CN101661220B - Liquid crystal display panel and mask plate - Google Patents
Liquid crystal display panel and mask plate Download PDFInfo
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- CN101661220B CN101661220B CN2008101191369A CN200810119136A CN101661220B CN 101661220 B CN101661220 B CN 101661220B CN 2008101191369 A CN2008101191369 A CN 2008101191369A CN 200810119136 A CN200810119136 A CN 200810119136A CN 101661220 B CN101661220 B CN 101661220B
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Abstract
The invention relates to a liquid crystal display panel and a mask plate, wherein the liquid crystal display panel comprises an array substrate and a color film substrate; alignment precision measurement check marks are formed in a pixel area of an effective area of the array substrate; a black matrix is formed at the position corresponding to the alignment precision measurement check marks on the color film substrate; and the black matrix is used for shielding the alignment precision measurement check marks. The mask plate comprises a reusable area and a non-reusable area, and the alignment precision measurement check marks are set in the effective areas of the reusable area and a non-reusable area. The liquid crystal display panel and the mask plate effectively solve problems caused by poor alignments so that the alignment precision of a Stitch area can be controlled in a required range, and the adverse problems of a thin-film transistor liquid crystal display (TFT-LCD) are avoided.
Description
Technical field
The present invention relates to liquid crystal display and make the field, relate in particular to a kind of panel of LCD and mask plate.
Background technology
Along with Thin Film Transistor-LCD (Thin Film Transistor-Liquid Crystal Display, hereinafter to be referred as: the TFT-LCD) fast development of technology, the size of TFT-LCD panel also constantly increases, the producer of each TFT-LCD furnishes a huge amount of money for to build new advanced lines production line one after another, to produce larger sized panel.But, a newly-built new production line, the production line of advanced lines more particularly, need huge investment, and has very large risk, therefore, become an effective method that addresses the above problem in present production line exploitation and the panel of part producing large-size, as shown in Figure 1, produce a synoptic diagram of large-size panel for adopting present production line, the method is specially: utilize the mask plate (Mask) of several reduced sizes to carry out repeatedly substep exposure, form the panel of large-size, again by certain design with arrange to realize the function of large-size panel.
Although adopt the method for repeatedly substep exposure can produce the panel of large-size at low production line from generation to generation; but the docking zone (zones shown among Fig. 1 10) in the double exposure zone; the series of problems that exceeds standard and cause by sewing up docking (Stitch) and interlayer covering (Overlay) often can occur, this also is the technical difficulty that is difficult to break through all the time.As shown in Figure 2, produce another synoptic diagram of large-size panel for adopting present production line, the key of its problem is that general mask plate all is arranged at the alignment mark in the technique (Mark) (representing with the star among Fig. 2) and aligning accuracy measurement check mark (representing with the triangle among Fig. 2) outside effective (Active) zone.For the less panel of size, because the formation of panel does not need to adopt mask plate to carry out repeatedly substep exposure, in technological process, its aligning accuracy is more easy to control within the scope that designing institute needs; But the panel for the large-size that adopts mask plate to form through repeatedly exposing step by step, because the alignment mark of mask plate and aligning accuracy are measured check mark and are arranged at outside the effective coverage, also be formed at outside the effective coverage so the alignment mark of large-size panel and aligning accuracy are measured check mark, can not guarantee the effective coverage that the large-size panel is all like this, the aligning accuracy that particularly adopts mask plate to carry out the docking zone of substep exposure is controlled within the needed scope, and can't carry out aligning accuracy inspection and control to this type of zone, cause TFT-LCD bad problem to occur.
Summary of the invention
The object of the present invention is to provide a kind of panel of LCD and mask plate, so that the aligning accuracy of effective coverage is controlled within the needed scope, avoid TFT-LCD bad problem to occur.
The invention provides a kind of mask plate, comprise and reuse zone and the non-zone of reusing, reuse the zone and non-reusing is provided with aligning accuracy measurement check mark in the regional effective coverage described.
The invention provides a kind of panel of LCD, comprise array base palte and color membrane substrates, in the pixel region of described array base palte effective coverage, be formed with aligning accuracy and measure check mark, measure position corresponding to check mark with described aligning accuracy and be formed with black matrix on described color membrane substrates, described black matrix is used for blocking described aligning accuracy and measures check mark.
The present invention is provided with the mask plate that aligning accuracy is measured check mark by adopting in the effective coverage, in the pixel region of panel of LCD, form aligning accuracy and measured check mark, effectively solved bad by contraposition and problem that cause, the aligning accuracy that has guaranteed the effective coverage that the large-size panel is all is controlled in the needed scope, has avoided TFT-LCD bad problem to occur.
Description of drawings
Fig. 1 is for adopting present production line to produce a synoptic diagram of large-size panel;
Fig. 2 is for adopting present production line to produce another synoptic diagram of large-size panel;
Fig. 3 is the synoptic diagram of mask plate one embodiment of the present invention;
Fig. 4 is the synoptic diagram of array base palte among panel of LCD one embodiment of the present invention;
Fig. 5 is the synoptic diagram of array base palte one dot structure among the panel of LCD embodiment of the present invention;
Fig. 6 is the synoptic diagram of color membrane substrates one dot structure among the panel of LCD embodiment of the present invention;
Fig. 7 is the synoptic diagram of another dot structure of array base palte among the panel of LCD embodiment of the present invention.
Embodiment
Below by drawings and Examples, technical scheme of the present invention is described in further detail.
As shown in Figure 3, synoptic diagram for mask plate one embodiment of the present invention, this mask plate comprises Three regions, be respectively zone 21, zone 22 and zone 23, wherein zone 22 is for reusing the zone, be repeatedly used in a photoetching process, zone 21 and zone 23 are the non-zone of reusing, and only use once in a photoetching process.Zone 21 comprises effective coverage (among the figure shown in the A) and non-effective zone (among the figure shown in the A '), zone 22 comprises effective coverage (among the figure shown in the B) and non-effective zone (among the figure shown in the B '), and regional 23 comprise effective coverage (among the figure shown in the C) and non-effective zone (among the figure shown in the C ').
Compared with prior art, present embodiment not only is provided with alignment mark (representing with star) and aligning accuracy and measures check mark (representing with triangle) in non-effective regional A ', B ' and C ', and in reusing zone 22 effective coverage B and non-effective coverage A, the C that reuses zone 21,23, be provided with aligning accuracy and measure check mark, also defined this aligning accuracy and measured check mark in the exact position on the mask plate and adopting exact position on the panel that this mask plate forms.
In the present embodiment, aligning accuracy is measured the optional position that check mark can be arranged on A, B and C, wherein more excellent embodiment is: in the non-right hand edge zone of reusing zone 21 effective coverage A, the non-left hand edge zone of reusing the effective coverage C in zone 23, the left hand edge zone of effective coverage B of reusing zone 22 and right hand edge zone aligning accuracy is set and measures check mark, aligning accuracy namely is set in gray area shown in Figure 3 measures check mark.
The number of above-mentioned aligning accuracy measurement check mark can be for more than one, and A, B, C can have more than one aligning accuracy to measure check mark on each zone.Divide according to function, aligning accuracy is measured check mark and can be divided into overall tilt mark (Total Pitch Mark), sew up docking mark (StitchMark) and interlayer overlay marks (Overlay Mark).
In sum, the present embodiment difference with the prior art is to be provided with aligning accuracy to measure check mark in the effective coverage of mask plate, like this, when adopting this mask plate to form the array base palte of large-size panel, in the effective coverage of array base palte, also form aligning accuracy and measured check mark, the aligning accuracy that has guaranteed the effective coverage that the large-size panel is all is controlled in the needed scope, has avoided TFT-LCD bad problem to occur.
The embodiment of display panels of the present invention specifically comprises array base palte and color membrane substrates, and wherein array base palte adopts mask plate manufacturing shown in Figure 3 to form.As shown in Figure 4, synoptic diagram for array base palte among panel of LCD one embodiment of the present invention, measure check mark owing to be provided with aligning accuracy in the effective coverage of mask plate, also be formed with aligning accuracy in the effective coverage of the array base palte that is then formed by this mask plate manufacturing and measure check mark.Specifically, array base palte shown in Figure 4 is formed through repeatedly exposing step by step by mask plate shown in Figure 3, the effective coverage of this array base palte comprises a plurality of exposure areas of being exposed step by step and being formed by mask plate, wherein exposure area a is formed by the regional A single exposure among Fig. 3, exposure area c is formed by the regional C single exposure among Fig. 3, exposure area b is formed by the regional B multiexposure, multiple exposure among Fig. 3, dotted line represents the zone of repeating to form, and the number of times of repetition is different because of the design of the size of panel and mask plate.
As shown in Figure 4, the array base palte of present embodiment comprises the exposure area that a plurality of substep exposures form, zone 20 be that the docking of adjacent per two exposure areas is regional among the figure, if the mask plate that present embodiment uses is above-mentioned more excellent embodiment, namely be provided with aligning accuracy and measure check mark in gray area shown in Figure 3, the array base palte that is then formed by this mask plate manufacturing has formed aligning accuracy and has measured check mark in zone 20.
In order not affect the performance of panel, the present invention specifically is formed with aligning accuracy and measures check mark in the pixel region of array base palte effective coverage, measure position corresponding to check mark with aligning accuracy and be formed with black matrix on color membrane substrates, this black matrix is used for blocking aligning accuracy and measures check mark.
The below's dot structure that aligning accuracy is measured check mark 33 places in Fig. 4 is further introduced technical scheme of the present invention as example.
As shown in Figure 5, synoptic diagram for array base palte one dot structure among the panel of LCD embodiment of the present invention, this dot structure comprises TFT structure 31, pixel region 32 and aligning accuracy measurement check mark 33, wherein adopts mask plate of the present invention that aligning accuracy is measured check mark 33 and is formed in the pixel region 32.The position of aligning accuracy measurement check mark 33 is not limited only to position shown in Figure 5 among the present invention, can also be arranged on other positions in the pixel region 32.
As shown in Figure 6, synoptic diagram for color membrane substrates one dot structure among the panel of LCD embodiment of the present invention, this dot structure comprises black matrix and pixel region 42, wherein black matrix be included in array base palte on the black matrix 41 that forms of TFT structure 31 correspondence positions and with array base palte on aligning accuracy measure the black matrix 43 that position corresponding to check mark 33 forms, black matrix 43 is used for blocking aligning accuracy and measures check mark 33.
Further, aligning accuracy is measured check mark and can be formed on the optional position of pixel region in the present embodiment, but need know this exact position of aligning accuracy measurement check mark on panel.The number that the aligning accuracy of present embodiment is measured check mark can for more than one, be arranged in the above pixel region.The related aligning accuracy of present embodiment is measured check mark and can be divided into overall tilt mark (Total Pitch Mark), sew up docking mark (Stitch Mark) and interlayer overlay marks (OverlayMark) by function.Wherein, the aligning accuracy that function is identical is measured check mark and can be arranged in the pixel region, also can be arranged in a plurality of pixel regions; The aligning accuracy that function is different is measured check mark and can be arranged in the pixel region, also can be arranged in a plurality of pixel regions.As shown in Figure 7, be the synoptic diagram of another dot structure of array base palte among the panel of LCD embodiment of the present invention, wherein aligning accuracy measurement check mark 51 and 52 is arranged in the pixel region.The function of these two aligning accuracy measurement check marks can be identical, also can be different.
Present embodiment is provided with the mask plate that aligning accuracy is measured check mark by adopting in the effective coverage, in the pixel region of panel of LCD effective coverage, form aligning accuracy and measured check mark, especially form aligning accuracy in the docking zone of substep exposure and measure check mark, guaranteed that all effective coverages of large-size panel, the particularly aligning accuracy in the docking zone of substep exposure are controlled in the needed scope, effectively solved bad by contraposition and problem that cause has avoided TFT-LCD bad problem to occur.
Description below by rear process inspection flow process, further specify mask plate of the present invention and panel of LCD the aligning accuracy in docking (Stitch) zone of substep exposure can be controlled within the needed scope, effectively solve the bad problem that TFT-LCD occurs.After producing panel of LCD, adopt following check process to control aligning accuracy, specifically comprise the steps:
Step 1, when the rear process inspection of mask lithography technique, use specific equipment, adopting certain method that the aligning accuracy on the panel of LCD is measured check mark measures, obtain measurement result, be respectively between the adjacent area of substep exposure position offset and and benchmark mask lithography technique between the contraposition side-play amount;
Step 2, the measurement result obtained in the step 1 and desired value and the designated value of design are compared, if in the scope that error allows, then do not need the technological parameter of mask to adjust, process inspection flow process after finishing; If exceed error range, then the technological parameter of this mask is adjusted, again carry out mask lithography technique, execution in step 1.
By above-mentioned rear process inspection flow process, guaranteed that the aligning accuracy in docking (Stitch) zone of exposure can be controlled within the needed scope step by step, effectively solve the bad problem that TFT-LCD occurs.
It should be noted that at last: above embodiment only in order to technical scheme of the present invention to be described, is not intended to limit; Although with reference to previous embodiment the present invention is had been described in detail, those of ordinary skill in the art is to be understood that: it still can be made amendment to the technical scheme that aforementioned each embodiment puts down in writing, and perhaps part technical characterictic wherein is equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution break away from the spirit and scope of various embodiments of the present invention technical scheme.
Claims (4)
1. panel of LCD that adopts mask plate to make, comprise array base palte and color membrane substrates, it is characterized in that: in the pixel region of described array base palte effective coverage, be formed with aligning accuracy and measure check mark, measure position corresponding to check mark with described aligning accuracy and be formed with black matrix on described color membrane substrates, described black matrix is used for blocking described aligning accuracy and measures check mark; Described aligning accuracy is measured check mark and is used for guaranteeing the step by step aligning accuracy in the docking zone of exposure;
It is to adopt described mask plate to form that the aligning accuracy of described array base palte is measured check mark, described mask plate comprises reuses zone and the non-zone of reusing, be provided with aligning accuracy in zone and the non-effective coverage of reusing the zone and measure check mark described reusing, described aligning accuracy is measured the aligning accuracy in the docking zone that check mark is used for guaranteeing that substep exposes;
The described aligning accuracy that is provided with in reusing zone and the non-effective coverage of reusing the zone is measured check mark and is specially: in a non-right hand edge zone of reusing the effective coverage in zone, there is aligning accuracy measurement check mark in another non-left hand edge zone of reusing the effective coverage in zone, left hand edge zone and right hand edge region division of reusing the effective coverage in zone;
The number that described aligning accuracy is measured check mark is more than one; Described aligning accuracy is measured check mark and is comprised the overall tilt mark, sews up docking mark and interlayer overlay marks.
2. panel of LCD according to claim 1, it is characterized in that, the effective coverage of described array base palte comprises a plurality of exposure areas of being exposed step by step and being formed by described mask plate, is formed with aligning accuracy and measures check mark in the pixel region in the docking zone of per two adjacent exposure areas.
3. panel of LCD according to claim 1 is characterized in that, the number that described aligning accuracy is measured check mark is more than one, is arranged in the above pixel region.
4. panel of LCD according to claim 3 is characterized in that, described aligning accuracy is measured check mark and comprised the overall tilt mark, sews up docking mark and interlayer overlay marks.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101191369A CN101661220B (en) | 2008-08-27 | 2008-08-27 | Liquid crystal display panel and mask plate |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2008101191369A CN101661220B (en) | 2008-08-27 | 2008-08-27 | Liquid crystal display panel and mask plate |
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| Publication Number | Publication Date |
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| CN101661220A CN101661220A (en) | 2010-03-03 |
| CN101661220B true CN101661220B (en) | 2013-03-13 |
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| CN2008101191369A Active CN101661220B (en) | 2008-08-27 | 2008-08-27 | Liquid crystal display panel and mask plate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103176306A (en) * | 2013-03-22 | 2013-06-26 | 京东方科技集团股份有限公司 | Colorized film substrate, manufacturing method thereof, liquid crystal panel and display device |
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| JP5306391B2 (en) * | 2011-03-02 | 2013-10-02 | 株式会社東芝 | Photo mask |
| CN102832109A (en) * | 2011-06-15 | 2012-12-19 | 广东中显科技有限公司 | Method for strengthening thin film in flexible thin film transistor manufacturing process |
| CN102650819B (en) * | 2011-08-03 | 2014-07-02 | 京东方科技集团股份有限公司 | Photo mask and positioning method of photo mask |
| CN102867823B (en) * | 2012-09-27 | 2015-05-27 | 合肥京东方光电科技有限公司 | Array substrate and manufacturing method and display device thereof |
| CN103366648B (en) * | 2013-07-24 | 2015-06-17 | 京东方科技集团股份有限公司 | Substrate, display screen, spliced screen and alignment method for spliced screen |
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| CN104570611B (en) * | 2013-10-21 | 2016-06-08 | 合肥京东方光电科技有限公司 | Mask plate and improvement splicing exposure nurse thereof draw the method for phenomenon |
| CN103744214B (en) * | 2013-12-31 | 2016-08-17 | 深圳市华星光电技术有限公司 | A kind of exposure method of the glass substrate of liquid crystal display |
| CN104317158B (en) * | 2014-11-14 | 2018-05-22 | 京东方科技集团股份有限公司 | A kind of mask plate, mask plate group, color membrane substrates and display device |
| CN105759564B (en) * | 2016-03-17 | 2020-04-17 | 京东方科技集团股份有限公司 | Mask plate and manufacturing method thereof |
| KR20180078409A (en) * | 2016-12-29 | 2018-07-10 | 엘지디스플레이 주식회사 | Display Device and Method for Manufacturing thereof |
| CN106502060B (en) * | 2017-01-03 | 2018-09-18 | 京东方科技集团股份有限公司 | A kind of display base plate, display panel and display device |
| CN107195639B (en) | 2017-06-27 | 2020-04-03 | 京东方科技集团股份有限公司 | Preparation method of array substrate mother board, array substrate mother board and detection method |
| CN107505754A (en) * | 2017-09-20 | 2017-12-22 | 深圳市华星光电技术有限公司 | Liquid crystal display panel and liquid crystal display |
| CN110716359A (en) * | 2019-10-14 | 2020-01-21 | 深圳市华星光电技术有限公司 | Array substrate, manufacturing method thereof and alignment precision detection method |
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| Publication number | Publication date |
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| CN101661220A (en) | 2010-03-03 |
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Effective date of registration: 20201201 Address after: 215200 No. 1700, Wujiang economic and Technological Development Zone, Suzhou, Jiangsu, Zhongshan North Road Patentee after: Gaochuang (Suzhou) Electronics Co.,Ltd. Patentee after: BOE TECHNOLOGY GROUP Co.,Ltd. Address before: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee before: BOE TECHNOLOGY GROUP Co.,Ltd. Patentee before: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |