CN101599421B - 一种硅片码片机 - Google Patents
一种硅片码片机 Download PDFInfo
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- CN101599421B CN101599421B CN200910064693XA CN200910064693A CN101599421B CN 101599421 B CN101599421 B CN 101599421B CN 200910064693X A CN200910064693X A CN 200910064693XA CN 200910064693 A CN200910064693 A CN 200910064693A CN 101599421 B CN101599421 B CN 101599421B
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Abstract
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Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN200910064693XA CN101599421B (zh) | 2009-04-21 | 2009-04-21 | 一种硅片码片机 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN200910064693XA CN101599421B (zh) | 2009-04-21 | 2009-04-21 | 一种硅片码片机 |
Publications (2)
Publication Number | Publication Date |
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CN101599421A CN101599421A (zh) | 2009-12-09 |
CN101599421B true CN101599421B (zh) | 2011-12-07 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN200910064693XA Expired - Fee Related CN101599421B (zh) | 2009-04-21 | 2009-04-21 | 一种硅片码片机 |
Country Status (1)
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CN (1) | CN101599421B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107093651B (zh) * | 2017-05-18 | 2023-08-04 | 江西比太科技有限公司 | 太阳能硅片二合一自动上下料设备 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1779936A (zh) * | 2005-10-19 | 2006-05-31 | 哈尔滨工业大学 | 二维并联驱动的硅片搬运机器人 |
CN1986086A (zh) * | 2006-12-22 | 2007-06-27 | 上海集成电路研发中心有限公司 | 半导体硅片的清洗装置及清洗方法 |
CN201383491Y (zh) * | 2009-04-21 | 2010-01-13 | 新乡市华盛天龙数控设备有限公司 | 一种硅片码片机 |
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2009
- 2009-04-21 CN CN200910064693XA patent/CN101599421B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1779936A (zh) * | 2005-10-19 | 2006-05-31 | 哈尔滨工业大学 | 二维并联驱动的硅片搬运机器人 |
CN1986086A (zh) * | 2006-12-22 | 2007-06-27 | 上海集成电路研发中心有限公司 | 半导体硅片的清洗装置及清洗方法 |
CN201383491Y (zh) * | 2009-04-21 | 2010-01-13 | 新乡市华盛天龙数控设备有限公司 | 一种硅片码片机 |
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Publication number | Publication date |
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CN101599421A (zh) | 2009-12-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: ZHANG WANJIN Free format text: FORMER OWNER: XINXIANG HUASHENG TIANLONG CNC EQUIPMENT CO., LTD. Effective date: 20110215 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20110215 Address after: No. 1018 Xinxiang City, Henan province 453000 Frestech high tech Development Zone Avenue Applicant after: Zhang Wanjin Address before: No. 1018 Xinxiang City, Henan province 453000 Frestech high tech Development Zone Avenue Applicant before: Xinxiang Huasheng Tianlong CNC Equipment Co., Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111207 Termination date: 20150421 |
|
EXPY | Termination of patent right or utility model |