with a plurality of slots in the inside of box body with ccontaining a plurality of wafers, and there is an opening can supply the input and the output of wafer in a wherein side of box body, and dispose a plurality of wafer limiting pieces that two row's formation are spaced and align near centre at the inner surface of door body, wherein each wafer limiting piece has a base portion, one end of base portion is fixed on the inner surface of a body, and its other end and is cranked arm and is connected, and wherein cranks arm to have one first contact jaw and one second contact jaw and make wafer limiting piece can utilize above-mentioned first contact jaw and second contact to bring in the restriction wafer in regular turn to move toward opening direction centre and the opening direction than dual-side.
Description of drawings
Fig. 1 is the schematic diagram of existing a kind of wafer case;
Fig. 2 is the generalized section of existing a kind of wafer limiting piece when limiting wafer;
Fig. 3 is the schematic diagram of first kind of wafer case of the present invention;
Fig. 4 A is that first kind of its wafer limiting piece of wafer case of the present invention rigidly connects the schematic diagram that touches wafer;
Fig. 4 B is the schematic diagram of first kind of its wafer limiting piece of wafer case of the present invention in the restriction wafer;
Fig. 5 is the schematic diagram of second kind of wafer case of the present invention;
Fig. 6 A is that second kind of its wafer limiting piece of wafer case of the present invention rigidly connects the schematic diagram that touches wafer;
Fig. 6 B is the schematic diagram of second kind of its wafer limiting piece of wafer case of the present invention in the restriction wafer;
Fig. 7 is the schematic diagram of the third wafer case of the present invention;
Fig. 8 A is that its wafer limiting piece of the third wafer case of the present invention rigidly connects the schematic diagram that touches wafer;
Fig. 8 B is the schematic diagram of its wafer limiting piece of the third wafer case of the present invention in the restriction wafer;
Fig. 9 is fixed in the schematic diagram of a body for its wafer limiting piece of the third wafer case of the present invention; And
Figure 10 is the schematic diagram of the third its wafer limiting piece of wafer case of the present invention.
[main element symbol description]
10 box bodys
11 slots
12 openings
20 bodies
21 outer surfaces
22 inner surfaces
24 outstanding posts
400 limiting piece modules
40 limited parts
41 base portions
42 crank arm
43 first contact jaws
44 second contact jaws
500 limiting piece modules
50 limited parts
51 base portions
52 first crank arm
53 second crank arm
54 first contact jaws
55 second contact jaws
56 the 3rd contact jaws
57 hinges
600 limiting piece modules
60 limited parts
61 bases
The 62 curved portions that prolong
The semicircular protuberance of 62C
62G central authorities guide groove
63 installing holes
The W wafer
Embodiment
For technology contents, goal of the invention that the present invention is used and the effect reached thereof have more complete and clearly disclose,, and see also the diagram and the figure number of being taken off now in describing in detail down:
At first, see also shown in Figure 3ly, be the schematic diagram of first kind of wafer case of the present invention.This wafer case is a kind of front-open wafer box, mainly comprise a box body 10 and a body 20, be provided with a plurality of slots 11 with ccontaining a plurality of wafers in the inside of box body 10, and there is an opening 12 that the input and the output of wafer can be provided in one of them side of box body 10, door body 20 then is to have an outer surface 21 and an inner surface 22, outer surface 21 at least one bolt perforate (not being shown among the figure) of configuration of door body 20, in order to open or the sealing front-open wafer box, arrange wafer limiting piece modules 400 and dispose two at the middle approximately place of door body 20 inner surfaces 22, each row's wafer limiting piece module 400 is made up of a plurality of spaced wafer limiting piece 40, and each this wafer limiting piece 40 aligns with each wafer limiting piece 40 on the adjacent wafer limiting piece module 400.
Shown in Fig. 4 A, above-mentioned a plurality of wafer limiting piece 40 each wafer limiting piece 40 wherein all has a base portion 41, one end of base portion 41 is fixed on the inner surface 22 of a body 20, and its other end and cranks arm and 42 be connected, and wherein cranks arm 42 to have one first contact jaw 43 and one second contact jaw 44.And the elastic construction that each wafer limiting piece 40 can be one of the forming (for example: the thermoplastic elastic structure), when door body 20 do not combine with box body 10 or just will in conjunction with the time, first contact jaw 43 of wafer limiting piece 40 and online (43-44) of second contact jaw 44 with the door body 20 inner surface 22 parallel to each other.At this moment, wafer is earlier with 43 contacts of first contact jaw, when wafer contacts first contact jaw 43, can make base portion 41 produce deformation and lever drives cranks arm 42, makes i.e. second contact jaw 44 contact wafer in order of another contact jaw of cranking arm on 42.At this moment, shown in Fig. 4 B, door body 20 follows the inner surface 22 of door body 20 to form an angle with first contact jaw 43 of box body 10 driving fits and wafer limiting piece 40 and online (43-44) of second contact jaw 44.Very clearly, each wafer limiting piece 40 produces with wafer with two contact jaws and contacts, and except limiting wafer toward the opening direction centre moves, also can provide wafer to move toward the direction of opening than the both sides.
Above-mentioned wafer limiting piece 40 its base portions 41 with crank arm 42 also can for two kinds of different materials or elastic construction (for example: the thermoplastic elastic structure), similarly be the plastics of different hardness, make base portion 41 can produce bigger deformation and crank arm 42 to be not easy deformation, wafer limiting piece 40 Lower Halves can provide the good deformation first half then to provide stable lever to crank arm thus.And wafer limiting piece 40 or wafer limiting piece 40 its base portions 41 (for example: the thermoplastic elastic structure) are arranged to elastic construction, except reaching deformation so that first contact jaw 43 and second contact jaw 44 in regular turn with wafer contacts, this elastic construction also has the effect of shock-absorbing, can avoid wafer to move because of the opening direction that unexpected vibrations produce dystopy or past box body 10.Again, base portion 41 has a bend at least, and therefore, when wafer one contact first contact jaw 43, its angle of the bend of base portion 41 can change and then drive cranks arm 42, can make second contact jaw 44 contact wafer in order.And first contact jaw 43 and second contact jaw 44 can also have a depression, and wafer is absorbed in the depression, avoid wafer to move up and down.And above-mentioned a plurality of wafer limiting piece 40 can be formed at a base, and this base is fixed in the inner surface 22 of a body 20.Certainly, a plurality of wafer limiting pieces 40 also can be directly integrally formed with the inner surface 22 of door body 20, so can reduce and produce required cost.
Secondly, see also shown in Figure 5ly, be the schematic diagram of second kind of wafer case of the present invention.This front open type wafer case is identical with above-mentioned first kind of wafer case, comprises a box body 10 and a body 20, and different is that wafer limiting piece module 500 its wafer limiting pieces 50 that are fixed in both sides, a body 20 inner surfaces, 22 middle place have three contact jaws.
As shown in Figure 6A, each wafer limiting piece 50 has a base portion 51, one end of base portion 51 is fixed on the inner surface 22 of a body 20, and its other end and one first is cranked arm and 52 is connected, this first cranks arm and 52 has two free ends, wherein form one first contact jaw 54 near the free end of centre, and also further crank arm and 53 be connected with one second away from another free end of centre, second cranks arm 53 has one second contact jaw 55 and one the 3rd contact jaw 56.The material of this embodiment and a last embodiment, structure and operating principle are similar, when door body 20 do not combine with box body 10 or just will in conjunction with the time, online (54-55-56) of first contact jaw 54, second contact jaw 55 and the 3rd contact jaw 56 of wafer limiting piece 50 with the door body 20 medial surface 22 parallel to each other.At this moment, wafer is earlier with 54 contacts of first contact jaw, when wafer contacts first contact jaw 54, can make base portion 51 produce deformation and lever drives first and crank arm and 52 and second crank arm 53, make second second contact jaw 55 on 53 and the 3rd contact jaw 56 contact wafer in order of cranking arm.At this moment, shown in Fig. 6 B, online (54-55-56) of first contact jaw 54, second contact jaw 55 and the 3rd contact jaw 56 of door body 20 and box body 10 driving fits and wafer limiting piece 50 forms an angle with the inner surface 22 of door body 20.Clearly, because each wafer limiting piece 50 provides three contact jaws in wafer, can more firmly limit wafer and move or opening moves than the direction of both sides toward the opening direction centre.Certainly, present embodiment can also be cranked arm first and be disposed a hinge 57 between two free ends of 52 and on the side near door body 20 inner surfaces 22, this hinge 57 is fixed in a body 20 inner surfaces 22, so when base portion 51 deformation more firmly lever drives first crank arm and 52 and second crank arm 53, first contact jaw 54, second contact jaw 55 and the 3rd contact jaw 56 all can be contacted with wafer closely.And as the embodiment of aforementioned two contact jaws, the elastic construction that these a plurality of wafer limiting pieces 50 each wafer limiting piece 50 wherein can be one of the forming (for example: the thermoplastic elastic structure), its base portion 51 and first crank arm 52 or second crank arm 53 can also for unlike material or elastic construction (for example: the thermoplastic elastic structure), similarly be the plastics of different hardness, can make base portion 51 that bigger deformation is arranged and crank arm to be not easy deformation.Certainly, first contact jaw 54, second contact jaw 55 and the 3rd contact jaw 56 can also have a depression, and wafer is absorbed in the depression, avoid wafer to move up and down.And above-mentioned a plurality of wafer limiting piece 50 can also be formed at a base earlier, and this base is fixed in the inner surface 22 of a body 20 or a plurality of wafer limiting piece 50 is directly directly integrally formed with the inner surfaces 22 of door body 20.
Then, see also shown in Figure 7ly, be the schematic diagram of the third wafer case of the present invention, the inner surface 22 of this its body 20 of front open type wafer case disposes a limiting piece module 600 near centre, and limiting piece module 600 is spaced by a plurality of wafer limiting pieces 60 and forms.Shown in Fig. 8 A and Fig. 8 B, because these a plurality of wafer limiting pieces 60 each wafer limiting piece 60 wherein has elasticity, therefore when wafer at the beginning during contact wafer limited part 60 (Fig. 8 A) only have slightly area to have to contact with wafer, and when door body 20 and box body 10 driving fits (Fig. 8 B), wafer limiting piece 60 produces deformation makes the contact area between wafer and the wafer limiting piece 60 become big or become many.
As Fig. 9 and shown in Figure 10, a plurality of wafer limiting pieces 60 are spaced on a base 61, to form a wafer limiting piece module 600.This base 61 has a plurality of installing holes 63, with respect to these a few installing holes 63 places outstanding post 24 is arranged then on the inner surface 22, makes wafer limiting piece module 600 be fixed in inner surface 22 centre of a body 20 in the mode that snaps in (snap on).And have a plurality of wafer limiting pieces 60 in the centre of base 61, have the gap between the adjacent wafer limiting piece 60, make wafer limiting piece 60 can be corresponding relative wafers in the box body 10.Above-mentioned each wafer limiting piece 60 respectively forms one by the centre of base 61 to both sides and curvedly prolongs that portion 62 and each are curved prolongs the protuberance 62C that portion's 62 its free ends form approximate half-circular, contacts with wafer with the central guide groove 62G that passes through this semicircular protuberance 62C.The place that the guide groove 62G of central authorities contact with wafer can a kind of wear-resisting consumptive material of surperficial coating (for example: polyether-ether-ketone polyetheretherketone, PEEK), to reduce friction and the generation of particle dust.In addition, the width of central guide groove 62G can be identical with the thickness of wafer, can allow wafer be absorbed among this central guide groove 62G, to avoid moving up and down of wafer.Clearly, above-mentioned base 61 forms an angle with the curved portion 62 that prolongs, this angle can be 10～60 degree, when angle more little, about the distance of two central guide groove 62G can be far away more, can provide than opening toward the restriction of lateral direction, and angle is when big more, the direction of restriction concentrates on the centre of opening direction.
Though the present invention discloses as above with aforesaid preferred embodiment; right its is not in order to limit the present invention; anyly have the knack of alike skill person; without departing from the spirit and scope of the present invention; when can doing a little change and retouching, therefore scope of patent protection of the present invention must be looked the appended claim person of defining of this specification and is as the criterion.
Claims (26)
1. front-open wafer box; mainly comprise a box body; this box body inside is provided with a plurality of slots with ccontaining a plurality of wafers; and forming an opening in a side of this box body can be for the input and the output of these a plurality of wafers; and a body, having an outer surface and an inner surface, this body combines with this opening of this box body with this inner surface; and in order to protect these a plurality of wafers of this box body inside, wherein this front-open wafer box is characterised in that:
This inner surface of this body near centre dispose two row limiting piece modules, each row's limiting piece module is made up of a plurality of spaced limited part, and each this limited part aligns with a limited part of adjacent limiting piece module, wherein each this limited part has a base portion, one end of this base portion is fixed on this inner surface of this body, and its other end and is cranked arm and is connected, wherein this is cranked arm and has two free ends, what wherein this was cranked arm forms one first contact jaw near the free end of this inner surface centre of this body, forms one second contact jaw away from another free end of this inner surface centre of this body and this is cranked arm.
2. front-open wafer box as claimed in claim 1 is characterized in that: the structure that this limiting piece module is one of the forming.
3. front-open wafer box as claimed in claim 1 is characterized in that: this inner surface of this limiting piece module and this body is integrally formed.
4. front-open wafer box as claimed in claim 1 is characterized in that: the structure that this limited part is one of the forming.
5. front-open wafer box as claimed in claim 1 is characterized in that: this limited part is a kind of flexible member.
6. front-open wafer box as claimed in claim 1 is characterized in that: this base portion of this limited part is a kind of flexible member.
7. front-open wafer box as claimed in claim 1 is characterized in that: this first contact jaw that this is cranked arm and this second contact jaw tool, one depression move up and down to limit this wafer.
8. front-open wafer box as claimed in claim 1 is characterized in that: this base portion of this limited part has a knee at least.
9. front-open wafer box; mainly comprise a box body; this box body inside is provided with a plurality of slots with ccontaining a plurality of wafers; and forming an opening in a side of this box body can be for the input and the output of these a plurality of wafers; and a body, having an outer surface and an inner surface, this body combines with this opening of this box body with this inner surface; and in order to protect these a plurality of wafers of this box body inside, wherein this front-open wafer box is characterised in that:
This inner surface of this body near centre dispose two row limiting piece modules, each row's limiting piece module is made up of a plurality of spaced limited part, and each this limited part aligns with a limited part of adjacent limiting piece module, wherein each this limited part has a base portion, one end of this base portion is fixed on this inner surface of this body, and its other end and one first is cranked arm and is connected, this first is cranked arm and has two free ends, wherein form first contact jaw near the free end of this inner surface centre of this body, and also further crank arm and be connected with one second away from another free end of this inner surface centre of this body, this second is cranked arm and has two free ends, wherein this second crank arm form one second contact jaw near the free end of this inner surface centre of this body, and this second crank arm form one the 3rd contact jaw away from another free end of this inner surface centre of this body.
10. front-open wafer box as claimed in claim 9 is characterized in that: this first is cranked arm dispose a hinge between its this two free end and near on the side of this inner surface.
11. front-open wafer box as claimed in claim 10 is characterized in that: this hinge and this inner surface are fixed.
12. front-open wafer box as claimed in claim 9 is characterized in that: the structure that this limiting piece module is one of the forming.
13. front-open wafer box as claimed in claim 9 is characterized in that: this inner surface of this limiting piece module and this body is integrally formed.
14. front-open wafer box as claimed in claim 9 is characterized in that: the structure that this limited part is one of the forming.
15. front-open wafer box as claimed in claim 9 is characterized in that: this limited part is a kind of flexible member.
16. front-open wafer box as claimed in claim 9 is characterized in that: this base portion of this limited part is a kind of flexible member.
17. front-open wafer box as claimed in claim 9 is characterized in that: this of this limited part first contact jaw, this second contact jaw and the 3rd contact jaw tool one depression move up and down to limit this wafer.
18. front-open wafer box as claimed in claim 9 is characterized in that: this base portion of this limited part has a knee at least.
19. front-open wafer box; mainly comprise a box body; this box body inside is provided with a plurality of slots with ccontaining a plurality of wafers; and forming an opening in a side of this box body can be for the input and the output of these a plurality of wafers; and a body, having an outer surface and an inner surface, this body combines with this opening of this box body with this inner surface; and in order to protect these a plurality of wafers of this box body inside, wherein this front-open wafer box is characterised in that:
The centre of this inner surface of this body disposes a limiting piece module, this limiting piece module has a base, the centre of this base has a plurality of spaced limited parts, each this limited part respectively forms a curved portion that prolongs by the centre of this base to both sides, this base and this curved portion of prolonging form the angle of a 10-60 degree, and each should curved prolong protuberance that its free end of portion forms approximate half-circular, contacted with wafer with the central guide groove by the protuberance of this approximate half-circular.
20. front-open wafer box as claimed in claim 19 is characterized in that: the structure that this limiting piece module is one of the forming.
21. front-open wafer box as claimed in claim 19 is characterized in that: this inner surface of this limiting piece module and this body is integrally formed.
22. front-open wafer box as claimed in claim 19 is characterized in that: the place that the central guide groove of this protuberance contacts with wafer coats a kind of wear-resisting consumptive material for the surface.
23. front-open wafer box as claimed in claim 22 is characterized in that: this wear-resisting consumptive material is a polyether-ether-ketone.
24. front-open wafer box as claimed in claim 19 is characterized in that: the width of the central guide groove of this protuberance is approximately identical with wafer thickness, moves up and down with the restriction wafer.
25. front-open wafer box as claimed in claim 19 is characterized in that: this base of this limiting piece module has a plurality of installing holes, so that this limiting piece module is fixed in this inner surface of this body in the mode that snaps in.
26. front-open wafer box as claimed in claim 19 is characterized in that: this limited part has elasticity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101491429A CN101673696B (en) | 2008-09-12 | 2008-09-12 | Front-opening unified pod with wafer constraints arranged on door |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101491429A CN101673696B (en) | 2008-09-12 | 2008-09-12 | Front-opening unified pod with wafer constraints arranged on door |
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| Publication Number | Publication Date |
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| CN101673696A CN101673696A (en) | 2010-03-17 |
| CN101673696B true CN101673696B (en) | 2011-09-28 |
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| CN2008101491429A Active CN101673696B (en) | 2008-09-12 | 2008-09-12 | Front-opening unified pod with wafer constraints arranged on door |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104183491B (en) * | 2013-05-21 | 2018-05-01 | 中芯国际集成电路制造(上海)有限公司 | The forming method of transistor |
| TWI641071B (en) * | 2018-01-08 | 2018-11-11 | 家登精密工業股份有限公司 | Container door retaining structure |
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| US5228568A (en) * | 1991-08-30 | 1993-07-20 | Shin-Etsu Handotai Co., Ltd. | Semiconductor wafer basket |
| US5452795A (en) * | 1994-11-07 | 1995-09-26 | Gallagher; Gary M. | Actuated rotary retainer for silicone wafer box |
| US6808352B2 (en) * | 2001-08-20 | 2004-10-26 | Semiconductor Leading Edge Technolgies, Inc. | Method for transporting boards, load port apparatus, and board transport system |
| CN1639029A (en) * | 2002-02-26 | 2005-07-13 | 诚实公司 | Wafer container cushion system |
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|---|---|---|---|---|
| US5228568A (en) * | 1991-08-30 | 1993-07-20 | Shin-Etsu Handotai Co., Ltd. | Semiconductor wafer basket |
| US5452795A (en) * | 1994-11-07 | 1995-09-26 | Gallagher; Gary M. | Actuated rotary retainer for silicone wafer box |
| US6808352B2 (en) * | 2001-08-20 | 2004-10-26 | Semiconductor Leading Edge Technolgies, Inc. | Method for transporting boards, load port apparatus, and board transport system |
| CN1639029A (en) * | 2002-02-26 | 2005-07-13 | 诚实公司 | Wafer container cushion system |
| CN1676436A (en) * | 2004-03-31 | 2005-10-05 | 未来儿株式会社 | Lid unit for thin plate supporting container |
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| CN101673696A (en) | 2010-03-17 |
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