CN101527255A - Ultraviolet irradiation set and ultraviolet irradiation processing unit - Google Patents
Ultraviolet irradiation set and ultraviolet irradiation processing unit Download PDFInfo
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- CN101527255A CN101527255A CN200910004700A CN200910004700A CN101527255A CN 101527255 A CN101527255 A CN 101527255A CN 200910004700 A CN200910004700 A CN 200910004700A CN 200910004700 A CN200910004700 A CN 200910004700A CN 101527255 A CN101527255 A CN 101527255A
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- excimer lamp
- space
- lamp
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- lampshade
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
Abstract
The invention provides an ultraviolet irradiation set which can fill the non-active gas rapidly around the quasi-molecule lamp and comprises: a plurality of quasi-molecule lamps enclosed with the discharging gas in a sealed space formed in a discharging container and forming a pair of electrodes on the outer surface of the capacitor isolated by the sealed space; a lampshade surrounding the plurality of quasi-molecule lamps, opening at one direction of the vertical direction and a gas supply mechanism for supplying the non-active gas to the interior of the lampshade. The ultraviolet irradiation set is characterized in that in the lampshade the space shielding body is disposed in a space out of the space of the quasi-molecule lamp.
Description
Technical field
The present invention relates to ultraviolet irradiation treatment device, especially relate in the manufacturing process of semiconductor substrate or crystal liquid substrate etc., use the ultraviolet lamp and the ultraviolet irradiation treatment device of clean etc. the Excimer lamp be used in semiconductor substrate or crystal liquid substrate.
Background technology
In the manufacturing process of nearest semiconductor substrate or crystal liquid substrate etc., as the method for the dirt of the organic compound on the surface of the glass substrate of removing the silicon chip that is attached to semiconductor substrate or crystal liquid substrate etc., use ultraviolet thermal drying method to be utilized widely.Especially using from the method for cleaning of the ozone of the vacuum-ultraviolet light that Excimer lamp radiated or active oxygen gas, motion has various decontaminating apparatus more efficient and that clean in the short time, and is for example, known just like patent documentation 1.
Figure 13 is that expression is disclosed in the structure with the existing ultraviolet irradiation treatment device of document.According to existing ultraviolet irradiation treatment device, the hole of the diameter 2mm of a plurality of 3mm spacings is for example formed at corrosion resistant plate on the top at open lampshade A, and the porous gas diffuser plate B that becomes aperture opening ratio 40% is configured to parallel with the open surface of opening lampshade A.At supporting bracket C, be formed with continuous gas supply port CA in space by this gas diffusion plate B institute zoning, and on the supporting bracket C from above be provided with gas supplying duct D and cover above-mentioned gas supply port CA.At this gas supplying duct D, be connected with not shown nitrogen supply source, become peace and quiet nitrogen (non-active gas) is supplied in the space of gas diffusion plate B top through gas supplying duct D and gas supply port CA, and these structures have constituted gas feed unit E.In conveying room F, constitute many of conveyer G and transport arbor H for to being arranged to rotate freely state with the direction of the carriage direction quadrature of workpiece W, workpiece W puts in what be located at that these respectively transport arbor H and a plurality ofly transports roller and be transported.In addition,, be provided with the exhaust manifolds I that is connected in not shown exhaust apparatus mutually, and make the ozone that to discharge in inside with the nitrogen of supplying with produced etc. in conveying room F in the bottom of conveying room F.
Shown in the arrow of Figure 13, according to the ultraviolet irradiation treatment device of above-mentioned formation, nitrogen is spued downwards from the minute aperture of being located at the gas diffusion plate B in the lampshade A.The nitrogen that is spued is the tabular surface that at first bumps against in Excimer lamp J, here changes to transverse direction and flows, and flows as the crow flies to workpiece W surface from the both sides of Excimer lamp and drops.So, around Excimer lamp J,, and be maintained at the non-active gas environment that has oxygen hardly until the ultraviolet irradiation space X of workpiece W is all abrim with flowing of nitrogen.Therefore, be can be absorbed by oxygen and arrive hardly from the ultraviolet light that Excimer lamp J radiated to the ultraviolet irradiation space X, the uitraviolet intensity on workpiece W surface is to compare with the situation of having now to uprise considerablely.
Patent documentation 1: TOHKEMY 2005-197291 number.
, according to above-mentioned existing ultraviolet irradiation treatment device, in order to carry out the processing of workpiece W apace, becoming must be until the situation that the ultraviolet space X between Excimer lamp J and the workpiece W is full of apace with nitrogen around Excimer lamp J.Yet as shown in figure 13, in existing ultraviolet irradiation treatment device, a plurality of Excimer lamp J of adjacency are configured to across predetermined distance mutually, thereby have to increase the internal volume of open lampshade A.So, around a plurality of Excimer lamp J of the inside that is disposed at open lampshade A until the ultraviolet irradiation space X of workpiece W be full of with flowing of non-active gas, must supply with a large amount of non-active gas and the such problem that exists cost to uprise through gas supplying duct D and gas supply port CA and become.In addition, be used for a large amount of non-active gas through the minute aperture of gas diffusion plate B because of non-active gas is riddled Excimer lamp J around need for a long time, and have to reduce the travelling speed of workpiece W, have the such problem that reduces output.
Thus, in the present invention, its objective is provides ultraviolet lamp on every side that non-active gas can be riddled apace Excimer lamp and the ultraviolet irradiation treatment device that possesses ultraviolet lamp.
Summary of the invention
Ultraviolet lamp of the present invention has: a plurality of Excimer lamps, the described Excimer lamp confined space in being formed on discharge vessel is enclosed discharge gas, and is formed with pair of electrodes across this confined space at the outer surface of above-mentioned discharge vessel; Lampshade surrounds a direction opening of these a plurality of Excimer lamps and vertical direction; And gas supply mechanism, being used for non-active gas is supplied with inside to this lampshade, this ultraviolet lamp is characterized by: in above-mentioned lampshade, the space beyond the space that the space obturator is configured to be occupied by above-mentioned Excimer lamp.
In addition, ultraviolet lamp of the present invention is characterized by: be to dispose above-mentioned space obturator between above-mentioned Excimer lamp adjacent to each other, and the base end part of this space obturator is fixed in the top of above-mentioned lampshade.
Ultraviolet lamp of the present invention is in recent years, is required for large-area handled object irradiation ultraviolet radiation, therefore, just must increase the length of illumination that is accommodated in the Excimer lamp in the lampshade.For example, while when transporting handled object for the handled object irradiation ultraviolet radiation, the length of illumination of Excimer lamp must be paired in the overall length of direction of the carriage direction quadrature of handled object and also will grow.
Increase the length of illumination of Excimer lamp, then must increase the length of the synthetic quartz glass pipe that constitutes luminous tube.Increase the overall length of 1 of Excimer lamp, as described below, the problem that exists problem in the manufacturing of synthetic quartz glass pipe or Excimer lamp to be provided with, thereby difficulty.
Problem in the manufacturing of so-called synthetic quartz glass pipe, for making the long synthetic quartz glass pipe of overall length, then can bending, and be difficult to be processed into the lamp of stability of characteristics.In addition,, be not easy to transport (operation), and can injure the synthetic quartz glass pipe, can become expensive lamp along with the overall length of synthetic quartz glass pipe is elongated.
The problem that is provided with of so-called Excimer lamp, be meant when the Excimer lamp that overall length is long is located at lampshade, make the Excimer lamp warpage and the central part of Excimer lamp approaches workpiece, the uneven of ultra violet radiation can take place and to produce the processing of substrate uneven, perhaps further during warpage, then Excimer lamp is contacted with workpiece and rubs surface of the work and the problem that has the mechanicalness brought to damage for workpiece.
So, as shown in Figure 4, prepare its total length Excimer lamp 1A, the 1B also shorter, form light-emitting zone SA, the SB overlapping areas Q of each Excimer lamp 1A, 1B than the overall length of the direction of the carriage direction quadrature of handled object, thus, carrying out the growth length of illumination usually.Yet, as shown in Figure 4, compare with the Excimer lamp that total length is short, be formed with unnecessary space at the central axis direction of each Excimer lamp 1A, 1B.
Therefore, in order to reduce the redundant space of the central axis direction that is formed at above-mentioned Excimer lamp 1A, 1B, ultraviolet lamp of the present invention is characterized by: be that above-mentioned space obturator is configured on the central shaft of above-mentioned Excimer lamp, and each light-emitting zone of the above-mentioned Excimer lamp of adjacency mutually overlaps on the imaginary line for the orthogonality of center shaft of above-mentioned Excimer lamp.
In addition, above-mentioned ultraviolet lamp is characterized by: be to have to be used for above-mentioned Excimer lamp is fixed on supporter in the above-mentioned lampshade, and be fixed with the both sides of above-mentioned Excimer lamp and above-mentioned space obturator for this supporter.
In addition, ultraviolet irradiation treatment device of the present invention is characterized by: possess above-mentioned ultraviolet lamp, and have the conveyer that transports handled object to the direction of the orthogonality of center shaft of above-mentioned Excimer lamp.
According to ultraviolet lamp of the present invention, in lampshade, the space obturator is configured in the space beyond the space of being occupied by Excimer lamp, so the volume of the surrounding space of Excimer lamp tails off.Thereby, can will not make non-active gas atmosphere around the Excimer lamp even the volume non-active gas is not supplied in the lampshade yet, supply with the necessary cost of non-active gas and can reduce.In addition, as mentioned above, the volume of the surrounding space by reducing Excimer lamp make non-active gas atmosphere around can Excimer lamp apace, therefore can promote output.
In addition, in ultraviolet lamp of the present invention, between above-mentioned Excimer lamp adjacent to each other, dispose above-mentioned space obturator, and the base end part of this space obturator is fixed in the top of above-mentioned lampshade, therefore the space obturator positively can be fixed on the inside of lampshade.
In addition, in ultraviolet lamp of the present invention, above-mentioned space obturator is configured on the central shaft of above-mentioned Excimer lamp, and each light-emitting zone of the above-mentioned Excimer lamp of adjacency mutually, overlap on the imaginary line for the orthogonality of center shaft of above-mentioned Excimer lamp, therefore when the Excimer lamp that uses total length to lack, seal the space of the central axis direction that is formed on Excimer lamp by the space obturator, can reduce the volume of the surrounding space of Excimer lamp in the inside of lampshade, and ultraviolet ray positively can be radiated at large-area handled object.
In addition, according to ultraviolet lamp of the present invention, possess in order to above-mentioned Excimer lamp is fixed on the supporter of above-mentioned lampshade, and be fixed with the both sides of above-mentioned Excimer lamp and above-mentioned space obturator for this supporter, when therefore using common lampshade to carry out the ultraviolet irradiation processing for the width of its carriage direction multiple handled object inequality, can lower and supply with the necessary cost of non-active gas, and can will make non-active gas atmosphere around the Excimer lamp apace.
In addition, according to ultraviolet irradiation treatment device of the present invention, the central shaft that possesses Excimer lamp transports the conveyer of handled object towards the direction of quadrature, so can reduce the number of the last necessary Excimer lamp of ultraviolet irradiation processing of handled object.
Description of drawings
Fig. 1 is the sectional view of the structure of expression ultraviolet lamp of the present invention.
Fig. 2 (a) and Fig. 2 (b) are the sectional views of the structure of expression Excimer lamp.
Fig. 3 is the figure of expression when vertical direction is watched ultraviolet lamp.
Fig. 4 represents Excimer lamp, the figure of the configuration of space obturator and handled object conceptually.
Fig. 5 is the figure of the structure of representation space obturator.
Fig. 6 is the figure that represents the ultraviolet lamp of comparative example conceptually.
Fig. 7 is the sectional view of structure of the 2nd execution mode of expression ultraviolet lamp of the present invention.
To be expression watch figure when the ultraviolet lamp shown in Fig. 7 from vertical direction to Fig. 8.
Fig. 9 is the sectional view of structure of the 3rd execution mode of expression ultraviolet lamp of the present invention.
The stereogram that Figure 10 is expression when oblique upper is watched ultraviolet lamp a part of.
Figure 11 is the figure of structure that is used to illustrate the supporter of Excimer lamp.
Figure 12 is a stereogram of lighting lamp between being used to illustrate.
Figure 13 is the sectional view of the structure of the existing ultraviolet irradiation treatment device of expression.
The main element symbol description
1: Excimer lamp
2: the space obturator
3: gas supply mechanism
5: lampshade
6: conveyer
7: supporter
20: the space obturator
W: handled object
1B: Excimer lamp
1D: Excimer lamp
2A, 2C: space obturator
3B, 3D, 3F, 3H: gas supply mechanism
5: lampshade
6: conveyer
31B, 31D, 31F, 31H: opening
51: opening
52: the top
61: a plurality of rollers
100: ultraviolet lamp
Embodiment
(the 1st execution mode)
Below, the 1st execution mode that is directed to ultraviolet lamp of the present invention uses Fig. 1 to Fig. 5 to describe.Fig. 1 is the sectional view of the structure of expression ultraviolet lamp of the present invention.Fig. 2 is the sectional view of the structure of expression Excimer lamp.The sectional view of Excimer lamp is cut off in Fig. 2 (a) expression to central axis direction.Fig. 2 (b) is expression to cutting off the sectional view of Excimer lamp with the direction of orthogonality of center shaft.Fig. 3 is the figure of expression when vertical direction is watched ultraviolet lamp of the present invention.Fig. 4 conceptually represents Excimer lamp, the figure of the configuration of space obturator and handled object.Fig. 5 is the figure of the structure of representation space obturator.
As shown in Figure 2, Excimer lamp 1 is that the silex glass by dielectric material constitutes, and has the discharge vessel 10 in the flat square tube shape of four bights circle.Confined space S in the inside that is formed at discharge vessel 10, the rare gas of xenon etc. for example, or the halogen gas of chlorine etc. is mixed in rare gas comes filling as discharge gas.Produce the quasi-molecule light of wavelength inequality according to the kind of discharge gas.Discharge gas generally is that the pressure with about 10～100KPa is filled.
As shown in Figure 2, discharge vessel 10, the flat wall 12 of flat wall 11 and the lower side that is positioned at paper that is positioned at the upper side of paper stretches for separating mutually abreast, and the flat wall 14 on flat wall 13 and the right that is positioned at paper that is positioned at the left side of paper stretches for separating mutually abreast, and each end of these flat wall 11 to 14 is linked by bend 15.This kind discharge vessel 10 is to be positioned at any formation of paper flat wall 11,12 up and down to the used light-emitting face of trap apparatus outgoing ultraviolet ray, and in the time of for example below trap apparatus being disposed at discharge vessel 10, flat wall 12 becomes light-emitting face.
In flat wall 11,12, dispose electrode 17,18 respectively.Electrode 17,18 for example be with the corrosion resistant metal of gold, silver, copper, nickel, chromium etc. by print or evaporation on flat wall 11,12, for example thickness becomes 0.1 μ m～several 10 μ m, is covered with Width approximately region-wide of flat wall 11,12.Be positioned at the electrode 18 of below, when flat wall 12 becomes light-emitting face, with above-mentioned metal by printing or evaporation becomes clathrate and forms and has light transmission.Light-emitting zone SA be in Fig. 2 (a) with shown in the dotted line, among the confined space S in the discharge vessel 10 with electrode 17,18 zones that clipped.
As shown in Figure 1, 2, at inner face 11a, be formed with the ultraviolet reflecting film 16 that silicon (silica) particle is for example become with aluminium oxide particles for trap apparatus flat wall 11 on one side far away.In example shown in Figure 2, ultraviolet reflecting film 16 extends to continuously in the bend 15 at the two ends of flat wall 11 and the inner face of flat wall 12～14.Ultraviolet reflecting film 16 be the quality of silicon particle to contain ratio be 30～99%, and the quality of preferred aluminium oxide particles to contain ratio be 1～70%.
Use Fig. 3, be directed to ultraviolet lamp of the present invention and be described in detail.
In lampshade 5, Excimer lamp 1A～the 1D of a plurality of (example shown in Figure 3 is 4), and be positioned on the central shaft X of each Excimer lamp 1A～1D for each space obturator 2A～2D with the space obturator 2A～2D of Excimer lamp 1A～1D same number, and with the central shaft X orthogonal direction of Excimer lamp 1A～1D on Excimer lamp 1A～1D and space obturator 2A～2D be configured to alternatively arrange specific as followsly.
So, as shown in Figure 3, Figure 4, in ultraviolet lamp 100, each Excimer lamp 1A～1D, be that each central shaft X is arranged in the direction with the carriage direction quadrature of trap apparatus, and each light-emitting zone SA～SD of the Excimer lamp 1A～1D of adjacency mutually overlaps on the imaginary line K for each orthogonality of center shaft of Excimer lamp 1A～1D and is configured.Thus, shown in the 4th figure, even the overall length for the direction of the carriage direction quadrature of trap apparatus is compared also long with the overall length of each Excimer lamp 1A～1D, also be irradiated onto the whole overall length of direction for the carriage direction quadrature of trap apparatus by the ultraviolet ray of being radiated from Excimer lamp 1A～1D, can positively carry out the surface treatment of trap apparatus, and needn't make the long Excimer lamp of overall length, thereby have quasi-molecule is made the lamp simple such advantage that becomes corresponding to the trap apparatus overall length.
As Fig. 1, shown in Figure 3, above the vertical direction of each Excimer lamp 1A～1D, dispose in order to non-active gas is supplied in this Excimer lamp 1A～1D around gas supply mechanism 3A～3H.Each gas supply mechanism 3A～3H, constituted by the tubular element that the cross section is square tube and be used to blow out a plurality of opening 31A～31H of non-active gas, separate mutually and be arranged in order the length direction that is formed at gas supply mechanism 3A～3H, and can blow out non-active gas equably from each opening 31A～31H.Non-active gas for example preferably uses nitrogen etc. for fear of being supplied with from the ultraviolet light that Excimer lamp 1A～1D is radiated by the oxygen absorption that is present in the lampshade 5.
The formation that is directed to space obturator 2A～2D is described as follows.For convenience, only the structure to space obturator 2A describes, but for space obturator 2B～2D also is and the identical structure of space obturator 2A.
As shown in Figure 5, space obturator 2A be by: be installed in the top 52 of lampshade 5 clava 21A, cover bottom tube-like body 22A being arranged and fix this clava 21A and this has the fixed component 23A of bottom tube-like body 22A to be constituted around this clava.Clava 21A is the top 52 that base end side is fixed in lampshade 5, and is formed with end screw 211A is arranged being positioned at front near trap apparatus.There is bottom tube-like body 22A to be connected to the base end side at top 52, and is formed with in order to insert the opening 222A of logical fixed component 23A in the central authorities of base plate 221A by opening.Fixed component 23A is the bar-shaped spire 231A by the screw 211A that is screwed together in clava 21A, and leads the flange part 232A of expansion annularly to constitute continuously in this spire 231A.
In ultraviolet lamp of the present invention, the front end face (front end face that the bottom tube-like body is arranged) of preferred each space obturator 2A～2D, be disposed at than the plane of the light-emitting face that comprises each Excimer lamp 1A～1D also near trap apparatus, and than the top of close vertical direction also, the plane of the front end face of the lower side of the vertical direction that is positioned at lampshade 5.Thus, in the inner space of lampshade 5, the volume in the space beyond the space that can reduce to be occupied by each Excimer lamp 1A～1D, and, do not have the misgivings that trap apparatus bumps against for each space obturator 2A～2D.
According to ultraviolet lamp of the present invention as above, as Fig. 1, shown in Figure 3, the obturator that has living space of the spatial configuration beyond the space of being occupied by Excimer lamp 1A～1D in the inside of lampshade 5, thereby the volume in the unnecessary space in lampshade 5 diminishes.Therefore, just the inner space of lampshade 5 can be made non-active gas atmosphere, thereby the required cost of non-active gas that can abridge supply, and can be full of non-active gas apace for the inner space of lampshade 5 by supplying with a spot of non-active gas.
Especially, as shown in Figure 1, in possessing the ultraviolet irradiation treatment device of conveyer, in order to promote output, after considering to transport the trap apparatus of finishing processing the atmosphere in the lampshade 5 is become air atmosphere, and handled object be positioned at lampshade 5 opening 51 under the time, the atmosphere in the lampshade 5 must be made non-active gas atmosphere apace.Therefore, as the present invention, inside at lampshade 5, space beyond the space that reduces to be occupied by Excimer lamp 1, thus, when trap apparatus be positioned at lampshade 5 opening 51 under the time, non-active gas can be riddled in the lampshade 5 apace, thereby the output of comparing with the ultraviolet lamp that comparative example relates to can improve significantly.
To this, in the ultraviolet lamp of as shown in Figure 6 comparative example, inside at lampshade 5, space TA～TD beyond the space of being occupied by Excimer lamp 1A～1D is the configuration space obturator not, thereby if the non-active gas of volume is not supplied in space in the lampshade 5, then the spaces in the lampshade 5 can't be made non-active gas atmosphere, and can uprise cost, in addition, non-active gas is filled in space requirement time for a long time in the lampshade 5, thereby can reduces output.
(the 2nd execution mode)
Below, use Fig. 7 to Fig. 8 to describe for the 2nd execution mode of ultraviolet lamp.This execution mode is the short situation of overall length that preferably is applicable to for the direction of the carriage direction quadrature of handled object.Fig. 7 is the sectional view of structure of the 2nd execution mode of expression ultraviolet lamp of the present invention.Fig. 8 is the figure of expression when vertical direction is watched ultraviolet lamp shown in Figure 7.In Fig. 7, Fig. 8, give the symbol identical with Fig. 1 to Fig. 5 at the position identical with Fig. 1 to Fig. 5.
As shown in Figure 8, in ultraviolet lamp of the present invention, a plurality of Excimer lamp 1A～1C are configured uniformly-spaced to separate mutually and each central axes ground is arranged.Above the vertical direction of each Excimer lamp 1A～1C, dispose the gas supply mechanism 3A～3F that is used for around this Excimer lamp 1A～1C, supplying with non-active gas.
As Fig. 7, shown in Figure 8, space obturator 2A～2B is the space that is configured in beyond the space between the Excimer lamp 1A～1C that is present in adjacency mutually inevitably, that occupied by Excimer lamp 1A～1C.So, in the 2nd execution mode of ultraviolet lamp of the present invention, with the direction of the orthogonality of center shaft of each Excimer lamp 1A～1C, each Excimer lamp 1A～1C and each space obturator 2A～2B is by alignment arrangements alternatively.
That is, in ultraviolet lamp 200, can't guarantee the insulation distance with the supply side electrode, thereby can't be, and between each Excimer lamp 1A～1C of adjacency mutually, be formed with the space inevitably terrifically near each Excimer lamp 1A～1C.Like this, by space obturator 2A～2B being disposed at the space between the Excimer lamp 1A～1C that is formed at adjacency mutually inevitably, identical with the 1st execution mode of above-mentioned ultraviolet lamp of the present invention, the volume in the space beyond the space that can reduce in lampshade 5 inside, to be occupied by Excimer lamp 1A～1C, thereby, by supplying with a spot of non-active gas, just the inner space of lampshade 5 can be made non-active gas atmosphere, thereby the required cost of non-active gas that can abridge supply, and can be full of non-active gas apace for the inner space of lampshade 5.
(the 3rd execution mode)
Below, the 3rd execution mode that is directed to ultraviolet lamp of the present invention uses Fig. 9 to Figure 11 to describe.Fig. 9 is the sectional view of expression ultraviolet lamp.The stereogram that Figure 10 is expression when oblique upper is watched ultraviolet lamp a part of.Among Fig. 9, Figure 10, giving prosign with Fig. 1 to Fig. 5 with the common position of Fig. 1 to Fig. 5.Figure 11 is used for the figure that the structure to the supporter of Excimer lamp describes.Figure 12 is that expression is used for lighting the stereogram that lamp describes.
In ultraviolet lamp 300, the specification of lampshade 5 is unified into multiple, no matter the size of trap apparatus, when handling multiple trap apparatus, generally use lampshade 5 jointly, the number of the size of lampshade 5 and the Excimer lamp 1 that holds in this lampshade 5 is deciding corresponding to the width maximum of carriage direction in the multiple trap apparatus.Therefore, the width of the carriage direction of trap apparatus is compared with the width of the lampshade of this direction also and to be wanted hour, then pulls down several Excimer lamps 1 from supporter 7, carries out so-called and lights lamp (Inter and draw I and light a lamp).
As shown in figure 12, between to light lamp be to make the not supported state of Excimer lamp 1 at supporter 7D, the 7E of the right-hand side that is positioned at Excimer lamp 1C, and as shown in figure 10, be separately fixed at supporter 7D, 7E and carry out by having space obturator 20A, 20B with each Excimer lamp 1 about equal volume.The 3rd execution mode of ultraviolet lamp of the present invention, effective especially when carrying out lighting lamp between such.
At Fig. 9, ultraviolet lamp shown in Figure 10, be lampshade 5 inside that have the metallic basket formation of opening 51 in the lower side of vertical direction, a plurality of Excimer lamp 1A～1C isolate mutually to be become parallel and is individually fixed in supporter 7A～7C, and is provided with the gas supply pipe 3A～3F in order to the non-active gas of supplying with nitrogen etc. at the top 52 of lampshade 5.Be positioned at the right side of Excimer lamp 1C, block spaces obturator 20A, parallel supporter 7D, the 7E of being separately fixed at of 20B at the paper of Figure 10 with Excimer lamp 1A～1C.Each Excimer lamp 1A～1C is in order to make equalization with the distance of trap apparatus, and each light-emitting face is configured on the same plane.
As shown in figure 11, supporter 7A has: the 1st retaining member 71A is installed in the end 10A of Excimer lamp 1A; Reach the 2nd retaining member 72A, be installed in the other end 10B of Excimer lamp 1A.The 1st retaining member 71A is the fixed part 711A that extends abreast by the tubular axis that possesses with Excimer lamp 1A, and the protuberance 712A that extends continuously in fixed part 711A and toward the direction of fixed part 711A quadrature, and make section form L shaped shape, and at the front end face 713A of fixed part 711A, what be formed with the end that is used to insert Excimer lamp 1A has a bottom outlet 714A.
The 2nd retaining member 72A is by the 722A of post portion, 723A, 724A and form section コ shape continuously, and the frame 721A that disposes by the other end around Excimer lamp 1A, and become the 725A of pushing portion that rotation is linked to frame 721A freely as the center with the 724A of post portion and constituted.The 725A of pushing portion is the matrix part 726A by the end that is linked to the 724A of post portion, reach the protuberance 727A that extends in the vertical direction of this matrix part 726A continuously and form, and the leaf spring 728A of section formation C shape is fixed in protuberance 727A.
In addition, supporter 7B～7E has the structure identical with above-mentioned supporter 7A, as mentioned above, is fixed with Excimer lamp 1B, 1C respectively, and space obturator 20A, 20B.
In the ultraviolet lamp, have at supporter 7A～7E all to be fixed with the situation of under the state of Excimer lamp 1A～1E the trap apparatus irradiation ultraviolet radiation being implemented the processing of trap apparatus respectively, and from supporter 7A～7E any pulled down the situation of under any state of Excimer lamp 1A～1E the trap apparatus irradiation ultraviolet radiation being implemented the processing of trap apparatus.In the latter's situation, as shown in figure 10,, be fixed with space obturator 20A, 20B for the supporter 7D, the 7E that are not provided with Excimer lamp 1 according to ultraviolet lamp 300 of the present invention, therefore can reduce the redundant space of lampshade 5 inside.Thereby, according to ultraviolet lamp 300, can be identical with the ultraviolet lamp 100,200 of above-mentioned the 1st execution mode, just the inner space of lampshade 5 can be made non-active gas atmosphere with a spot of non-active gas, the needed cost of non-active gas therefore can abridge supply.
Claims (5)
1. ultraviolet lamp, it has: a plurality of Excimer lamps, described Excimer lamp are to enclose discharge gas in the confined space that forms in discharge vessel, and are formed with pair of electrodes across this confined space at the outer surface of above-mentioned discharge vessel; Lampshade surrounds these a plurality of Excimer lamps and at a direction opening of vertical direction; Reach gas supply mechanism, be used for non-active gas is supplied with the inside of this lampshade, this ultraviolet lamp is characterized by:
In above-mentioned lampshade, the space obturator is configured in the space beyond the space of being occupied by above-mentioned Excimer lamp.
2. ultraviolet lamp as claimed in claim 1 is characterized in that,
Between above-mentioned Excimer lamp adjacent to each other, dispose above-mentioned space obturator, and the base end part of this space obturator is fixed in the top of above-mentioned lampshade.
3. ultraviolet lamp as claimed in claim 1 is characterized in that,
Above-mentioned space obturator is configured on the central shaft of above-mentioned Excimer lamp, and each light-emitting zone of the above-mentioned Excimer lamp of adjacency mutually, overlaps on the imaginary line with the orthogonality of center shaft of above-mentioned Excimer lamp.
4. ultraviolet lamp as claimed in claim 1 is characterized in that,
Above-mentioned ultraviolet lamp is to have to be used for above-mentioned Excimer lamp is fixed on supporter in the above-mentioned lampshade, and is fixed with both of above-mentioned Excimer lamp and above-mentioned space obturator for this supporter.
5. a ultraviolet irradiation treatment device is characterized in that,
Have as each described ultraviolet lamp in the claim 1 to 4, and have to transporting the conveyer of handled object with the direction of the orthogonality of center shaft of above-mentioned Excimer lamp.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP056155/2008 | 2008-03-06 | ||
| JP2008056155A JP5092808B2 (en) | 2008-03-06 | 2008-03-06 | Ultraviolet irradiation unit and ultraviolet irradiation treatment device |
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| CN101527255A true CN101527255A (en) | 2009-09-09 |
| CN101527255B CN101527255B (en) | 2012-05-23 |
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| CN2009100047007A Active CN101527255B (en) | 2008-03-06 | 2009-03-06 | Ultraviolet irradiation set and ultraviolet irradiation processing unit |
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| Country | Link |
|---|---|
| JP (1) | JP5092808B2 (en) |
| KR (1) | KR101181171B1 (en) |
| CN (1) | CN101527255B (en) |
| TW (1) | TWI399787B (en) |
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| CN102419496A (en) * | 2010-09-02 | 2012-04-18 | 优志旺电机株式会社 | Irradiation device |
| CN102671891A (en) * | 2011-03-15 | 2012-09-19 | 优志旺电机株式会社 | Light irradiating device |
| CN102847691A (en) * | 2011-06-27 | 2013-01-02 | 株式会社杰士汤浅国际 | Ultraviolet irradiation device |
| CN103081058A (en) * | 2010-09-30 | 2013-05-01 | 株式会社杰士汤浅国际 | Dielectric barrier discharge lamp device |
| CN104145424A (en) * | 2012-04-19 | 2014-11-12 | 优志旺电机株式会社 | Solar cell test light irradiation device |
| WO2018119726A1 (en) * | 2016-12-26 | 2018-07-05 | 武汉华星光电技术有限公司 | Ultraviolet irradiation device for light emitting diode package |
| CN110831708A (en) * | 2017-07-19 | 2020-02-21 | 优志旺电机株式会社 | Light irradiation device |
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| JP5257324B2 (en) * | 2009-10-30 | 2013-08-07 | ウシオ電機株式会社 | Oxygen concentration measuring instrument and oxygen concentration measuring method |
| JP5510792B2 (en) * | 2009-12-02 | 2014-06-04 | 岩崎電気株式会社 | UV irradiation equipment |
| CN105916695B (en) * | 2014-02-04 | 2018-12-07 | 江泽事务器株式会社 | Printing object surface modifying device |
| DE102022112838A1 (en) * | 2022-05-21 | 2023-11-23 | IST METZ GmbH & Co. KG | Irradiation facility |
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| JP2001113163A (en) * | 1999-10-20 | 2001-04-24 | Hoya Schott Kk | Ultraviolet light irradiation device and method |
| JP3593654B2 (en) * | 2000-05-25 | 2004-11-24 | 東京エレクトロン株式会社 | Substrate processing apparatus and substrate processing method |
| JP2004119942A (en) * | 2002-09-30 | 2004-04-15 | Japan Storage Battery Co Ltd | Ultraviolet irradiation device |
| JP4479466B2 (en) * | 2004-11-04 | 2010-06-09 | ウシオ電機株式会社 | Excimer light irradiation equipment |
| TWI344320B (en) * | 2005-12-27 | 2011-06-21 | Harison Toshiba Lighting Corp | Short arc type discharge lamp operating apparatus, ultraviolet irradiation apparatus and method of ultraviolet irradiating |
| JP4702079B2 (en) * | 2006-02-06 | 2011-06-15 | ウシオ電機株式会社 | Excimer lamp |
| JP5019156B2 (en) * | 2006-08-21 | 2012-09-05 | ウシオ電機株式会社 | Excimer lamp device |
-
2008
- 2008-03-06 JP JP2008056155A patent/JP5092808B2/en active Active
- 2008-12-11 TW TW097148236A patent/TWI399787B/en active
-
2009
- 2009-01-19 KR KR1020090004163A patent/KR101181171B1/en active IP Right Grant
- 2009-03-06 CN CN2009100047007A patent/CN101527255B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102419496A (en) * | 2010-09-02 | 2012-04-18 | 优志旺电机株式会社 | Irradiation device |
| CN102419496B (en) * | 2010-09-02 | 2014-10-08 | 优志旺电机株式会社 | Irradiation device |
| CN103081058A (en) * | 2010-09-30 | 2013-05-01 | 株式会社杰士汤浅国际 | Dielectric barrier discharge lamp device |
| CN102671891A (en) * | 2011-03-15 | 2012-09-19 | 优志旺电机株式会社 | Light irradiating device |
| CN102847691A (en) * | 2011-06-27 | 2013-01-02 | 株式会社杰士汤浅国际 | Ultraviolet irradiation device |
| CN104145424A (en) * | 2012-04-19 | 2014-11-12 | 优志旺电机株式会社 | Solar cell test light irradiation device |
| WO2018119726A1 (en) * | 2016-12-26 | 2018-07-05 | 武汉华星光电技术有限公司 | Ultraviolet irradiation device for light emitting diode package |
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| CN110831708A (en) * | 2017-07-19 | 2020-02-21 | 优志旺电机株式会社 | Light irradiation device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009212429A (en) | 2009-09-17 |
| TWI399787B (en) | 2013-06-21 |
| CN101527255B (en) | 2012-05-23 |
| TW200939291A (en) | 2009-09-16 |
| JP5092808B2 (en) | 2012-12-05 |
| KR101181171B1 (en) | 2012-09-18 |
| KR20090096307A (en) | 2009-09-10 |
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