CN111495883B - Device and method for carrying out deoxidation treatment on Be window of radiation detector - Google Patents
Device and method for carrying out deoxidation treatment on Be window of radiation detector Download PDFInfo
- Publication number
- CN111495883B CN111495883B CN202010334669.XA CN202010334669A CN111495883B CN 111495883 B CN111495883 B CN 111495883B CN 202010334669 A CN202010334669 A CN 202010334669A CN 111495883 B CN111495883 B CN 111495883B
- Authority
- CN
- China
- Prior art keywords
- window
- laser
- optical focusing
- focusing imaging
- radiation detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Abstract
The invention provides a radiation detector Be window deoxidation treatment device and a radiation detector Be window deoxidation treatment method which have good effect and high efficiency and can monitor the deoxidation degree in real time, wherein the device comprises the following steps: a sample chamber; a drive section; the pulse laser emits high-power laser to ablate the oxide on the surface of the Be window sample; the first optical focusing imaging part focuses and aims the high-power laser at a Be window sample; the femtosecond and excimer laser emits low-power laser to perform filling scanning on the ablated area to generate aerosol; the second optical focusing imaging part focuses the low-power laser to Be aligned to the ablation area of the Be window sample; the gas supply part is communicated with the sample chamber, supplies inert protective gas into the sample chamber, and blows aerosol generated after the femtosecond and excimer laser are filled and scanned to a gas outlet of the sample chamber; the monitoring and judging part is used for monitoring the element content condition of the aerosol and judging whether further sintering is needed according to the monitoring result; and a control section.
Description
Technical Field
The invention belongs to the technical field of deoxidation, and particularly relates to a device and a method for deoxidation treatment of a Be window of a radiation detector.
Background
The Be window is a component used in X-ray tubes, radiation detectors and the like. X-ray tubes and radiation detectors generally minimize the absorption of radiation by the window. The window is generally made of Be, Al or light glass, wherein Be has a small neutron absorption section, small absorption of X-rays and strong penetrating power, so Be is an ideal output window material. Be is very active, a layer of compact oxide film can Be generated on the surface of beryllium in the air at room temperature, the wettability of solder on beryllium is extremely poor due to the layer of compact oxide film, the air leakage rate after sealing is high, and the thermal shock resistance during working is poor. Existing Be window deoxidationThe technique is mostly chemical washing method with Cr2O3And carrying out chemical washing by using a mixed solution of phosphoric acid, glycerol, HF and alcohol. The beryllium foil is too thin in thickness and is easy to wash and leak when washed by acid liquor, so that needle holes are formed, the air tightness of the beryllium foil is reduced, and the beryllium foil cannot be used finally. And the acid liquor is corrosive, takes long time, is difficult to control the degree of deoxidation, and cannot monitor the derusting degree in real time.
The laser derusting is to form continuous or pulse laser with high brightness and good directivity into laser beam with specific spot shape and energy distribution after optical focusing and spot shaping, and to irradiate the material with oxide on the surface. After the oxide attached to the material absorbs laser energy, a series of complex physical and chemical processes such as vibration, melting, combustion, even gasification and the like can be generated, and finally the oxide is separated from the surface of the material without damaging the material. Compared with the traditional derusting method, the laser derusting method has the characteristics of high precision and easy control.
However, the existing laser rust removal device is complex in process and low in precision of controlling laser rust removal. Particularly, the rust removal of the precision parts such as the Be window has higher requirements on rust removal and can not damage the Be window. The existing laser rust removal system has no real-time monitoring capability, so that the rust removal degree cannot be judged, the laser scanning frequency cannot be controlled, and the rust removal result is not ideal. Easily causing damage to the Be window or incomplete removal of the corrosion layer.
Disclosure of Invention
The present invention is made to solve the above problems, and an object of the present invention is to provide a device and a method for performing a deoxidation treatment on a window of a radiation detector Be, which have good effects and high efficiency and can monitor the degree of deoxidation in real time.
In order to achieve the purpose, the invention adopts the following scheme:
< apparatus >
The invention provides a radiation detector Be window deoxidation treatment device, which is characterized by comprising the following components: the sample chamber is internally provided with a bearing platform for bearing the Be window sample; the driving part is connected with the bearing platform and is used for driving the bearing platform to move according to a preset track; the pulse laser emits high-power laser to ablate the oxide on the surface of the Be window sample; the first optical focusing imaging part focuses the high-power laser emitted by the pulse laser to Be aligned to the Be window sample; the femtosecond and excimer laser emits low-power laser to perform filling scanning on the ablated area to generate aerosol; the second optical focusing imaging part focuses the low-power laser emitted by the femtosecond laser and the excimer laser to Be aligned to the ablation area of the Be window sample; the gas supply part is communicated with the sample chamber, supplies inert protective gas into the sample chamber, and blows aerosol generated after the femtosecond and excimer laser are filled and scanned to a gas outlet of the sample chamber; the monitoring and judging part is communicated with the gas outlet of the sample chamber, monitors the element content condition of the aerosol and judges whether further sintering is needed according to the monitoring result; and the control part is in communication connection with the driving part, the pulse laser, the first optical focusing imaging part, the femtosecond and excimer laser, the second optical focusing imaging part, the gas supply part and the monitoring and judging part, and controls the driving part, the pulse laser, the first optical focusing imaging part, the femtosecond and excimer laser, the second optical focusing imaging part and the gas supply part to operate according to the judging result of the monitoring and judging part, wherein the control part controls the driving part and the pulse laser to further ablate the corresponding area under the condition that the judging result of the monitoring and judging part is yes.
Preferably, the device for performing window deoxidation on the radiation detector Be provided by the invention can also have the following characteristics: the pulse laser is 1080nm pulse laser, and the femtosecond and excimer laser is femtosecond and 193nm excimer laser.
Preferably, the device for performing window deoxidation on the radiation detector Be provided by the invention can also have the following characteristics: the alignment area of the high-power laser focused by the first optical focusing imaging part is far away from the alignment area of the low-power laser focused by the second optical focusing imaging part.
Preferably, the device for performing window deoxidation on the radiation detector Be provided by the invention can also have the following characteristics: the sample chamber comprises a first air inlet, a second air inlet, a first air outlet and a second air outlet, the first air inlet faces to a high-power laser alignment area focused by the first optical focusing imaging part, the second air inlet faces to a low-power laser alignment area focused by the second optical focusing imaging part, and the second air outlet is communicated with the monitoring and judging part; the air supply part comprises a first air supply unit and a second air supply unit which are respectively communicated with the first air inlet and the second air inlet; the window deoxidation treatment device for the radiation detector Be further comprises an exhaust part which is communicated with the first air outlet and exhausts gas generated by the blown high-power laser ablation.
Preferably, the device for performing window deoxidation on the radiation detector Be provided by the invention can also have the following characteristics: the monitoring and judging part comprises: the device comprises an IPC rectangular tube communicated with an air outlet of a sample chamber, a mass spectrometer communicated with the IPC rectangular tube and used for analyzing the content condition of elements, and a judging unit for judging whether further ablation treatment needs to be carried out on a detection area according to the analysis condition of the mass spectrometer.
Preferably, the device for performing window deoxidation treatment on the radiation detector Be provided by the invention further comprises: and the input display part is in communication connection with the driving part, the pulse laser, the first optical focusing imaging part, the femtosecond and excimer laser, the second optical focusing imaging part, the gas supply part, the monitoring and judging part and the control part, so that a user can input an operation instruction and display corresponding information.
Preferably, the device for performing window deoxidation on the radiation detector Be provided by the invention can also have the following characteristics: the first optical focusing imaging part comprises a collimating lens, a scanning galvanometer and a focusing lens, and the second optical focusing imaging part comprises a laser beam expander, two groups of scanning galvanometers, laser beam homogenizers, diaphragms, scanning galvanometers and a focusing lens which are sequentially arranged and are opposite to each other at an angle of 45 degrees with the horizontal direction.
< method >
Further, the invention also provides a method for performing deoxidation treatment on the Be window of the radiation detector, which is characterized by comprising the following steps of: the Be window is deoxidized by using the Be window deoxidizer described in any one of the following devices.
Action and Effect of the invention
The invention provides a device and a method for deoxidizing a Be window of a radiation detector.A pulse laser with higher power is utilized, after optical focusing imaging is carried out by a first optical focusing imaging part, a laser beam is controlled to carry out single-item scanning on the surface of a sample, and oxides in a certain area on the surface of the sample are removed by ablation; then, a femtosecond laser with smaller power and an excimer laser are utilized, after the femtosecond laser and the excimer laser pass through the second optical focusing imaging part, laser beams are controlled to Be filled in a defined area, aerosol is generated and is separately sent into the monitoring judging part through the air supply part, the monitoring judging part monitors the deoxidation degree in real time, whether the area needs to Be ablated and scanned or not is judged according to the information monitored in real time, then the control part controls the operation of each structure according to the monitoring and judging conditions, and under the condition that the aerosol is generated, the scanning frequency of the driving part and the pulse laser is controlled to further ablate the corresponding area, the rust removal effect is effectively ensured, the deoxidation treatment of the Be window before the Be window is sealed is realized, in addition, the time consumption of the process is short, the accuracy is high, the effect is good, and the efficiency is high.
Drawings
FIG. 1 is a schematic structural diagram of a window deoxidation treatment device for a radiation detector Be according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an embodiment of the present invention, in which a pulsed laser and a first optical focusing imaging part are used to ablate a Be window sample;
fig. 3 is a schematic diagram of a scanning route of unidirectional scanning filling (ablation) by a laser beam according to an embodiment of the present invention.
Detailed Description
The following describes in detail embodiments of a device and a method for performing window deoxidation treatment on a radiation detector Be according to the present invention with reference to the accompanying drawings.
< example >
As shown in fig. 1 and 2, the device 10 for deoxidation treatment of a window of a radiation detector Be provided in this embodiment includes a sample chamber 11, a driving part, a pulse laser 12, a first optical focusing imaging part 13, a femtosecond and excimer laser 14, a second optical focusing imaging part 15, a gas sending part, a monitoring and judging part, an input display part, and a control part.
The sample chamber 11 is of a glass closed structure, and two openings are arranged at the upper end of the sample chamber and are respectively connected with the first optical focusing imaging part 13 and the second optical focusing imaging part 15, so that light beams can enter; in addition, two openings are arranged at opposite positions of the left side and the right side, one opening is used as an air inlet to be communicated with the air supply part, and the other opening is used as an air outlet to be communicated with the monitoring and judging part. A bearing platform for bearing Be window samples is arranged in the sample chamber 11.
The driving part is connected with the bearing platform and used for driving the bearing platform to move according to a preset track so as to drive the Be-loaded window sample to move synchronously. In this embodiment, the driving portion is a stepping motor capable of driving the supporting platform and the Be window sample to move, and can move arbitrarily in the X and Y two-dimensional directions.
The pulse laser 12 emits high-power laser to ablate and remove oxides on the surface of Be window sample. In this embodiment, the pulse laser 12 used is a 1080nm pulse laser 12.
The first optical focusing and imaging part 13 focuses the high-power laser emitted by the pulse laser 12 on the Be window sample, focuses the light beam and adjusts the beam diameter. In the present embodiment, the first optical focus imaging section 13 includes a collimator lens 13a, a scanning galvanometer 13b, and a focusing lens 13c for focusing a light beam.
The femtosecond and excimer laser 14 is used for emitting low-power laser to scan and fill the ablated area to generate aerosol. In this embodiment, the femtosecond and excimer lasers used are femtosecond and 193nm excimer lasers.
The second optical focusing imaging part 15 is used for focusing the low-power laser emitted by the femtosecond and excimer laser 14 to the ablation area of the Be window sample, and the alignment area of the low-power laser focused by the second optical focusing imaging part 15 should Be as far away from the alignment area of the high-power laser focused by the first optical focusing imaging part 13 as possible. The second optical focusing and imaging part 15 includes a laser beam expander 15a, two sets of scanning galvanometers 15b arranged opposite to each other at an angle of 45 degrees with respect to the horizontal direction, a laser beam homogenizer 15c for shaping gaussian energy distribution output by the laser to homogenize the energy distribution, a diaphragm 15d for controlling the width of a light beam in the light path, a scanning galvanometer 15e for changing the light path, and a focusing mirror 15f for focusing.
The gas-feeding part is communicated with the sample chamber 11, inert protective gas (such as argon or helium) is fed into the sample chamber 11 to isolate air, and aerosol generated after the femtosecond and excimer laser 14 is filled and scanned is blown to a gas outlet of the sample chamber 11.
The monitoring and judging part is communicated with the air outlet of the sample chamber 11, monitors the element content condition of the aerosol, and judges whether further ablation is needed according to the monitoring result. The monitoring and judging part comprises an IPC rectangular tube 16, a mass spectrometer and a judging unit. The IPC rectangular tube 16 is communicated with the air outlet of the sample chamber 11 and is used for generating ions. The mass spectrometer is communicated with an IPC rectangular tube 16 and is used for analyzing the content of oxygen element in the gas. The judgment unit judges whether further ablation is needed on the detection area according to the analysis condition of the mass spectrometer.
The input display part is in communication connection with the driving part, the pulse laser 12, the first optical focusing imaging part 13, the femtosecond and excimer laser 14, the second optical focusing imaging part 15, the air supply part, the monitoring and judging part and the control part, so that a user can input an operation instruction and display corresponding information according to the operation instruction, for example, the operation condition and parameters of each device and the monitoring and judging condition.
The control part is communicated with the driving part, the pulse laser 12, the first optical focusing imaging part 13, the femtosecond and excimer laser 14, the second optical focusing imaging part 15, the gas supply part and the monitoring and judging part, and the control part controls the operation of the driving part, the pulse laser 12, the first optical focusing imaging part 13, the femtosecond and excimer laser 14, the second optical focusing imaging part 15 and the gas supply part according to the judgment result of the monitoring and judging part. And under the condition that the judgment result of the monitoring judgment part is yes, the control part controls the driving part and the pulse laser 12 to further ablate the corresponding area, then controls the femtosecond and excimer laser 14 and the monitoring judgment part to generate aerosol in the area and monitor and judge the element content in the aerosol, and the process is continuously repeated until the judgment result is no.
The above is the specific structure of the device 10 for deoxidation treatment of the window of the radiation detector Be, and the working process thereof is explained below:
when the pulse laser device works, the frequency of the pulse laser device 12 is 15-25 kHz, the power range is 8-12W, after a laser beam is focused and imaged by the first optical focusing and imaging part 13, the diameter of the light beam is 0.05mm, a Be window sample in the sample chamber 11 moves at 1500-2000 mm/s under the driving of the driving part, namely the Be window sample and the laser beam do relative motion, the relative motion of the laser beam on the surface of the Be window sample is controlled to Be equivalent to a one-way filling mode shown in figure 3, and oxide in one small area of the Be window sample is removed (the area is defined in advance) each time. Other parameters are adjusted to switch delay: 300 mus, light-off delay: 100 μ s, corner delay: 100 μ s, defocus amount: 0 mm.
The laser frequency of the femtosecond and excimer laser 14 is 10-20 KHz, the power range is 1-2W, after the laser beam is focused and imaged by the second optical focusing imaging part 15, the beam diameter is 0.05mm, the beam of the femtosecond and excimer laser 14 and the beam of the pulse laser 12 are controlled to keep a certain distance (for example, the beam distance can Be set to Be 1mm by 10mm of Be window according to the size of the Be window sample), the beam of the femtosecond and excimer laser 14 and the surface of the Be window interact to generate aerosol, the gas supply part ensures that the aerosol generated by the beam of the femtosecond and excimer laser 14 enters the IPC rectangular tube 16 by controlling the flow of carrier gas (for example, argon or helium), ions are generated by further gasification, atomization and ionization in high-temperature plasma, and the ions enter the mass spectrometer to Be detected.
The judging unit can obtain the proportion of oxygen elements of Be window surface substances according to the result measured by the mass spectrometer, so that the content of Be window surface oxides is determined, when the content of the oxygen elements is smaller than a certain threshold value (for example, 0.1%), the Be window surface oxides in the area are judged to Be cleaned by laser ablation, the Be window surface oxides are good in removing effect, and the oxides in the next area can Be removed. When the content of the oxygen element is larger than the threshold value, judging that the Be oxide in the area is not completely removed by laser ablation, and further performing ablation.
The control part controls the driving part, the pulse laser 12, the first optical focusing imaging part 13, the femtosecond and excimer laser 14, the second optical focusing imaging part 15 and the air supply part to perform corresponding operations based on the judgment result. And the control part controls the structures to repeat the working process continuously until all the area oxides are cleaned (the content of the oxygen element is less than a threshold value).
The above embodiments are merely illustrative of the technical solutions of the present invention. The device and method for de-oxidizing the window of the radiation detector Be according to the present invention are not limited to the description of the above embodiments, but only to the scope defined by the following claims. Any modification or supplement or equivalent replacement made by a person skilled in the art on the basis of this embodiment is within the scope of the invention as claimed in the claims.
In the above embodiment, the sample chamber is provided with only one air inlet and one air outlet, in order to further ensure that aerosol generated by femtosecond and excimer laser filling scanning is blown into the IPC rectangular tube, so that the monitoring and judgment result is more accurate, the sample chamber may further include a first air inlet, a second air inlet, a first air outlet and a second air outlet, the first air inlet faces a high-power laser alignment area focused by the first optical focusing imaging part, the second air inlet faces a low-power laser alignment area focused by the second optical focusing imaging part, and the second air outlet is communicated with the monitoring and judgment part; correspondingly, the air supply part comprises a first air supply unit and a second air supply unit which are respectively communicated with the first air inlet and the second air inlet; the window deoxidation treatment device for the radiation detector Be further comprises an exhaust part which is communicated with the first air outlet and exhausts gas generated by the blown high-power laser ablation.
Claims (7)
1. A radiation detector Be window deoxidation treatment device is characterized by comprising:
the sample chamber is internally provided with a bearing platform for bearing the Be window sample;
the driving part is connected with the bearing platform and is used for driving the bearing platform to move according to a preset track;
the pulse laser emits high-power laser to ablate the oxide on the surface of the Be window sample;
the first optical focusing imaging part focuses the high-power laser emitted by the pulse laser to Be aligned to the Be window sample;
the femtosecond and excimer laser emits low-power laser to perform filling scanning on the ablated area to generate aerosol;
the second optical focusing imaging part focuses and aims the low-power laser emitted by the femtosecond and excimer laser at an ablation area of the Be window sample;
the gas supply part is communicated with the sample chamber, supplies inert protective gas into the sample chamber, and blows aerosol generated after the femtosecond and excimer laser are filled and scanned to a gas outlet of the sample chamber;
the monitoring and judging part is communicated with the gas outlet of the sample chamber, monitors the element content condition of the aerosol and judges whether further ablation is needed according to the monitoring result; and
a control part which is communicated and connected with the driving part, the pulse laser, the first optical focusing imaging part, the femtosecond and excimer laser, the second optical focusing imaging part, the gas supply part and the monitoring and judging part, and controls the operation of the driving part, the pulse laser, the first optical focusing imaging part, the femtosecond and excimer laser, the second optical focusing imaging part and the gas supply part according to the judgment result of the monitoring and judging part,
wherein, when the judgment result of the monitoring judgment part is yes, the control part controls the driving part and the pulse laser to further ablate the corresponding area;
the sample chamber comprises a first air inlet, a second air inlet, a first air outlet and a second air outlet, the first air inlet faces to a high-power laser alignment area focused by the first optical focusing imaging part, the second air inlet faces to a low-power laser alignment area focused by the second optical focusing imaging part, and the second air outlet is communicated with the monitoring and judging part;
the air supply part comprises a first air supply unit and a second air supply unit which are respectively communicated with the first air inlet and the second air inlet;
the window deoxidation treatment device for the radiation detector Be further comprises an exhaust part which is communicated with the first air outlet and exhausts gas generated by the blown high-power laser ablation.
2. The radiation detector Be window deoxidation treatment apparatus as claimed in claim 1, wherein:
wherein the pulse laser is a 1080nm pulse laser, and the femtosecond and excimer laser is a femtosecond and 193nm excimer laser.
3. The radiation detector Be window deoxidation treatment apparatus as claimed in claim 1, wherein:
the alignment area of the high-power laser focused by the first optical focusing imaging part is far away from the alignment area of the low-power laser focused by the second optical focusing imaging part.
4. The radiation detector Be window deoxidation treatment apparatus as claimed in claim 1, wherein:
wherein the monitoring and judging part comprises: the device comprises an IPC rectangular tube communicated with an air outlet of the sample chamber, a mass spectrometer communicated with the IPC rectangular tube and used for analyzing the element content, and a judging unit for judging whether further ablation treatment needs to be carried out on the detection area according to the analysis condition of the mass spectrometer.
5. The radiation detector Be window deoxidation treatment apparatus as claimed in claim 1 further comprising:
and the input display part is in communication connection with the driving part, the pulse laser, the first optical focusing imaging part, the femtosecond and excimer laser, the second optical focusing imaging part, the air supply part, the monitoring and judging part and the control part, so that a user can input an operation instruction and display corresponding information.
6. The radiation detector Be window deoxidation treatment apparatus as claimed in claim 1, wherein:
wherein the first optical focusing imaging part comprises a collimating mirror, a scanning galvanometer and a focusing mirror,
the second optical focusing imaging part comprises a laser beam expander, two groups of scanning galvanometers, a laser beam homogenizer, a diaphragm, a scanning galvanometer and a focusing lens which are arranged in sequence and form an angle of 45 degrees with the horizontal direction in an opposite mode.
7. A radiation detector Be window deoxidation treatment method is characterized by comprising the following steps:
the Be window is deoxidized by using the Be window deoxidizer of the radiation detector as set forth in any one of claims 1 to 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010334669.XA CN111495883B (en) | 2020-04-24 | 2020-04-24 | Device and method for carrying out deoxidation treatment on Be window of radiation detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010334669.XA CN111495883B (en) | 2020-04-24 | 2020-04-24 | Device and method for carrying out deoxidation treatment on Be window of radiation detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111495883A CN111495883A (en) | 2020-08-07 |
| CN111495883B true CN111495883B (en) | 2021-06-15 |
Family
ID=71876397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010334669.XA Active CN111495883B (en) | 2020-04-24 | 2020-04-24 | Device and method for carrying out deoxidation treatment on Be window of radiation detector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111495883B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112404706B (en) * | 2021-01-22 | 2021-04-23 | 武汉大学 | Laser processing detection device and method, laser processing equipment and focusing control method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5847825A (en) * | 1996-09-25 | 1998-12-08 | Board Of Regents University Of Nebraska Lincoln | Apparatus and method for detection and concentration measurement of trace metals using laser induced breakdown spectroscopy |
| CN103698385A (en) * | 2013-12-06 | 2014-04-02 | 宁波检验检疫科学技术研究院 | Direct analysis device of solid samples |
| CN108031687A (en) * | 2017-11-29 | 2018-05-15 | 江苏大学 | A kind of method and device for efficiently removing laser cleaning before Process on Aluminum Alloy Oxidation Film is welded |
| CN109073879A (en) * | 2016-01-11 | 2018-12-21 | 元素科学雷射有限责任公司 | Synchronization pattern in sample handling processes scans layout |
| CN109079329A (en) * | 2018-09-14 | 2018-12-25 | 东莞理工学院 | A kind of metal board laser derusting system |
| CN109813805A (en) * | 2019-01-28 | 2019-05-28 | 广东工业大学 | A kind of laser cleaning process monitoring method based on acoustic emission |
-
2020
- 2020-04-24 CN CN202010334669.XA patent/CN111495883B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5847825A (en) * | 1996-09-25 | 1998-12-08 | Board Of Regents University Of Nebraska Lincoln | Apparatus and method for detection and concentration measurement of trace metals using laser induced breakdown spectroscopy |
| CN103698385A (en) * | 2013-12-06 | 2014-04-02 | 宁波检验检疫科学技术研究院 | Direct analysis device of solid samples |
| CN109073879A (en) * | 2016-01-11 | 2018-12-21 | 元素科学雷射有限责任公司 | Synchronization pattern in sample handling processes scans layout |
| CN108031687A (en) * | 2017-11-29 | 2018-05-15 | 江苏大学 | A kind of method and device for efficiently removing laser cleaning before Process on Aluminum Alloy Oxidation Film is welded |
| CN109079329A (en) * | 2018-09-14 | 2018-12-25 | 东莞理工学院 | A kind of metal board laser derusting system |
| CN109813805A (en) * | 2019-01-28 | 2019-05-28 | 广东工业大学 | A kind of laser cleaning process monitoring method based on acoustic emission |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111495883A (en) | 2020-08-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5610356B2 (en) | Laser decontamination equipment | |
| CN1972040B (en) | Method of cutting stainless steel by using fiber laser | |
| Krüger et al. | Ultrashort pulse laser interaction with dielectrics and polymers | |
| US6545247B2 (en) | Laser welding apparatus, a gas shielding apparatus and a method for controlling a laser welding apparatus | |
| US7217448B2 (en) | Glass structure and method for producing the same | |
| TWI599269B (en) | An extreme ultraviolet light system and a method of generating an extreme ultraviolet light | |
| CN108031687A (en) | A kind of method and device for efficiently removing laser cleaning before Process on Aluminum Alloy Oxidation Film is welded | |
| CN101590570A (en) | A kind of method of welding tube type heat exchanger by using laser scanning and device | |
| CN1972039A (en) | Method of cutting c-mn steel by a fiber laser | |
| CN111495883B (en) | Device and method for carrying out deoxidation treatment on Be window of radiation detector | |
| CN102092931A (en) | Method and device for preparing microchannel in glass material | |
| CN108597638B (en) | Composite laser decontamination device and method for radioactive decontamination of nuclear power station component | |
| CN110303246B (en) | Seal welding method and bipolar plate | |
| CN201205636Y (en) | Apparatus for welding tubular heat exchanger by laser scanning | |
| CN110102897B (en) | Laser cleaning and laser welding integrated equipment and method for curved surface thin-wall structure | |
| JPH10314973A (en) | Device and method for laser beam machining by composite laser beam | |
| CN101563183B (en) | Laser welding device and laser welding method | |
| JP2003117674A (en) | Laser welding equipment | |
| RU2005108572A (en) | METHOD AND APPARATUS FOR SPECTROSCOPY OF OPTICAL RADIATION OF LIQUID EXCITED BY A LASER | |
| CN112355470A (en) | Beryllium window assembly welding device and method | |
| JP2015000423A (en) | Exterior can sealing method and exterior can sealing apparatus | |
| CN207372497U (en) | A kind of high power laser welding system based on high-velocity scanning galvanometer | |
| JP3492032B2 (en) | Laser marking method and apparatus | |
| JP2021026052A (en) | Extreme ultraviolet light generator and production method of electronic device | |
| CN211613668U (en) | Laser ablation decontamination plant |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |