JP5460191B2 - 磁界の空間成分を測定する磁界センサ装置 - Google Patents
磁界の空間成分を測定する磁界センサ装置 Download PDFInfo
- Publication number
- JP5460191B2 JP5460191B2 JP2009206609A JP2009206609A JP5460191B2 JP 5460191 B2 JP5460191 B2 JP 5460191B2 JP 2009206609 A JP2009206609 A JP 2009206609A JP 2009206609 A JP2009206609 A JP 2009206609A JP 5460191 B2 JP5460191 B2 JP 5460191B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- field sensor
- sensor device
- magnetic
- sensors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102008041859.5 | 2008-09-08 | ||
| DE102008041859A DE102008041859A1 (de) | 2008-09-08 | 2008-09-08 | Magnetfeldsensoranordnung zur Messung von räumlichen Komponenten eines magnetischen Feldes |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010066262A JP2010066262A (ja) | 2010-03-25 |
| JP2010066262A5 JP2010066262A5 (enExample) | 2012-08-30 |
| JP5460191B2 true JP5460191B2 (ja) | 2014-04-02 |
Family
ID=41650599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009206609A Expired - Fee Related JP5460191B2 (ja) | 2008-09-08 | 2009-09-08 | 磁界の空間成分を測定する磁界センサ装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8421453B2 (enExample) |
| JP (1) | JP5460191B2 (enExample) |
| CN (1) | CN101672902B (enExample) |
| DE (1) | DE102008041859A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018197661A (ja) * | 2017-05-23 | 2018-12-13 | Tdk株式会社 | 磁気センサ |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT509725B1 (de) * | 2010-09-01 | 2011-11-15 | Kral Ag | Durchflussmesseinrichtung |
| US8761987B2 (en) * | 2010-10-05 | 2014-06-24 | Checkpoint Llc | Automatic guided vehicle sensor system and method of using same |
| US11506732B2 (en) | 2010-10-20 | 2022-11-22 | Infineon Technologies Ag | XMR sensors with serial segment strip configurations |
| US9000763B2 (en) | 2011-02-28 | 2015-04-07 | Infineon Technologies Ag | 3-D magnetic sensor |
| DE102011086371A1 (de) * | 2011-11-15 | 2013-05-16 | Robert Bosch Gmbh | Steuermodul für einen Antriebsmotor |
| DE102011086368A1 (de) * | 2011-11-15 | 2013-05-16 | Robert Bosch Gmbh | Positionserkennung für einen Läufer eines Antriebsmotors |
| WO2013085547A1 (en) | 2011-12-05 | 2013-06-13 | Advanced Microsensors Corporation | Magnetic field sensing apparatus and methods |
| US9116198B2 (en) | 2012-02-10 | 2015-08-25 | Memsic, Inc. | Planar three-axis magnetometer |
| US9000760B2 (en) * | 2012-02-27 | 2015-04-07 | Everspin Technologies, Inc. | Apparatus and method for resetting a Z-axis sensor flux guide |
| US9244134B2 (en) * | 2013-01-15 | 2016-01-26 | Infineon Technologies Ag | XMR-sensor and method for manufacturing the XMR-sensor |
| US9341684B2 (en) | 2013-03-13 | 2016-05-17 | Plures Technologies, Inc. | Magnetic field sensing apparatus and methods |
| CN103267520B (zh) * | 2013-05-21 | 2016-09-14 | 江苏多维科技有限公司 | 一种三轴数字指南针 |
| DE102013107821A1 (de) * | 2013-07-22 | 2015-01-22 | Sensitec Gmbh | Mehrkomponenten-Magnetfeldsensor |
| DE102013112628A1 (de) | 2013-11-15 | 2015-05-21 | Epcos Ag | Vorrichtung, Anordnung und Verfahren zur Messung einer Stromstärke in einem stromdurchflossenen Primärleiter |
| CN104656045B (zh) | 2013-11-17 | 2018-01-09 | 爱盛科技股份有限公司 | 磁场感测模块、测量方法及磁场感测模块的制作方法 |
| DE102014203317A1 (de) * | 2014-02-25 | 2015-08-27 | Robert Bosch Gmbh | Sensorvorrichtung, Herstellungsverfahren für eine Sensorvorrichtung mit mindestens einem Magnetkern und Verfahren zum Ermitteln einer Feldstärke eines Magnetfelds in mindestens einer Raumrichtung |
| DE102014116953B4 (de) | 2014-11-19 | 2022-06-30 | Sensitec Gmbh | Verfahren und Vorrichtung zur Herstellung einer Magnetfeldsensorvorrichtung, sowie diesbezüglicheMagnetfeldsensorvorrichtung |
| US10247790B2 (en) * | 2015-03-12 | 2019-04-02 | Tdk Corporation | Magnetic sensor |
| US9752877B2 (en) | 2015-04-23 | 2017-09-05 | Apple Inc. | Electronic device having electronic compass with demagnetizing coil and annular flux concentrating yokes |
| WO2017209169A1 (ja) * | 2016-05-31 | 2017-12-07 | 株式会社村田製作所 | 磁気センサ |
| US11647678B2 (en) | 2016-08-23 | 2023-05-09 | Analog Devices International Unlimited Company | Compact integrated device packages |
| US10416244B2 (en) | 2016-09-28 | 2019-09-17 | Arizona Board Of Regents On Behalf Of Arizona State University | Three-dimensional imaging utilizing low frequency magnetic fields |
| US10697800B2 (en) * | 2016-11-04 | 2020-06-30 | Analog Devices Global | Multi-dimensional measurement using magnetic sensors and related systems, methods, and integrated circuits |
| WO2018106053A2 (ko) * | 2016-12-09 | 2018-06-14 | 주식회사 아모센스 | 인덕션렌지용 발열모듈 및 이를 포함하는 인덕션렌지 |
| US10261138B2 (en) | 2017-07-12 | 2019-04-16 | Nxp B.V. | Magnetic field sensor with magnetic field shield structure and systems incorporating same |
| WO2019035269A1 (ja) * | 2017-08-16 | 2019-02-21 | 株式会社村田製作所 | 磁気センサ |
| US10718825B2 (en) | 2017-09-13 | 2020-07-21 | Nxp B.V. | Stray magnetic field robust magnetic field sensor and system |
| US11628275B2 (en) | 2018-01-31 | 2023-04-18 | Analog Devices, Inc. | Electronic devices |
| US10816363B2 (en) | 2018-02-27 | 2020-10-27 | Nxp B.V. | Angular sensor system and method of stray field cancellation |
| US10670425B2 (en) | 2018-03-30 | 2020-06-02 | Nxp B.V. | System for measuring angular position and method of stray field cancellation |
| US11009562B2 (en) * | 2018-08-03 | 2021-05-18 | Isentek Inc. | Magnetic field sensing apparatus |
| US11486742B2 (en) | 2019-08-16 | 2022-11-01 | Nxp B.V. | System with magnetic field shield structure |
| CN111624525B (zh) * | 2020-05-26 | 2022-06-14 | 中国人民解放军国防科技大学 | 一种利用磁性应力调控抑制磁噪声的一体化三轴磁传感器 |
| US11422167B2 (en) * | 2020-07-17 | 2022-08-23 | Texas Instruments Incorporated | Integrated current sensor with magnetic flux concentrators |
| US11719773B2 (en) | 2021-07-14 | 2023-08-08 | Globalfoundries U.S. Inc. | Magnetic field sensor with MTJ elements arranged in series |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2964062B2 (ja) * | 1994-08-31 | 1999-10-18 | 帝国通信工業株式会社 | 微小位置変化量検出器 |
| US6166539A (en) * | 1996-10-30 | 2000-12-26 | Regents Of The University Of Minnesota | Magnetoresistance sensor having minimal hysteresis problems |
| US6175229B1 (en) * | 1999-03-09 | 2001-01-16 | Eaton Corporation | Electrical current sensing apparatus |
| JP4936299B2 (ja) * | 2000-08-21 | 2012-05-23 | メレクシス・テクノロジーズ・ナムローゼフェンノートシャップ | 磁場方向検出センサ |
| DE10150950C1 (de) | 2001-10-16 | 2003-06-18 | Fraunhofer Ges Forschung | Kompakter vertikaler Hall-Sensor |
| JP4368797B2 (ja) * | 2002-08-01 | 2009-11-18 | メレクシス テクノロジーズ エスエー | 磁場センサ−と磁場センサ−の操作方法 |
| JP2004257995A (ja) * | 2003-02-27 | 2004-09-16 | Asahi Kasei Electronics Co Ltd | 3次元磁気検出装置および半導体装置 |
| JP2006003116A (ja) * | 2004-06-15 | 2006-01-05 | Hitachi Metals Ltd | 磁気センサ |
| WO2006067747A2 (en) * | 2004-12-23 | 2006-06-29 | Koninklijke Philips Electronics N.V. | Method and device for characterization of a magnetic field applied to a magnetic sensor |
| US20090027048A1 (en) | 2005-03-17 | 2009-01-29 | Hideki Sato | Three-Axis Magnetic Sensor and Method for Manufacturing the Same |
| WO2006134520A1 (en) * | 2005-06-13 | 2006-12-21 | Nxp B.V. | Magnetic field sensor device |
| EP1746426B1 (de) * | 2005-07-22 | 2019-03-06 | Melexis Technologies NV | Stromsensor |
| DE102006022336B8 (de) * | 2006-02-28 | 2015-12-31 | Infineon Technologies Ag | Magnetfeldsensor und Sensoranordnung mit demselben |
| JP5500785B2 (ja) * | 2008-05-14 | 2014-05-21 | 新科實業有限公司 | 磁気センサ |
-
2008
- 2008-09-08 DE DE102008041859A patent/DE102008041859A1/de not_active Withdrawn
-
2009
- 2009-09-04 US US12/554,271 patent/US8421453B2/en not_active Expired - Fee Related
- 2009-09-08 CN CN200910170527.8A patent/CN101672902B/zh not_active Expired - Fee Related
- 2009-09-08 JP JP2009206609A patent/JP5460191B2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018197661A (ja) * | 2017-05-23 | 2018-12-13 | Tdk株式会社 | 磁気センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010066262A (ja) | 2010-03-25 |
| US20100072992A1 (en) | 2010-03-25 |
| DE102008041859A1 (de) | 2010-03-11 |
| CN101672902B (zh) | 2014-08-13 |
| US8421453B2 (en) | 2013-04-16 |
| CN101672902A (zh) | 2010-03-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5460191B2 (ja) | 磁界の空間成分を測定する磁界センサ装置 | |
| CN104749536B (zh) | 器件、磁传感器器件以及方法 | |
| JP2010066262A5 (enExample) | ||
| US8766623B2 (en) | Magnetic-field sensor including a plurality of magnetoresistive sensor elements and method of calibrating a magnetic-field sensor | |
| US11313923B2 (en) | Method for measuring a magnetic field using a magnetic field sensor device having a second magnetic field sensor between parts of a first magnetic field sensor | |
| US9297635B2 (en) | Magnetic sensor system including two detection circuits | |
| JP7246400B2 (ja) | 磁場角度センサに関する角度誤差を低減するためのシステム及び方法 | |
| JP2005534199A (ja) | Gmrセンサエレメントおよびgmrセンサエレメントの使用 | |
| KR100606584B1 (ko) | 바이어스층의 선택적 자화 방향을 갖는 자기 저항 센서 소자 | |
| US11448659B2 (en) | AMR speed and direction sensor for use with magnetic targets | |
| JP2016517952A (ja) | 磁気センシング装置及びその磁気誘導方法、製造プロセス | |
| CN109655767B (zh) | 一种集成磁结构 | |
| JP2017219539A (ja) | 一体化された磁場コンセントレータを有する磁場センサ | |
| JP2010527454A (ja) | 直線運動又は回転運動を非接触に検出するための装置 | |
| JP2014182096A (ja) | 磁気センサ | |
| US7602176B2 (en) | AMR sensor element for angle measurement | |
| US10006968B2 (en) | XMR sensor device | |
| JP2009052963A (ja) | 磁気ベクトル分布測定プローブ | |
| CN214585084U (zh) | 一种磁传感器及基于磁传感器的无损检测装置 | |
| JP2006145323A (ja) | 回転角度検出装置 | |
| JP2007516437A (ja) | マグネットセンサ装置 | |
| TW202045947A (zh) | 磁場感測裝置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20101227 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120712 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120712 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130517 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130527 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130826 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130829 |
|
| RD13 | Notification of appointment of power of sub attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7433 Effective date: 20131015 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20131016 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131126 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20131216 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140114 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5460191 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |