CN1750230B

CN1750230B - Excited quasi-molecular lamp device

Info

Publication number: CN1750230B
Application number: CN200510099983XA
Authority: CN
Inventors: 村上悟司; 藤次英树; 广濑贤一
Original assignee: Ushio Denki KK
Current assignee: Ushio Denki KK
Priority date: 2004-09-13
Filing date: 2005-09-13
Publication date: 2010-08-18
Anticipated expiration: 2025-09-13
Also published as: CN1750230A; KR20060049916A; KR100849801B1; TW200609990A; JP4380591B2; JP2006108069A; TWI332672B

Abstract

The present invention provides an excimer lamp apparatus with high reliability simply and safely carrying out exchange even in a long length lamp exceeding 1000mm and evading soiling of the interior of a lamp house or a conveyor chamber. An excimer lamp is stored in the lamp house and ultraviolet rays are radiated outside from the lamp in the excimer lamp apparatus. A plurality of plate frames (110) lined up in parallel in the lamp house (10), a unit (120) fabricated into an approximate rectangular box shape with a lamp storing part (125) formed on a bottom part and the excimer lamp (121) stored in the lamp storing part are provided. The unit (120) is inserted between the frames (110 and 110) installed facing each other and supported to be able to be extracted by the frames (110 and 110).

Description

Excited quasi-molecular lamp device

Technical field

The present invention relates to a kind of excited quasi-molecular lamp device.

Background technology

For example known in patent documentation 1 or patent documentation 2 have a following technology: be mounted with in the excited quasi-molecular lamp device of excited quasi-molecular lampbulb, will be from the ultraviolet ray of the scope more than the following 100nm of the 200nm that excited quasi-molecular lampbulb radiated, shine surface in object being treated, pass through the ozone that is produced and see through after ultraviolet composite effect, make the decomposition such as organic substance on object being treated surface disperse and clean.Recently, along with the maximization as the glass substrate of the liquid crystal indicator of object being treated, in the excited quasi-molecular lamp device, but tight demand has the irradiated area increaseization of large-area treatment.Thereby, the luminous tube sustainable growthization of the excited quasi-molecular lampbulb of loading, and accommodate during the internal capacity of lamp house of excited quasi-molecular lampbulb or weight also increases.

Yet in the above-mentioned excited quasi-molecular lamp device, following problem is arranged.

(1) excited quasi-molecular lampbulb, its luminous tube length surpasses 1000mm, and then the replacing operation of lamp can become difficult.Also be that lamp can be easy to generate deflection than length, add use to the glass of the luminous tube of the excited quasi-molecular lampbulb of end of lifetime can be because of the ultraviolet ray deterioration, if imprudent processing the, then vibrations in the operation or impact and may make luminous tube damaged easily.And the lamp house that patent documentation 1 is put down in writing is being got the enterprising portable lighter replacing of light window glass operation, when luminous tube is damaged when lamp is changed, have its fragment etc. and drop on the glass pane and pollute the lamp reception room, or member such as lamp seat drops on the glass pane and produces problem such as breakage.In addition, patent documentation 2 is put down in writing not to be possessed in the excited quasi-molecular lamp device of getting optical window, under the state that lamp house is set on the conveyor device of carrying substrate, carry out lamp and change, when lamp is changed under the situation of luminous tube breakage, have problems such as pollution conveyer such as this fragment is indoor.

(2) the framework part of lamp house, because be subjected to the thermal impact of excited quasi-molecular lampbulb, and along with bright the putting out of excited quasi-molecular lampbulb carried out thermal expansion, contraction repeatedly, but because of lamp house itself maximizes, thereby the absolute magnitude of the elongation that thermal expansion caused can increase, and can produce friction at the contact site with the conveyor device that is mounted with this lamp house, and member produces friction each other, powder disperses, and pollutes in the substrate and the situation in the conveyor device and have.

(3) in as described in patent documentation 1, possessing the device of getting optical window that quartz glass plate constitutes, though to inner importing of lamp house and filling inactive gas, keep the state higher than processed chamber, but window ara becomes big if device is maximized, when then constituting the glass bending expansion laterally of window, the central part of getting optical window can be very near substrate, handles speckle and produce at the periphery of window and central part, or touches substrate.

As described in patent documentation 2,,, also can't solve other problems though can solve the bad problem of getting outside expansion of optical window and producing according to not possessing the excited quasi-molecular lamp device of getting optical window.

Patent documentation 1: TOHKEMY 2001-160376 communique

Patent documentation 2: TOHKEMY 2004-113984 communique

Summary of the invention

The present invention In view of the foregoing makes, even the object of the present invention is to provide a kind of to surpassing the long size lamp of 1000mm, also can simply and safely change, and can avoid in the lamp house or conveyer indoor contaminated, the excited quasi-molecular lamp device that reliability is higher.

And, its purpose is to provide a kind of lamp house thermal expansion of avoiding, can not produce or floating metal powder etc. arranged, can prevent pollution that object being treated or device are inner or breakage, deterioration, and can seek the excited quasi-molecular lamp device that reliability improves because of the friction between lamp house and the conveying device etc.

Excited quasi-molecular lamp device of the present invention, be in lamp house, to accommodate excited quasi-molecular lampbulb, and will be from the past outside excited quasi-molecular lamp device of the ultraviolet irradiation of lamp, it is characterized in that, possess a plurality of plate-shaped frames of being arranged in parallel in lamp house inside, be configured as the essentially rectangular box, be formed with the unit of lamp resettlement section and be contained in the excited quasi-molecular lampbulb of above-mentioned lamp resettlement section, said units, insert between the framework of configuration relatively, simultaneously removedly by this frame supported.

In addition, it is characterized in that above-mentioned lamp resettlement section is formed at the bottom of unit.

In addition, it is characterized in that said units possesses and is formed with the housing of getting light portion.

In addition, it is characterized in that said units is supported in said frame via housing.

In addition, it is characterized in that said frame possesses cooling body is arranged.

In addition, it is characterized in that above-mentioned cooling body is formed with stream in chassis body, circulation has the cooling fluid in this stream.

In addition, it is characterized in that its inside of said units is hollow.

In addition, it is characterized in that possessing the gas supply device of supply gas, above-mentioned gas circulates in the inside of said units, and from being arranged in the squit hole ejection of bottom surface.

In addition, it is characterized in that above-mentioned squit hole is arranged on the position relative with the topmost of excited quasi-molecular lampbulb.

In addition, it is characterized in that said units is provided with the cooling body of lamp.

In addition, it is characterized in that said frame is formed with flange part in the bottom, be formed with recess above this flange part.

The invention effect

Among the present invention, the unit that is fixed with excited quasi-molecular lampbulb is loaded in the plate-shaped frame of relative configuration removedly, thereby lamp is when changing, can excited quasi-molecular lampbulb be taken out to the outside of lamp house according to each unit, and be placed into harbor, thereby luminous tube breaks and pollutes the accident of inner treatment chamber can prevent that lamp from changing the time.

Because of the unit is configured between the pair of frames, supported by this pair of frames simultaneously, thereby the state of unit for moving forward and backward, it can be extracted out easily, thereby can simply carry out the replacing operation of lamp.

Then,,, also can prevent two member frictions in advance, and avoid metal powder etc. to disperse in lamp house or in the process chamber even framework and/or unit expand because of the heat of lamp when lighting a lamp by between framework upper side and side, unit, the space being set.

And, the distance of lamp and workpiece can be disposed closer, thereby can be under the light attenuation less state that lamp radiated, with high efficiency irradiation workpiece in unit bottom formation lamp resettlement section.

And housing is set in the unit, just in case lamp also can avoid the lamp separation of fragments in processed indoor when damaged.

Possess cooling body at framework, can suppress the thermal expansion of lamp house.

And cooling body is preferably in chassis body and forms stream, and circulation has the cooling body of cooling with fluid in this stream.

In addition, if make a plurality of frameworks not produce temperature difference, then the degree of thermal expansion is understood equalization, and avoids producing distortion at lamp house.

For example, each framework is imported the mechanism of fluid if use independent formation stream in each framework, then the temperature of cooling fluid can not be risen, between a plurality of frameworks, be difficult to produce temperature difference by being circulated in framework.

Inside, unit forms hollow, forms solid structure compared with inside, unit, and weight can significantly alleviate, and can reduce the deflection that produces because of weight own.

And by to inactive gas such as the hollow internal feed nitrogen of unit and to the object being treated ejection, can the ultraviolet absorption of radiating from lamp be reduced by near the object being treated oxygen partial pressure is reduced, thereby improve disposal ability.

And the part as if squit hole being arranged at the luminous tube that surrounds lamp then can flow through nitrogen around the luminous tube, but and cool down lamp.

Description of drawings

Fig. 1 represents the end view of excited quasi-molecular lamp device of the present invention with cut-away section;

Fig. 2 is the decomposition structural map of the lamp house of Fig. 1;

Fig. 3 is the cutaway view of the lamp house part of Fig. 1, also is the A-A cutaway view;

Fig. 4 is the cutaway view of the lamp house part of Fig. 1, also is the B-B cutaway view;

Fig. 5 is for amplifying the cutaway view of the contact portion of representing unit and framework;

Fig. 6 illustrates the enlarged drawing of the structure of power supply connecting portion;

Fig. 7 explanation is arranged at the enlarged drawing of the engaging support mechanism on top, unit;

The amplification view of the maintained state of Fig. 8 indication lamp;

Fig. 9 illustrates the structure of excited quasi-molecular lampbulb, (a) is the cutaway view of tube axial direction, (b) is the cutaway view with the tubular axis vertical direction;

The plane graph of bottom surface, Figure 10 unit;

Figure 11 illustrates the major part cutaway view of unit cooling device;

Figure 12 illustrates the figure of other execution modes of the present invention, takes out 1 major part amplification view that the unit is represented;

Figure 13 illustrates the figure of other execution modes of the present invention, takes out 1 major part amplification view that the unit is represented;

Figure 14 illustrates other execution modes of the present invention, (a) is the decomposition structural map of seeing from sidepiece, (b) is end view;

Figure 15 is the cutaway view of Figure 14;

Figure 16 takes out 1 enlarged drawing that the unit is represented among Figure 15;

Figure 17 represents other execution mode, amplifies the cutaway view of 1 unit of expression;

Figure 18 represents other execution mode, amplifies the cutaway view of 1 unit of expression.

Embodiment

With reference to figure 1～Fig. 6 the 1st execution mode of the present invention is described.

Fig. 1 is an end view of representing excited quasi-molecular lamp device integral body of the present invention with cut-away section, and Fig. 2 is the decomposition structural map of the lamp house of Fig. 1.Fig. 3 and Fig. 4 are the cutaway views of the lamp house part of Fig. 1, and Fig. 3 is the A-A cutaway view, and Fig. 4 is the B-B cutaway view.In addition, Fig. 5 is the key diagram that amplifies the contact portion section of expression unit and framework, and Fig. 6 is the key diagram of the structure of power supply connecting portion.

With reference to figure 1～Fig. 4 device integral body is described.As shown in Figure 1, lamp house 10 belows of essentially rectangular box are formed with process chamber 20.These process chamber 20 belows possess not shown carrying mechanisms such as conveyer, carrying workpiece W such as glass substrate and shine the quasi-molecule light that has from lamp house 10, and apply predetermined processing.

Lamp house 10 is to possess the framework 11 that forms the side, cover the lid 12 of its upper opening and be disposed at the pedestal 13 of framework 11 belows, is disposed on the process chamber 20 via this pedestal 13.In addition, 117 is the general pipelines of chilled fluid flow among Fig. 1, the 118th, handle gas supply pipeline, and describe in detail in the back.

Lamp house bottom open (with reference to figure 1, Fig. 4), the luminous tube of excited quasi-molecular lampbulb 121 disposes in the face of the inner space of process chamber 20.

In addition, on the top of excited quasi-molecular lampbulb 121, at one end the 121a side possesses power supply unit 130 as shown in Figure 1, and power supply unit 130 is fixedly installed between the framework 110 as shown in Figure 3.

Inner parallel and equally spaced dispose a plurality of thick plate-like frameworks 110 (with reference to figure 2) side by side at lamp house 10, lamp house 10 inside are divided into elongated rectangle by framework 110.As shown in Figure 3, Figure 4, between the framework 110,110 of configuration, dispose case shape unit 120.115 be that conduit use in framework cooling among Fig. 2 in addition, the 116th, pressing member, among Fig. 3, Fig. 4, the wall thickness F partly that is arranged at framework 110 is by above-mentioned conduit 115 formed streams.In the back they are described.

Framework 110 for example is made of aluminium.Framework 110 is fixed on the pedestal 13, and the bottom is formed with the flange part 112 in the Width expansion, and section forms inverted T-shape (with reference to figure 3, Fig. 4).Unit 120 is set up with the state on the flange part 112 that is placed on described framework 110.

Though framework 110 is with its flange part 112 support units 120, owing to possess side wall portion 111 and formation height to a certain degree, the mechanical strength that can seek lamp house 10 improves, and is difficult to produce lamp house deflection or distortion.

On the other hand, the sheet material of thickness 2～8mm that unit 120 for example is made of aluminium constitutes, and inside forms hollow, and top board 122 tops are provided with unit 120 and take out the handle 123 of usefulness.If make unit 120 inner, then can seek lightweight, and become the structure that lamp house 10 is difficult to deflection for hollow.

Among Fig. 4, the width S of unit 120 ₁Form interval S than framework 110 ₂Narrow 0.5～5mm shown in the enlarged drawing of Fig. 5, is formed with space d between unit 120 and the framework 110.Even therefore excited quasi-molecular lampbulb 121 heatings make unit 120 thermal expansions, because and be formed with sufficient space between the framework 110, thereby can prevent producing friction between stop element 120 and the framework 110 or distorting.

In addition, on framework 110 during the metal powder of generation unit 120 and framework 110 frictions, for its temporary transient recovery being provided with recess 113 on flange part 112.This recess 113 for example is made of the elongated slot that extends framework 110 long side directions, even also can avoid it to disperse during generation such as metal powder thus at once, and keeps the cleaning of process chamber or lamp house inside.

Unit 120 can take off the lid 12 of lamp house 10 in Fig. 1, hold the end 120a side that handle 123 is mentioned unit 120, pulls out to the direction of leaving power supply 130, thereby takes out from lamp house 10 simply.

Thereby, when changing excited quasi-molecular lampbulb 121, unit 120 can be transported to excited quasi-molecular lamp device 100 outsides and operate, can safety and operability carry out well, even lamp breakage in changing operation, the fragment of lamp can not polluted in the process chamber yet or in the lamp house.

According to above the present invention, because of unit 120 is to be placed a structure that is held on the framework 110, thereby unit 120 can freely come in and go out in lamp house 10, can simply unit 120 be transported to the outside of lamp house 10, can carry out the replacing of lamp safely and simply.

In addition, make its height higher, can increase mechanical strength, can make the lamp house 10 that is difficult to produce deflection or distortion than the side wall portion 111 of framework 110.

The structure of power supply connecting portion then is described with reference to figure 3 and Fig. 6.Fig. 6 is the enlarged drawing of the structure of explanation power supply connecting portion, and the structure that illustrated for leading portion is represented with same numeral and omitted explanation.

In the bottom of power supply unit 130, corresponding each excited quasi-molecular lampbulb 121 and be equipped with the power supply terminal 131 that crooked leaf spring forms.According to Fig. 6 (a), if will accommodate once again to lamp house 10 from the unit 120 that lamp house 10 takes out, then be set at unit 120 the power supply bulge loop (

The prominent son of Electricity) 124 meetings face contact power supply terminal 131 shown in Fig. 6 (b) makes power supply unit 130 and excited quasi-molecular lampbulb 121 be electrically connected thus.Though so power supply connects and to be arranged at each excited quasi-molecular lampbulb 121 as shown in Figure 3, because of itself and above-mentioned unit 120 is accommodated to the operation of lamp house 10 are carried out simultaneously, thereby the operation connection of very simply also also can positively powering.

Thus, the annexation of excited quasi-molecular lampbulb 121 and power supply unit 130 only forms with the contacting of pressed state of power supply terminal 131 with power supply bulge loop 124, the combination of in installation unit 120, just can powering, thereby need not constitute the power supply connection at each excited quasi-molecular lampbulb 121, and can very simply carry out the replacing operation of lamp.

Unit and framework are located with mechanism for example shown in Figure 7.Fig. 7 is the enlarged drawing of the detent mechanism part of unit and framework in the lamp house cutaway view shown in Figure 4.Fig. 7 (a) is the length direction vertical sectional view of unit, and Fig. 7 (b) is the C-C cutaway view of (a).On the side of the top board 122 of unit 120, be provided with guide finger 122a outstanding on Width by method such as being pressed into, the chimeric embeded slot 111a of guide finger 122a is formed at above the rank portion of framework 110 therewith.When unit 120 was contained in lamp house, if unit 120 is slided at framework 110 upper edge long side directions, then guide finger 122a can be embedded in embeded slot 111a and carry out the location of unit 120 and framework 110, and the long side direction of limiting unit 120 in lamp house moves simultaneously.By location herein, being electrically connected of illustrated power supply terminal and power supply bulge loop before can obtaining, and reach the power supply joint of excited quasi-molecular lampbulb really.

For example following described being assemblied in the unit of excited quasi-molecular lampbulb.

As shown in Figure 4 in the substantial middle portion of the bottom surface of each unit 120 120c, for example be formed with outstanding to the inside and section is the groove of semicircle shape at long side direction two places, be respectively arranged with lamp resettlement section 125.A pair of holding

member

126a, 126b shown in the enlarged drawing of Fig. 8, are equipped with in each

lamp resettlement section

125, and 121 of excited quasi-molecular lampbulbs are supported by this holding

member

126a, 126b and are assemblied in unit 120.Among Fig. 8 127 is squit holes in addition, and arrow is that gas flow is handled in expression, all is illustrated following.

Lamp holding member

126a, 126b for example are made of the line style spring that forms the U font, and the U character segment can deform to the direction of leaving mutually, only lamp are inserted the top and can be assemblied in unit 120, can free and loading and unloading easily.Though this holding

member

126a, 126b in this diagram, are provided with many places at the long side direction of excited quasi-molecular lampbulb 121.

Fig. 9 is the cutaway view of structure of explanation excited quasi-molecular lampbulb, (a) is the tube axial direction cutaway view, (b) is the cutaway view of the direction vertical with tubular axis.

Excited quasi-molecular lampbulb 121 for example constitutes, possess by synthetic quartz glass and constitute and the inner straight tube-like luminous tube 121b of xenon that seals up for safekeeping, the additional outer electrode 121c that is provided with the semicircle tubular on this luminous tube 121b outer surface, on the other hand, luminous tube 121b internal configurations has the internal electrode 121d of coiled type, is applied with high frequency voltage between internal electrode 121d and the outer electrode 121c.121e is by the bobbin that dielectric constituted that possesses for discharge stabilization, for example glass tube.This bobbin 121e inside is inserted with internal electrode 121d.

The metal forming 121f that the two ends of internal electrode 121d are connected with molybdenum respectively and are constituted, this metal forming 121f is embedded among the 121g of the envelope portion of contracting (ピ Application チシ-Le portion) that is formed on luminous tube 121b end, make internal electrode 121d suspension in luminous tube, luminous tube 121b is sealed simultaneously.The outer end of metal forming 121f is welded with the outside and leads rod (リ-De rod) 121h, and this outside is led rod and is taken out to the luminous tube outside.121i is that the inwall from luminous tube 121b is given prominence to the pillar that forms to center position for the moving of radial direction of limiting glass tube 121e in addition.

If between internal electrode 121d and outer electrode 121c, apply voltage, then can produce discharge via luminous tube 121b and glass tube 121e, xenon is excited in discharge space and produces the quasi-molecule light of wavelength 172nm, and is radiated to luminous tube 121b outside.

Excited quasi-molecular lampbulb 121 according to above-mentioned formation can obtain good flash-over characteristic, and the lamp structure is fairly simple simultaneously, and can make the lamp of long size easily.

Certainly, the excited quasi-molecular lampbulb structure is not limited to above-mentioned formation and can suitably changes.

In the above-mentioned excited quasi-molecular lamp device, also can possess cooling body at framework.

For example shown in Figure 2, in a side of the side wall portion 111 of framework 110, be formed with the through slot of 2 section U words along the long side direction of frame 110.The state that the inside of through slot 114 projects to framework 110 outsides with return portion 115a embeds to have and forms the roughly conduit 115 of U font outward, additionally above it tabular pressing member 116 being set and integrated fixing.By this conduit 115, can on each framework 110, form the stream F shown in Fig. 3, Fig. 4 etc.

According to this execution mode, then use the supply port 115b of fluid as shown in Figure 2 in side's opening formation cooling of conduit 115, the opposing party's opening forms outlet 115c, before a side of the general pipe 117 of chilled fluid flow shown in Figure 1 be connected in supply port 115b, the opposing party's pipe (117) then is connected in outlet 115c.

If conductive pipe 115 is supplied with cooling fluid, then fluid can flow through the stream F that is formed at conduit 115 inside, circulates while transmit the heat of framework 110, makes framework 110 coolings thus.Fluid can be expelled to lamp house 10 outsides by outlet 115c at last.

In addition, possess as shown in Figure 3, Figure 4 a plurality of frameworks 110,110 ... the time, can make each framework 110,110 ... conduit 115,115 ... be communicated with, and become the cooling with circulation of fluid in a plurality of frameworks 110,110 ... between structure, also can to each framework 110,110 ... the independently cooling structure of the supply discharger of fluid is set.When each framework is independently flowed into fluid, if as this execution mode, form conduit 115 back and forth at the framework long side direction, then the derivation introduction part of cooling fluid can be collected in the one-sided of framework 110, thereby the formation of the derivation lead-in path of fluid is oversimplified.

When making circulation of fluid, fluid itself because of by a plurality of frameworks 110,110 ... and heat up, being contemplated to its cooling performance can reduce gradually, thus each framework 110,110 ... be provided with that independently cooling path is better.Under this situation, can prevent framework 110,110 ... between produce temperature difference, thereby framework 110,110 ... can not produce thermal expansion difference, and can avoid lamp house 10 to distort.

As mentioned above, possess cooling body at framework 110, even excited quasi-molecular lampbulb 121 generates heat and heating unit 120, also can suppress framework 110 becomes high temperature, and avoids thermal expansion.Therefore, can prevent that lamp house 10 from distorting, the junction surface between lamp house 10 and the process chamber 20 can not produce friction, and can prevent the generation of metal powder etc.And, when independently cooling off framework 110, reduce the thermal expansion difference between the framework 110, can effectively eliminate the distortion of lamp house 10.

In the excited quasi-molecular lamp device,, also can be provided with and supply with the device of handling gas for inactive gas such as nitrogen or workpiece are applied predetermined processing.

For example supply with pipe 118, gas is directed into the hollow inside of unit 120 main bodys from gas shown in Figure 1.Shown in the cutaway view of Fig. 8, being formed with squit hole 127 in the unit 120, be fed to unit 120 gas inside, as shown by arrows, pass the space of the wall and the excited quasi-molecular lampbulb 121 of lamp resettlement section 125, spray towards the below process chamber.

Shown in this execution mode, squit hole 127 is formed on the position (with reference to figure 8) of the luminous tube topmost of corresponding excited quasi-molecular lampbulb 121, can make gas flow around excited quasi-molecular lampbulb 121, thereby gas also help cool down lamp and especially desirable.Such squit hole shown in the plane graph of being seen by the unit bottom surface side of Figure 10, is striden impartial formation of long side direction of unit, can make the concentration of handling gas become average and desirable.

More than, use inactive gas when handling gas, be carried near the workpiece in the process chamber oxygen concentration by reduction, can reduce ultraviolet ray that excited quasi-molecular lampbulb 121 radiated by the absorption of oxygen, therefore can carry out high efficiency rayed to workpiece.Certainly, also can select suitable processing gas in addition according to the workpiece processing.

Figure 11 is the key diagram that is provided with the unit of cooling device, is to take out the major part amplification view that the unit is represented.The B-B section of Fig. 1 before this figure is equivalent to.

Shown in figure, the inside of unit 120 forms hollow, and the inner face corresponding with the lamp resettlement section 125 that is formed at its bottom surface is provided with the conduit maintaining part 128 that forms the groove shape.Place the conduit P that cooling fluid flows through in this conduit maintaining part 128 then, be close to fixing by omitting illustrated installation component.In addition, cooling fluid for example is made of water etc.

Thus, by in unit 120 cooling device being set, excited quasi-molecular lampbulb 121 can be cooled and improve lamp efficient, and the thermal expansion meeting of unit 120 main bodys simultaneously is suppressed, and effectively whole generation of restraining device distorted.

More than, though understand the 1st execution mode of the present invention, above-mentioned structure only is an example, can suitably change to replaceable structure certainly.

For example in the 1st execution mode,, also this power supply unit can be installed on cell side though power supply unit is installed on framework and is fixed in device (with reference to figure 3).In the case, when lamp is changed, can successively lamp be installed on the operation of unit, whip up lamp and be connected, reach power supply really and connect, and obtain high-reliability with the power supply of power supply unit.

In addition,, be not limited to the jockey that uses tabular terminal and bulge loop to push, also can use known power supply joint construction for the power supply joint construction between power supply unit and the lamp.For example male and female head connector or use crimp type terminal carry out Perfected process such as screw fixed.

And in the above-mentioned execution mode, though handle the topmost (with reference to figure 8) that the squit hole of gas is set to corresponding lamp, be not limited thereto, also can be arranged on the position of its downside, or be arranged between lamp resettlement section and the lamp resettlement section.

In addition, among Fig. 8,, be not limited to this certainly, also can under lamp and bottom surface, unit state of contact, keep though represent the not example of state of contact of excited quasi-molecular lampbulb and unit.Lamp and unit are close to and under the situation about keeping, even the unit slight vibration, moving of lamp also can be limited in addition, thereby can suppress the vibration that unfavorable rotation or above-below direction take place lamp.

In addition, the holding member of lamp also is not limited to structure shown in Figure 8.For example also can use to have the tabular supporting member that section forms the support portion of semicircle arcuation, from supported underneath lamp and screw fixed on the unit.

In above-mentioned in addition the 1st execution mode, though be that the unit is placed on the flange part of framework and supported structure, the present invention is defined in this mode.

For example Figure 12 is the figure of other execution modes of explanation the present invention, is to take out 1 major part amplification view that the unit is represented.In addition, at this to the structure identical construction illustrated with Fig. 1～Figure 11, additional same numeral and omit its explanation.

Among Figure 12, the top board 122 of unit 120, the outside of the side, unit of its downward square box shape of both side edges portion is extended and give prominence to, and

protuberance

122A, 122A are placed on the 111A of rank portion, the 111A on the side wall portion 111 that is arranged at pair of frames 110, can freely take out supported.

Thus, be formed at the support portion of the unit 120 of framework 110, just be not limited to above-mentioned flange part, placement unit gets final product at least a portion.

In addition in this example, the flange part 112 that is set at framework is because of support unit not, thereby do not need to be provided with reluctantly flange part 112, but if be pre-formed flange part 112, when framework 110 and unit 120 frictions produce metal powders etc., can temporarily reclaim, thereby can keep the cleaning of process chamber or lamp house inside it.

Figure 13 is the figure of another execution mode of explanation the present invention, is to take out 1 major part amplification view that the unit is represented.In addition, in this structure identical construction to having illustrated with Fig. 1～Figure 12, additional same numeral and omit its explanation.

In this execution mode, pair of frames 110,110, its side 111B, 111B make spacing distance form with narrowing down gradually towards the below coniform.Unit 120, its side 120B, 120B form towards the below and width diminishes, and by being embedded between the above-mentioned pair of frames 110,110, and are releasably supported.Thus, coniform even the side of unit and pair of frames becomes, make both chimeric and support, also can carry out the taking-up of unit easily.

In addition in this example,,, when framework 110 and unit 120 frictions produce metal powders etc., can temporarily it be reclaimed, thereby can keep the cleaning of process chamber or lamp house inside if be pre-formed flange part 112 though also there is no need to be provided with reluctantly flange part 112.

Then, another embodiment of the present invention is described.Figure 14 is used to illustrate another execution mode, and (a) the decomposition structural map for being seen by sidepiece (b) is end view.Figure 15 is the cutaway view of Figure 14, and Figure 16 takes out 1 enlarged drawing that the unit is represented among Figure 15.This execution mode is the example that the essential structure of above-mentioned the 1st execution mode further is provided with the housing that covers the lamp resettlement section.This execution mode middle frame is identical with the 1st execution mode with the structure of unit, the unit being positioned between the framework on this point, same action effect is arranged.In addition in the following description, to the illustrated structure identical construction of Fig. 1～Figure 13 before, represent with same-sign and omit its explanation.

Housing 200, for example possess the frame member 201 that constitutes by side plate 201a and end plate 201b and cover frame member 201 peristome window member 202 and constitute.Frame member 201, the bottom shape of engagement unit 120 and form rectangular shape, its upper end is close on the top board 122 or bottom surface of unit 120, waits combination to omit illustrated bolt.As Figure 15, shown in Figure 16, the bottom of frame member 201 is provided with window member 202 the supporting member 201A of usefulness is installed, and the side portion of window member 202 is embedded in formed holddown groove D between this supporting member 201A and the frame portion main body 201.

Window member 202 be the size that covers 2 excited quasi-molecular lampbulb 121 degree, and material is good with synthetic quartz glass as shown in figure 14.Though such window member 202 is the size of the length that is fit to excited quasi-molecular lampbulb 121, size that can corresponding workpiece W and the short side direction length of window member 202 of shortening.

As shown in figure 15, below lamp resettlement section 125, be provided with the arm shape lamp holding member 126c that extends the lamp short side direction in a plurality of positions of the short side direction of lamp, excited quasi-molecular lampbulb 121 is supported from the below thus, and is contained in the lamp resettlement section 125.

As shown in figure 16,120 lamp resettlement section 125 and bottom are provided with squit hole 127 in the unit, supply with pipeline 118 from the gas of aforementioned Figure 14 and to be fed to the interior gas in unit 120, can be by this squit hole 127 shown in this figure arrow, towards by in 120 bottom surfaces, unit and the housing 200 formed Space H, or discharge towards space outerpace (processed chamber).The gas of the Space H that inflow housing 200 is surrounded can spill from the space between the fitting portion of frame member 201 and window member 202, or discharges from omitting illustrated exhaust outlet.

Handling gas for example is inactive gas (being nitrogen specifically), fills inactive gas at the inner space of housing 200 H, can make the light more effective irradiation of being radiated from excited quasi-molecular lampbulb 121 in workpiece.So when the inner space of housing 200 H fills inactive gas, though have internal pressure is maintained at situation than outside (processed chamber) state that atmosphere is higher, but dwindle because of the corresponding as mentioned above workpiece area of big I of window member 202, thereby can avoid the crooked laterally expansion of glass, reduce the maximum deflection of window member 202, and can make distance between this window member 202 and the workpiece in whole window member 202 scopes all for supporting definitely.Therefore, can avoid producing the processing speckle, or window member 202 touches substrate at the periphery and the central part of window.In addition, window member 202 for example is 0.5～10mm (is good with 3～5mm) with the distance of workpiece.

Figure 17 represents the another one execution mode, is the cutaway view that amplifies 1 unit of expression.In addition, to the illustrated structure identical construction of Fig. 1～Figure 16 before, represent with same-sign and omit its explanation.

This execution mode, structure shown in Figure 16 before comparing is the example that speculum 203 is installed along lamp 121, this speculum 203 reflects the light that excited quasi-molecular lampbulb 121 is radiated towards the below (window member 202 sides) on the paper.Speculum 203 is bent to form with bright and clean aluminium sheet, stride lamp 121 long side direction total length and dispose.

Handle the part that gas squit hole 127 only is formed at the top of corresponding lamp resettlement section 125, the processing gas that is fed to 120 inside, unit flows through along the periphery of excited quasi-molecular lampbulb 121, is imported into the inner space H side of housing 200 simultaneously more efficiently.And in the housing 200, a plurality of positions are formed with squit hole 204 on frame member 201, fill inactive gas at the inner space of housing 200 H, and can reduce inner oxygen concentration.By the such processing gas and the setting content of its stream,,, thereby can prevent effectively that ultraviolet irradiation from causing the oxidative phenomena of hardware because housing 200 inner oxygen concentrations are reduced even constitute speculum 203 with the bright and clean material of metal.

Figure 18 represents other execution mode, is the cutaway view that amplifies 1 unit of expression.In addition, to the illustrated structure identical construction of Fig. 1～Figure 17 before, represent with same-sign and omit its explanation.

This execution mode is that frame member 201 (being specially supporting member 201A) with housing 200 is placed on the flange part 112 in the framework 110 example that carries out the support of unit 120.Thus in the present invention, also can come support unit 120 via housing 200.Under this situation, also the cooling body in the framework can be extended to the side of housing 200.

In addition, in the execution mode shown in the figure, the cooling device of the illustrated unit of Figure 11 before also possessing.Also promptly, the inner face in corresponding lamp resettlement section 125 is provided with the conduit maintaining part 128 that forms the groove shape, and this conduit maintaining part 128 is placed with the conduit P that cooling fluid flows through.Thus, by unit 120 is provided with cooling device, excited quasi-molecular lampbulb 121 can be cooled and improve lamp efficient, and the thermal expansion meeting of unit 120 main bodys simultaneously is suppressed, and effectively whole generation of restraining device distorted.

More than, though understand various execution modes of the present invention, the present invention is not limited to above-mentioned structure, can suitably change.For example the structure of the joint portion between housing 200 and the unit 120 is not limited to combine the mode of fixing with bolt etc., also can get involved encapsulant etc. betwixt and is connected and fixed and is airtight conditions.

As previously discussed, according to the present invention, even, also can simply and safely change to surpassing the long size lamp of 1000mm, but the distortion of the whole generation of restraining device simultaneously, and effectively avoid in the lamp house or conveyer indoor contaminated.

Claims

1. excited quasi-molecular lamp device is to accommodate excited quasi-molecular lampbulb in lamp house, and will it is characterized in that possessing from the ultraviolet irradiation of lamp toward outside excited quasi-molecular lamp device:

The a plurality of plate-shaped frames that are arranged in parallel in lamp house inside,

Be shaped as the essentially rectangular box, the bottom be formed with the lamp resettlement section the unit and

Be accommodated in the excited quasi-molecular lampbulb of described lamp resettlement section,

Described unit is inserted between the framework of relative configuration, and removedly by this frame supported.

2. excited quasi-molecular lamp device as claimed in claim 1 is characterized in that, described lamp resettlement section is formed at the bottom of unit.

3. excited quasi-molecular lamp device as claimed in claim 1 is characterized in that, described unit possesses and is formed with the housing of getting light portion.

4. excited quasi-molecular lamp device as claimed in claim 3 is characterized in that described unit is supported in described framework via housing.

5. excited quasi-molecular lamp device as claimed in claim 1 is characterized in that described framework possesses cooling body is arranged.

6. excited quasi-molecular lamp device as claimed in claim 5 is characterized in that described cooling body is formed with stream in chassis body, and circulation has the cooling fluid in this stream.

7. excited quasi-molecular lamp device as claimed in claim 1 is characterized in that, its inside, described unit is hollow.

8. excited quasi-molecular lamp device as claimed in claim 7 is characterized in that, possesses the gas supply device that is used for supply gas, and described gas is at the internal circulation of described unit, and from the squit hole ejection of the bottom surface that is arranged in described unit.

9. excited quasi-molecular lamp device as claimed in claim 8 is characterized in that, described squit hole is arranged at the position relative with the topmost of excited quasi-molecular lampbulb.

10. excited quasi-molecular lamp device as claimed in claim 7 is characterized in that described unit is provided with the cooling body of lamp.

11. excited quasi-molecular lamp device as claimed in claim 1 is characterized in that, described framework is formed with flange part in the bottom, is formed with recess above the flange part at this.