CN101504491B

CN101504491B - Optical contraposition apparatus for joint of circuit apparatus and substrates, and system having the same

Info

Publication number: CN101504491B
Application number: CN200810008108XA
Authority: CN
Inventors: 林汉声
Original assignee: Chroma Electronics Shenzhen Co Ltd
Current assignee: Chroma Electronics Shenzhen Co Ltd; Chroma ATE Inc
Priority date: 2008-02-05
Filing date: 2008-02-05
Publication date: 2012-04-11
Anticipated expiration: 2028-02-05
Also published as: CN101504491A

Abstract

The invention relates to an optical alignment device and a system provided with the same for combining a circuit device with a substrate, which are used for combining the circuit device with the substrate having a height difference with the circuit device through precise alignment. The combining system comprises a bearing device for bearing the substrate, a carrying and moving device for carrying and moving the circuit device, and a set of control device for driving the bearing device and the carrying and moving device to move relatively; and the optical alignment device comprises an optical image acquiring unit which is driven by the control device and is used for acquiring optical images of the circuit device and the substrate synchronously in the direction with the height difference, and an optical path compensating unit which is arranged between the circuit device and the optical image acquiring unit and/or between the substrate and the optical image acquiring unit, and is used for compensating the optical path difference of the height difference of the circuit device and the corresponding substrate. The optical alignment device and the system greatly improve the efficiency of the alignment for the needs of combining the circuit device with the substrate.

Description

Circuit arrangement and substrates are with the optics alignment device and have the system of this device

Technical field

The invention relates to a kind of optical registration device and have the system of this device, especially a kind of circuit arrangement and substrates are with the optics alignment device and have the system of this device.

Background technology

On the substrate of glass of liquid crystal display or printed circuit board (PCB) class; Need to be provided with like integrated circuit or other circuit component more, complicated with element especially, the pin number continues to increase, pin density increases thereupon; The efficient of splice program with precisely paid attention to day by day; Industry invariably painstakingly Application and Development wherein, be responsible for precision positioning circuit arrangement and substrate in the full-automatic board that engages manufacturing process; Thereby the device of the accurate contraposition when guaranteeing to engage more becomes the key factor that influences board usefulness.

Fig. 1 is known circuits device and substrates when carrying out contraposition, focuses the motor-driven synoptic diagram of doing of type industrial photography, and the general industry video camera is for keeping high resolution; The shooting field depth that sets thereby quite narrow and shallow; That is, when light path overruns slightly, promptly can't know to differentiate and resolve.The upper left side is a substrate 10 among the figure, and top mark X prepares with mark X locating engagement to substrate 10 for preparation abutment, the circuit arrangement 12 of upper right side, and substrate 10 needs maintenance one difference in height h with before circuit arrangement 12 engages.

For confirming that circuit arrangement 12 engages with substrate 10 correctly; Need by focusing the two place mark X position of type industrial photography machine 14 sensing substrates 10 with circuit arrangement 12; Because of both have difference in height h; Two mark X are also inequality with the distance (light path) that focuses type industrial photography machine 14, can only be according to successively judging respectively.Suppose the mark X position of measuring substrate 10 earlier; During subsequent sense circuit arrangement 12 mark X; Focusing type industrial photography machine 14 needs to be converted into according to the direction of arrow and focuses type industrial photography seat in the plane and put 14 ' position; And for avoiding sensing interpretation mistake, substrate 10 needs temporary transient towards horizontal direction of arrow displacement, and the mark X operation of treating sensing circuit device 12 rear that is finished resets.

That is to say,, focus type industrial photography machine 14 and can directly penetrate sensing substrate 10, but simultaneously the mark X on the sensing substrate 10 and the mark X of circuit arrangement 12 even substrate 10 is the clear glass material; And must extraly increase keeping out of the way and the flow process that resets of substrate 10, and except expending time in, cause the chance that machine error once possibly take place again, when carrying out bit motion one by one, focusing type industrial photography machine 14 also needs constantly to go up and down with the conversion focusing position.

Fig. 2 is that known circuits device and substrates are when carrying out contraposition; The motor-driven synoptic diagram of doing of zoom type industrial photography; If with the lens changing of sensing is zoom type industrial photography machine 16; Can reduce moving up and down of video camera by the internal actions of zoom type industrial photography machine 16, but still have identical problem, simultaneously the mark X on sensing substrate 10 and the circuit arrangement 12.

Therefore; If can provide a kind of sensing substrate simultaneously to engage the optical registration device of mark with circuit arrangement and have the system of this device; Both preparations of sensing simultaneously engage mark, except can significantly shortening bit time, reduce by the unnecessary displacement of sensing thing; Also directly stop to produce the chance of error, should be best solution.

Summary of the invention

Therefore, one object of the present invention is to provide a kind of utilization optical principle compensation to eliminate the difference in height problem, can sense the optical registration device that circuit arrangement and substrate belong to the locus, are used for circuit arrangement and substrates simultaneously.

Another object of the present invention is to provide a kind of utilization optical principle compensation to eliminate the difference in height problem, can sense the optical registration system that circuit arrangement and substrate belong to the locus, are used for circuit arrangement and substrates simultaneously.

A further object of the present invention is to provide a kind of single image capturing operation that only needs, and significantly shortens optical registration and consumes the time, and the circuit arrangement and the substrates that directly promote mating system and board work efficiency are used the optics alignment system.

Another purpose of the present invention is to provide useless corresponding motion between a kind of minimizing substrate and circuit arrangement, makes machine error produce chance and reduces to minimumly, uses the optics alignment system thereby engage circuit arrangement and the substrates that acceptance rate promotes.

Another purpose again of the present invention is to provide a kind of zoom type industrial photography machine, simple structure, organizational system circuit arrangement and substrates with low cost needn't used to use the optics alignment system.

Therefore; The present invention is the optical registration device that a kind of circuit arrangement and substrates system use; Confession the accurate contraposition of this circuit arrangement is engaged to and this circuit arrangement between leave this substrate of difference in height; This mating system comprise one group of bogey that carries this substrate, one group of portable device that carries and move this circuit arrangement, and one group drive the control device that this bogey and this portable device relatively move, this optical registration device comprises: one group receives this control device to drive, leave the difference in height direction, supply synchronously that optical image of the optical image of this circuit arrangement of picked-up and this substrate absorbs the unit at this; And one group between between this circuit arrangement and this optical image picked-up unit and/or this substrate and this optical image absorb between the unit, in order to compensate this circuit arrangement and this substrate optical path compensation unit to optical path difference that should difference in height.

Configuration by the optical path compensation unit; The true altitude and the optical path difference of contraposition mark to the optical image picked-up unit of on the one hand effective compensating circuit device and substrate; But make optical image capturing apparatus single absorb both images synchronously, and whether the tridimensional contraposition of interpretation is accurate, not only simplifies the contraposition flow process, promote operating efficiency; Thereby reduce possible error, lifting acceptance rate that mechanically actuated caused; Especially the optical image capturing apparatus can adopt fixed focus camera, the manufacturing cost of system is obviously reduced, precision improvement, the aspects that complete solution known optical alignment system exists.

Description of drawings

Fig. 1 is known circuits device and substrates when carrying out contraposition, focuses the motor-driven synoptic diagram of doing of type industrial photography;

Fig. 2 is known circuits device and substrates when carrying out contraposition, the motor-driven synoptic diagram of doing of zoom type industrial photography;

Fig. 3 is the optical registration device first preferred embodiment synoptic diagram of the present invention;

Fig. 4 is the optical registration device second preferred embodiment synoptic diagram of the present invention;

Fig. 5 is optical registration device the 3rd a preferred embodiment synoptic diagram of the present invention;

Fig. 6 is optical registration device the 4th a preferred embodiment synoptic diagram of the present invention;

Fig. 7 is optical registration device the 5th an embodiment schematic perspective view of the present invention;

Fig. 8 is the schematic perspective view of test macro first embodiment of the present invention; And

Fig. 9 is the schematic perspective view of second embodiment of test macro of the present invention.

The main element symbol description

X... mark h... difference in height 10... substrate 12... circuit arrangement

10 ' ... LCD MODULE 12 ' ... drive IC 14... focuses type industrial photography machine

14 ' ... focus type industrial photography seat in the plane and put 16... zoom type industrial photography machine

2,2 ' ... optical registration device 20... optical image picked-up unit

22,22 ', 22 " ... optical path compensation unit 24... video camera 26... light source

3... control device 4... corner reflecting element 5... charge coupled device video camera

6... portable device 62... mechanical arm 64... suction nozzle 66... well heater 7... bogey

72... breather line 74... air hole 76... carrier 8... mating system

Embodiment

About aforementioned and other technology contents, characteristics and effect of the present invention, in the detailed description of following conjunction with figs. and said preferred embodiment, can clearly appear.

The first preferred embodiment synoptic diagram that Fig. 3 uses for the present invention, as previously mentioned, wherein 12 of substrate 10 and circuit arrangements leave difference in height h, and the accurate contraposition of both need engages.Optical registration device 2 of the present invention comprises: controlled device 3 drives, absorbs synchronously in the difference in height direction optical image picked-up unit 20 of circuit arrangement 12 and substrate 10 optical images; And between 20 of unit of circuit arrangement 12 and optical image picked-up, in order to the optical path compensation unit 22 of the optical path difference of compensating circuit device 12 and substrate 10 respective heights difference h.

Collide each other with substrate 10 for avoiding calibration to move middle circuit arrangement 12; It is poor that both leave the required safe altitude that relatively moves; Make the light path of two sections keys; Be between optical image picked-up unit 20 to circuit arrangement 12 mark X, and the light path between optical image picked-up unit 20 to substrate 10 mark X and inequality, but optical path compensation unit 22 can change the light path between optical image picked-up unit 20 to circuit arrangement 12 mark X; Make two sections light path indifference distances, optical image picked-up unit 20 can absorb the image that is regarded as a plane simultaneously.

Optical path compensation unit 22 can be by the certain transmittance of tool, and the material that satisfies required conversion light path rate forms for example quartzy or other appropriate materials; Fig. 4 is the present invention's second preferred embodiment synoptic diagram; Optical path compensation unit 22 ' absorbs 20 of unit between circuit arrangement 12/ substrate 10 and optical image; By two kinds of different printing opacity prisms of refractive index each other; Let from the light beam of circuit arrangement 12 and light beam from substrate 10, the prism of the different refractivity of passing through and get into optical image picked-up unit is accomplished optical path compensation.

Fig. 5 is the present invention's the 3rd preferred embodiment; Optical path compensation unit 22 " 20 equally between circuit arrangement 12/ substrate 10 and optical image picked-up unit; and the parallelogram prism that is disposed at triangle hypotenuse place by a right angle Tp and respectively constitutes jointly; and at triangle and quadrant prism interface, and plating has a semi-reflection and semi-transparent film.

Make that by the top surface incident of quadrant prism, the hypotenuse reflection traverses across illustrated quadrant prism under a left side earlier in meeting from the light of substrate, the semi-reflection and semi-transparent film reflection by interface breaks away from prism downwards again; Relatively; From the light of circuit component, will directly pass Tp, semi-reflection and semi-transparent film and quadrilateral, and keep straight on to the diagram below; Make from the pass through different light paths of composite prism of substrate and the light beam of circuit component, thus the structural optical path difference of compensation script.

Fig. 6 is the synoptic diagram of optical registration device the 4th embodiment of the present invention; In the practical application; For more knowing the image of picked-up substrate 10 and circuit arrangement 12 each mark X; Optical registration system 2 removes and comprises the video camera 24 that control device 3 is controlled, and provides outside the optical path compensation unit 22 of optical path compensation, more is provided with the light source 26 of additional illumination degree.

Fig. 7 is the schematic perspective view of optical registration device the 5th embodiment of the present invention; For asking more accurate contraposition effect; The single-point contraposition of above-mentioned each embodiment is made on circuit arrangement 12 and substrate 10, two place's setting marks to be set respectively, be responsible for calibrating contraposition by two groups of video cameras respectively; The member of optics picked-up is also done conversion slightly.Among the figure, substrate 10 is carried by bogey 7, and circuit arrangement 12 is drawn by portable device 6, and control device 3 is except that control bogey 7 relatively moves with portable device 6, and keyholed back plate optical registration device 2 ' more simultaneously; Optical registration device 2 ' can as shown in the figurely dispose, and optical path compensation unit 22 is positioned at circuit arrangement 12 belows, and optical path compensation unit 22 is away from the opposite side configuration corner reflecting element 4 of circuit arrangement 12; Two for example is the corresponding both sides that charge coupled device video camera 5 is disposed at corner reflecting element 4 respectively; Principle by light refraction and reflection; The charge coupled device video camera 5 of both sides is the mark that engages at sensing circuit device 12 two ends and substrate 10 two ends simultaneously, can more promote the joint precision.

Further be integrated in the optical registration device in the system; It is thus clear that like Fig. 8 is the first embodiment schematic perspective view with system of optical registration device of the present invention, mating system 8 comprise bearing substrate 10 bogey 7, carry and the portable device 6 of walking circuit device 12, drive control device 3 and optical registration device 2 that bogey 7 and portable device 6 relatively move.

Optical registration device 2 more comprises: controlled device 3 drives, and is leaving the difference in height direction, is supplying the optical image picked-up unit 20 of the optical image of picked-up circuit arrangement 12 and substrate 10 synchronously and between

circuit arrangement

12 and 20 of unit of optical image picked-up, in order to the optical path compensation unit 22 of the optical path difference of compensating circuit device 12 and substrate 10 respective heights differences; Certainly, optical registration device 2 visual demand configuration light sources are with the additional illumination degree.

Fig. 9 is the schematic perspective view of second embodiment of the system of the present invention with optical registration device; The system of Fig. 8 is appeared with the another kind combination; Substrate can be LCD MODULE 10 '; Circuit arrangement can be drive IC 12 ', the corresponding running of control device 3 keyholed back plate bogeys 7, portable device 6 and optical registration device 2 '.

Optical registration device 2 ' comprises the charge coupled device video camera 5 of optical path compensation unit 22, the corresponding setting with both sides of corner reflecting element 4; Bogey 7 is carriers 76 that surface that one group of inside is formed with breather line 72 and carries LCD MODULE 10 ' is formed with a plurality of air holes 74.

6 in portable device comprises one group of convergence and away from the mechanical arm 62 of LCD MODULE 10 ' and one group of suction nozzle 64 that receives mechanical arm 62 to drive, supply to draw drive IC 12 ' relatively; Portable device 6 more comprises one group in order to drive IC 12 ' heating is overlayed the well heater 66 to LCD MODULE 10 '.

According to above-mentioned each embodiment, the optical path compensation unit can effectively solve the problem of difference in height really, and whether also disposing single thus, can to accomplish circuit arrangement and substrate position that affirmation need engage correct; More make full use of the light refraction principle, the configuration of each member of optical registration system is brought into play more flexibly, therefore can effectively reach all above-mentioned purposes of the application really by the present invention.

The above is merely preferred embodiment of the present invention; Can not constitute restriction to protection domain of the present invention; Any simple equivalent variations and modification of doing according to application claim protection domain of the present invention and description all should still belong in the scope that patent of the present invention contains.

Claims

1. the optical registration device used of circuit arrangement and substrates system; Confession the accurate contraposition of this circuit arrangement is engaged to and this circuit arrangement between leave this substrate of difference in height; This mating system comprise one group of bogey that carries this substrate, one group of portable device that carries and move this circuit arrangement, and one group drive the control device that this bogey and this portable device relatively move, this optical registration device comprises:

One group receives this control device to drive, leave the difference in height direction, supply the optical image of the optical image of synchronous this circuit arrangement of picked-up and this substrate to absorb the unit at this; And

One group between between this circuit arrangement and this optical image picked-up unit and/or this substrate and this optical image absorb between the unit, in order to compensate this circuit arrangement and this substrate optical path compensation unit to optical path difference that should difference in height.

2. optical registration device according to claim 1, wherein this group optical image picked-up unit is one group of video camera.

3. optical registration device according to claim 1 more comprises one group of corner reflecting element between between this optical image picked-up unit to this circuit arrangement and this substrate.

4. optical registration device according to claim 3, wherein this group optical image picked-up unit is two groups of charge coupled device video cameras that are mutually symmetrical and are provided with.

5. a circuit arrangement and substrates system with optical registration device of claim 1, supply with the accurate contraposition of a circuit arrangement be engaged to and this circuit arrangement between leave a substrate of difference in height, this mating system comprises:

One group of bogey that carries this substrate;

One group of portable device that carries and move this circuit arrangement;

The control device that one group of this bogey of driving and this portable device relatively move; And

One group of optical registration device comprises:

6. mating system according to claim 5, wherein this bogey is that one group of inside is formed with breather line and carries the carrier that this substrate surface is formed with a plurality of air holes.

7. mating system according to claim 5, wherein this portable device comprises:

One group of convergence and away from the mechanical arm of this substrate relatively; And

One group of suction nozzle that receives this mechanical arm to drive, supply to draw this circuit arrangement.

8. mating system according to claim 7, wherein this circuit arrangement is a drive IC, this substrate is a slice LCD MODULE, and this portable device more comprises one group in order to this drive IC heating is overlayed the well heater to this LCD MODULE.