CN101634011B - 一种实现工件外表面均匀镀膜的磁控溅射装置及方法 - Google Patents
一种实现工件外表面均匀镀膜的磁控溅射装置及方法 Download PDFInfo
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- CN101634011B CN101634011B CN2008101200118A CN200810120011A CN101634011B CN 101634011 B CN101634011 B CN 101634011B CN 2008101200118 A CN2008101200118 A CN 2008101200118A CN 200810120011 A CN200810120011 A CN 200810120011A CN 101634011 B CN101634011 B CN 101634011B
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- 238000004544 sputter deposition Methods 0.000 title claims abstract description 33
- 239000011248 coating agent Substances 0.000 title claims abstract description 7
- 238000000576 coating method Methods 0.000 title claims abstract description 7
- 238000000034 method Methods 0.000 title claims description 11
- 238000005477 sputtering target Methods 0.000 claims abstract description 14
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 42
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 230000007246 mechanism Effects 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 230000000979 retarding effect Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 description 3
- 238000009504 vacuum film coating Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
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CN2008101200118A CN101634011B (zh) | 2008-07-21 | 2008-07-21 | 一种实现工件外表面均匀镀膜的磁控溅射装置及方法 |
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CN2008101200118A CN101634011B (zh) | 2008-07-21 | 2008-07-21 | 一种实现工件外表面均匀镀膜的磁控溅射装置及方法 |
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CN101634011A CN101634011A (zh) | 2010-01-27 |
CN101634011B true CN101634011B (zh) | 2011-04-27 |
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Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102219398B (zh) * | 2011-03-15 | 2013-06-19 | 中国科学院半导体研究所 | 一种用于在光纤侧面均匀蒸镀增透膜的夹具 |
CN104694885B (zh) * | 2013-12-05 | 2017-10-31 | 中国科学院宁波材料技术与工程研究所 | 用于研究多元薄膜结构和性能的实验装置 |
CN105714263B (zh) * | 2014-12-02 | 2018-07-31 | 中国科学院大连化学物理研究所 | 一种四棱镜镀膜时的装夹方法 |
CN105671512B (zh) * | 2016-03-04 | 2018-10-26 | 中国科学院宁波材料技术与工程研究所 | 一种球体真空镀膜装夹装置 |
CN108486542A (zh) * | 2018-05-18 | 2018-09-04 | 辽宁科技大学 | 一种应用于磁控溅射的新型工件转架装置 |
CN110144558B (zh) * | 2019-04-29 | 2021-06-11 | 河南东微电子材料有限公司 | 一种磁控溅射镀膜设备 |
CN110306160A (zh) * | 2019-08-09 | 2019-10-08 | 中国科学院上海微系统与信息技术研究所 | 高通量薄膜沉积设备及薄膜沉积方法 |
CN110747442A (zh) * | 2019-09-10 | 2020-02-04 | 天津大学 | 一种空心圆柱形被镀件外表面镀膜的旋转装置 |
CN111185886A (zh) * | 2020-03-12 | 2020-05-22 | 宁波双德电子有限公司 | 一种音响生产加工用可调式操作台 |
CN113186502A (zh) * | 2020-06-30 | 2021-07-30 | 南京三乐集团有限公司 | 一种在多根螺旋线表面磁控溅射均匀镀铜的方法 |
CN112290905B (zh) * | 2020-11-10 | 2024-03-22 | 四川大学 | 一种基于磁控溅射对石英谐振器升频调节的方法 |
CN115369369A (zh) * | 2022-09-28 | 2022-11-22 | 潍坊科技学院 | 一种磁控溅射镀膜机的工件内曲面镀膜机构 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1174897A (zh) * | 1996-08-22 | 1998-03-04 | 张入通 | 一种磁控溅射镀吸收膜工艺 |
US6153061A (en) * | 1998-03-02 | 2000-11-28 | Auburn University | Method of synthesizing cubic boron nitride films |
CN1472360A (zh) * | 2003-06-26 | 2004-02-04 | 上海交通大学 | 离子注入复合镀膜设备 |
CN1680619A (zh) * | 2004-04-08 | 2005-10-12 | 应用薄膜公司 | 用于高功率溅镀的电源联接器 |
CN101118331A (zh) * | 2006-08-02 | 2008-02-06 | 东莞东林光电有限公司 | 液晶硅微型显示器的基板结合方法 |
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- 2008-07-21 CN CN2008101200118A patent/CN101634011B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1174897A (zh) * | 1996-08-22 | 1998-03-04 | 张入通 | 一种磁控溅射镀吸收膜工艺 |
US6153061A (en) * | 1998-03-02 | 2000-11-28 | Auburn University | Method of synthesizing cubic boron nitride films |
CN1472360A (zh) * | 2003-06-26 | 2004-02-04 | 上海交通大学 | 离子注入复合镀膜设备 |
CN1680619A (zh) * | 2004-04-08 | 2005-10-12 | 应用薄膜公司 | 用于高功率溅镀的电源联接器 |
CN101118331A (zh) * | 2006-08-02 | 2008-02-06 | 东莞东林光电有限公司 | 液晶硅微型显示器的基板结合方法 |
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