CN101643194A - Method for manufacturing micro pattern with inverted trapezoidal cross section by using ice template - Google Patents
Method for manufacturing micro pattern with inverted trapezoidal cross section by using ice template Download PDFInfo
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- CN101643194A CN101643194A CN200910067486A CN200910067486A CN101643194A CN 101643194 A CN101643194 A CN 101643194A CN 200910067486 A CN200910067486 A CN 200910067486A CN 200910067486 A CN200910067486 A CN 200910067486A CN 101643194 A CN101643194 A CN 101643194A
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Abstract
The invention provides a method for manufacturing a micro pattern with an inverted trapezoidal cross section by using an ice template, which comprises the following steps: using a micro molding methodin the soft printing for manufacturing an ice film micro pattern with a forward trapezoidal cross section on a substrate surface; soaking the ice film micro pattern in a water-insoluble polymer organic solution, wherein in the process of volatilization of an organic solvent, removing the moisture on the surface of the ice film micro pattern by the polymer organic solution, and obtaining a polymersolution film pattern which is complemented with the ice film pattern; and finally, melting the ice into water and volatilizing, and forming a polymer film micro pattern with the inverted trapezoidalcross section, which is complemented with the three-dimensional shape of the ice film micro pattern, on the substrate surface. The method uses simple soft printing and refrigerating equipment and hassimple processes. The ice template which is formed by pure water is used as the complementary structure of the inverted trapezoidal structure for pattern transfer to obtain stronger universality fordielectric materials which can be patterned, the ice template can be removed easily, and the pollution on the environment is effectively reduced. The pattern, the precision of which is 5 micrometers,is obtained, and the machining precision is higher.
Description
Technical field
The invention belongs to and adopting ice template making cross section is the little method of patterning of inverted trapezoidal structure.
Background technology
Organic light emitting display is owing to characteristics such as flexible, light-duty, low energy consumption, wide visual angle are called as flat panel display of future generation after liquid crystal display.When being applied to Organic Light Emitting Diode in the FPD, need carry out micro-patterning to diode it is arranged in matrix form, this just need carry out patterning to the metallic cathode of Organic Light Emitting Diode.In order to carry out the patterning of metallic cathode at the organic light emission laminar surface and to protect its performance, need to select suitable micro-patterning method.
Prior art generally adopts bushing to be placed between evaporation source and deposition substrate, directly realizes the patterning of metallic cathode then by evaporation.This method technology is simple, can protect the performance of organic luminous layer, but be subjected to the bushing precision to limit this method patterning precision lower.Also have and adopt photoetching method to make little pattern (undercut structure) with inverted trapezoidal structure, the cross section of this pattern is inverted trapezoidal, be structure wide at the top and narrow at the bottom, can realize the separation and the patterning of metallic cathode as insulated column in the metallic cathode vacuum deposition process.The 1075th page of " advanced material " the 15th volume of being published by Wiley publishing house on July 4th, 2003 reported the article of people such as Korea S Lee Hong H. " fall the making of trapezoidal three-dimensional structure and the application in Organic Light Emitting Diode thereof " by name, use the method for the little molding of capillary in the soft printing in the literary composition, made the inverted trapezoidal structure of epoxy resin and be used for the separation and the patterning of metallic cathode.The epoxy resin inverted trapezoidal structure that the little molding of capillary is made, though compare the requirement that has overcome expensive device and severe rugged environment with photoetching method, but this method need at first obtain inverted trapezoidal structure as template, secondly need therefore qualification have been proposed to the strong material of substrate adhesion as patterned media to processing method.
Summary of the invention
In order to overcome the shortcoming of prior art, the invention provides and adopting ice template making cross section is the little method of patterning of inverted trapezoidal structure.This pattern can be used for realizing as insulated column in the demonstration of organic electroluminescent matrix the separation and the patterning of metallic cathode.
At first adopt the method for the little molding of capillary in the soft printing, make the little pattern of ina thin film at substrate surface with trapezoid cross section.In then that its dipping and water is the not miscible polymer organic solution, the organic solvent in the polymer organic solution volatilizees prior to water owing to stronger volatility; In the organic solvent volatilization process, polymer organic solution obtains the polymer solution Thinfilm pattern with the complementation of ina thin film pattern at the little patterned surfaces wetting removal of ina thin film.Ice is fused into water and volatilization at last, stays the little pattern of the thin polymer film with trapezoidal cross-section that has with the complementation of the little pattern three-dimensional appearance of ina thin film at substrate surface.
Adopting ice template to make cross section is the little method of patterning of inverted trapezoidal structure, and its step and condition are as follows:
1), as shown in Figure 1, selecting the surfacial pattern cross section is the dimethyl silicone polymer soft template 2 of trapezoid structure, and dimethyl silicone polymer soft template 2 is placed in the substrate 1, forms capillary grooves 3 between dimethyl silicone polymer soft template 2 and the substrate 1; Water droplet is added to capillary grooves 3 ports, treats water after flowing to capillary grooves 3 under the effect of capillary force, with dimethyl silicone polymer soft template 2 and substrate 1 be placed on together subzero 20 ℃ to subzero 5 ℃ refrigerator, make water cooling form ice; Substrate 1 is glass or the glass with indium tin oxide plated film;
2), dimethyl silicone polymer soft template 2 is peeled off from substrate 1, obtain the substrate 1 that the surface has ina thin film pattern 4, then substrate 1 is impregnated into mass concentration and is in the organic solution 5 of polymer of 0.2%-5%, then take out; Polymer is polymethyl methacrylate, polystyrene, polyethylene or polypropylene; Solvent is chloroform, carbon tetrachloride, carbon disulfide, trichloro-ethylene, sym-dichloroethylene, acetylene tetrachloride or dichloroethanes;
3), with step 2) substrate 1 that obtains after handling is positioned in the room temperature, makes the water volatilization of organic solvent and ice template fusing, obtains having down the little pattern 6 of thin polymer film of trapezoidal cross-section in the substrate 1.
Beneficial effect: compare with photoetching technique, method of the present invention only need be used simple soft printing and freezing equipment, and processing technology is simpler.Owing to adopted ice template that pure water forms to carry out the pattern transmission in the processing as the complementary structure of inverted trapezoidal structure, therefore stronger to the dielectric material universality of patternable, and ice template can remove easilier, and effectively reduce pollution to environment.Simultaneously to have processed and obtained precision be 5 microns pattern to above method, and machining accuracy is higher.
Description of drawings
Fig. 1 ice template is made the process schematic diagram of the processing method with the little pattern of inverted trapezoidal structure.Among Fig. 1, the 1st, substrate, the 2nd, the dimethyl silicone polymer soft template, the 3rd, capillary grooves, the 4th, ice, the 5th, the organic solution of polymer, the 6th, high molecular inverted trapezoidal structure insulate.
The A of Fig. 1 is the schematic diagram that dimethyl silicone polymer soft template 2 and target substrate 1 are formed capillary grooves 3.The B of Fig. 1 is that dimethyl silicone polymer soft template 2 and target substrate 1 are formed capillary grooves 3 and filled water inlet, and freezes into the schematic diagram of ina thin film pattern 4.The C of Fig. 1 is for to be impregnated into ina thin film pattern 4 in the organic solution 5 of polymer, and the schematic diagram after taking out.The D of Fig. 1 is the schematic diagram of the high molecular inverted trapezoidal structure 6 of insulation that finally obtains after the volatilization of organic solvent and water.
Fig. 2 adopts ice template to make the electron scanning micrograph that cross section is the inverted trapezoidal structure 6 of the polymethyl methacrylate made of the little method of patterning of inverted trapezoidal structure.
The specific embodiment
1), as shown in Figure 1, selecting the surfacial pattern cross section is the dimethyl silicone polymer soft template 2 of trapezoid structure, dimethyl silicone polymer soft template 2 is placed on the substrate of glass 1, forms capillary grooves 3 between dimethyl silicone polymer soft template 2 and the substrate of glass 1.Water droplet is added to capillary grooves 3 ports, treats that water after flowing to capillary grooves 3 under the effect of capillary force, is placed on dimethyl silicone polymer soft template 2 and substrate of glass 1 in the subzero 20 ℃ refrigerator together, make water cooling form ice.
2), dimethyl silicone polymer soft template 2 is peeled off from substrate of glass 1, obtain the substrate of glass 1 that the surface has ina thin film pattern 4, then substrate of glass 1 is impregnated into mass concentration and is in the chloroformic solution 5 of 0.5% polymethyl methacrylate, then take out.
3), with step 2) substrate of glass 1 that obtains after handling is positioned in the room temperature, makes the water volatilization of chloroform solvent and ice template fusing, obtains having down the little pattern 6 of polymethyl methacrylate film of trapezoidal cross-section on the substrate of glass 1.
1), as shown in Figure 1, selecting the surfacial pattern cross section is the dimethyl silicone polymer soft template 2 of trapezoid structure, dimethyl silicone polymer soft template 2 is placed into surface deposition to be had on the substrate of glass of indium tin oxide (hereinafter to be referred as " ito glass substrate ") 1, forms capillary grooves 3 between dimethyl silicone polymer soft template 2 and the ito glass substrate 1.Water droplet is added to capillary grooves 3 ports, treats that water after flowing to capillary grooves 3 under the effect of capillary force, is placed on dimethyl silicone polymer soft template 2 and ito glass substrate 1 in the subzero 10 ℃ refrigerator together, make water cooling form ice.
2), dimethyl silicone polymer soft template 2 is peeled off from ito glass substrate 1, obtain the ito glass substrate 1 that the surface has ina thin film pattern 4, then ito glass substrate 1 is impregnated into mass concentration and is in the carbon disulfide solution 5 of 1% polystyrene, then take out.
3), with step 2) the ito glass substrate 1 that obtains after handling is positioned in the room temperature, makes the water volatilization of carbon disulfide solvent and ice template fusing, obtains having down the little pattern 6 of polystyrene film of trapezoidal cross-section in the ito glass substrate 1.
1), as shown in Figure 1, selecting the surfacial pattern cross section is the dimethyl silicone polymer soft template 2 of trapezoid structure, dimethyl silicone polymer soft template 2 is placed in the ito glass substrate 1, forms capillary grooves 3 between dimethyl silicone polymer soft template 2 and the ito glass substrate 1.Water droplet is added to capillary grooves 3 ports, treats that water after flowing to capillary grooves 3 under the effect of capillary force, is placed on dimethyl silicone polymer soft template 2 and ito glass substrate 1 in the subzero 5 ℃ refrigerator together, make water cooling form ice.
2), dimethyl silicone polymer soft template 2 is peeled off from ito glass substrate 1, obtain the ito glass substrate 1 that the surface has ina thin film pattern 4, then ito glass substrate 1 is impregnated into mass concentration and is in 2% the poly acetylene tetrachloride solution 5, then take out.
3), with step 2) the ito glass substrate 1 that obtains after handling is positioned in the room temperature, makes the water volatilization of acetylene tetrachloride solvent and ice template fusing, obtains having down the little pattern 6 of polyethylene film of trapezoidal cross-section in the ito glass substrate 1.
1), as shown in Figure 1, selecting the surfacial pattern cross section is the dimethyl silicone polymer soft template 2 of trapezoid structure, dimethyl silicone polymer soft template 2 is placed in the ito glass substrate 1, forms capillary grooves 3 between dimethyl silicone polymer soft template 2 and the ito glass substrate 1.Water droplet is added to capillary grooves 3 ports, treats that water after flowing to capillary grooves 3 under the effect of capillary force, is placed on dimethyl silicone polymer soft template 2 and ito glass substrate 1 in the subzero 20 ℃ refrigerator together, make water cooling form ice.
2), dimethyl silicone polymer soft template 2 is peeled off from ito glass substrate 1, obtain the ito glass substrate 1 that the surface has ina thin film pattern 4, then ito glass substrate 1 is impregnated into mass concentration and is in 5% the polyacrylic trichloro-ethylene solution 5, then take out.
3), with step 2) the ito glass substrate 1 that obtains after handling is positioned in the room temperature, makes the water volatilization of equal trichloroethylene solvent and ice template fusing, obtains having down the little pattern 6 of polypropylene film of trapezoidal cross-section in the ito glass substrate 1.
1), as shown in Figure 1, selecting the surfacial pattern cross section is the dimethyl silicone polymer soft template 2 of trapezoid structure, dimethyl silicone polymer soft template 2 is placed in the ito glass substrate 1, forms capillary grooves 3 between dimethyl silicone polymer soft template 2 and the ito glass substrate 1.Water droplet is added to capillary grooves 3 ports, treats that water after flowing to capillary grooves 3 under the effect of capillary force, is placed on dimethyl silicone polymer soft template 2 and ito glass substrate 1 in the subzero 10 ℃ refrigerator together, make water cooling form ice.
2), dimethyl silicone polymer soft template 2 is peeled off from ito glass substrate 1, obtain the ito glass substrate 1 that the surface has ina thin film pattern 4, then ito glass substrate 1 is impregnated into mass concentration and is in the carbon tetrachloride solution 5 of 2% polystyrene, then take out.
3), with step 2) the ito glass substrate 1 that obtains after handling is positioned in the room temperature, makes the water volatilization of equal carbon tetrachloride solvent and ice template fusing, obtains having down the little pattern 6 of polystyrene film of trapezoidal cross-section in the ito glass substrate 1.
1), as shown in Figure 1, selecting the surfacial pattern cross section is the dimethyl silicone polymer soft template 2 of trapezoid structure, dimethyl silicone polymer soft template 2 is placed in the ito glass substrate 1, forms capillary grooves 3 between dimethyl silicone polymer soft template 2 and the ito glass substrate 1.Water droplet is added to capillary grooves 3 ports, treats that water after flowing to capillary grooves 3 under the effect of capillary force, is placed on dimethyl silicone polymer soft template 2 and ito glass substrate 1 in the subzero 10 ℃ refrigerator together, make water cooling form ice.
2), dimethyl silicone polymer soft template 2 is peeled off from ito glass substrate 1, obtain the ito glass substrate 1 that the surface has ina thin film pattern 4, then ito glass substrate 1 is impregnated into mass concentration and is in 2% the polyacrylic sym-dichloroethylene solution 5, then take out.
3), with step 2) the ito glass substrate 1 that obtains after handling is positioned in the room temperature, makes the water volatilization of sym-dichloroethylene solvent and ice template fusing, obtains having down the little pattern 6 of polypropylene film of trapezoidal cross-section in the ito glass substrate 1.
Embodiment 7
1), as shown in Figure 1, selecting the surfacial pattern cross section is the dimethyl silicone polymer soft template 2 of trapezoid structure, dimethyl silicone polymer soft template 2 is placed in the ito glass substrate 1, forms capillary grooves 3 between dimethyl silicone polymer soft template 2 and the ito glass substrate 1.Water droplet is added to capillary grooves 3 ports, treats that water after flowing to capillary grooves 3 under the effect of capillary force, is placed on dimethyl silicone polymer soft template 2 and ito glass substrate 1 in the subzero 10 ℃ refrigerator together, make water cooling form ice.
2), dimethyl silicone polymer soft template 2 is peeled off from ito glass substrate 1, obtain the ito glass substrate 1 that the surface has ina thin film pattern 4, then ito glass substrate 1 is impregnated into mass concentration and is in 2% the poly dichloroethane solution 5, then take out.
3), with step 2) the ito glass substrate 1 that obtains after handling is positioned in the room temperature, makes the water volatilization of dichloroethanes solvent and ice template fusing, obtains having down the little pattern 6 of polyethylene film of trapezoidal cross-section in the ito glass substrate 1.
Claims (1)
1, adopting ice template to make cross section is the little method of patterning of inverted trapezoidal structure, and its step and condition are as follows:
1), to select the surfacial pattern cross section be the dimethyl silicone polymer soft template of trapezoid structure, and the dimethyl silicone polymer soft template is placed in the substrate, forms capillary grooves between dimethyl silicone polymer soft template and the substrate; Water droplet is added to the capillary grooves port, treats water after flowing to capillary grooves under the effect of capillary force, dimethyl silicone polymer soft template and substrate are placed on subzero 20 together to subzero 5 ℃ refrigerator, make water cooling form ice; Described substrate is glass or the glass with indium tin oxide plated film;
2), dimethyl silicone polymer soft template and substrate are peeled off, obtain the substrate that the surface has the ina thin film pattern, then substrate is impregnated into mass concentration and is in the organic solution of polymer of 0.2%-5%, then take out; Described polymer is polymethyl methacrylate, polystyrene, polyethylene or polypropylene; Solvent is chloroform, carbon tetrachloride, carbon disulfide, trichloro-ethylene, sym-dichloroethylene, acetylene tetrachloride or dichloroethanes;
3), with step 2) substrate that obtains after handling is positioned in the room temperature, makes the water volatilization of organic solvent and ice template fusing, obtains having down the little pattern of thin polymer film of trapezoidal cross-section in the substrate.
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| CN200910067486A CN101643194A (en) | 2009-09-03 | 2009-09-03 | Method for manufacturing micro pattern with inverted trapezoidal cross section by using ice template |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104048463A (en) * | 2014-07-07 | 2014-09-17 | 南通江南制冷设备有限公司 | Ice die |
| CN104943433A (en) * | 2015-07-05 | 2015-09-30 | 林志苹 | Pattern transferring template and preparing method thereof |
| CN105668511A (en) * | 2016-03-03 | 2016-06-15 | 广东工业大学 | Method for preparing electronic device through micro-nano machining |
-
2009
- 2009-09-03 CN CN200910067486A patent/CN101643194A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104048463A (en) * | 2014-07-07 | 2014-09-17 | 南通江南制冷设备有限公司 | Ice die |
| CN104943433A (en) * | 2015-07-05 | 2015-09-30 | 林志苹 | Pattern transferring template and preparing method thereof |
| CN104943433B (en) * | 2015-07-05 | 2017-07-21 | 林志苹 | A kind of pattern transfer template and preparation method thereof |
| CN105668511A (en) * | 2016-03-03 | 2016-06-15 | 广东工业大学 | Method for preparing electronic device through micro-nano machining |
| CN105668511B (en) * | 2016-03-03 | 2017-06-09 | 广东工业大学 | A kind of method that micro-nano technology prepares electronic device |
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Application publication date: 20100210 |