CN101526751B - Flexible positioning structure with safety protection function - Google Patents
Flexible positioning structure with safety protection function Download PDFInfo
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- CN101526751B CN101526751B CN 200910045242 CN200910045242A CN101526751B CN 101526751 B CN101526751 B CN 101526751B CN 200910045242 CN200910045242 CN 200910045242 CN 200910045242 A CN200910045242 A CN 200910045242A CN 101526751 B CN101526751 B CN 101526751B
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- positioning structure
- flexible positioning
- material clamper
- protection function
- safety protection
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Abstract
The invention discloses a flexible positioning structure with a safety protection function, comprising a material holder, a movement mechanism, an elastic mechanism, bolt assemblies and a sensor. The movement mechanism is connected with a material transfer system, and the surface of the movement mechanism is provided with an arc groove and a V-shaped elongated slot; one end of the elastic mechanism is fixed on the movement mechanism, and the other en is in point contact with the material holder; the bolt assemblies penetrate through the material holder and contact with the surface of the movement mechanism; and the sensor is used for detecting the displacement change of the material holder. The flexible positioning structure is characterized in that part of the bolt assemblies are positioned in the arc groove and the V-shaped elongated slot. The flexible positioning structure provided by the invention can protect the movement mechanisms of a mask, the material holder and the transfer system under the condition that the material holder is mechanically collided due to the failure of the system or man-made incorrect manipulation, thereby greatly reducing the damage of the equipment.
Description
Technical field
The invention relates to a kind of location structure of semiconductor manufacturing equipment technical field, and particularly relevant for a kind of flexible positioning structure with safety protection function that is used for the material clamping.
Background technology
Modern age, the semiconductor development in science and technology was rapid, and optical lithography techniques has been played the part of important role.The application of optical lithography techniques on semiconductor is the mask that the circuit that will design is made into the light-permeable with given shape, utilizes the exposure principle, make light source by mask projection to silicon wafer, show specific pattern with exposure.
In exposure sources, the transmission system of materials such as mask or silicon chip is very important subsystem.Wherein, the mask that mask transmission system is mainly used in appointment takes out from the mask storing mechanism, steadily, safety and contamination-freely be transported to the mask platform subsystem or the exposure subsystem in, and in this process, carry out the aligning of mask mark, for exposure is prepared.Whole process must satisfy the requirement of high speed, high precision and high reliability.In mask transmission system, be used for fixing and the structure of carrying mask is the mask clamper.The mask clamper firmly also is fixed on mask on the mask clamper reliably by methods such as vacuum suction or mechanical grip, and the motion of safety and steady ground drive mask, finishes the predetermined function of mask transmission system.Generally, the clamper of material such as mask or silicon chip is the physical construction of a fork-shaped.As the mask clamper of mentioning in publication number CN 101241311A and two pieces of patents of CN 1493921A.
In the material transmission system of most of exposure sources, no matter the material clamper specifically be shaped as which kind of form, all be to adopt the fastening mode of screw to be fixed on the motion usually.This connected mode equipment that makes can not instrumentality material clamper levelness, this is very disadvantageous in to the very high transmission system of material levelness accuracy requirements such as mask and silicon chip.And this connected mode can not break down or maloperation in system, causes under the situation that the material clamper is collided, and material and transmission system are played a protective role.In case the generation mechanical collision may cause the damage of mask, the damage of material clamper even the damage of whole motion, causes the loss that is difficult to save.In addition, the fastening connected mode of this screw does not also have the location uniqueness, change or dismantle, safeguard under the situation of material clamper at needs, the material clamper is installed on the original accurate position, make the precision of system also can't guarantee like this.
Summary of the invention
For addressing the above problem; the invention provides a kind of flexible positioning structure with safety protection function; can break down or the people is taken place in system causes the material clamper to produce under the situation of mechanical collision for maloperation; motion to mask, material clamper and transmission system plays a protective role, the infringement that the equipment of greatly reducing is subjected to.
Flexible positioning structure with safety protection function disclosed by the invention comprises: the material clamper; Motion is connected with material transmission system, has deep-slotted chip breaker, V-arrangement elongated slot on the described motion surface; Elastic mechanism, the one end is fixed in described motion, and the other end contacts with described material clamper point; Screw assembly, described screw assembly passes described material clamper, contact with the motion surface, the part screw assembly is positioned described deep-slotted chip breaker and V-arrangement elongated slot, described screw assembly comprises: first holding screw, pass described material clamper, be positioned described deep-slotted chip breaker, wherein said first holding screw can break away from described deep-slotted chip breaker; Second holding screw passes described material clamper, is positioned described V-arrangement elongated slot, and wherein said second holding screw can slide in described V-arrangement elongated slot; The 3rd holding screw passes described material clamper, contacts on the described motion plane.
Flexible positioning structure disclosed in this invention also comprises, described material clamper, the one end has a clamping part and is used for fixing material, the other end has a shank, wherein said shank has first threaded hole, second threaded hole, the 3rd threaded hole, the line of first threaded hole and the second threaded hole present position is perpendicular to the center line of material clamper, and the 3rd threaded hole is on the center line of material clamper.
Flexible positioning structure disclosed in this invention comprises that also the contact point that described elastic mechanism contacts with described material clamper point is between three threaded holes on the material clamper center line.
Flexible positioning structure disclosed in this invention comprises that also the end of described first holding screw, second holding screw, the 3rd holding screw is a spherical structure.
Flexible positioning structure disclosed in this invention comprises that also described deep-slotted chip breaker is taper shape or semisphere.
Flexible positioning structure disclosed in this invention also comprises, sensor when described sensor arrives the change in displacement of described material clamper, produces electric signal.
Flexible positioning structure disclosed in this invention comprises that also described material transmission system receives described electric signal, makes outage or corresponding protection measure.
Flexible positioning structure disclosed in this invention comprises that also described elastic mechanism is a flake structure, links to each other by the locating slot of steel ball with described material clamper; Described flake structure has the keyway that limits described steel ball displacement.
Flexible positioning structure disclosed in this invention comprises that also described elastic mechanism is the flexible hinge structure, and an end and motion fix, and it is spherical that the other end is, and links to each other with the material clamper.
Flexible positioning structure disclosed in this invention comprises that also described elastic mechanism is the flexible hinge structure, and an end and motion fix, and the built-in steel ball roller of the other end links to each other with the material clamper.
Flexible positioning structure disclosed in this invention also comprises, the built-in level meter of described material clamper.
Flexible positioning structure disclosed in this invention also comprises, described level meter is the circular configuration of a reveal competence degree, there is the scale of a plurality of concentric annular on the surface of described circular configuration, the inside of described circular configuration is filled with liquid, and a bubble floats on the liquid, according to the distance in the described bubble off center calibration circle center of circle, obtain the degree of tilt of material clamper.
Flexible positioning structure disclosed in this invention comprises that also described motion is the mechanical arm of material transmission system.
Flexible positioning structure disclosed in this invention has safety protection function; because mask costs an arm and a leg; the motion of material clamper and transmission system is high-accuracy structure, and cost is also higher, so this flexible positioning structure is very important to their safeguard protection effect.In the present invention, the material clamper can be dismantled and reinstall easily, is convenient to safeguard and change.When dismounting and again during installation material material clamper, the position of clamper be unique, determine that so just need not the work of debugging again, reorientating, the precision that has guaranteed equipment can and not installed and changes because of the dismounting of material clamper.Flexible positioning structure of the present invention is the levelness of instrumentality material clamper easily, and height that can trace ground instrumentality material clamper.So also reduce the motion accuracy requirement in height of material clamper below to a certain extent, saved cost.In addition, this structure also has processing and low cost of manufacture, characteristics such as easy to assembly.
For above-mentioned feature and advantage of the present invention can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below.
Description of drawings
Figure 1 shows that the fork configuration of the material clamper of one embodiment of the invention.
Figure 2 shows that the side view of the flexible positioning structure with safety protection function of one embodiment of the invention.
Figure 3 shows that the stereographic map of the flexible positioning structure with safety protection function of one embodiment of the invention.
Fig. 4 a is depicted as the deep-slotted chip breaker structural representation of one embodiment of the invention.
Fig. 4 b is depicted as the V-arrangement elongated slot structural representation of one embodiment of the invention.
Figure 5 shows that the material clamper synoptic diagram with reveal competence degree of one embodiment of the invention.
Figure 6 shows that the structural representation that plays the locating slot of position-limiting action on the spring bearer plate of another embodiment of the present invention.
Figure 7 shows that the side view of the flexible positioning structure with safety protection function of yet another embodiment of the invention.
Figure 8 shows that the side view of the flexible positioning structure with safety protection function of further embodiment of this invention.
Embodiment
In order to more clearly understand technology contents of the present invention, especially exemplified by specific embodiment and cooperate appended graphic being described as follows.
Figure 1 shows that the fork configuration of the material clamper of one embodiment of the invention.As shown in Figure 1, the method for material clamper 01 by vacuum suction or mechanical grip fixes and carries materials such as mask or silicon chip.Shank at material clamper 01 has some architectural features: the first threaded hole 01-1, the second threaded hole 01-2 and the 3rd threaded hole 01-3 are three threaded holes on the material clamper 01.The line of the first threaded hole 01-1 and the second threaded hole 01-2 present position is perpendicular to the center line of material clamper 01.The 3rd threaded hole 01-3 is on the center line of material clamper 01.Locating slot 01-4 is taper shape or the hemispherical groove on material clamper 01 center line, between three threaded hole 01-1,01-2 and 01-3.
Figure 2 shows that the side view of the flexible positioning structure with safety protection function of one embodiment of the invention.Figure 3 shows that the stereographic map of the flexible positioning structure with safety protection function of one embodiment of the invention.
As shown in Fig. 2 and Fig. 3, motion 06 can be the mechanical arm of material transmission system.First holding screw 02, second holding screw 02 ' and the 3rd holding screw 04 are mounted in three holding screws on the material clamper 01, and its end is a spherical structure, and they screw out the lower surface of material clamper 01, are positioned on the locating slot of motion 06.
Locating slot structure on the motion 06 is shown in Fig. 4 a.Deep-slotted chip breaker 06-1 is a taper shape or hemispheric locating slot.The cross-section structure of V-arrangement elongated slot 06-2 is shown in Fig. 4 b.The center line of V-arrangement elongated slot and the center line of conical bore are point-blank.First holding screw 02 on the material clamper 01 is positioned deep-slotted chip breaker 06-1 place, this moment, the material clamper can be around this contact point rotation, rotate to certain angle second holding screw 02 ' on the material clamper is fallen among the V-arrangement elongated slot 06-2, at this moment material clamper 01 is positioned.The 3rd holding screw 04 freely falls within on the plane of motion 06 a bit.Like this, material clamper 01 just is supported on the motion 06 by three holding screws 02,02 ' and 04.
This benefit that flexibly connects is, if fault or maloperation have appearred in system's operation, material clamper 01 is collided and since the flake structure of spring bearer plate 05 be flexible, be subjected to can enlarging crooked deformation behind the acting force, make material clamper 01 produce displacement.First holding screw 02 breaks away from arc positioning groove 06-1 under the effect of power, second holding screw 02 ' produces slip among V-arrangement locating slot 06-2.Steel ball 03 relative resilient pressing plate 05 on the material clamper 01 produces and slides.Thereby sensor 07 detects the displacement of material clamper 01 and produces electric signal, and material transmission system is made outage or corresponding protection measure, thereby plays the effect of safeguard protection.
Owing to be installed in holding screw 02 on the material clamper 01,02 ' and 06, three definite plane of 04 3 contact movement mechanisms, so material clamper 01 is on these three determined planes of point.By regulating the back-out length of holding screw 02,02 ' and 04, can change material clamper 01 residing plane.As shown in Figure 1, level meter is placed on along the Y direction on the upper surface of material clamper 01, it is the plane of a level that lay down location requires, and regulates holding screw 02 and 02 ', just can instrumentality material clamper 01 levelness in the Y direction.In like manner, level meter is placed along directions X, is regulated holding screw 04, just can instrumentality material clamper 01 in the levelness of directions X.In addition, can also regulate three holding screws 02,02 ' and 04 simultaneously, promptly increase or reduce the length of three holding screw projection material clamper 01 lower surfaces simultaneously, can the lifting of trace ground or reduce the height of material clamper.
During in view of leveling on the material clamper possible space anxiety be not enough to place industrial bigger level meter, and also do not allow on the materials such as mask to place level meter in order to avoid damage its surface, flexible positioning structure at this moment as herein described can adopt structure as shown in Figure 5.Figure 5 shows that the material clamper synoptic diagram with reveal competence degree of one embodiment of the invention.The circular configuration 51 that a built-in reveal competence degree is arranged on material clamper 01.There is the scale of ring-type on the surface of this structure: the center is a very little circle, and other calibration circles are concentric circless that radius increases successively.The inside of this structure has been full of liquid (as water), has a close bubble of the concentricity calibration circle of size to float on the liquid.According to the distance in the bubble off center calibration circle center of circle, can obtain the degree of tilt of material clamper.During as the calibration circle center of circle, the off-centring center 2mm of, bubble, degree of tilt is 0.6 degree.The degree of tilt that shows according to this structure can instrumentality material clamper to horizontal level.
In another embodiment of the present invention, spring bearer plate 05 has been done further design.Figure 6 shows that the structural representation that plays the locating slot of position-limiting action on the spring bearer plate of another embodiment of the present invention.As shown in Figure 6, at more shallow keyway of lower surface design of the flaky texture of spring bearer plate 05.Spring bearer plate with keyway is the same with last embodiment to provide an acting force vertically downward to material clamper 01, and material clamper 01 is fixing.The existence of keyway makes the sliding scale of steel ball be defined, thereby makes offset qualification that the material clamper produced when being collided in the scope of keyway, plays spacing effect, better realizes the function of safeguard protection.
Figure 8 shows that the side view of the flexible positioning structure with safety protection function of further embodiment of this invention.As shown in Figure 8, flexible hinge 05 " there are both sides that the gradually thin flexible structure of radian is arranged.The one end remains on the motion 06 that is fixed on the below, and the other end is equipped with a built-in steel ball roller 09.The structure of this flexible hinge can replace the effect of steel ball 03 equally, is with material clamper 01 to contact, and provides a power vertically downward with fixture material clamper 01.Different with embodiment one is, when material clamper 01 is collided and when producing displacement, flexible hinge 05 " built-in steel ball roller 09 can produce rolling friction by relative material clamper 01.Under the same case, force of rolling friction is less than force of sliding friction.When promptly bumping steel ball roller position near be difficult for staying cut.This structure can play the same safeguard protection effect with embodiment one.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; have in the technical field under any and know the knowledgeable usually; without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (12)
1. flexible positioning structure with safety protection function comprises:
The material clamper;
Motion is connected with material transmission system, has deep-slotted chip breaker, V-arrangement elongated slot on the described motion surface; It is characterized in that:
Described flexible positioning structure with safety protection function comprises: elastic mechanism, and the one end is fixed in described motion, and the other end contacts with described material clamper point;
Screw assembly, described screw assembly pass described material clamper, contact with the motion surface, and described screw assembly comprises:
First holding screw passes described material clamper, is positioned described deep-slotted chip breaker, and wherein said first holding screw can break away from described deep-slotted chip breaker;
Second holding screw passes described material clamper, is positioned described V-arrangement elongated slot, and wherein said second holding screw can slide in described V-arrangement elongated slot;
The 3rd holding screw passes described material clamper, contacts on the described motion plane.
2. the flexible positioning structure with safety protection function according to claim 1; it is characterized in that; described material clamper; the one end has a clamping part and is used for fixing material; the other end has a shank; wherein said shank has first threaded hole, second threaded hole, the 3rd threaded hole, and the line of first threaded hole and the second threaded hole present position is perpendicular to the center line of material clamper, and the 3rd threaded hole is on the center line of material clamper.
3. the flexible positioning structure with safety protection function according to claim 2 is characterized in that, the contact point that described elastic mechanism contacts with described material clamper point is between three threaded holes on the material clamper center line.
4. the flexible positioning structure with safety protection function according to claim 1 is characterized in that, the end of described first holding screw, second holding screw, the 3rd holding screw is a spherical structure.
5. the flexible positioning structure with safety protection function according to claim 4 is characterized in that, described deep-slotted chip breaker is taper shape or semisphere.
6. the flexible positioning structure of stating according to claim 1 with safety protection function, it is characterized in that, described flexible positioning structure with safety protection function also comprises sensor, when described sensor arrives the change in displacement of described material clamper, produces electric signal; Described material transmission system receives described electric signal, makes outage or corresponding protection measure.
7. the flexible positioning structure with safety protection function according to claim 1 is characterized in that, described elastic mechanism is a flake structure, links to each other by the locating slot of steel ball with described material clamper; Described flake structure has the keyway that limits described steel ball displacement.
8. the flexible positioning structure with safety protection function according to claim 1 is characterized in that, described elastic mechanism is the flexible hinge structure, and an end and motion fix, and it is spherical that the other end is, and links to each other with the material clamper.
9. the flexible positioning structure with safety protection function according to claim 1 is characterized in that, described elastic mechanism is the flexible hinge structure, and an end and motion fix, and the built-in steel ball roller of the other end links to each other with the material clamper.
10. the flexible positioning structure with safety protection function according to claim 1 is characterized in that, the built-in level meter of described material clamper.
11. the flexible positioning structure with safety protection function according to claim 10; it is characterized in that; described level meter is the circular configuration of a reveal competence degree; there is the scale of a plurality of concentric annular on the surface of described circular configuration; the inside of described circular configuration is filled with liquid; and a bubble floats on the liquid, according to the distance in the described bubble off center calibration circle center of circle, obtains the degree of tilt of material clamper.
12. the flexible positioning structure with safety protection function according to claim 1 is characterized in that, described motion is the mechanical arm of material transmission system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910045242 CN101526751B (en) | 2009-01-13 | 2009-01-13 | Flexible positioning structure with safety protection function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910045242 CN101526751B (en) | 2009-01-13 | 2009-01-13 | Flexible positioning structure with safety protection function |
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| Publication Number | Publication Date |
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| CN101526751A CN101526751A (en) | 2009-09-09 |
| CN101526751B true CN101526751B (en) | 2011-03-30 |
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| CN 200910045242 Active CN101526751B (en) | 2009-01-13 | 2009-01-13 | Flexible positioning structure with safety protection function |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104440924B (en) * | 2013-09-22 | 2016-05-11 | 沈阳芯源微电子设备有限公司 | A kind of manipulator impact protection apparatus |
| US20160119458A1 (en) * | 2014-10-28 | 2016-04-28 | Lite-On Technology Corporation | Clamp device |
| CN114619160A (en) * | 2022-05-13 | 2022-06-14 | 济南森峰激光科技股份有限公司 | Fork tooth and sucker composite loading and unloading device and method |
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |