CN101625242B - MOEMS gyro cavity resonator and method for adjusting micro-mirror spatial state thereof - Google Patents
MOEMS gyro cavity resonator and method for adjusting micro-mirror spatial state thereof Download PDFInfo
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- CN101625242B CN101625242B CN2009100911386A CN200910091138A CN101625242B CN 101625242 B CN101625242 B CN 101625242B CN 2009100911386 A CN2009100911386 A CN 2009100911386A CN 200910091138 A CN200910091138 A CN 200910091138A CN 101625242 B CN101625242 B CN 101625242B
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Abstract
The invention relates to an MOEMS gyro cavity resonator and a method for adjusting a micro-mirror spatial state thereof to solve the problems higher once molding difficulty and lower initial alignment precision existing in an existing method for adjusting the MOEMS gyro cavity resonator. The intermediate region of a cavity resonator baseplate is fixedly arranged, a micro-mirror and a piezoelectric ceramic wafer are respectively arranged at the upper end and the lower end of a marginal region, and the piezoelectric ceramic wafer is used for causing the deformation of the marginal region provided with the piezoelectric ceramic wafer according to the displacement of the piezoelectric ceramic wafer; and the piezoelectric ceramic wafer is arranged at the lower end of the cavity resonator baseplate and is used for causing the deformation of the marginal region provided with the piezoelectric ceramic wafer according to the displacement generated by applied voltage. The micro-mirror and the piezoelectric ceramic wafer are arranged at the marginal region of the cavity resonator baseplate, and the piezoelectric ceramic wafer can displace to cause the deformation of the cavity resonator baseplate and adjust the pitching angle and the deflection angle of the micro-mirror, thereby realizing that an once molding technology is used for manufacturing the MOEMS gyro cavity resonator, and accurately adjusting the initial alignment precision of a gyro.
Description
Technical field
The invention provides the method for the micro mirror spatiality of a kind of MOEMS gyro resonator cavity and adjusting resonator cavity, belong to laser and micro photo-electro-mechanical technical field.
Background technology
Gyro is as a kind of inertia type instrument, and the principle difference by producing gyroscopic effect can be divided into mechanical rotor gyroscope, gyrotron, particle gyroscope and lasergyro and fibre optic gyroscope.Wherein fibre optic gyroscope is developed rapidly after Vali in 1976 and Shorthill propose, and measuring accuracy is from initial several (15 °/h) bring up to now magnitude less than 0.0001 °/h of earth autobiography speed that decuple.Along with MEMS (Micro-electro-mechanical Systems, MEMS (micro electro mechanical system)) development of technology and ripe gradually, fundamentally broken the macroscopical barrier that people all the time make inertia device, for the miniaturization of gyro provides new method and research thinking.The MEMS gyro has become the focus of various countries' research, and existing Related product comes out.
At this moment, be based upon micro photo-electro-mechanical (MOEMS-Micro-opto-electro-mechanical Systems on micro mechanical technology and the Sagnac effect basis; Also claiming Optical MEMS) gyro then shown its remarkable advantages, because its micro optical element, microelectronics and micro-mechanical device organically integrate, it is ray machine electricity inertia measurement device one, microminiaturized, integrated, so the MOEMS gyro combines the advantage of optical sensor and miniaturization technologies, compare with optical fibre gyro, laser gyro, its volume is little, and weight is lighter; Compare with the MEMS inertia device, it is highly sensitive, and movement-less part does not need Vacuum Package, and anti-electromagnetic interference capability is strong, can use under some rugged surroundings.
The MOEMS gyro can be divided into two kinds of resonant mode and interfere types, wherein resonant mode MOEMS gyro is the stronger MOEMS gyro of a kind of technical feasibility, and resonator cavity is the critical component of sensing, and its structural parameters directly have influence on the effect of MOEMS resonance gyro resonance effect and the ultimate precision of system.The MOEMS space time processing method of forming and separate type construction from part are generally adopted in the adjustment of existing resonator cavity, the MOEMS space time processing method of forming is higher to manufacture process requirement, and the separate type construction from part adopts piezoelectric ceramics as actuation device by the angular setting actuator, utilize angular actuator that resonator cavity is carried out closed loop and transfer the chamber, the adjusting of implementation space resonator cavity, but be difficult to improve the initial alignment precision.
Therefore, in the method for existing adjusting MOEMS gyro resonator cavity, there is the problem that time processing moulding difficulty is higher, the initial alignment precision is lower.
Summary of the invention
The invention provides the method for the micro mirror spatiality of a kind of MOEMS gyro resonator cavity and adjusting resonator cavity,, have the problem that time processing moulding difficulty is higher, the initial alignment precision is lower to solve in the method for existing adjusting MOEMS gyro resonator cavity.
A kind of MOEMS gyro resonator cavity comprises:
The resonator cavity substrate, zone line fixedly installs, and the two ends up and down of fringe region are respectively arranged with micro mirror and piezoelectric ceramic piece, are used to make the fringe region that is provided with piezoelectric ceramic piece to produce deformation according to the displacement that piezoelectric ceramic piece produces;
Piezoelectric ceramic piece is arranged on the lower end of resonator cavity substrate, is used for producing displacement according to the voltage that applies, and makes the resonator cavity substrate produce deformation.
A kind of method of regulating the micro mirror spatiality of resonator cavity comprises:
Piezoelectric ceramic piece is applied voltage, make piezoelectric ceramic piece produce displacement, and make the fringe region of the resonator cavity substrate that is provided with piezoelectric ceramic piece produce deformation;
Be added in voltage on the piezoelectric ceramic piece according to the position adjustment of detected flare and circulation hot spot, make the deformation of the fringe region generation that is provided with piezoelectric ceramic piece of resonator cavity substrate, overlap with the circulation hot spot until flare horizontal by certain angle.
The present invention is provided with micro mirror and piezoelectric ceramic piece respectively by the two ends up and down at the fringe region of gyro resonator cavity substrate, and produce displacement by piezoelectric ceramic piece and make the resonator cavity substrate produce the angle of pitch and deflection angle that micro mirror is adjusted in deformation, realized that not only the time processing moulding process is used for the manufacturing of MOEMS gyro resonator cavity, can also in manufacture process, the initial alignment precision to gyro adjust accurately.
Description of drawings
Fig. 1 is the structural representation of a kind of MOEMS gyro resonator cavity of providing of the specific embodiment of the present invention;
Fig. 2 is the structural representation that resonator cavity substrate that the specific embodiment of the present invention provides is fixedlyed connected with the gyro base by fixed head;
Fig. 3 is that micro mirror resonant cavity substrate that the specific embodiment of the present invention provides is arranged on the structural representation on the gyro base;
Fig. 4 is that piezoelectric ceramic piece resonant cavity substrate that the specific embodiment of the present invention provides is arranged on the structural representation on the gyro base;
Fig. 5 is the angle of pitch of the adjustment micro mirror that provides of the specific embodiment of the present invention and the principle schematic of deflection angle;
The schematic flow sheet of the method for a kind of micro mirror spatiality of regulating resonator cavity that Fig. 6 is that the specific embodiment of the present invention provides;
Fig. 7 is that the angle of pitch of micro mirror and the synoptic diagram of deflection angle are adjusted in the deformation of passing through the resonator cavity substrate that the specific embodiment of the present invention provides;
Fig. 8 be the specific embodiment of the present invention provide finish the resonator cavity micro mirror spatiality synoptic diagram of adjusting.
Embodiment
The specific embodiment of the present invention provides a kind of MOEMS gyro resonator cavity, comprise resonator cavity substrate and piezoelectric ceramic piece, the zone line of resonator cavity substrate fixedly installs, the two ends up and down of fringe region are respectively arranged with micro mirror and piezoelectric ceramic piece, are used to make the fringe region that is provided with piezoelectric ceramic piece to produce deformation according to the displacement that piezoelectric ceramic piece produces; Piezoelectric ceramic piece is arranged on the lower end of resonator cavity substrate, is used for producing displacement according to the voltage that applies, and makes the resonator cavity substrate produce deformation.
Further, corresponding micro mirror has four, and the zone line that is separately positioned on the resonator cavity substrate is on foursquare four angles at center.Corresponding piezoelectric ceramic piece has three groups, and every group has two, and per two piezoelectric ceramic pieces are set up in parallel respectively in the lower end of resonator cavity substrate, and are arranged on same the axis vertical with surface level with micro mirror.This resonator cavity also comprises one or more antidetonation piezoelectric ceramic pieces, is separately positioned on the fixed area of resonator cavity substrate lower end and is provided with between the fringe region of piezoelectric ceramic piece, is used to improve the anti seismic efficiency of device.
Because the resonance degree of depth and the sharpness of resonator cavity are directly determining the detection accuracy of photodetector and the measuring accuracy of gyro, therefore, the resonator cavity gordian technique is to guarantee that resonator cavity has the highest resonance sharpness, the resonance degree of depth.The computing formula of the resonance degree of depth ρ of resonance sharpness F, resonator cavity, the limiting snesibility δ Ω of gyro is respectively:
In the formula,
R is the reflectivity of input and output mirror; R
rReflectivity for micro mirror; Δ ω=2 π Δ f are the angular frequency of laser instrument output spectrum live width, and Δ f is the laser instrument line width; τ is the transit time of light in resonator cavity; λ is a laser instrument centre wavelength; n
0For arriving the photon number of detector p.s.; η
DBe detective quantum efficiency; τ ' is the integral time of detector.Can get from top formula, realize for resonator cavity, input and output mirror and micro mirror reflectivity require very high.Loss in the resonator cavity directly influences the sharpness of resonator cavity and the limiting snesibility of gyro.Therefore require the space resonator cavity to have that precision height, controllability are good, to possess certain range of control, can reach the adjustment scheme of mirror aberration accuracy requirement and utilize micro fabrication to make orthogonal vertical micro mirror be two gordian techniquies that MOEMS gyro space resonator cavity is realized.A kind of MOEMS gyro resonator cavity for clearer explanation embodiment of the present utility model provides now is elaborated to this resonator cavity in conjunction with Figure of description, as shown in Figure 1, specifically can comprise:
Piezoelectric ceramic piece 12 is arranged on the lower end of resonator cavity substrate 11, is used for producing displacement according to the voltage that applies, and makes resonator cavity substrate 11 produce deformation.
The lower end of piezoelectric ceramic piece 12 is fixedly installed on the gyro base 17, fixedlys connected with the lower end of resonator cavity substrate 11 fringe regions in the upper end of piezoelectric ceramic piece 12.If synchronous two piezoelectric ceramic pieces 12 to every group apply voltage, then this group piezoelectric ceramic piece 12 can produce synchronous displacement, can produce deformation with the fringe region of the fixing resonator cavity substrate 11 of this group piezoelectric ceramic piece 12, to adjust and this group piezoelectric ceramic piece 12 is arranged on the angle of pitch of same the micro mirror 13 on the axis vertical with surface level horizontal by certain angle.If respectively two piezoelectric ceramic pieces 12 of every group are applied voltage, then this group piezoelectric ceramic piece 12 can produce different displacements, can produce deformation with the fringe region of the fixing resonator cavity substrate 11 of this group piezoelectric ceramic piece 12, to adjust and this group piezoelectric ceramic piece 12 is arranged on the deflection angle of same the micro mirror 13 on the axis vertical with surface level horizontal by certain angle.When initial the adjustment, adjust respectively and be added in three groups of voltages on the piezoelectric ceramic piece 12, make incident light by the 4th micro mirror 131 successively by after three other micro mirrors, 13 reflections, get back to the 4th micro mirror 131, export from convergent point at last, form light beam clockwise and that propagate counterclockwise respectively, produce also responsive Sagnac effect of resonance.
Further, as shown in Figure 1, can be respectively in the fixed area of resonator cavity substrate 11 lower ends and be provided with between the fringe region of piezoelectric ceramic piece 12 one or more antidetonation piezoelectric ceramic pieces 14 are set, be used to improve the anti seismic efficiency of device.
This embodiment is provided with micro mirror 13 and piezoelectric ceramic piece 12 respectively by the two ends up and down at the fringe region of gyro resonator cavity substrate 11, and produce displacements by piezoelectric ceramic piece 12 and make resonator cavity substrate 11 produce the angle of pitch and the deflection angle that micro mirror 13 is adjusted in deformation, realized that not only the time processing moulding process is used for the manufacturing of the resonator cavity of MOEMS gyro, can also in manufacture process, the initial alignment precision to gyro adjust accurately.
The specific embodiment of the present invention also provides a kind of method of regulating the micro mirror spatiality of resonator cavity, at first piezoelectric ceramic piece is applied voltage, make piezoelectric ceramic piece produce displacement, and make the fringe region of the resonator cavity substrate that is provided with piezoelectric ceramic piece produce deformation; Be added in voltage on the piezoelectric ceramic piece according to the position adjustment of detected flare and circulation hot spot then, make the deformation of the fringe region generation that is provided with piezoelectric ceramic piece of resonator cavity substrate, overlap with the circulation hot spot until flare horizontal by certain angle.Further comprising corresponding micro mirror has four, and the zone line that is separately positioned on the resonator cavity substrate is on foursquare four angles at center; Corresponding piezoelectric ceramic piece has three groups, and every group has two, respectively per two piezoelectric ceramic pieces is set up in parallel in the lower end of resonator cavity substrate, and is arranged on same the axis vertical with surface level with micro mirror; The voltage that is added on the piezoelectric ceramic piece according to detected flare and the adjustment of circulation hot spot comprises: adjust the voltage on two piezoelectric ceramic pieces that are applied to every group synchronously, make the fringe region that is provided with piezoelectric ceramic piece of resonator cavity substrate produce deformation horizontal by certain angle; Adjust the voltage that is applied on two piezoelectric ceramic pieces that do not have group respectively, make the fringe region that is provided with piezoelectric ceramic piece of resonator cavity substrate produce the deformation that is certain rotational angle with micromirror method vector.In addition, this method also comprises: in the fixed area of resonator cavity substrate lower end and be provided with between the fringe region of piezoelectric ceramic piece and be provided with one or more antidetonation piezoelectric ceramic pieces, be used to improve the anti seismic efficiency of device.
Regulate resonator cavity the micro mirror spatiality principle as shown in Figure 5: wherein Fig. 1 a is a side view, and the angle [alpha] of micro mirror 13 relative surface levels generations is the angle of pitch; Fig. 1 b is a vertical view, and the angle beta that micro mirror 13 relative method vector plane produce is a deflection angle.For clearer this embodiment of explanation, now this resonator cavity is elaborated in conjunction with Figure of description, as shown in Figure 6, specifically can comprise:
Step 61 applies voltage to piezoelectric ceramic piece, makes piezoelectric ceramic piece produce displacement, and makes the fringe region of the resonator cavity substrate that is provided with piezoelectric ceramic piece produce deformation.
Corresponding micro mirror 13 has four, and the zone line that is separately positioned on resonator cavity substrate 11 is on foursquare four angles at center; Corresponding piezoelectric ceramic piece 12 has three groups, and every group has two, and per two piezoelectric ceramic pieces 12 are set up in parallel respectively in the lower end of resonator cavity substrate 11, and are arranged on same the axis vertical with surface level with micro mirror 13.Wherein three groups of piezoelectric ceramic pieces 12 are distinguished corresponding three micro mirrors 13, and in these three micro mirrors 13, first micro mirror 13 is a plane mirror, and second micro mirror 13 is that catoptron and minute surface are concave surface, and the 3rd micro mirror 13 is plane mirror.The 4th micro mirror 131 is arranged on the incident end of gyro base 21, and the diaphotoscope of the 4th micro mirror 131 for having semi-transparent semi-reflecting characteristic.
Synchronous two piezoelectric ceramic pieces 12 to every group apply voltage, then this group piezoelectric ceramic piece 12 can produce synchronous displacement, can produce deformation with the fringe region of the fixing resonator cavity substrate 11 of this group piezoelectric ceramic piece 12, to adjust and this group piezoelectric ceramic piece 12 is arranged on the angle of pitch of same the micro mirror 13 on the axis vertical with surface level horizontal by certain angle.If respectively two piezoelectric ceramic pieces 12 of every group are applied voltage, then this group piezoelectric ceramic piece 12 can produce different displacements, can produce deformation with the fringe region of the fixing resonator cavity substrate 11 of this group piezoelectric ceramic piece 12, to adjust and this group piezoelectric ceramic piece 12 is arranged on the deflection angle of same the micro mirror 13 on the axis vertical with surface level horizontal by certain angle.
Step 62, be added in voltage on the piezoelectric ceramic piece according to the position adjustment of detected flare and circulation hot spot, make the deformation of the fringe region generation that is provided with piezoelectric ceramic piece of resonator cavity substrate, overlap with the circulation hot spot until flare horizontal by certain angle.
As shown in Figure 7, figure a is an original state; Figure b is that the angle of pitch of micro mirror is regulated, and ω is rotating shaft, and this adjusting has independence; Figure c regulates the distortion of resonator cavity substrate 11, and ω ' be rotating shaft, because coupling effect, the deflection angle of micro mirror 13 will be conditioned this moment, the luffing angle of micro mirror 13 in addition of variation simultaneously, and this step is with the purpose that is adjusted to of the deflection angle of finishing micro mirror 13; Figure d is the adjusting of the angle of pitch, and this step is poor for eliminating the luffing angle that is coupled when substrate is twisted, thereby finishes the adjusting of whole micro mirror 13; In adjustment process, because one-shot forming technique has determined that the deflection angle of micro mirror 13 is indivisible with respect to luffing angle, so in figure d, when distortion done in resonator cavity substrate 11, can ignore the deformation that brought when substrate was last time reversed with ω ' to this torsion effect.
As shown in Figure 8, adjust the angle of pitch and deflection angle of micro mirror 13 after, the 4th micro mirror 131 is arranged on the incident end of resonator cavity.First light beam 21 among Fig. 8 is the laser beam from first laser aligner 27, when it arrives the micro mirror 131 of Transflective, part reflected light enters second laser aligner 28 as second light beam 22, part light beam enters the space ring resonator, the 3rd light beam 23 as the circulation light beam, each circulation all has segment beam to see through the 4th micro mirror 131 to enter second laser aligner 28, form multiple-beam interferences with second light beam 22.Identical therewith, the 4th laser beam 24 from second laser aligner 28 is beamed into the 5th light beam 25 and the 6th light beam 26 at the 4th micro mirror 131 places, wherein the 5th light beam 25 is a reflector laser, and the 6th light beam 26 will partly be exported after will entering space ring resonator circulation again.Clockwise second light beam 22 and the 3rd light beam 23 from convergent point output produces resonance and responsive Sagnac effect at second laser aligner 28 at last, and the 5th counterclockwise light beam 25 and the 6th light beam 26 exported from convergent point produce resonance and responsive Sagnac effects at first laser aligner 27.
Further, after adjusting is finished, one or more antidetonation piezoelectric ceramic pieces can also be arranged on the fixed area of resonator cavity substrate lower end and be provided with between the fringe region of piezoelectric ceramic piece, to improve the anti seismic efficiency of device.
This embodiment produces displacement by piezoelectric ceramic piece 12 makes resonator cavity substrate 11 produce the angle of pitch and the deflection angle that micro mirror 13 is adjusted in deformation, produce resonance and responsive Sagnac effect at output terminal, not only realized the technology of time processing moulding, can also in manufacture process, the initial alignment precision to gyro adjust accurately.
The above; only for the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (9)
1. a MOEMS gyro resonator cavity is characterized in that, comprising:
The resonator cavity substrate, the zone line of described resonator cavity substrate fixedly installs, and the two ends up and down of fringe region are respectively arranged with micro mirror and piezoelectric ceramic piece, are used to make the fringe region that is provided with piezoelectric ceramic piece to produce deformation according to the displacement that piezoelectric ceramic piece produces;
Piezoelectric ceramic piece is arranged on the lower end of resonator cavity substrate, is used for producing displacement according to the voltage that applies, and makes the resonator cavity substrate produce deformation.
2. resonator cavity according to claim 1 is characterized in that described micro mirror has four, and the zone line that is separately positioned on the resonator cavity substrate is on foursquare four angles at center.
3. resonator cavity according to claim 2, it is characterized in that described piezoelectric ceramic piece has three groups, every group has two, per two piezoelectric ceramic pieces are set up in parallel respectively in the lower end of resonator cavity substrate, and are arranged on same the axis vertical with surface level with micro mirror.
4. resonator cavity according to claim 3 is characterized in that, respectively corresponding three micro mirrors of described three groups of piezoelectric ceramic pieces, and in described three micro mirrors, first micro mirror is a plane mirror, and second micro mirror is that catoptron and minute surface are concave surface, and the 3rd micro mirror is plane mirror.
5. resonator cavity according to claim 4 it is characterized in that the 4th micro mirror is arranged on the incident end of resonator cavity, and the 4th micro mirror is the diaphotoscope with semi-transparent semi-reflecting characteristic.
6. according to any described resonator cavity of claim 1 to 5, it is characterized in that this resonator cavity also comprises:
One or more antidetonation piezoelectric ceramic pieces are separately positioned on the fixed area of resonator cavity substrate lower end and are provided with between the fringe region of piezoelectric ceramic piece, are used to improve the anti seismic efficiency of described MOEMS gyro resonator cavity.
7. a method of regulating the micro mirror spatiality of the described MOEMS gyro of claim 1 resonator cavity is characterized in that, comprising:
Piezoelectric ceramic piece is applied voltage, make piezoelectric ceramic piece produce displacement, and make the fringe region of the resonator cavity substrate that is provided with piezoelectric ceramic piece produce deformation;
Be added in voltage on the piezoelectric ceramic piece according to the position adjustment of detected flare and circulation hot spot, make the deformation of the fringe region generation that is provided with piezoelectric ceramic piece of resonator cavity substrate, overlap with the circulation hot spot until flare horizontal by certain angle.
8. method according to claim 7 is characterized in that, the described voltage that is added on the piezoelectric ceramic piece according to detected flare and the adjustment of circulation hot spot comprises:
Adjust the voltage on two piezoelectric ceramic pieces that are applied to every group synchronously, make the deformation of the fringe region generation that is provided with piezoelectric ceramic piece of resonator cavity substrate, be arranged on the angle of pitch of same the micro mirror on the axis vertical with adjustment and this group piezoelectric ceramic piece with surface level horizontal by certain angle;
Adjust the voltage on two piezoelectric ceramic pieces that are applied to every group respectively, make the fringe region that is provided with piezoelectric ceramic piece of resonator cavity substrate produce the deformation that is certain rotational angle with micromirror method vector, to adjust the deflection angle that is arranged on same the micro mirror on the axis vertical with this group piezoelectric ceramic piece with surface level.
9. according to any described method of claim 7 to 8, it is characterized in that this method also comprises:
One or more antidetonation piezoelectric ceramic pieces are arranged on the fixed area of resonator cavity substrate lower end and are provided with between the fringe region of piezoelectric ceramic piece, to improve the anti seismic efficiency of described MOEMS gyro resonator cavity.
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| CN110146065B (en) * | 2019-06-10 | 2020-11-20 | 北京航空航天大学 | Micro-mechanical gyroscope based on waveguide grating evanescent field disturbance detection |
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