CN101672902B - 用于测量磁场的空间分量的磁场传感器装置 - Google Patents
用于测量磁场的空间分量的磁场传感器装置 Download PDFInfo
- Publication number
- CN101672902B CN101672902B CN200910170527.8A CN200910170527A CN101672902B CN 101672902 B CN101672902 B CN 101672902B CN 200910170527 A CN200910170527 A CN 200910170527A CN 101672902 B CN101672902 B CN 101672902B
- Authority
- CN
- China
- Prior art keywords
- magnetic field
- field sensor
- sensor device
- magnetic
- flux
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102008041859.5 | 2008-09-08 | ||
| DE102008041859A DE102008041859A1 (de) | 2008-09-08 | 2008-09-08 | Magnetfeldsensoranordnung zur Messung von räumlichen Komponenten eines magnetischen Feldes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101672902A CN101672902A (zh) | 2010-03-17 |
| CN101672902B true CN101672902B (zh) | 2014-08-13 |
Family
ID=41650599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910170527.8A Expired - Fee Related CN101672902B (zh) | 2008-09-08 | 2009-09-08 | 用于测量磁场的空间分量的磁场传感器装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8421453B2 (enExample) |
| JP (1) | JP5460191B2 (enExample) |
| CN (1) | CN101672902B (enExample) |
| DE (1) | DE102008041859A1 (enExample) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT509725B1 (de) * | 2010-09-01 | 2011-11-15 | Kral Ag | Durchflussmesseinrichtung |
| US8761987B2 (en) * | 2010-10-05 | 2014-06-24 | Checkpoint Llc | Automatic guided vehicle sensor system and method of using same |
| US11506732B2 (en) | 2010-10-20 | 2022-11-22 | Infineon Technologies Ag | XMR sensors with serial segment strip configurations |
| US9000763B2 (en) | 2011-02-28 | 2015-04-07 | Infineon Technologies Ag | 3-D magnetic sensor |
| DE102011086371A1 (de) * | 2011-11-15 | 2013-05-16 | Robert Bosch Gmbh | Steuermodul für einen Antriebsmotor |
| DE102011086368A1 (de) * | 2011-11-15 | 2013-05-16 | Robert Bosch Gmbh | Positionserkennung für einen Läufer eines Antriebsmotors |
| WO2013085547A1 (en) | 2011-12-05 | 2013-06-13 | Advanced Microsensors Corporation | Magnetic field sensing apparatus and methods |
| US9116198B2 (en) | 2012-02-10 | 2015-08-25 | Memsic, Inc. | Planar three-axis magnetometer |
| US9000760B2 (en) * | 2012-02-27 | 2015-04-07 | Everspin Technologies, Inc. | Apparatus and method for resetting a Z-axis sensor flux guide |
| US9244134B2 (en) * | 2013-01-15 | 2016-01-26 | Infineon Technologies Ag | XMR-sensor and method for manufacturing the XMR-sensor |
| US9341684B2 (en) | 2013-03-13 | 2016-05-17 | Plures Technologies, Inc. | Magnetic field sensing apparatus and methods |
| CN103267520B (zh) * | 2013-05-21 | 2016-09-14 | 江苏多维科技有限公司 | 一种三轴数字指南针 |
| DE102013107821A1 (de) * | 2013-07-22 | 2015-01-22 | Sensitec Gmbh | Mehrkomponenten-Magnetfeldsensor |
| DE102013112628A1 (de) | 2013-11-15 | 2015-05-21 | Epcos Ag | Vorrichtung, Anordnung und Verfahren zur Messung einer Stromstärke in einem stromdurchflossenen Primärleiter |
| CN104656045B (zh) | 2013-11-17 | 2018-01-09 | 爱盛科技股份有限公司 | 磁场感测模块、测量方法及磁场感测模块的制作方法 |
| DE102014203317A1 (de) * | 2014-02-25 | 2015-08-27 | Robert Bosch Gmbh | Sensorvorrichtung, Herstellungsverfahren für eine Sensorvorrichtung mit mindestens einem Magnetkern und Verfahren zum Ermitteln einer Feldstärke eines Magnetfelds in mindestens einer Raumrichtung |
| DE102014116953B4 (de) | 2014-11-19 | 2022-06-30 | Sensitec Gmbh | Verfahren und Vorrichtung zur Herstellung einer Magnetfeldsensorvorrichtung, sowie diesbezüglicheMagnetfeldsensorvorrichtung |
| US10247790B2 (en) * | 2015-03-12 | 2019-04-02 | Tdk Corporation | Magnetic sensor |
| US9752877B2 (en) | 2015-04-23 | 2017-09-05 | Apple Inc. | Electronic device having electronic compass with demagnetizing coil and annular flux concentrating yokes |
| WO2017209169A1 (ja) * | 2016-05-31 | 2017-12-07 | 株式会社村田製作所 | 磁気センサ |
| US11647678B2 (en) | 2016-08-23 | 2023-05-09 | Analog Devices International Unlimited Company | Compact integrated device packages |
| US10416244B2 (en) | 2016-09-28 | 2019-09-17 | Arizona Board Of Regents On Behalf Of Arizona State University | Three-dimensional imaging utilizing low frequency magnetic fields |
| US10697800B2 (en) * | 2016-11-04 | 2020-06-30 | Analog Devices Global | Multi-dimensional measurement using magnetic sensors and related systems, methods, and integrated circuits |
| WO2018106053A2 (ko) * | 2016-12-09 | 2018-06-14 | 주식회사 아모센스 | 인덕션렌지용 발열모듈 및 이를 포함하는 인덕션렌지 |
| JP6652108B2 (ja) * | 2017-05-23 | 2020-02-19 | Tdk株式会社 | 磁気センサ |
| US10261138B2 (en) | 2017-07-12 | 2019-04-16 | Nxp B.V. | Magnetic field sensor with magnetic field shield structure and systems incorporating same |
| WO2019035269A1 (ja) * | 2017-08-16 | 2019-02-21 | 株式会社村田製作所 | 磁気センサ |
| US10718825B2 (en) | 2017-09-13 | 2020-07-21 | Nxp B.V. | Stray magnetic field robust magnetic field sensor and system |
| US11628275B2 (en) | 2018-01-31 | 2023-04-18 | Analog Devices, Inc. | Electronic devices |
| US10816363B2 (en) | 2018-02-27 | 2020-10-27 | Nxp B.V. | Angular sensor system and method of stray field cancellation |
| US10670425B2 (en) | 2018-03-30 | 2020-06-02 | Nxp B.V. | System for measuring angular position and method of stray field cancellation |
| US11009562B2 (en) * | 2018-08-03 | 2021-05-18 | Isentek Inc. | Magnetic field sensing apparatus |
| US11486742B2 (en) | 2019-08-16 | 2022-11-01 | Nxp B.V. | System with magnetic field shield structure |
| CN111624525B (zh) * | 2020-05-26 | 2022-06-14 | 中国人民解放军国防科技大学 | 一种利用磁性应力调控抑制磁噪声的一体化三轴磁传感器 |
| US11422167B2 (en) * | 2020-07-17 | 2022-08-23 | Texas Instruments Incorporated | Integrated current sensor with magnetic flux concentrators |
| US11719773B2 (en) | 2021-07-14 | 2023-08-08 | Globalfoundries U.S. Inc. | Magnetic field sensor with MTJ elements arranged in series |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1266189A (zh) * | 1999-03-09 | 2000-09-13 | 易通公司 | 电流探测仪 |
| CN1343889A (zh) * | 2000-08-21 | 2002-04-10 | 桑特隆股份公司 | 检测磁场方向用的传感器 |
| EP1746426A1 (de) * | 2005-07-22 | 2007-01-24 | Sentron Ag | Stromsensor |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2964062B2 (ja) * | 1994-08-31 | 1999-10-18 | 帝国通信工業株式会社 | 微小位置変化量検出器 |
| US6166539A (en) * | 1996-10-30 | 2000-12-26 | Regents Of The University Of Minnesota | Magnetoresistance sensor having minimal hysteresis problems |
| DE10150950C1 (de) | 2001-10-16 | 2003-06-18 | Fraunhofer Ges Forschung | Kompakter vertikaler Hall-Sensor |
| JP4368797B2 (ja) * | 2002-08-01 | 2009-11-18 | メレクシス テクノロジーズ エスエー | 磁場センサ−と磁場センサ−の操作方法 |
| JP2004257995A (ja) * | 2003-02-27 | 2004-09-16 | Asahi Kasei Electronics Co Ltd | 3次元磁気検出装置および半導体装置 |
| JP2006003116A (ja) * | 2004-06-15 | 2006-01-05 | Hitachi Metals Ltd | 磁気センサ |
| WO2006067747A2 (en) * | 2004-12-23 | 2006-06-29 | Koninklijke Philips Electronics N.V. | Method and device for characterization of a magnetic field applied to a magnetic sensor |
| US20090027048A1 (en) | 2005-03-17 | 2009-01-29 | Hideki Sato | Three-Axis Magnetic Sensor and Method for Manufacturing the Same |
| WO2006134520A1 (en) * | 2005-06-13 | 2006-12-21 | Nxp B.V. | Magnetic field sensor device |
| DE102006022336B8 (de) * | 2006-02-28 | 2015-12-31 | Infineon Technologies Ag | Magnetfeldsensor und Sensoranordnung mit demselben |
| JP5500785B2 (ja) * | 2008-05-14 | 2014-05-21 | 新科實業有限公司 | 磁気センサ |
-
2008
- 2008-09-08 DE DE102008041859A patent/DE102008041859A1/de not_active Withdrawn
-
2009
- 2009-09-04 US US12/554,271 patent/US8421453B2/en not_active Expired - Fee Related
- 2009-09-08 CN CN200910170527.8A patent/CN101672902B/zh not_active Expired - Fee Related
- 2009-09-08 JP JP2009206609A patent/JP5460191B2/ja not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1266189A (zh) * | 1999-03-09 | 2000-09-13 | 易通公司 | 电流探测仪 |
| CN1343889A (zh) * | 2000-08-21 | 2002-04-10 | 桑特隆股份公司 | 检测磁场方向用的传感器 |
| CN1303430C (zh) * | 2000-08-21 | 2007-03-07 | 桑特隆股份公司 | 检测磁场方向用的传感器 |
| EP1746426A1 (de) * | 2005-07-22 | 2007-01-24 | Sentron Ag | Stromsensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010066262A (ja) | 2010-03-25 |
| US20100072992A1 (en) | 2010-03-25 |
| DE102008041859A1 (de) | 2010-03-11 |
| US8421453B2 (en) | 2013-04-16 |
| CN101672902A (zh) | 2010-03-17 |
| JP5460191B2 (ja) | 2014-04-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140813 Termination date: 20200908 |