CN101650163B - 数字干涉条纹分析方法及光学元件面形检测装置 - Google Patents
数字干涉条纹分析方法及光学元件面形检测装置 Download PDFInfo
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Publication number | Priority date | Publication date | Assignee | Title |
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CN102645178B (zh) * | 2011-02-18 | 2015-01-21 | 上海微电子装备有限公司 | 基于双频干涉的面型测量装置及方法 |
CN102645179B (zh) * | 2011-02-18 | 2015-01-21 | 上海微电子装备有限公司 | 一种基于双频干涉的面型测量装置及方法 |
JP5818475B2 (ja) * | 2011-03-24 | 2015-11-18 | 富士フイルム株式会社 | 画像処理装置、画像処理方法並びに画像処理プログラム |
CN103322940B (zh) * | 2013-07-09 | 2015-09-09 | 河北工程大学 | 一种获取三维形貌显微图像的方法 |
CN104006765B (zh) * | 2014-03-14 | 2016-07-13 | 中国科学院上海光学精密机械研究所 | 单幅载频干涉条纹相位提取方法及检测装置 |
FR3022346B1 (fr) * | 2014-06-16 | 2022-10-07 | Commissariat Energie Atomique | Dispositif et procede de caracterisation d'un faisceau de lumiere |
CN104634272A (zh) * | 2015-01-08 | 2015-05-20 | 常州大学 | 一种基于单幅白光干涉图样的等高线与三维形貌再现的方法 |
CN105021137B (zh) * | 2015-06-30 | 2017-11-07 | 西安空间无线电技术研究所 | 一种快速转镜动态面形的测试系统 |
CN107664514A (zh) * | 2017-09-30 | 2018-02-06 | 中国科学院长春光学精密机械与物理研究所 | 一种多幅干涉成像光学系统 |
CN108051184A (zh) * | 2017-11-30 | 2018-05-18 | 中国兵器科学研究院宁波分院 | 一种扩束准直光检测方法 |
CN108225737A (zh) * | 2017-12-06 | 2018-06-29 | 天津大学 | 一种新型光学透镜测量方法 |
CN108267082B (zh) * | 2017-12-26 | 2020-07-14 | 华南师范大学 | 一种双通道同时空域和时域偏振相移干涉的方法及系统 |
CN109916332B (zh) * | 2019-04-01 | 2020-09-08 | 哈尔滨理工大学 | 一种带载频单幅干涉条纹相位重构方法 |
CN112697259B (zh) * | 2020-12-31 | 2022-04-08 | 福州大学 | 基于组合条纹的梁结构模态振型测量装置及方法 |
CN112857208B (zh) * | 2021-03-09 | 2022-12-16 | 哈尔滨工业大学 | 基于高速相机的单光束三自由度激光干涉仪 |
CN113281013B (zh) * | 2021-05-25 | 2022-08-05 | 华中科技大学 | 一种用于真空环境下测量光学元件面形的装置及方法 |
CN113405490A (zh) * | 2021-06-17 | 2021-09-17 | 西安应用光学研究所 | 高分辨率二维快速控制反射镜动态角度测量装置 |
CN116402819B (zh) * | 2023-06-08 | 2023-09-12 | 季华实验室 | 类镜面缺陷检测方法、装置、电子设备及存储介质 |
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Application publication date: 20100217 Assignee: ZHEJIANG HUADONG PHOTOELECTRIC INSTRUMENT CO., LTD. Assignor: No.205 Inst., Chinese Ordnance Industries Contract record no.: 2014330000037 Denomination of invention: Method for analyzing digital interference fringe and device for detecting optical component surface shape Granted publication date: 20110316 License type: Exclusive License Record date: 20140314 |
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Application publication date: 20100217 Assignee: ZHEJIANG HUADONG PHOTOELECTRIC INSTRUMENT CO., LTD. Assignor: No.205 Inst., Chinese Ordnance Industries Contract record no.: 2014330000037 Denomination of invention: Method for analyzing digital interference fringe and device for detecting optical component surface shape Granted publication date: 20110316 License type: Exclusive License Record date: 20140314 |
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