CN101558001B - Substrate transfer apparatus - Google Patents
Substrate transfer apparatus Download PDFInfo
- Publication number
- CN101558001B CN101558001B CN2007800456544A CN200780045654A CN101558001B CN 101558001 B CN101558001 B CN 101558001B CN 2007800456544 A CN2007800456544 A CN 2007800456544A CN 200780045654 A CN200780045654 A CN 200780045654A CN 101558001 B CN101558001 B CN 101558001B
- Authority
- CN
- China
- Prior art keywords
- substrate
- basal plate
- horizontal direction
- casing
- glass substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Robotics (AREA)
- Specific Conveyance Elements (AREA)
- Liquid Crystal (AREA)
Abstract
A substrate transfer apparatus is provided with a moving stage (32), which is movably arranged in a horizontal direction on a base (14) and positioned on one side for receiving and transferring a substrate (G) on the one side; a supporting apparatus (S), which is arranged on the moving stage (32) with a supporting area, for movably supporting the substrate (G) in the horizontal direction; a movingapparatus (T), which traverses the leading end of the supporting area on the one side and transfers the substrate (G) on the supporting area in the horizontal direction so as to receive and transfer the substrate (G) on the one side; a column (16) standing on the base (14); and a hand (H), which is attached to the column (16) to be movable in the horizontal direction and liftable in the vertical direction by traversing the supporting area, so as to transfer the substrate (G) on the opposite side and transfer the transferring substrate (G) onto the supporting apparatus (S). The supporting areahas an extending section protruded to the one side from the moving stage (32).
Description
Technical field
The present invention relates to a kind of basal plate conveyer, in more detail, relate to the substrate conveying conveyer of the glass substrate that is applicable to uses such as LCD TV.
Background technology
For example in the manufacturing process of LCD TV, glass substrate becomes liquid crystal panel through various working procedure processing.Be called the container of casing (カ セ ッ ト) in the mobile use of the inter process of glass substrate, container be with a plurality of glass substrates on above-below direction devices spaced apart and respectively with horizontality with its container of taking in.
In each operation, basal plate conveyer is configured between casing and the processing unit (plant), and this basal plate conveyer is accepted glass substrate from casing, and the glass substrate of accepting is consigned to processing unit (plant).And when the processing of glass substrate finished, this basal plate conveyer was accepted glass substrate and the glass substrate of accepting is delivered to casing (for example with reference to patent documentation 1) once more from processing unit (plant) in processing unit (plant).
Specifically, for example (Japan) spy open the disclosed basal plate conveyer of 2006-335518 communique (base board delivery device) have hand (Ha Application De), the handing-over with belt conveyor and intermediate transport band.Hand can move at above-below direction and horizontal direction, and processing unit (plant) between carry out the handing-over of glass substrate.Handing-over with belt conveyor and intermediate transport band and casing between carry out the handing-over of glass substrate, glass substrate in course of conveying from direction the opposing party switching of hand and belt conveyor.
In the basal plate conveyer of above-mentioned communique, basal plate conveyer and casing be certain at interval.Under this wide at interval situation, there is the problem that possibly handing-over of the glass substrate of the belt conveyor between glass conveyer and casing can not be carried out smoothly owing to the deflection of the glass substrate that joins.Particularly, a basal plate conveyer is being provided with movably, under the situation of carrying out using in the handing-over of glass substrate with a plurality of casings, is making the interval of substrate transfer device and each casing set the ground broad sometimes, increasing the possibility that produces this problem.
In addition, in the basal plate conveyer of above-mentioned communique, intermediate transport band and hand are made as one, complex structure.Under the situation that particularly the intermediate transport band is made up of air-cushion device, the pipe arrangement of compressed-air actuated service becomes numerous and diverse.
Summary of the invention
The object of the present invention is to provide a kind of basal plate conveyer that has simple structure and the handing-over of substrate is carried out smoothly.
In order to realize described purpose,, a kind of basal plate conveyer is provided according to the present invention; The substrate that is used for receiving at side's side joint of a side that is separated from each other and opposition side is carried; And be delivered to the opposing party's side, it is characterized in that possessing: traverser; It is configured on the pedestal in the horizontal direction movably, and when a said top-cross connects substrate, is positioned at a said side; Bearing set, it is configured on the said traverser, and has the support region that is used for supporting movably in said horizontal direction said substrate; Mobile device, it is used for connecing said substrate in a said top-cross, and cross a said side said support region front end and substrate on the said support region is moved on said horizontal direction; Stand and be located at the pillar on the said pedestal; Hand; It joins said substrate at said opposition side; And and said bearing set between the handing-over course of conveying said substrate; Removable and see from above-below direction and to cross said support region and liftably be installed on the said pillar in said horizontal direction, said support region has from prolonging of exposing of said traverser in a said side and portion.
According to basal plate conveyer of the present invention, when a top-cross of relative machine (relatively machine) connect substrate, traverser was positioned at a side, follows in this, exceed traverser support region prolong that portion approaching to relative machine.Therefore, relatively machine shortens with the interval of support region, the bending of the substrate that prevents between support region and relative machine, to join.The result is, according to this basal plate conveyer, carries out smoothly with the handing-over of the substrate of relative machine spare.
In addition, owing to bearing set only is configured on the traverser, so this basal plate conveyer has simple structure.
Preferably, said mobile device is located at said bearing set.In the basal plate conveyer of optimal way, because mobile device is located at bearing set, so simple in structure.
Preferably, said bearing set has: a plurality of pipelines that are arranged parallel to each other and extend to horizontal direction respectively, be formed at the compressed-air actuated blow-off outlet above the said pipeline.
According to the basal plate conveyer of optimal way, the pressurized air that the bearing set utilization blows out from blow-off outlet and supporting substrates non-contactly.Be used to supply with compressed-air actuated tracheae and plumbing connection, but owing to pipeline only is configured on the traverser, so the configuration of tracheae is simple.
Preferably, said mobile device comprises: the main orbit that extends in said horizontal direction along said support region, be slidably mounted in the sliding rail on the said main orbit.According to the basal plate conveyer of optimal way, mobile device is made up of main orbit and Auxiliary Track, can be through simple structure moving substrate.
Preferably, basal plate conveyer possesses two said hands that separate up and down each other.
Even the basal plate conveyer of optimal way has two hands and also has simple structure.On the other hand, owing to have two hands, therefore, when opposite side handing-over substrate, accept substrate with a hand and can pay afterwards and carry the substrate of putting at another hand in advance.The result is according to this basal plate conveyer, significantly to shorten the time of delivery of substrate.
Description of drawings
Fig. 1 is the scheme drawing of a part of the production system of liquid crystal panel;
Fig. 2 is the lateral plan from the basal plate conveyer of an embodiment of the system that is applicable to Fig. 1 that processing unit (plant) is looked sideways;
Fig. 3 is the planar view of the basal plate conveyer of Fig. 2 of seeing from the top;
Fig. 4 is the front elevation of a part of otch being represented at the IV-IV of Fig. 2 line;
Fig. 5 is the planar view of the state during the handing-over glass substrate between basal plate conveyer and the processing unit (plant) of Fig. 2 of seeing from the top;
Fig. 6 is the front elevation that the basal plate conveyer part otch of the state of Fig. 5 is represented;
Fig. 7 is the front elevation that glass substrate is forwarded to the state behind the bearing set in the basal plate conveyer of Fig. 2 of seeing along the direction of pedestal track from hand;
Fig. 8 be the basal plate conveyer of Fig. 2 of seeing from the top traverser to the planar view of the state of casing side shifting;
Fig. 9 is the front elevation that the basal plate conveyer part otch of the state of Fig. 8 is represented;
Figure 10 be the basal plate conveyer of Fig. 2 of seeing from the top Auxiliary Track to the planar view of the state of casing side shifting;
Figure 11 is the front elevation that the basal plate conveyer part otch of the state of Figure 10 is represented;
Figure 12 is the planar view of the state during the handing-over glass substrate between basal plate conveyer and the casing of Fig. 2 of seeing from the top;
Figure 13 is the front elevation that the basal plate conveyer part otch of the state of Figure 12 is represented.
The specific embodiment
Fig. 1 is the part of production system of LCD TV (liquid crystal panel) of roughly having represented to be suitable for the basal plate conveyer of an embodiment.The part of this production system is located in the dust free room, possesses right side among the figure and is arranged in a plurality of casing CS of row and a plurality of processing unit (plant) PM that the left side is arranged in row.Be configured in to the basal plate conveyer drivable on the basic rail 10 that extends between the row of row and processing unit (plant) PM of casing CS.
In detail, shown in Fig. 2～4, basal plate conveyer has and is configured on the basic rail 10 pedestal 14 via pedestal slide block 12.Pedestal 14 has to overlook and is tetragonal shape, and upright on pedestal 14 have a pillar 16.
The end 20a of the crossbeam 20 of casing CS side sees more outstanding than the end of pedestal 14 from throughput direction.On the other hand, the end 20b of the crossbeam 20 of processing unit (plant) PM side is configured in the position roughly the same with the end of pedestal 14.
The root of coupling plate 22 is installed on each crossbeam 20, and coupling plate 22 can run through the other end 20b from an end 20a of crossbeam 20 and move to throughput direction.Coupling plate 22 in the horizontal direction vertical with throughput direction, be that the axis direction of basic rail 10 is long.
For example the base end part of 5 support rod 24 is fixed on the coupling plate 22.Support rod 24 is separated on the Width of self each other and is parallel, and extends to throughput direction respectively.That is, support rod 24 is arranged as the broach shape.The length of the support rod 24 on throughput direction is shorter than the length of crossbeam 20, but longer than the length of pedestal 14.
Extend to processing unit (plant) PM from coupling plate 22 in support rod 24, when coupling plate 22 is positioned at the lifting position of an end 20a side of crossbeam 20, see that from throughput direction the leading section of support rod 24 is positioned in the position roughly the same with the other end 20b of crossbeam 20.When coupling plate 22 was positioned at the delivery position of the other end 20b side of crossbeam 20, support rod 24 was outstanding from the end of the other end 20b of crossbeam 20 and pedestal 14, and the leading section of support rod 24 gets in the processing unit (plant) PM.
In addition, on pedestal 14, dispose fixed way 26.Fixed way 26 is positioned at the place ahead of pillar 16, and fixed way 26 and hand H are positioned at identical position with respect to pillar 16.See that from throughput direction the length of the top board 26a of fixed way 26 is longer than the length of pedestal 14, the end of the top board 26a of casing CS side is outstanding from the end of pedestal 14.But the outstanding length of top board 26a is shorter than the outstanding length of crossbeam 20.
On the top board 26a of fixed way 26, dispose two table slides 28, these table slides 28 spread all over the roughly total length of top board 26 and extend to throughput direction respectively, are separated from each other at the axis direction of basic rail 10.Via bench board slide block 30 configuration traversers 32, traverser 32 can move at throughput direction on table slide 28.
Traverser 32 has tetragonal base plate 34, sees from throughput direction, and the length of base plate 34 is shorter than the length of pedestal 14.When traverser 32 was positioned at the switching position of processing unit (plant) PM side, the end of the base plate 34 of processing unit (plant) PM side was positioned at the position roughly the same with the end of top board 26a.Be positioned at switching during the position at traverser 32, the end of the base plate 34 of casing CS side is positioned at the centre of table slide 28, but follows traverser 32 the moving of throughput direction, and can surpass the end of pedestal 14 and moves.
On the base plate 34 of traverser 32, so that the interval of regulation is upright for example each six roots of sensation supporting member 36 arranged at its two ends.Supporting member 36 extends to above-below direction respectively, supporting bearing set S.
Bearing set S is the bearing set of air-cushion type for example, has six roots of sensation pipeline 38.Pipeline 38 is separated from each other and is parallel, extends at throughput direction respectively.Each pipeline 38 is through 36 supportings of two supporting members, and the quantity of pipeline 38 is corresponding with the quantity at each supporting member of holding 36 of base plate 34.The shape of cross section of pipeline 38 is hollow oblong, and the top of each pipeline 38 is smooth.These pipelines 38 top is configured to same surface on level reference.
On each pipeline 38, for example below it, connect the front end of tracheae (not shown), the root of tracheae is connected with air-blast device 40.Air-blast device 40 is configured on the pedestal 14 with filtering installation 42 side by side.
Above the pipeline 38, spread all over whole zone and be formed with a plurality of blow-off outlet 44, these blow-off outlets 44 are arranged on the length direction of pipeline 38 at each.When air-blast device 40 actions, to pass through in the tracheae service 38 by the pressurized air that filtering installation 42 purifies, pressurized air blows out above roughly from each blow-off outlet 44.Through this pressurized air that blows out, can glass substrate G be bearing on the pipeline 38 non-contactly.That is, the top of regulation pipeline 38 is the support region of supporting glass substrate G non-contactly.
In addition, traverser 32 has mobile device (device) T that is used to make the glass substrate G on the pipeline 38 to move to throughput direction, and mobile device T has two main orbits 46.Respectively by two groups supporting member, 36 supportings of both sides in 6 groups of supporting members 36, each main orbit 46 extends at throughput direction main orbit 46 via carriage.The length of main orbit 46 is more longer than the length of the base plate 34 of traverser 32.The end of the main orbit 46 of casing CS side and the end part aligning of base plate 34, the end of the main orbit 46 of processing unit (plant) PM side is more outstanding than the end of base plate 34.
On main orbit 46, dispose Auxiliary Track 48 than main orbit 46 weak points.Auxiliary Track 48 extends along main orbit 46, can move at throughput direction with respect to main orbit 46.
On main orbit 48, sucker 50 is installed movably at throughput direction.Sucker 50 can be adsorbed in the back side of glass substrate G, under the state that is adsorbed in glass substrate G, can between the both ends of Auxiliary Track 48, move.
At this, the length of each pipeline 38 is longer than the length on the floor 34 of traverser 32, sees from throughput direction, roughly aligns in the position of the end of the pipeline 38 of processing unit (plant) PM side and the end of base plate 34.Therefore, it is side-prominent to casing CS that the end of the pipeline 38 of casing CS side exceeds the end of base plate 34, follows traverser 32 to casing CS side shifting, can exceed the end of crossbeam 20 and give prominence to.In other words, had than prolonging of exceeding of traverser 32 in casing CS side by the regulation support region above the pipeline 38 and portion, this prolongs portion and follow moving of traverser 32 can exceed the end of crossbeam 20 and give prominence to.
For the movable range of Auxiliary Track 48, the end of the Auxiliary Track 48 of processing unit (plant) PM side does not exceed the end of main orbit 46 and gives prominence to.On the other hand, the end of the Auxiliary Track 48 of casing CS side is followed moving of Auxiliary Track 48 can exceed the end of main orbit 46 and give prominence to, and is further, also can exceed bearing set S pipeline 38 the end and give prominence to.
The movable range of sucker 50 spreads all over its roughly total length with respect to Auxiliary Track 48.Therefore,, see from throughput direction through the mobile combination of sucker 50 self, Auxiliary Track 48 and traverser 32, sucker 50 can exceed casing CS side pipeline 38 end and crossbeam 20 the end and give prominence to.
Below, being example from the situation that processing unit (plant) PM is transported to casing CS, the action (method of application) of above-mentioned basal plate conveyer is described glass substrate G.
Basal plate conveyer is moved on basic rail 10, and basal plate conveyer is carried between the casing CS and processing unit (plant) PM of glass substrate G being used to.Then, like Fig. 5 and shown in Figure 6, more lean on the hand H of top to move to the position of accepting of processing unit (plant) PM side than the pipeline 38 of bearing set S, thus, hand H is that support rod 24 gets in the processing unit (plant) PM.Then, rise, upload in support rod 24 and put glass substrate G through making lifting slider 18.That is, the hand H of basal plate conveyer accepts glass substrate G in processing unit (plant) PM.
After accepting glass substrate G, hand H such as above-mentioned Fig. 2～shown in Figure 4 move to the lifting position of casing CS side.Then, as shown in Figure 7, lifting slider 18 makes the support rod 24 of hand H drop to the position of more leaning on the below than the support region of bearing set S, and when support rod 24 was crossed support region, the glass substrate G on the support rod 24 moved on the supporting field.That is, glass substrate G transfers to bearing set S from hand H.
In addition; During switching; Traverser 32, Auxiliary Track 48 and sucker 50 lay respectively at the position (switching position) near processing unit (plant) PM side with respect to fixed way 26, main orbit 46 and Auxiliary Track 48, the coupling plate 22 of hand H can with pipeline 38 and Auxiliary Track 48 collisions.In addition, overlook and see the interstitial site of each support rod 24 between the gap between the pipeline 38 or pipeline 38 and Auxiliary Track 48, support rod 24 gets into these gaps from the top, thereby can cross the supporting field.
In addition, during switching, from blow-off outlet 44 blowing out pressurised air of pipeline 38, the glass substrate G that is transferred to bearing set S is supported by noncontact through pipeline 38.On the other hand, sucker 50 adsorbs the glass substrate G that transfers in the end in this processing unit (plant) PM side from the below.
After glass substrate G is transferred to bearing set S, like Fig. 8 and shown in Figure 9, traverser 32 on fixed way 26 near moving the position of casing CS side, and the end of the pipeline 38 of bearing set S be configured in casing CS near.In addition, follow moving of traverser 32, glass substrate G with support region to casing CS side shifting, and the end of glass substrate G also be configured in casing CS near.
Afterwards, like Figure 10 and shown in Figure 11, Auxiliary Track 48 moving near the position of casing CS side on main orbit 46.Follow moving of Auxiliary Track 48, glass substrate G relatively moves with respect to support region, and simultaneously to casing CS side shifting, and the part of glass substrate G surpasses the end (front end) of support region, gets in the casing CS.
In casing CS, dispose and be used to join the casing of glass substrate G with substrate supporting device 60, the part that casing gets into the glass substrate G in the casing CS with substrate supporting device 60 supportings.Casing for example is made up of air-cushion device with substrate supporting device 60.
Then, like Figure 12 and shown in Figure 13, sucker 50 moves on the Auxiliary Track 48 the position near casing CS side.Follow moving of sucker 50, glass substrate G further relatively moves with respect to support region, and is final simultaneously to casing CS side shifting, and glass substrate integral body gets into casing CS side and supported with substrate supporting device 60 by casing.Thereafter, casing CS is risen slightly, sucker 50 is paid to casing CS from glass substrate G disengaging and with glass substrate G.
So far, to glass substrate G is illustrated from the situation that processing unit (plant) PM is transported to casing CS.Glass substrate G in will being accommodated in casing CS accepts and carries and under the situation that processing unit (plant) PM pays, can above-mentioned operation be undertaken by reversing sense.
According to the aforesaid substrate feedway, and casing CS between during handing-over substrate G, traverser 32 is positioned at casing CS side, follows in this, the prolonging of support region that exceeds traverser 32 portion near casing CS.Therefore, shorten at interval between casing CS and support region, and the bending of the glass substrate that prevents between support region and casing CS, to join.As a result, according to this basal plate conveyer, and casing CS between can carry out the handing-over of glass substrate G smoothly.
In addition, in the aforesaid substrate conveyer, bearing set S only is configured on the traverser 32, and the result is that this basal plate conveyer has simple structure.Particularly in this substrate carrying mechanism, that compressed-air supply is also simple to the pipe arrangement of the tracheae of pipeline 38.
The present invention is not limited by an above-mentioned embodiment, and various distortion can be arranged.
For example in one embodiment, bearing set S is an air-cushion device, but also can be through the super sonic ultrasonic float-up device of supporting glass substrate G non-contactly.Perhaps, bearing set S also can be the roller set that a plurality of rollers constitute.Roller set contacts and supporting glass substrate G with the back side of glass substrate G, and through a plurality of roller regulation supportings field.Under this situation, can rotate driving rolls and make roller set double as mobile device.
In one embodiment, basal plate conveyer has two hand H that separate up and down each other, but also can only have a hand H.
But, if having two hand H, then through a hand H after processing unit (plant) PM accepts glass substrate G, can be delivered to processing unit (plant) PM with carrying the glass substrate G that puts on another hand H in advance.That is, handle between the glass substrate, can accept then to want glass substrate processed G and carry to put from casing CS at hand H at processing unit (plant) PM.Thus, the time of delivery of glass substrate G reduces, and improves the capacity rating of LCD TV.
In addition, even have two hands, because bearing set S only is configured on the traverser 32, so the structure of tracheae etc. also can be complicated.
At last, basal plate conveyer of the present invention goes in the production system of plasm TV etc., certainly also applicable to the substrate beyond the glass substrate.That is, the glass conveyer joins the relative machine of substrate each other and is not limited to processing unit (plant) and casing.
Claims (5)
1. basal plate conveyer, the substrate that is used for the said side's side joint in the side's side that is spaced from each other distance and the opposing party's side is received is carried, and is delivered to said the opposing party's side, it is characterized in that possessing:
Traverser, it is configured on the pedestal in the horizontal direction movably, and when said side's top-cross connects substrate, is positioned at said side's side;
Bearing set, it is configured on the said traverser, and has the support region that is used for supporting movably in said horizontal direction said substrate;
Mobile device, it is used for connecing said substrate in said side's top-cross, and cross said side's side said support region front end and substrate on the said support region is moved on said horizontal direction;
Stand and be located at the pillar on the said pedestal;
Hand, it connects said substrate in said the opposing party's top-cross, and and said bearing set between the said substrate of handing-over course of conveying, removable and see from above-below direction and to cross said support region and liftably be installed on the said pillar in said horizontal direction,
Said support region has from prolonging of exposing of said traverser in said side's side and portion.
2. basal plate conveyer as claimed in claim 1 is characterized in that said mobile device is located at said bearing set.
3. basal plate conveyer as claimed in claim 2 is characterized in that, said bearing set has:
The a plurality of pipelines that are arranged parallel to each other and extend to said horizontal direction respectively,
Be formed at the compressed-air actuated blow-off outlet above the said pipeline.
4. basal plate conveyer as claimed in claim 3 is characterized in that, said mobile device comprises:
The main orbit that the said support region in edge extends in said horizontal direction,
Be slidably mounted in the sliding rail on the said main orbit.
5. basal plate conveyer as claimed in claim 4 is characterized in that, possesses each other two said hands of partition distance up and down.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP039052/2007 | 2007-02-20 | ||
| JP2007039052A JP4840595B2 (en) | 2007-02-20 | 2007-02-20 | Board transfer machine |
| PCT/JP2007/074560 WO2008102510A1 (en) | 2007-02-20 | 2007-12-20 | Substrate transfer apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101558001A CN101558001A (en) | 2009-10-14 |
| CN101558001B true CN101558001B (en) | 2012-03-21 |
Family
ID=39709792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007800456544A Active CN101558001B (en) | 2007-02-20 | 2007-12-20 | Substrate transfer apparatus |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4840595B2 (en) |
| KR (1) | KR101133823B1 (en) |
| CN (1) | CN101558001B (en) |
| TW (1) | TWI343354B (en) |
| WO (1) | WO2008102510A1 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5218000B2 (en) * | 2008-12-12 | 2013-06-19 | 株式会社Ｉｈｉ | Substrate storage and supply system |
| KR101543681B1 (en) * | 2009-01-15 | 2015-08-11 | 주성엔지니어링(주) | Substrate processing system |
| CN102001525B (en) * | 2010-09-30 | 2012-07-04 | 东莞宏威数码机械有限公司 | Locked elevating translational transmission equipment |
| CN102009846B (en) * | 2010-09-30 | 2013-04-03 | 东莞宏威数码机械有限公司 | Locking type turning transmission platform device |
| JP5741834B2 (en) * | 2011-05-13 | 2015-07-01 | 株式会社ニコン | Object carry-out method, object exchange method, object holding apparatus, exposure apparatus, flat panel display manufacturing method, and device manufacturing method |
| CN102897536B (en) * | 2012-11-02 | 2015-04-15 | 深圳市华星光电技术有限公司 | Transferring system for transporting flat plate and mechanical device thereof as well as transporting method |
| CN103950716B (en) * | 2014-05-21 | 2016-07-27 | 芜湖万辰电光源科技有限公司 | A kind of conveying mechanism of glass bar plated film microscope carrier |
| CN109250502B (en) * | 2018-10-18 | 2020-08-11 | 深圳市华星光电半导体显示技术有限公司 | Substrate conveying device |
| CN112110377B (en) * | 2020-08-27 | 2022-02-18 | 银川威力传动技术股份有限公司 | Elevator for online detection and online detection system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1550434A (en) * | 2003-05-09 | 2004-12-01 | �Ϻ���ͨ��ѧ | Integrated large glass handling system |
| CN1608318A (en) * | 2001-12-25 | 2005-04-20 | 东京毅力科创株式会社 | Processed body carrying device, and processing system with carrying device |
| CN1776884A (en) * | 2004-11-15 | 2006-05-24 | 大日本网目版制造株式会社 | Base-board treating device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4356234B2 (en) * | 2000-11-30 | 2009-11-04 | 株式会社Ｉｈｉ | Substrate transfer device |
| JP4215426B2 (en) * | 2001-12-07 | 2009-01-28 | Ｎｅｃエンジニアリング株式会社 | Liquid crystal panel transfer equipment |
| JP2005064431A (en) * | 2003-08-20 | 2005-03-10 | Shinko Electric Co Ltd | Apparatus and method for substrate transfer |
| JP4904722B2 (en) * | 2005-06-02 | 2012-03-28 | 株式会社Ｉｈｉ | Substrate transfer device |
| KR101300853B1 (en) * | 2005-12-05 | 2013-08-27 | 도쿄엘렉트론가부시키가이샤 | Substrate conveying system, substrate conveying device and substrate treatment device |
-
2007
- 2007-02-20 JP JP2007039052A patent/JP4840595B2/en active Active
- 2007-12-20 CN CN2007800456544A patent/CN101558001B/en active Active
- 2007-12-20 KR KR1020097017284A patent/KR101133823B1/en active IP Right Grant
- 2007-12-20 WO PCT/JP2007/074560 patent/WO2008102510A1/en active Application Filing
-
2008
- 2008-01-04 TW TW97100280A patent/TWI343354B/en active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1608318A (en) * | 2001-12-25 | 2005-04-20 | 东京毅力科创株式会社 | Processed body carrying device, and processing system with carrying device |
| CN1550434A (en) * | 2003-05-09 | 2004-12-01 | �Ϻ���ͨ��ѧ | Integrated large glass handling system |
| CN1776884A (en) * | 2004-11-15 | 2006-05-24 | 大日本网目版制造株式会社 | Base-board treating device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008205160A (en) | 2008-09-04 |
| CN101558001A (en) | 2009-10-14 |
| TW200911661A (en) | 2009-03-16 |
| KR101133823B1 (en) | 2012-04-06 |
| WO2008102510A1 (en) | 2008-08-28 |
| JP4840595B2 (en) | 2011-12-21 |
| KR20090114404A (en) | 2009-11-03 |
| TWI343354B (en) | 2011-06-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101558001B (en) | Substrate transfer apparatus | |
| CN101224946B (en) | Automatic production line for TFT-LCD glass substrate | |
| JP4988763B2 (en) | Device for exchanging / conveying rolls | |
| CN103009488B (en) | Sheet material segmenting device and sheet material splitting equipment | |
| RU2689019C2 (en) | Straightening machine and method for replacing straightening roller elements | |
| CN101583463A (en) | Prismatic member polishing device | |
| CN105460623A (en) | Automatic stacking conveying line | |
| CN108161639B (en) | A kind of extra quality road glass edging equipment | |
| CN101842302B (en) | Substrate transport device | |
| CN101920834A (en) | Automated warehouse | |
| CN105858168B (en) | A kind of conveying transferring device of heat insulating decorative board | |
| CN104527842A (en) | Online system for disassembling scraped car | |
| CN210187743U (en) | Sorting road junction and equipment | |
| JP4784416B2 (en) | Plate alignment equipment | |
| KR101063310B1 (en) | Pipe internal shot blasting equipment | |
| CN107900247B (en) | A kind of automatic production line of cooperation industrial robot work | |
| CN101823215B (en) | Vertical machining production line of sheet material | |
| CN205520905U (en) | Can be according to two straight flange edging machines of straight line of glass size change | |
| CN108100344A (en) | The Quick packing machine structure and its method of work of ceramic brick stacking brick-vanning collator | |
| CN105437048B (en) | A kind of watchband grain automatic polishing feed arrangement | |
| CN201224707Y (en) | Automatic processing production line for TFT-LCD glass substrate | |
| CN209565078U (en) | High pressure roller mill technique workshop | |
| KR101075976B1 (en) | Pipe internal shot blasting equipment | |
| CN208307723U (en) | Double Tops lift-type stepper | |
| CN104797513A (en) | Workpiece conveyance device, and workpiece conveyance method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |