CN101530982A - Grinding clamp for changing wafer orientation - Google Patents
Grinding clamp for changing wafer orientation Download PDFInfo
- Publication number
- CN101530982A CN101530982A CN200910022002A CN200910022002A CN101530982A CN 101530982 A CN101530982 A CN 101530982A CN 200910022002 A CN200910022002 A CN 200910022002A CN 200910022002 A CN200910022002 A CN 200910022002A CN 101530982 A CN101530982 A CN 101530982A
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- China
- Prior art keywords
- dish
- support bar
- positioning seat
- grinding clamp
- angular deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
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Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN200910022002XA CN101530982B (en) | 2009-04-13 | 2009-04-13 | Grinding clamp for changing wafer orientation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200910022002XA CN101530982B (en) | 2009-04-13 | 2009-04-13 | Grinding clamp for changing wafer orientation |
Publications (2)
Publication Number | Publication Date |
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CN101530982A true CN101530982A (en) | 2009-09-16 |
CN101530982B CN101530982B (en) | 2011-03-16 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200910022002XA Expired - Fee Related CN101530982B (en) | 2009-04-13 | 2009-04-13 | Grinding clamp for changing wafer orientation |
Country Status (1)
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CN (1) | CN101530982B (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101769882B (en) * | 2009-12-15 | 2011-06-15 | 丹东奥龙射线仪器有限公司 | Gripping device for direction finder |
CN102513923A (en) * | 2011-12-28 | 2012-06-27 | 彩虹集团公司 | Sample tray for precision grinding and polishing machine |
CN103128657A (en) * | 2011-11-24 | 2013-06-05 | 宝山钢铁股份有限公司 | Clamp used for electron back scattering diffraction sample vibration polishing and use method thereof |
CN103692301A (en) * | 2013-12-12 | 2014-04-02 | 中国电子科技集团公司第二研究所 | Angle compensation processing device of crystalline direction of SiC monocrystalline and processing method thereof |
CN104816237A (en) * | 2015-04-29 | 2015-08-05 | 新乡航空工业(集团)有限公司 | Lower sleeve clamping mechanism of sleeve grinding device |
CN107256742A (en) * | 2017-07-25 | 2017-10-17 | 上饶市达淋新材料有限公司 | The variable FFC of cross-sectional area of conductor processing method |
CN108000291A (en) * | 2017-12-23 | 2018-05-08 | 哈尔滨秋冠光电科技有限公司 | Correct and use automatic orientation auxiliary device in sapphire ingot c faces |
CN109080012A (en) * | 2018-08-23 | 2018-12-25 | 中国工程物理研究院激光聚变研究中心 | Crystal orientation angle correction method |
CN112589671A (en) * | 2020-11-10 | 2021-04-02 | 东莞市新美洋技术有限公司 | Polishing jig |
CN113213092A (en) * | 2020-01-21 | 2021-08-06 | 特兰斯诺姆系统股份有限公司 | Transfer table and module |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69516035T2 (en) * | 1994-05-23 | 2000-08-31 | Sumitomo Electric Industries, Ltd. | Method for producing a semiconductor covered with hard material |
US6709322B2 (en) * | 2001-03-29 | 2004-03-23 | Lam Research Corporation | Apparatus for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing |
-
2009
- 2009-04-13 CN CN200910022002XA patent/CN101530982B/en not_active Expired - Fee Related
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101769882B (en) * | 2009-12-15 | 2011-06-15 | 丹东奥龙射线仪器有限公司 | Gripping device for direction finder |
CN103128657A (en) * | 2011-11-24 | 2013-06-05 | 宝山钢铁股份有限公司 | Clamp used for electron back scattering diffraction sample vibration polishing and use method thereof |
CN102513923A (en) * | 2011-12-28 | 2012-06-27 | 彩虹集团公司 | Sample tray for precision grinding and polishing machine |
CN103692301A (en) * | 2013-12-12 | 2014-04-02 | 中国电子科技集团公司第二研究所 | Angle compensation processing device of crystalline direction of SiC monocrystalline and processing method thereof |
CN103692301B (en) * | 2013-12-12 | 2016-01-20 | 中国电子科技集团公司第二研究所 | A kind of SiC single crystal crystal orientation angle compensation processing unit (plant) |
CN104816237A (en) * | 2015-04-29 | 2015-08-05 | 新乡航空工业(集团)有限公司 | Lower sleeve clamping mechanism of sleeve grinding device |
CN107256742A (en) * | 2017-07-25 | 2017-10-17 | 上饶市达淋新材料有限公司 | The variable FFC of cross-sectional area of conductor processing method |
CN107256742B (en) * | 2017-07-25 | 2023-05-16 | 上饶市达淋新材料有限公司 | Processing method of FFC with variable conductor section |
CN108000291A (en) * | 2017-12-23 | 2018-05-08 | 哈尔滨秋冠光电科技有限公司 | Correct and use automatic orientation auxiliary device in sapphire ingot c faces |
CN109080012A (en) * | 2018-08-23 | 2018-12-25 | 中国工程物理研究院激光聚变研究中心 | Crystal orientation angle correction method |
CN113213092A (en) * | 2020-01-21 | 2021-08-06 | 特兰斯诺姆系统股份有限公司 | Transfer table and module |
CN113213092B (en) * | 2020-01-21 | 2023-05-09 | 特兰斯诺姆系统股份有限公司 | Transfer table and module |
CN112589671A (en) * | 2020-11-10 | 2021-04-02 | 东莞市新美洋技术有限公司 | Polishing jig |
Also Published As
Publication number | Publication date |
---|---|
CN101530982B (en) | 2011-03-16 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: NANTONG OUTE MACHINERY EQUIPMENT CO., LTD. Free format text: FORMER OWNER: XI'AN UNIV. OF SCIENCE AND ENGINEERING Effective date: 20130821 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 710048 XI'AN, SHAANXI PROVINCE TO: 226600 NANTONG, JIANGSU PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20130821 Address after: 226600, Nantong County, Jiangsu City, Haian Province Liu Zhen Liu Village 1 groups Patentee after: Nantong Aote Machinery Equipment Co., Ltd. Address before: 710048 Shaanxi city of Xi'an Province Jinhua Road No. 5 Patentee before: Xi'an University of Technology |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110316 Termination date: 20180413 |
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CF01 | Termination of patent right due to non-payment of annual fee |