CN101606094A - 用于通过照明膜进行自动检测的方法和装置 - Google Patents

用于通过照明膜进行自动检测的方法和装置 Download PDF

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Publication number
CN101606094A
CN101606094A CNA2008800042806A CN200880004280A CN101606094A CN 101606094 A CN101606094 A CN 101606094A CN A2008800042806 A CNA2008800042806 A CN A2008800042806A CN 200880004280 A CN200880004280 A CN 200880004280A CN 101606094 A CN101606094 A CN 101606094A
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CN
China
Prior art keywords
light source
light
sheet material
coiled material
angle
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Pending
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CNA2008800042806A
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English (en)
Chinese (zh)
Inventor
史蒂文·P·弗洛德
詹姆斯·A·马斯特曼
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN101606094A publication Critical patent/CN101606094A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CNA2008800042806A 2007-02-16 2008-01-29 用于通过照明膜进行自动检测的方法和装置 Pending CN101606094A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US89041507P 2007-02-16 2007-02-16
US60/890,415 2007-02-16

Publications (1)

Publication Number Publication Date
CN101606094A true CN101606094A (zh) 2009-12-16

Family

ID=39690455

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2008800042806A Pending CN101606094A (zh) 2007-02-16 2008-01-29 用于通过照明膜进行自动检测的方法和装置

Country Status (5)

Country Link
EP (1) EP2132590A1 (ja)
JP (1) JP2010519516A (ja)
KR (1) KR20090113886A (ja)
CN (1) CN101606094A (ja)
WO (1) WO2008100703A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107102008A (zh) * 2016-02-22 2017-08-29 特克斯玛贸易有限公司 检测及/或轨道监视装置，在此装置中使用一布置的应用，以及用于操作此装置的方法
CN110609040A (zh) * 2019-09-30 2019-12-24 苏州精濑光电有限公司 一种隔膜的光学检测方法
CN110658201A (zh) * 2019-09-30 2020-01-07 苏州精濑光电有限公司 一种隔膜的光学检测机构

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5521283B2 (ja) * 2008-05-14 2014-06-11 パナソニック株式会社 基板検査装置
CN101819165B (zh) * 2009-02-27 2013-08-07 圣戈本玻璃法国公司 用于检测图案化基板的缺陷的方法及系统
JP6073704B2 (ja) * 2013-02-25 2017-02-01 倉敷紡績株式会社 外観検査装置
KR101366816B1 (ko) * 2013-07-12 2014-02-25 주식회사 에이피에스 그래핀 인쇄패턴 검사장치와, 그래핀 인쇄패턴 검사시스템 및 그 운용방법
KR101366815B1 (ko) * 2013-07-12 2014-02-25 주식회사 에이피에스 그래핀 인쇄패턴 검사장치와, 그래핀 인쇄패턴 검사시스템 및 그 운용방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07311160A (ja) * 1994-05-19 1995-11-28 Nitto Denko Corp 外観検査方法および検査装置
JP4484177B2 (ja) * 1999-02-19 2010-06-16 大日本印刷株式会社 面ぎらの定量的評価方法及び防眩性フィルムの製造方法
US7105848B2 (en) * 2002-04-15 2006-09-12 Wintriss Engineering Corporation Dual level out-of-focus light source for amplification of defects on a surface
US7382457B2 (en) * 2004-01-22 2008-06-03 Wintriss Engineering Corporation Illumination system for material inspection
JP4628824B2 (ja) * 2005-03-10 2011-02-09 富士フイルム株式会社 フイルムの欠陥検査装置及びフイルムの製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107102008A (zh) * 2016-02-22 2017-08-29 特克斯玛贸易有限公司 检测及/或轨道监视装置，在此装置中使用一布置的应用，以及用于操作此装置的方法
CN110609040A (zh) * 2019-09-30 2019-12-24 苏州精濑光电有限公司 一种隔膜的光学检测方法
CN110658201A (zh) * 2019-09-30 2020-01-07 苏州精濑光电有限公司 一种隔膜的光学检测机构
WO2021062938A1 (zh) * 2019-09-30 2021-04-08 苏州精濑光电有限公司 一种隔膜的光学检测机构
WO2021062939A1 (zh) * 2019-09-30 2021-04-08 苏州精濑光电有限公司 隔膜的光学检测方法
CN110609040B (zh) * 2019-09-30 2022-01-07 苏州精濑光电有限公司 一种隔膜的光学检测方法

Also Published As

Publication number Publication date
WO2008100703A1 (en) 2008-08-21
EP2132590A1 (en) 2009-12-16
JP2010519516A (ja) 2010-06-03
KR20090113886A (ko) 2009-11-02

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Open date: 20091216