CN101640163A - Excimer lamp - Google Patents
Excimer lamp Download PDFInfo
- Publication number
- CN101640163A CN101640163A CN200910164913A CN200910164913A CN101640163A CN 101640163 A CN101640163 A CN 101640163A CN 200910164913 A CN200910164913 A CN 200910164913A CN 200910164913 A CN200910164913 A CN 200910164913A CN 101640163 A CN101640163 A CN 101640163A
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- electrode
- excimer lamp
- space
- discharge
- face
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
- H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
- H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
- H01J5/58—Means for fastening the separate part to the vessel, e.g. by cement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
- H05B41/14—Circuit arrangements
- H05B41/26—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc
- H05B41/28—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters
- H05B41/2806—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters with semiconductor devices and specially adapted for lamps without electrodes in the vessel, e.g. surface discharge lamps, electrodeless discharge lamps
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
An excimer lamp is provided, which can suppress deterioration caused by oxidation of power supply wires for supplying electricity to the excimer lamp and the connection portion for connecting the power supply wires to the electrodes, improve reliability, and prolong life thereof. The excimer lamp of the invention includes an electrode provided outside the capacitor, gas for discharging is enclosedinside the discharging capacitor, medium is provided between the electrode and another electrode in the same pair with the electrode, conductive wires for supplying electricity between the electrodesare connected to the electrode and the other electrode, and electricity is supplied to the gas for discharging through the conductive wire, the electrode, and the medium. In the structure, a space connected to one terminal of the discharging capacitor and divided by at least five faces is provided, the space is isolated from the capacitor by an isolation wall, and a connection portion electrically connected to the electrode is formed outside the space. The conductive wires are connected to the connection portion through soldering tin.
Description
Technical field
The present invention relates to the light decontaminating apparatus or the semi-conductive apparatus for ultraviolet light treamtent of liquid crystal substrate, and relate to the Excimer lamp of surfaction device of being used in light-struck resin etc.Relate in particular to and connecting supply of electric power in the textural Excimer lamp of the lamp of the part of the supply lines of this Excimer lamp with feature.
Background technology
In the past, as the ultraviolet light source of light decontaminating apparatus that is used in crystal liquid substrate or semi-conductive apparatus for ultraviolet light treamtent etc., known had an Excimer lamp.Especially, in device by the xenon excimer lamp in light that this Excimer lamp radiated configuration vacuum ultraviolet (VUV) zone etc., constitute the basket inside of the lampshade of this Excimer lamp of configuration with the nitrogen displacement, and at the windowpane of the photoirradiated surface side of this basket configuration transmitance, with the air of isolating the object being treated side and the air of lampshade side.By this kind formation, by the vacuum-ultraviolet light that this Excimer lamp radiated, till being radiated, the windowpane that is disposed at this lampshade do not have by the absorbed situation of oxygen, can shine the vacuum-ultraviolet light that radiates from this Excimer lamp effectively.As this kind technology, for example known have Japan to specially permit No. 2854255 communiques etc.
On the other hand, developed a kind of Excimer lamp apparatus that light takes out window that is not provided with recently.As this kind technology, for example known have a TOHKEMY 2005-193088 communique.According to this communique, putting down in writing and arranging many square Excimer lamps, the situation of this quasi-molecule light direct irradiation at shone thing.And, in this device, the windowpane that is configured in lampshade and isolates shone thing and lampshade side is not set.
In addition, relevant for the square Excimer lamp that is equipped on the device that this communique puts down in writing, known have a for example TOHKEMY 2005-322510 communique.
At this,, the summary of the square Excimer lamp that this TOHKEMY 2005-322510 communique put down in writing is shown as Excimer lamp in the past.Fig. 5 is the figure that represents the general structure of Excimer lamp 100 in the past.Fig. 5-a) is expression with the general profile chart that dissects along the one side of the fluorescent tube axle of this Excimer lamp 100.Electrode 112, electrode 113 on the relative a pair of wall that this Excimer lamp 100 is discharge vessels 111 of being made of quartz glass etc., be formed at this discharge vessel 111, the quartz wedge 119 that is disposed at the end of this Excimer lamp 100, the glass capsulation portion 122 that is formed at the gas entrance hole 121 of this quartz wedge 119 and seals these gas entrance hole 121 leading sections are constituted.And, be provided with connecting portion 115 in the end 114 of this electrode 112,113, and, be connected with lead 116 at this connecting portion 115.And in the discharge space S1 that is covered with this discharge vessel 111, for example enclosing has xenon, is applied with high-frequency high-voltage via this electrode 112,113.Thus, the xenon of being enclosed forms excimer molecule, by the disassociation generation quasi-molecule light of this excimer molecule.This quasi-molecule light emits to this Excimer lamp 100 outsides from the window portion 118 of this discharge vessel 111.
Fig. 5-b) is the A-A cutaway view when being dissectd with the arrow A of Fig. 5-a), is orthogonal to the cutaway view of the face of fluorescent tube axle for expression.The section shape of this discharge vessel 111 is rectangles roughly, and short brink forms discharging gap, and is formed with electrode 113 and electrode 112 in the long side outside.This electrode 112 is the transmitance electrodes that for example are made of mesh electrode etc.
Patent documentation 1: No. 2854255, Japan's special permission
Patent documentation 2: TOHKEMY 2005-193088 number
Patent documentation 3: TOHKEMY 2005-322510 number
Yet, as allocation list is shown in the device that the above-mentioned patent documentation 2 of the square Excimer lamp 100 of Fig. 5 put down in writing, the situation of the windowpane of isolating shone thing and lampshade side is not set, for example use this Excimer lamp 100 of enclosing xenon, utilize the ozone that vacuum ultraviolet generated that is radiated from this Excimer lamp 100 to swim in this Excimer lamp 100 peripheries.This ozone oxidation is extremely strong, and is influential to electrode 112, electrode 113 or the connecting portion 115 etc. of the outer surface that is formed at this Excimer lamp 100.For example, in square Excimer lamp 100 shown in Figure 5, to be fixed in the outer surface of this Excimer lamp 100 by connecting portion 115 to the supply lines 116 of this Excimer lamp 100, but in this kind Excimer lamp, the connecting portion 115 of this supply lines 116 can be subjected to the influence of ozone.And, by the light that is radiated from this Excimer lamp 100, or the thermal impact of discharging and bringing, can produce stronger oxidation, can produce this lead 116 according to circumstances and come off, maybe can cause the problem that lamp can't be lit a lamp.
Summary of the invention
In view of these problems, problem to be solved by this invention be to provide suppress to engage with supply of electric power to the supply lines of Excimer lamp and be disposed at the connecting portion of electrode of this Excimer lamp or the scolding tin that is disposed at this connecting portion by oxidation etc. by the situation of deterioration, improve reliability, the Excimer lamp that the life-span is long.
Excimer lamp of the present invention, an electrode is disposed at the discharge vessel outside, inner inclosure of this discharge vessel discharge gas is arranged, this electrode and and its another paired electrode between dispose medium, on this electrode and this another electrode, be connected with and give interelectrode lead supply of electric power, with electric power via this lead, this electrode, this medium is supplied to this discharge gas, wherein, be provided with the space that is connected with an end of this discharge vessel with at least 5 face zonings, should isolate by next door and this discharge vessel with the space of at least 5 face zonings, be formed with the connecting portion that is electrically connected with above-mentioned electrode in this outside with the space of at least 5 face zonings, this lead is connected on this connecting portion via scolding tin.
And the axial face of fluorescent tube is open.And above-mentioned space with at least 5 face zonings is enclosed in the inside in this space to have with above-mentioned discharge and is promptly suppressed the gas that discharges with the different gas of gas.In addition, be to vacuum state in this degree that suppresses with the discharge of the interior volume of at least 5 face zonings.
The invention effect
Record according to the 1st technical scheme of the present invention, be provided with the space that is connected with this discharge vessel with at least 5 face zonings, this space isolates by next door and this discharge vessel, outside in this space is formed with connecting portion, be connected via scolding tin with this lead, thereby the temperature of this solder sections does not have situation about directly transmitting by the heat of discharge generation, and with the reactions such as ozone that generate by the vacuum ultraviolet that this Excimer lamp radiated, can not produce the loose contact with this lead, nor can produce the problem that the lamp that causes by coming off of lead etc. can't be lighted.
And according to the record of the 2nd technical scheme of the present invention, the axial face of this fluorescent tube with the space of at least 5 face zonings is open, thereby can not discharge in this space, can realize the lamp of long-life and high reliability.
And, record according to the 3rd technical scheme of the present invention, in this interior volume the gas that suppresses discharge is arranged by inclosure with at least 5 face zonings, even thereby electrode etc. is disposed at this space, can not discharge in this space yet, can not become high temperature and be formed at this with the scolding tin on the connecting portion of the outside in the space of at least 5 face zonings, and this lead between can not come in contact problems such as bad.
And, record according to the 4th technical scheme of the present invention, approximately be suppressed at this vacuum state because be with the discharge of the interior volume of at least 5 face zonings, thereby with the situation of the 2nd technical scheme similarly, the scolding tin that is formed on the connecting portion of outside, this space can not become high temperature, and this lead between can not come in contact problems such as bad.
Description of drawings
Fig. 1 is the general profile chart of expression the 1st embodiment of the present invention.
Fig. 2 is the figure of temperature of the solder sections of the expression input electric power that utilizes Excimer lamp of the present invention.
Fig. 3 is the life test result's of expression Excimer lamp of the present invention figure.
Fig. 4 is the general profile chart of expression the 2nd embodiment of the present invention.
Fig. 5 is a general profile chart of representing the shape of Excimer lamp in the past.
Description of symbols
1: Excimer lamp
11: discharge vessel
12,13: electrode
14: connecting portion
15: solder sections
16: supply lines
17: the space
18: window
19: dividing plate
S: discharge space
20: Excimer lamp
21: the space
100: Excimer lamp
111: discharge vessel
112,113: electrode
114: the end
115: connecting portion
116: lead
118: window portion
119: quartz wedge
121: the gas entrance hole
122: glass capsulation portion
S1: discharge space
Embodiment
Excimer lamp of the present invention is an end at discharge vessel, setting from discharge space isolate at least with the space of 5 face institute zonings, and the outer surface in this space disposes the electrode tip of this Excimer lamp, be formed with connection with supply of electric power in the supply lines of this Excimer lamp and the connecting portion of this electrode.By this formation, along with the ultraviolet irradiation of discharge or utilize the temperature of discharge vessel to make the reactivity of scolding tin, follow therewith, by being present in the erosion that ozone caused of periphery by activate, make this connecting portion deterioration, can suppress to cause that lamp can't light such problem.
The 1st embodiment of Excimer lamp of the present invention is shown in Fig. 1.Fig. 1-a) is the general profile chart that dissects at the fluorescent tube direction of principal axis of Excimer lamp 1 of the present invention.This Excimer lamp 1 by the discharge vessel 11 of quartz glass system, the electrode 12 that on position opposite one another, is formed at the outer surface of this discharge vessel 11, electrode 13 and, be formed at the inside of this discharge vessel 11 and enclose discharge that xenon etc. is arranged and constitute with the discharge space S of gas.And, though in figure, do not illustrate, in this discharge space S, except the window 18 of radiating light, also be provided with ultraviolet reflecting film.This electrode 12 is for example by the clathrate transmitance electrode that constituted and constituting such as print electrode, and disposes the face of this discharge vessel 11 of this electrode 12, has the window 18 of the quasi-molecule light that radiation produced in this discharge vessel 11 concurrently.
And, end at this Excimer lamp 1, in order supply of electric power to be given between this electrode 12 be configured in this Excimer lamp 1, the electrode 13, to be provided with the connecting portion 14 that is connected with this electrode 12, electrode 13, be disposed at solder sections 15 on this connecting portion 14, be connected to the supply lines 16 of this solder sections 15.This supply lines 16 uses copper (Cu), the environment when considering this Excimer lamp 1 of use etc., and the part of nickel plating (Ni) is implemented in the leading section utilization of this supply lines 16 on the Cu surface.Also have, the dividing plate 19 of the end by being located at this discharge vessel 11 be formed with this discharge space S separate at least with the space 17 of 5 face zonings, be provided with this solder sections 15 in the zone that is formed with this space 17.And in this space 17, the part of the end that is equivalent to this Excimer lamp 1 in this space 17 is become outside atmosphere (for example atmosphere) equal state with this Excimer lamp 1 by opening in this space 17.
In Fig. 1-b), the A-A section that is dissectd with the arrow A shown in Fig. 1-a is shown, this discharge vessel 11 is square containers that section is rectangle, and in discharge space S, for example encloses the discharge gas that xenon etc. is arranged with 0.05MPa.In the section of this discharge vessel 11, electrode 13 is configured on the face of long side.And, with 13 opposed at this electrode on be formed with electrode 12.This electrode 12 is for example to be printed electrode by gold paste the cancellate of formation such as (paste), but is the transmitance electrode from the gap radiating light of grid.These electrode 12 1 sides become the window 18 of radiation from the light of this Excimer lamp.And this electrode 13 in the scope identical with the scope that is formed with this electrode 12, is provided with the clathrate electrode same with this electrode 12 on the face of the long side of this discharge vessel 11.But, in these electrode 13 1 sides, for example be formed with (not shown) such as ultraviolet reflecting films of silicon particle main body with figure at the inner face of this discharge vessel 11, be reflected to the window 18 of being located at these electrode 12 1 sides from the light of this Excimer lamp.And this electrode 13 also is made of printing electrode of constituting such as gold paste equally with this electrode 12.In addition, this connecting portion 14 uses the transfer paper of gold for example etc., and, in this solder sections 15, consider the adherence with gold or glass, use the scolding tin that in tin, has added zinc, antimony.
Fig. 2 is the figure that is used to represent effect of the present invention, is with respect to the chart of comparing with Excimer lamp in the past to the temperature of this solder sections 15 of the input electric power of this Excimer lamp 1.The longitudinal axis of Fig. 2 is represented the temperature of solder sections, and transverse axis is represented the input electric power to Excimer lamp.And the solid line among the figure is represented the temperature of this solder sections 15 of Excimer lamp 1 of the present invention, and dotted line represents to be used for the temperature of this solder sections of the more measured Excimer lamp in the past that comes out.These Excimer lamps are Excimer lamps of enclosing the same type of xenon-133 gas in discharge space with 0.05MPa, to put modulation frequency and be made as 50kHz, the temperature of this solder sections 15 needs adequate time after lighting a lamp till stable, and placed 20 minutes the back that lights a lamp, and measures the temperature of this moment.In the temperature survey of this solder sections 15, make thermocouple be contacted with this solder sections 15 and measure.And, in this is measured, make the present invention and each 5 of in the past this Excimer lamps respectively, change successively the input electric power of this Excimer lamp measured, with 5 mean value of each Excimer lamp as measured value.
In Fig. 2, when for example importing electric power and being 100W, the temperature of this solder sections 15 is 70 ℃ in Excimer lamp 1 of the present invention, and is relative therewith, is 205 ℃ high-temperature in Excimer lamp in the past.Be among the 200W similarly at input electric power, with Excimer lamp 1 of the present invention be 90 ℃ relative, be 270 ℃ in Excimer lamp in the past, the input electric power be among the 300W, with Excimer lamp 1 of the present invention be 100 ℃ relative, be up to 300 ℃ in Excimer lamp in the past.So, according to Excimer lamp 1 of the present invention, compare with the situation of in the past Excimer lamp, the temperature of this solder sections 15 is reduced to about 1/3rd.So, the temperature step-down of this solder sections 15, and atmosphere such as the ozone that the place is set by this Excimer lamp 1 or by the ultraviolet ray of direct irradiation can obtain this solder sections 15 and can not be affected and the special result of deterioration.
Fig. 3 is result's the figure of the life test of expression Excimer lamp 1 of the present invention.The longitudinal axis of Fig. 3 represents that Excimer lamp can not cause the problem of not lighting a lamp and waiting, and each time can be kept the ratio [remaining rate (%)] that the lamp digital display of lighting a lamp shows percentage, and transverse axis is represented light a lamp the time (h) of Excimer lamp.And the solid line among Fig. 3 is represented Excimer lamp 1 of the present invention, and dotted line is represented Excimer lamp in the past.In this life test,, prepare 10 Excimer lamps 1 of the present invention, reach 10 Excimer lamps in the past, will be made as 300W, carry out a lantern test to the input electric power of each Excimer lamp as test piece.
According to Fig. 3, Excimer lamp was in the past being lit a lamp 2700 hours, and remaining rate becomes below 60%.On the other hand, in Excimer lamp of the present invention, at 4700 hours, remaining rate became below 60%, and the life-span of comparing with existing product approximately prolongs 2000 hours.And up to surpassing 3000 hours, remaining rate is 100%, and the Excimer lamp that can't light a lamp with the problem of this solder sections 15 is a zero branch.So,, do not have ultraviolet light and directly expose to this solder sections 15,, thereby have the advantage that high reliability, long-life Excimer lamp can be provided even can not be etched in ozone atmosphere according to formation of the present invention yet.
Embodiment 2
Fig. 4 represents the 2nd embodiment of the present invention.Fig. 4-a) is the general profile chart that dissects the Excimer lamp 20 of the 2nd embodiment of the present invention at the fluorescent tube direction of principal axis.The basic comprising of this Excimer lamp 20 is identical with the situation of the 1st embodiment shown in Figure 1, for the parts identical with the situation of the 1st embodiment, pays the symbol of duplicate numbers.And, same with the situation of Fig. 1, in discharge space S, be provided with not shown ultraviolet reflecting film.In the 2nd embodiment, outer wall 22 and external isolation are passed through in the space 21 with at least 5 face institute zonings that is connected with discharge space S.In the present embodiment, the inside in this space 21 is to be vacuum state, or the gas that is not easy to discharge with nitrogen etc. is full of.Thus, even have the outer surface that electrode is disposed at this space 21, the advantage of discharge can not take place in this space 21 yet.And, in Fig. 4-b), similarly be illustrated in the A-A section that the arrow A place of Fig. 4-a) is dissectd with the situation of the 1st embodiment.In the present embodiment, this section shape also is rectangular square.For other formation, also identical with the situation shown in Fig. 1-b), thereby be omitted in this detailed description.
Claims (4)
1, a kind of Excimer lamp, an electrode is disposed at the discharge vessel outside, inner inclosure of this discharge vessel discharge gas is arranged, this electrode and and its another paired electrode between dispose medium, on this electrode and this another electrode, be connected with and give interelectrode lead supply of electric power, electric power is supplied to this discharge gas via this lead, this electrode, this medium, it is characterized in that
Be provided with the space that is connected with an end of this discharge vessel with at least 5 face zonings, this space with at least 5 face zonings isolates by next door and this discharge vessel, be formed with the connecting portion that is electrically connected with above-mentioned electrode in the outside with this space of at least 5 face zonings, this lead is connected on this connecting portion via scolding tin.
2, Excimer lamp as claimed in claim 1 is characterized in that,
The axial face of fluorescent tube in above-mentioned space with at least 5 face zonings is open.
3, Excimer lamp as claimed in claim 1 is characterized in that,
Above-mentioned space with at least 5 face zonings is enclosed in the inside in this space to have with above-mentioned discharge and is promptly suppressed the gas that discharges with the different gas of gas.
4, Excimer lamp as claimed in claim 1 is characterized in that,
Above-mentioned space with at least 5 face zonings is the vacuum state of degree that the discharge in this interior volume is suppressed.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008194786A JP5051042B2 (en) | 2008-07-29 | 2008-07-29 | Excimer lamp |
| JP194786/2008 | 2008-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101640163A true CN101640163A (en) | 2010-02-03 |
| CN101640163B CN101640163B (en) | 2013-08-07 |
Family
ID=41615085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101649136A Active CN101640163B (en) | 2008-07-29 | 2009-07-29 | Excimer lamp |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5051042B2 (en) |
| KR (1) | KR101216315B1 (en) |
| CN (1) | CN101640163B (en) |
| TW (1) | TW201005791A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112204704A (en) * | 2018-07-06 | 2021-01-08 | 优志旺电机株式会社 | Excimer lamp |
| CN112204704B (en) * | 2018-07-06 | 2024-06-04 | 优志旺电机株式会社 | Excimer lamp |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19951873A1 (en) * | 1999-10-28 | 2001-05-03 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Discharge lamp |
| JP2004342369A (en) | 2003-05-13 | 2004-12-02 | Japan Storage Battery Co Ltd | Excimer lamp |
| JP4475001B2 (en) | 2004-05-10 | 2010-06-09 | 株式会社ジーエス・ユアサコーポレーション | Dielectric barrier discharge lamp |
| JP2005347025A (en) | 2004-06-01 | 2005-12-15 | Japan Storage Battery Co Ltd | Dielectric barrier discharge lamp |
| JP2007173090A (en) | 2005-12-22 | 2007-07-05 | Ushio Inc | Ultraviolet light source system |
-
2008
- 2008-07-29 JP JP2008194786A patent/JP5051042B2/en active Active
-
2009
- 2009-05-20 TW TW098116743A patent/TW201005791A/en unknown
- 2009-06-08 KR KR1020090050302A patent/KR101216315B1/en active IP Right Grant
- 2009-07-29 CN CN2009101649136A patent/CN101640163B/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112204704A (en) * | 2018-07-06 | 2021-01-08 | 优志旺电机株式会社 | Excimer lamp |
| CN112204704B (en) * | 2018-07-06 | 2024-06-04 | 优志旺电机株式会社 | Excimer lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201005791A (en) | 2010-02-01 |
| CN101640163B (en) | 2013-08-07 |
| JP5051042B2 (en) | 2012-10-17 |
| JP2010033883A (en) | 2010-02-12 |
| TWI379338B (en) | 2012-12-11 |
| KR101216315B1 (en) | 2012-12-27 |
| KR20100012801A (en) | 2010-02-08 |
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