CN101609855A - 光敏电容、光感测电路、基板及其制造工艺和显示装置 - Google Patents
光敏电容、光感测电路、基板及其制造工艺和显示装置 Download PDFInfo
- Publication number
- CN101609855A CN101609855A CNA200810067938XA CN200810067938A CN101609855A CN 101609855 A CN101609855 A CN 101609855A CN A200810067938X A CNA200810067938X A CN A200810067938XA CN 200810067938 A CN200810067938 A CN 200810067938A CN 101609855 A CN101609855 A CN 101609855A
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- electrode
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- insulating barrier
- capacitance
- photosensitive capacitor
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- 239000003990 capacitor Substances 0.000 title claims abstract description 88
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 239000000758 substrate Substances 0.000 title claims description 40
- 239000010409 thin film Substances 0.000 claims abstract description 68
- 239000004065 semiconductor Substances 0.000 claims abstract description 67
- 230000004888 barrier function Effects 0.000 claims abstract description 57
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 52
- 229910052751 metal Inorganic materials 0.000 claims description 43
- 239000002184 metal Substances 0.000 claims description 43
- 238000002161 passivation Methods 0.000 claims description 25
- 238000000151 deposition Methods 0.000 claims description 22
- 230000008021 deposition Effects 0.000 claims description 20
- 238000005530 etching Methods 0.000 claims description 17
- 239000004020 conductor Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 18
- 229910052710 silicon Inorganic materials 0.000 claims 18
- 239000010703 silicon Substances 0.000 claims 18
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract description 40
- 229920002120 photoresistant polymer Polymers 0.000 description 16
- 238000010586 diagram Methods 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 9
- 239000012071 phase Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical group O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/58—Arrangements comprising a monitoring photodetector
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (10)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200810067938XA CN101609855B (zh) | 2008-06-20 | 2008-06-20 | 光敏电容、光感测电路、基板及其制造工艺和显示装置 |
US12/456,719 US8300169B2 (en) | 2008-06-20 | 2009-06-22 | TFT substrate, LCD device using same and method for manufacturing TFT substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200810067938XA CN101609855B (zh) | 2008-06-20 | 2008-06-20 | 光敏电容、光感测电路、基板及其制造工艺和显示装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101609855A true CN101609855A (zh) | 2009-12-23 |
CN101609855B CN101609855B (zh) | 2013-09-18 |
Family
ID=41430873
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200810067938XA Active CN101609855B (zh) | 2008-06-20 | 2008-06-20 | 光敏电容、光感测电路、基板及其制造工艺和显示装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8300169B2 (zh) |
CN (1) | CN101609855B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102759400A (zh) * | 2011-04-25 | 2012-10-31 | 三星电子株式会社 | 光感测装置和驱动光感测装置的方法 |
CN105307337A (zh) * | 2015-11-02 | 2016-02-03 | 固安翌光科技有限公司 | 一种自动调节亮度的oled发光器件及其制备方法 |
CN107300812A (zh) * | 2017-05-12 | 2017-10-27 | 惠科股份有限公司 | 一种显示面板、显示面板的制程方法和显示装置 |
CN110828177A (zh) * | 2019-10-28 | 2020-02-21 | 宁波大学 | 一种基于卤化物钙钛矿的光敏电容器及其制备方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5349174A (en) * | 1992-05-06 | 1994-09-20 | U.S. Philips Corporation | Image sensor with transparent capacitive regions |
TW200411304A (en) * | 2002-12-24 | 2004-07-01 | Quanta Display Inc | TFT LCD and manufacturing method thereof |
Family Cites Families (15)
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JP2738613B2 (ja) * | 1991-10-31 | 1998-04-08 | シャープ株式会社 | 液晶演算素子及びこれを用いた画像処理システム |
JPH0611713A (ja) | 1992-06-25 | 1994-01-21 | Toshiba Corp | バックライト自動調整機能付きディスプレイ装置 |
JP3027298B2 (ja) | 1994-05-31 | 2000-03-27 | シャープ株式会社 | バックライト制御機能付き液晶表示装置 |
US6330387B1 (en) * | 1996-11-08 | 2001-12-11 | The Arizona Board Of Regents On Behalf Of The University Of Arizona | Coupled plasmon-waveguide resonance spectroscopic device and method for measuring film properties in the ultraviolet and infrared spectral ranges |
CN1307479C (zh) * | 2003-07-10 | 2007-03-28 | 友达光电股份有限公司 | 电容器装置 |
KR101001960B1 (ko) * | 2003-12-26 | 2010-12-17 | 삼성전자주식회사 | 광센서와 이를 갖는 액정 표시 장치 |
US7773139B2 (en) * | 2004-04-16 | 2010-08-10 | Apple Inc. | Image sensor with photosensitive thin film transistors |
JP2006013407A (ja) * | 2004-05-21 | 2006-01-12 | Sanyo Electric Co Ltd | 光量検出回路およびそれを用いた表示パネル |
KR101159324B1 (ko) * | 2005-06-09 | 2012-06-22 | 엘지디스플레이 주식회사 | 이미지 센싱 기능을 가지는 액정표시장치 및 그 제조방법과이를 이용한 이미지 센싱 방법 |
JP2007065243A (ja) * | 2005-08-31 | 2007-03-15 | Sanyo Epson Imaging Devices Corp | 表示装置 |
JP2007279093A (ja) * | 2006-04-03 | 2007-10-25 | Epson Imaging Devices Corp | 液晶表示装置 |
CN100529866C (zh) | 2006-04-19 | 2009-08-19 | 群康科技(深圳)有限公司 | 液晶显示器制造方法 |
CN100485476C (zh) * | 2006-04-26 | 2009-05-06 | 友达光电股份有限公司 | 液晶显示器的制造方法 |
US8674949B2 (en) * | 2007-02-20 | 2014-03-18 | Japan Displays Inc. | Liquid crystal display apparatus |
TWI358570B (en) * | 2007-11-27 | 2012-02-21 | Univ Nat Chiao Tung | Lcd with ambient light sense function and method t |
-
2008
- 2008-06-20 CN CN200810067938XA patent/CN101609855B/zh active Active
-
2009
- 2009-06-22 US US12/456,719 patent/US8300169B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5349174A (en) * | 1992-05-06 | 1994-09-20 | U.S. Philips Corporation | Image sensor with transparent capacitive regions |
TW200411304A (en) * | 2002-12-24 | 2004-07-01 | Quanta Display Inc | TFT LCD and manufacturing method thereof |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102759400A (zh) * | 2011-04-25 | 2012-10-31 | 三星电子株式会社 | 光感测装置和驱动光感测装置的方法 |
CN102759400B (zh) * | 2011-04-25 | 2017-06-06 | 三星电子株式会社 | 光感测装置和驱动光感测装置的方法 |
CN105307337A (zh) * | 2015-11-02 | 2016-02-03 | 固安翌光科技有限公司 | 一种自动调节亮度的oled发光器件及其制备方法 |
CN105307337B (zh) * | 2015-11-02 | 2019-02-12 | 固安翌光科技有限公司 | 一种自动调节亮度的oled发光器件及其制备方法 |
CN107300812A (zh) * | 2017-05-12 | 2017-10-27 | 惠科股份有限公司 | 一种显示面板、显示面板的制程方法和显示装置 |
CN110828177A (zh) * | 2019-10-28 | 2020-02-21 | 宁波大学 | 一种基于卤化物钙钛矿的光敏电容器及其制备方法 |
CN110828177B (zh) * | 2019-10-28 | 2021-10-01 | 宁波大学 | 一种基于卤化物钙钛矿的光敏电容器及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
US8300169B2 (en) | 2012-10-30 |
CN101609855B (zh) | 2013-09-18 |
US20090316092A1 (en) | 2009-12-24 |
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ASS | Succession or assignment of patent right |
Owner name: QIMEI ELECTRONIC CO LTD Free format text: FORMER OWNER: INNOLUX DISPLAY CO., LTD. Effective date: 20120227 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Effective date of registration: 20120227 Address after: 518109 Longhua, Shenzhen, town, Foxconn science and Technology Industrial Park E District, building 1, floor 4, Applicant after: Qunkang Technology (Shenzhen) Co., Ltd. Co-applicant after: Chimei Optoelectronics Co., Ltd. Address before: 518109 Longhua, Shenzhen, town, Foxconn science and Technology Industrial Park E District, building 1, floor 4, Applicant before: Qunkang Technology (Shenzhen) Co., Ltd. Co-applicant before: Innolux Display Group |
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Owner name: INNOLUX DISPLAY CORPORATION Free format text: FORMER OWNER: QIMEI ELECTRONIC CO LTD Effective date: 20130822 |
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TA01 | Transfer of patent application right |
Effective date of registration: 20130822 Address after: 518109 Longhua, Shenzhen, town, Foxconn science and Technology Industrial Park E District, building 1, floor 4, Applicant after: Qunkang Technology (Shenzhen) Co., Ltd. Applicant after: Innolux Display Group Address before: 518109 Longhua, Shenzhen, town, Foxconn science and Technology Industrial Park E District, building 1, floor 4, Applicant before: Qunkang Technology (Shenzhen) Co., Ltd. Applicant before: Chimei Optoelectronics Co., Ltd. |
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