CN101563183A - Laser welding device and laser welding method - Google Patents
Laser welding device and laser welding method Download PDFInfo
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- CN101563183A CN101563183A CNA2007800421615A CN200780042161A CN101563183A CN 101563183 A CN101563183 A CN 101563183A CN A2007800421615 A CNA2007800421615 A CN A2007800421615A CN 200780042161 A CN200780042161 A CN 200780042161A CN 101563183 A CN101563183 A CN 101563183A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
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- Optics & Photonics (AREA)
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- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention provides a laser welding device capable of efficient welding. The laser welding device seals a workpiece by applying a laser beam to it. The laser welding device has work areas for performing work on workpieces. An application position change section receives a laser beam from a laser beam emission section to change that position on a workpiece to which the laser beam is applied and performs welding of the workpieces in the work areas. Further, in order that welding is performed for the workpieces on a work-area-by-work-area basis, movement means moves the application position change section to that position in each work area where the application position change section is to be placed. That is, the laser beam emission section and the application position change section are moved for work by a single device. By this, welding is efficiently performed to increase the amount of production by the entire device.
Description
Technical field
The present invention relates to a kind of laser soldering device and method for laser welding by the workpiece illuminating laser beam is welded.
Background technology
In the past, in the potting of light device element, quartzy vibrator etc.,, welded (laser weld) lid and encapsulation by to the lid illuminating laser beam.For example, patent documentation 1 has been put down in writing as lower device: from probe to the workpiece illuminating laser beam, the baffle plate of cut-out/removal IC encapsulation.
In the prior art, the general place's fixed configurations probe that waits above vacuum chamber after the evacuation of having carried out vacuum chamber (vacuumizing), carries out weld job.Therefore, during the operations such as the workpiece replacement in carrying out vacuum chamber, evacuation, can't carry out weld job, so exist weld job to need the tendency of long period.And, in above-mentioned patent documentation 1 described technology, also be difficult to effectively carry out weld job.
Patent documentation 1:JP spy opens flat 10-216975 communique
Summary of the invention
The problem to be solved in the present invention comprises above-mentioned example.The object of the present invention is to provide a kind of laser soldering device and method for laser welding that can effectively carry out weld job.
In preferred implementation of the present invention, provide a kind of laser soldering device, by the workpiece illuminating laser beam is welded, to seal above-mentioned workpiece, it has: a plurality of operating areas, and accommodate a plurality of above-mentioned workpiece that is positioned on the pallet, and this workpiece is carried out operation; The laser beam injection part penetrates above-mentioned laser beam; Irradiating position changing section is accepted by the position on the above-mentioned workpiece of this laser beam of change irradiation, to carry out the weld job to the workpiece in the above-mentioned operating area from the laser beam of above-mentioned laser beam injection part ejaculation; And mobile unit, in order in each of above-mentioned a plurality of operating areas, to carry out above-mentioned weld job, and make above-mentioned irradiating position changing section move to the place that in above-mentioned a plurality of operating areas, should dispose above-mentioned irradiating position changing section to above-mentioned workpiece.
Above-mentioned laser soldering device is preferred for by the workpiece illuminating laser beam being welded with the sealing workpiece.Laser soldering device has a plurality of operating areas, accommodates a plurality of above-mentioned workpiece that is positioned on the pallet, and workpiece is carried out operation.And irradiating position changing section is accepted by the position on the workpiece of change illuminating laser beam, to carry out the weld job to the workpiece in the operating area from the laser beam of laser beam injection part ejaculation.Further, mobile unit is in order to carry out the weld job to workpiece in each of a plurality of operating areas, and makes irradiating position changing section move to the place that should dispose irradiating position changing section in a plurality of operating areas.That is, laser beam injection part and irradiating position changing section can move and carry out operation by a table apparatus.Therefore, can carry out weld job efficiently by above-mentioned laser soldering device.
In a mode of above-mentioned laser soldering device, when above-mentioned mobile unit finishes the weld job of the workpiece in the above-mentioned operating area whenever above-mentioned irradiating position changing section, make above-mentioned irradiating position changing section move to the above-mentioned place that should dispose in the operating area different with the operating area of having carried out above-mentioned weld job.
In the another way of above-mentioned laser soldering device, above-mentioned a plurality of operating area has a plurality of operating areas of carrying out evacuation, above-mentioned irradiating position changing section, in above-mentioned operating area, carry out the replacement of the open and above-mentioned pallet of atmospheric pressure and above-mentioned evacuation during, to different with above-mentioned operating area, the workpiece of having finished in the operating area of evacuation carries out weld job, when above-mentioned weld job is finished, move to the above-mentioned place that should dispose in the operating area of having finished above-mentioned evacuation by above-mentioned mobile unit, the workpiece in the above-mentioned operating area is carried out above-mentioned weld job.
In this mode,, and in two operating areas, carry out alternately repeatedly the weld job of workpiece and the operation of atmospheric pressure opening and pallet replacement and evacuation by mutual mobile irradiating position changing section between two operating areas.Therefore,, can efficiently carry out weld job, improve the output of device integral body according to laser soldering device.
In the another way of above-mentioned laser soldering device, be set in the number of the above-mentioned workpiece of placing on the above-mentioned pallet as follows: make required time of the above-mentioned weld job of all workpiece in the above-mentioned operating area and to carry out the time that the open and above-mentioned pallet of above-mentioned atmospheric pressure is replaced and above-mentioned evacuation is required in above-mentioned operating area equal substantially.So, can make moment that in operating area weld job finishes and to carry out atmospheric pressure in another operating area open and pallet is replaced and basically identical is constantly finished in the evacuation operation.Therefore, the weld job of irradiating position changing section is continued substantially incessantly in two operating areas, thereby can further improve the efficiency of movement of device integral body.
In the another way of above-mentioned laser soldering device, above-mentioned a plurality of operating areas have: the operating area that is set at inert gas atmosphere; With the operating area of carrying out evacuation.
In the another way of above-mentioned laser soldering device, above-mentioned irradiating position changing section, to the workpiece in the operating area that is set at above-mentioned inert gas atmosphere, on the position that in above-mentioned workpiece, should weld, part beyond the assigned position is carried out weld job, to the workpiece in the operating area of carrying out above-mentioned evacuation, weld job is carried out in the afore mentioned rules position of not welding by the weld job in the operating area that is set at above-mentioned inert gas atmosphere.
In this mode, use a plurality of operating areas to carry out weld job to workpiece through two stages.At this moment, in being set at the operating area of inert gas atmosphere, carry out the major part welding, in the operating area of having carried out evacuation, carry out a spot of welding.Therefore, can be suppressed at the generation of the welding slag that the weld job in the operating area of evacuation causes.Therefore, can alleviate of the pollution of welding slag to the penetrating window of operating area.
Preferred afore mentioned rules position is the part that is used to extract out the gas that produces when above-mentioned weld job in above-mentioned workpiece.At this moment, when in the operating area of evacuation, carrying out evacuation, at the gas that can when the assigned position of workpiece is suitably extracted weld job out, in workpiece, produce.
Preferred in above-mentioned laser soldering device: the number that is set in the above-mentioned workpiece of placing on the above-mentioned pallet as follows: as to make the required time of operation in the operating area that is set at above-mentioned inert gas atmosphere and carrying out carrying out in the operating area of above-mentioned evacuation the time that the open and above-mentioned pallet of atmospheric pressure is replaced and above-mentioned evacuation is required equal substantially.Therefore, the weld job of irradiating position changing section is continued substantially incessantly in two operating areas, thereby can further improve the efficiency of movement of device integral body.
In the another way of above-mentioned laser soldering device, above-mentioned laser beam injection part and above-mentioned irradiating position changing section connect by optical fiber, and by the above-mentioned laser beam of this Optical Fiber Transmission.So, separate laser beam injection part and irradiating position changing section and when constituting, laser beam suitably can be transferred to irradiating position changing section, be easy to only mobile irradiating position changing section simultaneously.
In the another way of above-mentioned laser soldering device, above-mentioned pallet is fixing in above-mentioned operating area when carrying out above-mentioned weld job, and above-mentioned mobile unit moves above-mentioned irradiating position changing section on two vertical substantially directions.Therefore, can only mobile irradiating position changing section and carry out weld job, therefore need not to be provided with separately the mechanism that is used for mobile pallet in the weld job process.Therefore, can make the operating area compact in size, and can make and simplify the structure.Thereby can reduce the cost of operating area.
In the another way of above-mentioned laser soldering device, above-mentioned pallet moves to a direction in above-mentioned operating area when carrying out above-mentioned weld job, above-mentioned mobile unit moves above-mentioned irradiating position changing section on a direction different with the moving direction of above-mentioned pallet.In this constitutes, significantly mobile irradiating position changing section, a small amount of mobile pallet in weld job.Therefore, the compact in size of operating area can be made, and its designs simplification can be made.
In other embodiments of the present invention, a kind of method for laser welding is provided, this method is carried out by the device that has with lower member, and welds with the sealing workpiece: a plurality of operating areas, accommodate a plurality of workpiece that are positioned on the pallet, and this workpiece is carried out operation; The laser beam injection part, outgoing laser beam; Irradiating position changing section, the laser beam that acceptance is penetrated from above-mentioned laser beam injection part, by the position on the above-mentioned workpiece of this laser beam of change irradiation, carry out weld job to the workpiece in the above-mentioned operating area, wherein, have mobile process, in order in each of above-mentioned a plurality of operating areas, to carry out above-mentioned weld job, and make above-mentioned irradiating position changing section move to the place that in above-mentioned a plurality of operating areas, should dispose above-mentioned irradiating position changing section above-mentioned workpiece.So, can carry out weld job efficiently, improve the output of device integral body.
Description of drawings
Fig. 1 is the figure that the summary of the laser soldering device of expression the present invention the 1st embodiment constitutes.
Fig. 2 represents the synoptic diagram of pallet and workpiece.
Fig. 3 is the figure that is used to specify the welding sequence of the 1st embodiment.
Fig. 4 is the figure that the summary of the laser soldering device of expression the present invention the 2nd embodiment constitutes.
Fig. 5 is the figure that is used for specifying the weld job that the workpiece in two operating areas is carried out at the 2nd embodiment.
Fig. 6 is the figure that the summary of the laser soldering device of expression the present invention the 3rd embodiment constitutes.
Label declaration
1 laser-beam welding machine
2 optical fiber
3 probes
4,14 operating areas
5,15 penetrating window
6 pallets
30 workpiece
101,102,103 laser soldering devices
The specific embodiment
Following with reference to description of drawings the preferred embodiments of the present invention.
(the 1st embodiment)
The 1st embodiment of the present invention at first is described.
(formation of laser soldering device)
Fig. 1 represents that the summary of the laser soldering device 101 of the 1st embodiment constitutes.The figure of laser soldering device 101 is observed in Fig. 1 (a) expression from the top, the partial cross section figure (sectional view of operating area 4a, 4b) of the laser soldering device 101 of the cut-out line B1-B2 of Fig. 1 (b) expression in Fig. 1 (a).In addition, in Fig. 1 (a), omitted workpiece 30 for convenience of explanation.
Fig. 2 represents the synoptic diagram of pallet 6 and workpiece 30.The figure of the pallet 6 that is placed with workpiece 30 is observed in Fig. 2 (a) expression from the top, the perspective view of Fig. 2 (b) expression workpiece 30.Shown in Fig. 2 (a), a plurality of workpiece 30 of configuration on pallet 6.And shown in Fig. 2 (b), workpiece 30 has tabular lid 30a, reaches the encapsulation 30b of case shape, and inside contains electronic components (not shown).Laser beam from above-mentioned laser soldering device 101 shines lid 30a, by lid 30a being welded on the encapsulation 30b, carries out the sealing of workpiece 30.
Returning Fig. 1 describes.Laser-beam welding machine 1 is the device of outgoing laser beam.For example, laser-beam welding machine 1 is constituted as laser beams such as sending YAG laser or fibre laser.Laser-beam welding machine 1 is connected with optical fiber 2, and the laser beam of ejaculation is by optical fiber 2.That is, the energy of laser beam is by optical fiber 2 transmission.And the other end of optical fiber 2 is connected with probe 3.So, the laser beam that penetrates from laser-beam welding machine 1 is transferred to probe 3.Connect laser-beam welding machine 1 and probe 3 by optical fiber 2 like this, thereby can suitably transmit laser beam, be easy to only make probe 3 to move simultaneously to the probe 3 that separates formation with laser-beam welding machine 1.In addition, laser-beam welding machine 1 plays a role as the laser beam injection part among the present invention.
And probe 3 moves by direction shown in the arrow A 1 of not shown travel mechanism (being equivalent to " mobile unit " among the present invention) in Fig. 1, the A2.Particularly, probe 3 with the face of the planar horizontal of having placed laser-beam welding machine 1, pallet 6 etc. in move to vertical substantially two direction A1, A2.Below direction shown in the arrow A 1 is called " X-direction ", direction shown in the arrow A 2 is called " Y direction ".And, in Fig. 1 (b), for convenience of explanation, oblique expression Y direction A2.
Further, laser soldering device 101 has two operating area 4a, 4b.Below when not distinguishing operating area 4a, 4b, be expressed as " operating area 4 " merely.Operating area 4 is spaces operation (hereinafter referred to as " weld job "), that sealably constitute of carrying out welding work pieces 30, accommodates the pallet 6 of having placed a plurality of workpiece 30.Top separately in this operating area 4 is provided with the penetrating window 5a, the 5b that are made of glass etc.The laser beam that penetrates from above-mentioned probe 3 incides in the operating area 4 via penetrating window 5a, 5b.And the laser beam via penetrating window 5a, 5b incident shines workpiece 30 like this, thereby carries out the welding of workpiece 30.In addition, can describe in detail after a while, weld job carries out according to any one zone of operating area 4a, 4b.And, connect not shown pump etc. in the operating area 4, attract internal gas (i.e. " evacuation ") by this pump, thereby inside is set to vacuum.That is, operating area 4a, 4b play a role as vacuum chamber.Above-mentioned weld job keeps carrying out under the state of vacuum in operating area 4.
(welding sequence)
Then specify the welding sequence of the laser soldering device 101 of the 1st embodiment.
In the 1st embodiment, move alternately above two operating area 4a, 4b by making probe 3, thereby carry out the weld job of workpiece 30 by an operating area 4.Particularly, in operating area 4, carry out the atmosphere opening of the weld job of workpiece 30 and operating area 4 repeatedly alternately and be placed with the replacement of pallet 6 of the workpiece 30 of having finished weld job and the operation of evacuation.Particularly, the workpiece 30 in an operating area 4 (evacuation has been carried out in this operating area 4) is carried out weld job during, in another operating area 4, carry out atmospheric pressure open and the replacement of pallet 6 and the operation of evacuation.And, when this weld job is finished, probe 3 is moved to the top of the operating area 4 of carrying out last time such as evacuation etc., workpiece 30 in this operating area 4 are carried out weld job, and in carrying out the operating area 4 of weld job last time, carry out atmospheric pressure open and the replacement of pallet 6 and the operation of evacuation.Carry out this operation afterwards repeatedly.
Fig. 3 is the figure that is used to specify the welding sequence of the 1st embodiment.Fig. 3 (a) is the schematic diagram of a series of operations of carrying out according to each operating area 4 of expression, the sectional view (sectional view of operating area 4a, 4b) of the laser soldering device 101 of the cut-out line B1-B2 of expression in Fig. 1 (a).And Fig. 3 (b) is the figure of expression to the weld job of a workpiece 30, and the figure of workpiece 30 is observed in expression from the top.
At first, shown in the arrow 80 among Fig. 3 (a), the operating area 4a (moving to the direction of operating area 4a in this example) that probe 3 is moved to should carry out weld job from operating area 4b.Particularly, probe 3 is moved to the top of the operating area 4a that should carry out weld job (specifically being the top of penetrating window 5a).And probe 3 moves to penetrating window 5a when top (moving to carrying out weld job should dispose the place of probe 3 time), begins the weld job to the workpiece in the 4a of operating area 30.Particularly, probe 3 is to the workpiece 30 illuminating laser beam LB that should weld.At this moment, probe 3 carries out weld job according to the image of the workpiece of being taken by inner camera 30.Therefore, the action positioning accuracy of probe 3 is no problem.In addition, the weld job of workpiece 30 and camera are carried out (promptly carrying out simultaneously) to operations such as the shooting of workpiece 30, image processing are parallel.
Particularly, shown in Fig. 3 (b), carry out welding to workpiece 30.In Fig. 3 (b), the hachure zone C is represented the zone that should weld, the zone of answering illuminating laser beam LB when promptly welding, and solid arrow represents to weld the direction of advancing.At this moment, the welding of workpiece 30 is undertaken by near the illuminating laser beam LB periphery of lid 30a.Particularly, probe 3 moves the irradiation position of laser beam LB so that near the irradiation position of the laser beam LB week periphery of lid 30a, thereby welds.In addition, in Fig. 3 (b), expression is only to the example of lid 30a illuminating laser beam LB, but also can be by welding to lid 30a and encapsulation 30b both sides illuminating laser beam LB.
Further, when carrying out the weld job among the 4a of operating area, probe 3 suitably can be moved to X-direction A1 and Y direction A2 and weld.This be because, but (this zone is the zone by regulation such as current mirror to make the zone of illuminating laser beam LB under the state that probe 3 is fixed, hereinafter referred to as " but irradiation area ") on pallet 6, move, thus carry out pallet 6a is gone up the welding of all workpiece 30 of placing.At this moment, but when the weld job of the workpiece 30 that exists in the irradiation area finished, probe 3 is moved to any one direction at least of X-direction A1 and Y direction A2.Particularly, but probe 3 is moved so that a plurality of workpiece 30 that weld as yet suitably enter in the irradiation area of probe 3.When as above upward the weld job of whole workpiece 30 of placement was finished to pallet 6a, when promptly the weld job among the 4a of operating area finished, probe 3 moved to the top that then should carry out the operating area 4b of weld job.
So only movable scan head 3 carries out weld job, so need not to be provided with separately the mechanism that is used for mobile pallet 6 in the weld job.Therefore, can make the compact in size of the operating area 4 that plays a role as vacuum chamber, and can make it constitute simplification.Thereby can reduce the cost of operating area 4.And, can shorten activity duration to the evacuation of operating area 4, the action beat is accelerated.
Operation among the 4b of operating area then is described.When in the 4a of operating area, just carrying out the welding to workpiece 30 as mentioned above, in the 4b of operating area, carry out following operation.At first, make operating area 4b atmospheric pressure open, shown in the arrow 81 among Fig. 3 (a), the pallet 6b that is placed with the workpiece 30 of finishing weld job is discharged from operating area 4b, and the pallet 6 that will be placed with the workpiece 30 that does not carry out weld job as yet is sent to operating area 4b.That is, carry out the replacement of pallet 6.After the replacement of this pallet 6 is finished, shown in the arrow 83 among Fig. 3 (a), carry out the evacuation operation of operating area 4b.Particularly, by attraction internal gas such as not shown pumps, thereby operating area 4b is set at vacuum.Afterwards, in the 4b of operating area, the weld job that is undertaken workpiece 30 by probe 3.
As mentioned above, in the 1st embodiment, probe 3 is moved above two operating areas 4 alternately, thereby in two operating area 4a, 4b, carry out replacement and evacuation operation repeatedly alternately weld job and the atmospheric pressure opening and the pallet 6 of workpiece 30.Therefore,, can efficiently carry out weld job, improve the output of device integral body according to laser soldering device 101.
In addition, preferably be set in the number of the workpiece of placing on the pallet 6 30 as follows: make required time of the weld job of all workpiece 30 in the operating area 4 and to carry out atmospheric pressure in operating area 4 open and pallet 6 is replaced and the evacuation required time is equal substantially.So, can make moment that in operating area weld job finishes, and to carry out atmospheric pressure in another operating area open and pallet 6 is replaced and basically identical is constantly finished in the evacuation operation.Therefore, the weld job of probe 3 is continued substantially incessantly in two operating areas 4, thereby can further improve the efficiency of movement of device integral body.In addition, the number that should be placed on a workpiece 30 on the pallet 6 can be obtained according to the following time at least: required time of the replacement operation of open required time of the atmospheric pressure of required time of the weld job of a workpiece 30, operating area 4, pallet 6, and required time of operating area 4 evacuation.
More than represent to use two operating area 4a, 4b to carry out the embodiment of weld job, but also can use the operating area more than three to carry out weld job.
(the 2nd embodiment)
The 2nd embodiment of the present invention then is described.
In the 2nd embodiment, also be by making probe 3 mutual moving above two operating areas to carry out weld job according to each operating area to workpiece 30, identical with above-mentioned the 1st embodiment in this.But the difference with the 1st embodiment in the 2nd embodiment is that replacement makes two operating area both sides' evacuation, and only makes an operating area evacuation, and another operating area is set at inert gas atmosphere.And, in the 2nd embodiment, in two operating areas, carry out different weld jobs.Particularly, in being set at the operating area of inert gas atmosphere, on the position that in workpiece 30, should weld, the part beyond the assigned position is carried out weld job (be residual assigned position and weld).On the other hand, in the evacuation operating area, carry out weld job in being set at the operating area of inert gas atmosphere, carrying out post-job workpiece 30.Particularly, in the operating area of evacuation, the assigned position that does not weld is carried out weld job in being set at the operating area of inert gas atmosphere.That is, in the 2nd embodiment, use two operating areas, workpiece 30 is carried out weld job through two stages.In addition, the afore mentioned rules position be when being used for when evacuation extracting weld job out workpiece 30 in the part (hereinafter referred to as " vacuum exhaust portion ") of the gas of generation.
Fig. 4 represents the summary pie graph of the welder 102 of the 2nd embodiment.Fig. 4 represents to observe from the top figure of laser soldering device 102.Laser soldering device 102 is with the difference of the structure of the laser soldering device 101 of above-mentioned the 1st embodiment, replaces operating area 4a, 4b and has operating area 14a, 14b.In addition, to being marked with identical label, omit its explanation with laser soldering device 101 identical inscapes.
In the 2nd embodiment, by being moved alternately, probe 3 carries out weld job to workpiece 30 according to each operating area 14a, 14b above two operating area 14a, 14b, particularly, in the 14a of operating area, on the position that should weld in workpiece 30, residual assigned position (vacuum exhaust portion) welds.On the other hand, in the 14b of operating area, the workpiece behind the weld job among the 14a of operating area 30 is carried out weld job.Particularly, in the 14b of operating area, the vacuum exhaust portion of not welding is carried out weld job in the 14a of operating area.That is, in the 2nd embodiment, by the weld job in two stages among operating area 14a and the operating area 14b, sealing workpiece 30.And, in the 14a of operating area, carry out weld job during, in the 14b of operating area, carry out atmospheric pressure open and the replacement of pallet 6 and the operation of evacuation.On the other hand, in the 14b of operating area, carry out weld job during, in the 14a of operating area, carry out the replacement of pallet 6 etc.
Fig. 5 is the figure to the weld job of workpiece 30 that specifies among operating area 14a, the 14b.Weld job among Fig. 5 (a) expression operating area 14a, the weld job among Fig. 5 (b) expression operating area 14b.In addition, Fig. 5 (a), Fig. 5 (b) are the figure that observes workpiece 30 from the top.And hachure part D1, the D4 of the blacking of denseer ground are illustrated in the part that should carry out weld job among operating area 14a, the 14b respectively.Further, solid arrow represents to weld the direction of advancing.
Shown in Fig. 5 (a), in the 14a of operating area, carry out weld job to hachure part D1.Particularly, part D2 shown in the residual dotted line, one carries out weld job allly near lid 30a periphery.The vacuum exhaust portion of the gas that in work 30, produces when part D2 is equivalent to be used to extract weld job out shown in this dotted line.Then, in the 14b of operating area, the workpiece behind the weld job among the 14a of operating area 30 is carried out weld job.Particularly, shown in Fig. 5 (b), the workpiece 30 (workpiece 30 that the D3 of part shown in the oblique line is soldered) after the welding in the 14a of operating area is carried out operation.At this moment, in the 14b of operating area, carry out the not welding of the hachure part D4 of welding among the 14a of operating area.That is, carry out welding to vacuum exhaust portion.In addition, workpiece 30 in the 14a of operating area behind the weld job is housed under the situation of operating area 14b, when in the 14b of operating area, carrying out evacuation, extract the gas of generation workpiece 30 in when the weld job of operating area 14a out from the vacuum exhaust portion of this workpiece 30.
Therefore,, thereby also make probe 3 mutual weld job that carries out workpiece 30 that moves above two operating area 14a, 14b, therefore can carry out weld job efficiently according to the 2nd embodiment.And, in the 2nd embodiment, in being set at the operating area 14a of blanket of nitrogen, carry out the major part welding, in the 14b of the operating area of evacuation, carry out a spot of welding.Therefore, can effectively suppress to produce bits (hereinafter referred to as " welding slag ") such as metal fillings because of the weld job among the operating area 14b of evacuation causes workpiece 30.Therefore, can alleviate of the pollution of welding slag to the penetrating window 15b of operating area 14b.
And, preferably set the number of the workpiece of placing on the pallet 6 30 as follows: make the required time of operation among the operating area 14a that is set in the inert gas atmosphere and in the 14b of operating area, carry out the replacement of the open and pallet 6 of atmospheric pressure and time that evacuation is required equal substantially.Therefore, the weld job of probe 3 is continued substantially incessantly in two operating area 14a, 14b, thereby can further improve the efficiency of movement of device integral body.
And, above example use two operating area 14a, 14b to carry out the embodiment of weld job, also can use the operating area more than three to carry out weld job.And, in operating area 14a, 14b, be set at the zone of inert gas atmosphere and the zone that is set at vacuum and also can not fix.Further, be not limited to use nitrogen as inert gas.
(the 3rd embodiment)
The 3rd embodiment of the present invention then is described.In the 3rd embodiment, be with the difference of above-mentioned the 1st embodiment and the 2nd embodiment, replace probe 3 is moved to two directions (X-direction and Y direction), and pallet 6 is moved to a direction in the operating area, and make probe 3 to moving with the vertical substantially direction of the moving direction of pallet 6.
Fig. 6 represents the summary pie graph of the laser soldering device 103 of the 3rd embodiment.Fig. 6 represents to observe from the top figure of laser soldering device 103.In addition, to being marked with identical label, omit its explanation with laser soldering device 101 identical inscapes.
And laser soldering device 103 has: make pallet 6a in the 4a of operating area to travel mechanism (not shown) that direction shown in the arrow E 2 moves and make pallet 6b in the 4b of operating area to travel mechanism (not shown) that direction shown in the arrow E 3 moves.So, pallet 6a, 6b move to Y direction in operating area 4a, 4b respectively.But these travel mechanisms are mainly in order to move the irradiation area of probe 3 when the weld job, and mobile pallet 6a, 6b.
In the formation of the 3rd embodiment, significantly movable scan head 3, a small amount of mobile pallet 6 in the weld job.Therefore, according to the formation of the 3rd embodiment, with scanning constant head 3, only pallet 6 is compared to the formation that X-direction and Y direction move, can make the compact in size of the operating area 4 that plays a role as vacuum chamber, and it is constituted simplify, reduce the cost of operating area 4.
In addition, be not defined as pallet 6a, 6b are moved to Y direction.In other examples, make pallet 6a, 6b axle rotation around the focus point that passes through pallet 6a, 6b.So also can make the compact in size of the operating area 4 that plays a role as vacuum chamber, and formation is simplified.
And, above example make the embodiment of two operating area 4 both sides' evacuation, but be not limited thereto.In other examples, also can only make an operating area evacuation, another operating area is set at inert gas atmosphere.That is, in the formation of the 3rd embodiment, the formation of above-mentioned the 2nd embodiment also capable of being combined.Further, be not defined as and use two operating area 6a, 6b to carry out weld job, can use the operating area more than three to carry out weld job yet.
As mentioned above, the laser soldering device that present embodiment relates to has: a plurality of operating areas, and accommodate a plurality of workpiece that are positioned on the pallet, and workpiece is carried out operation; Laser-beam welding machine, outgoing laser beam; Probe is accepted by the position on the workpiece of change illuminating laser beam, to carry out the weld job to the workpiece in the operating area from the laser beam of laser-beam welding machine ejaculation; And travel mechanism, in order to carry out the weld job to workpiece in each of a plurality of operating areas, but probe moves to the place that should dispose probe in a plurality of operating areas.So, can carry out weld job efficiently, and improve the output of device integral body.
The present invention for example can be used in the device that light device element, quartzy vibrator etc. carry out potting.
Claims (12)
1. a laser soldering device by the workpiece illuminating laser beam is welded, to seal above-mentioned workpiece, is characterized in that, has:
The a plurality of above-mentioned workpiece that is positioned on the pallet is accommodated in a plurality of operating areas, and this workpiece is carried out operation;
The laser beam injection part penetrates above-mentioned laser beam;
Irradiating position changing section is accepted by the position on the above-mentioned workpiece of this laser beam of change irradiation, to carry out the weld job to the workpiece in the above-mentioned operating area from the laser beam of above-mentioned laser beam injection part ejaculation; With
Mobile unit in order to carry out the above-mentioned weld job to above-mentioned workpiece in each of above-mentioned a plurality of operating areas, and makes above-mentioned irradiating position changing section move to the place that should dispose above-mentioned irradiating position changing section in above-mentioned a plurality of operating areas.
2. laser soldering device according to claim 1, it is characterized in that, when above-mentioned mobile unit finishes the weld job of the workpiece in the above-mentioned operating area whenever above-mentioned irradiating position changing section, make above-mentioned irradiating position changing section move to the above-mentioned place that should dispose in the operating area different with the operating area of having carried out above-mentioned weld job.
3. laser soldering device according to claim 1 is characterized in that,
Above-mentioned a plurality of operating area has a plurality of operating areas of carrying out evacuation,
Above-mentioned irradiating position changing section,
In above-mentioned operating area, carry out the replacement of the open and above-mentioned pallet of atmospheric pressure and above-mentioned evacuation during, the workpiece in the operating area different with above-mentioned operating area, that finished evacuation is carried out weld job,
When above-mentioned weld job is finished, move to the above-mentioned place that should dispose in the operating area of having finished above-mentioned evacuation by above-mentioned mobile unit, the workpiece in the above-mentioned operating area is carried out above-mentioned weld job.
4. laser soldering device according to claim 3, it is characterized in that, be set in the number of the above-mentioned workpiece of placing on the above-mentioned pallet as follows: make required time of the above-mentioned weld job of all workpiece in the above-mentioned operating area and to carry out the time that the open and above-mentioned pallet of above-mentioned atmospheric pressure is replaced and above-mentioned evacuation is required in above-mentioned operating area equal substantially.
5. laser soldering device according to claim 1 is characterized in that, above-mentioned a plurality of operating areas have: the operating area that is set at inert gas atmosphere; With the operating area of carrying out evacuation.
6. laser soldering device according to claim 5 is characterized in that,
Above-mentioned irradiating position changing section,
To the workpiece in the operating area that is set at above-mentioned inert gas atmosphere, on the position that in above-mentioned workpiece, should weld, the part beyond the assigned position is carried out weld job,
To the workpiece in the operating area of carrying out above-mentioned evacuation, weld job is carried out in the afore mentioned rules position of not welding by the weld job in the operating area that is set at above-mentioned inert gas atmosphere.
7. laser soldering device according to claim 6 is characterized in that, the afore mentioned rules position is the part that is used to extract out the gas that produces when above-mentioned weld job in above-mentioned workpiece.
8. laser soldering device according to claim 5, it is characterized in that, be set in the number of the above-mentioned workpiece of placing on the above-mentioned pallet as follows: make the required time of operation in the operating area that is set at above-mentioned inert gas atmosphere and in the operating area of carrying out above-mentioned evacuation, carry out the time that the open and above-mentioned pallet of atmospheric pressure is replaced and above-mentioned evacuation is required equal substantially.
9. laser soldering device according to claim 1 is characterized in that, above-mentioned laser beam injection part and above-mentioned irradiating position changing section connect by optical fiber, and by the above-mentioned laser beam of this Optical Fiber Transmission.
10. laser soldering device according to claim 1 is characterized in that,
Above-mentioned pallet is fixing in above-mentioned operating area when carrying out above-mentioned weld job,
Above-mentioned mobile unit moves above-mentioned irradiating position changing section on two vertical substantially directions.
11. laser soldering device according to claim 1 is characterized in that,
Above-mentioned pallet moves to a direction in above-mentioned operating area when carrying out above-mentioned weld job,
Above-mentioned mobile unit moves above-mentioned irradiating position changing section on a direction different with the moving direction of above-mentioned pallet.
12. a method for laser welding, this method is carried out by the device that has with lower member, and welds with the sealing workpiece: a plurality of operating areas, and accommodate a plurality of workpiece that are positioned on the pallet, and this workpiece is carried out operation; The laser beam injection part, outgoing laser beam; Irradiating position changing section is accepted by the position on the above-mentioned workpiece of this laser beam of change irradiation, to carry out the weld job to the workpiece in the above-mentioned operating area from the laser beam of above-mentioned laser beam injection part ejaculation,
This method for laser welding is characterised in that,
Have mobile process, in order in each of above-mentioned a plurality of operating areas, to carry out above-mentioned weld job, and make above-mentioned irradiating position changing section move to the place that in above-mentioned a plurality of operating areas, should dispose above-mentioned irradiating position changing section above-mentioned workpiece.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP308896/2006 | 2006-11-15 | ||
| JP2006308896 | 2006-11-15 | ||
| PCT/JP2007/072121 WO2008059893A1 (en) | 2006-11-15 | 2007-11-14 | Laser welding device and laser welding method |
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| Publication Number | Publication Date |
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| CN101563183A true CN101563183A (en) | 2009-10-21 |
| CN101563183B CN101563183B (en) | 2012-07-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2007800421615A Expired - Fee Related CN101563183B (en) | 2006-11-15 | 2007-11-14 | Laser welding device and laser welding method |
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| Country | Link |
|---|---|
| JP (1) | JP4914901B2 (en) |
| CN (1) | CN101563183B (en) |
| WO (1) | WO2008059893A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI508807B (en) * | 2012-11-30 | 2015-11-21 | Lts Co Ltd | Frit sealing apparatus using laser |
| CN105094159A (en) * | 2015-07-08 | 2015-11-25 | 哈尔滨工业大学 | Controlling and monitoring method for gases in vacuum cabin |
| CN108213698A (en) * | 2016-12-22 | 2018-06-29 | 发那科株式会社 | Laser Machining head and the laser-processing system with the laser Machining head |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5403392B2 (en) * | 2008-09-05 | 2014-01-29 | 株式会社向洋技研 | Laser light irradiation nozzle |
| CN102886604A (en) * | 2011-07-21 | 2013-01-23 | 深圳市通发激光设备有限公司 | Articulated laser welding machine for optical fiber transmission mold |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6285433A (en) * | 1985-10-09 | 1987-04-18 | Sumitomo Electric Ind Ltd | Polishing apparatus |
| JP4088233B2 (en) * | 2003-10-08 | 2008-05-21 | 株式会社ジェイテクト | Laser processing machine |
| JP2006150398A (en) * | 2004-11-29 | 2006-06-15 | Pioneer Electronic Corp | Apparatus and method of laser welding |
| JP2006150399A (en) * | 2004-11-29 | 2006-06-15 | Pioneer Electronic Corp | Laser welding apparatus and laser welding method |
| JP2006167756A (en) * | 2004-12-15 | 2006-06-29 | Mitsubishi Heavy Ind Ltd | Laser beam welding apparatus, and method for manufacturing welded structure |
-
2007
- 2007-11-14 WO PCT/JP2007/072121 patent/WO2008059893A1/en active Application Filing
- 2007-11-14 JP JP2008544180A patent/JP4914901B2/en not_active Expired - Fee Related
- 2007-11-14 CN CN2007800421615A patent/CN101563183B/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI508807B (en) * | 2012-11-30 | 2015-11-21 | Lts Co Ltd | Frit sealing apparatus using laser |
| CN105094159A (en) * | 2015-07-08 | 2015-11-25 | 哈尔滨工业大学 | Controlling and monitoring method for gases in vacuum cabin |
| CN105094159B (en) * | 2015-07-08 | 2017-08-25 | 哈尔滨工业大学 | Vacuum chamber gas is controlled and monitoring method |
| CN108213698A (en) * | 2016-12-22 | 2018-06-29 | 发那科株式会社 | Laser Machining head and the laser-processing system with the laser Machining head |
| CN108213698B (en) * | 2016-12-22 | 2019-11-08 | 发那科株式会社 | Laser Machining head and laser-processing system with the laser Machining head |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4914901B2 (en) | 2012-04-11 |
| CN101563183B (en) | 2012-07-18 |
| WO2008059893A1 (en) | 2008-05-22 |
| JPWO2008059893A1 (en) | 2010-03-04 |
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